| Patents for G01L 21 - Vacuum gauges (1,613) |
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| 10/15/2008 | EP1979730A1 Vacuum measuring cell having a membrane |
| 10/15/2008 | CN100426440C Cold cathode electron gun and vacuum gauge tube using the same |
| 10/09/2008 | WO2008042580A3 Offset correction techniques for positioning substrates |
| 09/30/2008 | US7429863 Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments |
| 09/30/2008 | US7428822 Vacuum sensor |
| 09/25/2008 | WO2008115445A1 Speech enhancement employing a perceptual model |
| 09/25/2008 | WO2008090541A3 Apparatus and methods for enhancement of speech |
| 09/18/2008 | US20080224711 Ionization vacuum gauge |
| 09/17/2008 | EP1969335A1 System and method for separation of a user's voice from ambient sound |
| 09/17/2008 | CN101268351A Robust decoder |
| 09/17/2008 | CN101266181A Vacuum combined electrical equipment on-line monitoring instrument |
| 09/17/2008 | CN101266180A Ionization gage |
| 09/03/2008 | CN101256105A Monocrystaline silicon transverse miniature MEMS pirani meter and preparation method thereof |
| 08/28/2008 | WO2008103799A2 High-speed, precise laser-based modification of electrical elements |
| 08/20/2008 | CN101248507A Selection of wavelenghts for end point in a time division multiplexed process |
| 08/19/2008 | US7413672 Controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement |
| 07/31/2008 | WO2008090541A2 Apparatus and methods for enhancement of speech |
| 07/31/2008 | US20080179284 Methods of operating an electromagnet of an ion source |
| 07/24/2008 | WO2008089121A2 A thermal vacuum gauge |
| 07/17/2008 | US20080168842 Thermal vacuum gauge |
| 07/16/2008 | CN101221082A Novel vacuometer |
| 07/16/2008 | CN100402871C Shaft fastening device |
| 07/15/2008 | US7400999 Determination of the gas pressure in an evacuated thermal insulating board (vacuum panel) by using a heat sink and test layer that are intergrated therein |
| 07/09/2008 | CN201083581Y Vacuum detection device |
| 07/09/2008 | CN100401491C Envelope follower end point detection in time division multiplexed processes |
| 07/08/2008 | US7396481 Etching method of organic insulating film |
| 07/01/2008 | US7395208 Integrating external voices |
| 07/01/2008 | US7393459 Method for automatic determination of substrates states in plasma processing chambers |
| 06/24/2008 | US7389696 Measuring device with a microsensor and method for producing the same |
| 06/18/2008 | CN201075049Y Auxiliary instrument for discharging gas surrounding ion vacuum gauge tube |
| 06/18/2008 | CN100395531C Bypass type ultrahigh and extreme-high vacuum gauge calibrating device and method thereof |
| 06/12/2008 | WO2008067681A1 Electron source for a vacuum pressure measuring device |
| 06/11/2008 | CN201072371Y Proximity switch of vacuum gauge |
| 06/10/2008 | US7384569 Imprint lithography mask trimming for imprint mask using etch |
| 05/22/2008 | US20080115585 Pirani Vacuum Gauge |
| 05/21/2008 | CN101184979A Systems, methods, and apparatus for highband excitation generation |
| 05/08/2008 | WO2008053729A1 Sensor, measuring device, and measuring method |
| 05/07/2008 | EP1917675A2 Selection of wavelenghts for end point in a time division multiplexed process |
| 05/07/2008 | EP1012870B1 Penning vacuum meter |
| 05/01/2008 | US20080100301 Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments |
| 05/01/2008 | US20080099436 Endpoint detection for photomask etching |
| 04/30/2008 | DE102007001444B3 Vacuum measuring device, has cold cathode ionization manometer arranged in measuring tube by inverse magnetron type and heat conducting manometer, and including two cathodes concerning measuring tube opening of tube housing |
| 04/24/2008 | WO2008048096A1 Base station of a telephone system and telephone system comprising such as a base station |
| 04/24/2008 | WO2008027226A3 Pressure gauge for organic materials |
| 04/23/2008 | EP1913355A1 Thermal conductivity gauge |
| 04/17/2008 | US20080087638 Selective-redeposition sources for calibrating a plasma process |
| 04/15/2008 | US7359177 Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output |
| 04/10/2008 | DE112005003338T5 Niederdruck-Entfernung von Photoresist und Ätzresten A low-pressure removal of photoresist and etching residues |
| 04/08/2008 | US7354524 Method and system for processing multi-layer films |
| 04/03/2008 | WO2008037081A1 Method and apparatus for rate reduction of coded voice traffic |
| 04/03/2008 | DE102006045471A1 Verfahren zur Bestimmung des Gasdruckes in evakuierten Körpern A method for determining the gas pressure in the evacuated bodies |
| 04/01/2008 | US7352187 Vacuum measuring gauge |
| 04/01/2008 | US7351377 Used in manufacture of microfabricated devices, such as integrated circuits, microprocessors, microfluidic components |
| 03/29/2008 | CA2604736A1 Vacuum gauge and refrigeration system service tool, and methods of using the same |
| 03/27/2008 | WO2007081529A3 Synchronizing image data among applications and devices |
| 03/27/2008 | DE102006045022A1 Anordnung mit Vakuumgerät und Verfahren zu derem Betrieb Arrangement with vacuum apparatus and method for operating alia, |
| 03/27/2008 | DE102006042426A1 Non-contact verification of adequate vacuum in insulation panels, employs radio frequency transponder and pressure switch in panel, with external detection instrument |
| 03/25/2008 | US7348106 after forming a predetermined mask pattern through an energy beam resist layer, mask is inspected for at least one missing pattern; mask is repaired in defect area; missing pattern is reformed; mask pattern is transferred in the shift layer material |
| 03/12/2008 | CN201034795Y Vacuum degree detecting auxiliary device used for vacuum circulation degassing device middle segment |
| 03/12/2008 | CN100374839C Apparatus and methods for heat loss pressure measurement |
| 03/06/2008 | WO2008027226A2 Pressure gauge for organic materials |
| 03/06/2008 | WO2007132286A8 An adaptive user interface |
| 03/06/2008 | DE102006001902B4 Verfahren zur Ermittlung des Druckes eines Gases oder Gasgemisches in einem Unterdruckgefäß mittels der Absorptionsspektroskopie Method for determining the pressure of a gas or gas mixture in a vacuum vessel by means of absorption spectroscopy |
| 03/05/2008 | EP1895296A1 Mass analyzer and use thereof |
| 02/27/2008 | CN101133308A Vacuum measuring gauge |
| 02/26/2008 | US7335315 Method and device for measuring wafer potential or temperature |
| 02/20/2008 | EP1890124A1 Ionization vacuum gauge |
| 02/20/2008 | CN201024134Y Vacuum glass with vacuum detection device |
| 02/20/2008 | CN101126668A Discharging gas environment ion vacuum gauge auxiliary instrument |
| 02/14/2008 | WO2008018994A1 Zirconium substituted barium titanate gate dielectrics |
| 01/31/2008 | US20080027733 Encoding Device, Decoding Device, and Method Thereof |
| 01/30/2008 | EP1258715B1 Noise signal analyzer, noise signal synthesizer, noise signal analyzing method, and noise signal synthesizing method |
| 01/30/2008 | CN101115351A Electronic components packaging structure |
| 01/29/2008 | US7323881 Process and apparatus for evaluating the degree of vacuum in closed bodies with transparent walls |
| 01/29/2008 | US7322248 Pressure gauge for organic materials |
| 01/24/2008 | WO2008011296A2 Process and system for quality management and analysis of via drilling |
| 01/24/2008 | US20080018337 Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments |
| 01/24/2008 | US20080017612 Method of fabricating a hinge |
| 01/17/2008 | WO2006135833A3 Systems and methods for conveying message composer's state information |
| 01/17/2008 | US20080011715 Process and system for quality management and analysis of via drilling |
| 01/16/2008 | CN100362621C Device and method for reducing thin-film type capacitance vacuum gauge zero-point drift |
| 01/08/2008 | CA2347735C High frequency content recovering method and device for over-sampled synthesized wideband signal |
| 01/02/2008 | CN201000382Y Novel vacuum gauges |
| 12/25/2007 | US7310965 Compressor head, internal discriminator, external discriminator, manifold design for refrigeration recovery apparatus |
| 12/12/2007 | EP1864101A1 Systems, methods, and apparatus for highband excitation generation |
| 12/12/2007 | CN200989787Y Pressure gage with sensing function |
| 12/12/2007 | CN101088147A Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage |
| 12/11/2007 | US7306746 Critical dimension control in a semiconductor fabrication process |
| 12/06/2007 | US20070278180 Electron induced chemical etching for materials characterization |
| 12/06/2007 | DE102006024381B3 MEMS Vakuumsensor nach dem Reibungsprinzip MEMS vacuum sensor based on the principle of friction |
| 12/06/2007 | DE102005029114B4 Verfahren zur Druckmessung für Kombinations-Druck-Sensoren im Vakuum-Bereich mit mindestens zwei Sensoren und Verfahren zur automatischen Findung eines Justierwertes für die "Offset-Justierung" bei Kombinations-Druck-Sensoren Method for measuring pressure for composite pressure sensors in the vacuum region with at least two sensors and method for automatic determination of adjustment value for the "Offset Adjustment" in combination pressure sensors |
| 12/05/2007 | CN101084422A Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure |
| 11/29/2007 | WO2007134714A1 Mems vacuum sensor based on the friction principle |
| 11/29/2007 | WO2007089516A3 Technique for improving pirani gauge temperature compensation over its full pressure range |
| 11/29/2007 | US20070273383 Tune-stabilized, non-scaling, fixed-field, alternating gradient accelerator |
| 11/22/2007 | WO2007132286A1 An adaptive user interface |
| 11/22/2007 | US20070269726 Phase-shift mask, manufacturing method thereof and manufacturing method of semiconductor element |
| 11/22/2007 | US20070267142 Method And Apparatus For The Treatment Of A Semiconductor Wafer |
| 11/14/2007 | EP1853890A1 Vacuum measuring gauge |
| 11/13/2007 | US7295015 Ionization gauge |