Patents for G01L 21 - Vacuum gauges (1,613)
05/2013
05/21/2013US8447585 System and method for characterizing, synthesizing, and/or canceling out acoustic signals from inanimate sound sources
05/21/2013US8445295 Semiconductor device and method for manufacturing the same
05/16/2013WO2013068216A2 Ionization manometer
05/16/2013WO2013068214A1 Ionization manometer
05/08/2013DE102011055089A1 Ionisationsmanometer Ionization
05/08/2013DE102011055084A1 Ionisationsmanometer Ionization
05/02/2013US20130106431 Ionization vacuum gauge
04/2013
04/24/2013CN202903419U Sealing device for RH refining furnace vacuum degree detection
04/24/2013CN103063362A Detection method for vacuum degree of external vacuum thermal insulation board
04/24/2013CN103063361A Vacuum degree detection method of built-in type vacuum insulated panel
04/24/2013CN102313624B Mono-crystalline furnace vacuum pipe pressure detection alarm system and control method thereof
04/24/2013CN102103030B Device and method for testing vacuum degree of embedded heat insulation pipe on line
04/23/2013US8425791 In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same
04/17/2013CN202886057U Electron vacuum gage
04/10/2013CN101738289B Vacuum sensor with permanent magnets
04/09/2013US8417515 Encoding device, decoding device, and method thereof
04/03/2013CN202853839U Integrated type vacuum gauge
04/03/2013CN202853838U Vacuum pressure transducer apparatus for vehicles
04/03/2013CN102070305B Vacuum glass with real-time detectable vacuum performance
03/2013
03/27/2013CN202836870U Compound vacuum gauge
03/27/2013CN102261979B Low-range piezoresistive pressure sensor for vacuum measurement and manufacturing method thereof
03/20/2013CN202814637U Device for detecting vacuum value at brake pipe end of vehicle
03/20/2013CN202814636U Vacuum degree measuring equipment for vacuum blood collection tube
03/14/2013WO2013033851A1 Ionization vacuum measuring cell
03/13/2013CN202793682U Detection loop which can simulate vacuum degree of tail end of automobile pipeline
02/2013
02/27/2013CN202757732U Vacuum glass detection system
02/27/2013CN102947685A Method and apparatus for reducing the effect of environmental noise on listeners
02/26/2013US8384391 Cold cathode ionization vacuum gauge, vacuum processing apparatus having the same, discharge starting auxiliary electrode used for the same, and method of measuring pressure using the same
02/26/2013US8383000 Substrate processing apparatus, method for measuring distance between electrodes, and storage medium storing program
02/26/2013US8382999 Pulsed plasma high aspect ratio dielectric process
02/19/2013US8377721 Substrate processing system and method
02/13/2013CN102928154A Method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles
02/13/2013CN102928153A Three-dimensional vacuum sensor and preparation method of three-dimensional vacuum sensor
02/13/2013CN102928152A Electronic vacuum meter
02/13/2013CN102923644A Three-dimensional vacuum sensor and manufacturing method thereof
02/05/2013US8366953 Plasma cleaning method and plasma CVD method
02/05/2013US8366690 System and method for determining a fill status of a canister of fluid in a reduced pressure treatment system
01/2013
01/31/2013WO2013016551A1 Cold cathode gauge fast response signal circuit
01/16/2013CN101512521B Concept based cross media indexing and retrieval of speech documents
01/10/2013WO2012141460A3 Apparatus for measuring the degree of vacuum of a multistage vacuum heat-insulating member, and measurement method using same
01/09/2013CN102313625B Pirani vacuum gauge of carbon nanotube and vacuum degree detection method thereof
01/08/2013US8350572 Ionization vacuum device
01/03/2013WO2013002180A1 Diaphragm barometer
01/02/2013CN202648869U Inductance type coupling sensor and vacuum degree on-line detection apparatus
01/01/2013US8343371 Apparatus and method for improving photoresist properties using a quasi-neutral beam
12/2012
12/26/2012CN202631187U Alarm device for rotary evaporator vacuum system
12/12/2012CN102818675A Device and method for testing vacuum degree of vacuum heat insulation plate
12/04/2012US8324904 Cold cathode ionization vacuum gauge, auxiliary discharge starting electrode, and vacuum processing apparatus
12/04/2012US8323522 Plasma reactor and etching method using the same
11/2012
11/21/2012CN202547862U Double-resistance single-ionization compound vacuum gauge
11/21/2012CN202547861U Switchable detection air intake plugging mechanism
11/20/2012US8313665 Showerhead electrode assemblies for plasma processing apparatuses
11/20/2012US8313664 Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber
11/15/2012DE102011010138B4 Kaltkathoden-Druckmessvorrichtung vom Penning-Typ Cold cathode pressure measuring device from Penning-type
11/14/2012CN202533224U Experimental calibration device
11/14/2012CN202533222U Novel vacuum display equipment
11/14/2012CN202533221U Measurement device for interlayer vacuum degree of all-glass vacuum heat-collecting tube
11/14/2012CN102782470A Transducer-type vacuum gauge
10/2012
10/30/2012US8298432 Method and system for adjusting beam dimension for high-gradient location specific processing
10/23/2012US8293126 Method and system for multi-pass correction of substrate defects
10/18/2012WO2012141460A2 Apparatus for measuring the degree of vacuum of a multistage vacuum heat-insulating member, and measurement method using same
10/11/2012US20120255364 Method for employing titania nanotube sensors as vacuum gauges
10/09/2012US8282849 Etching process state judgment method and system therefor
10/09/2012US8282848 Plasma processing method and plasma processing apparatus
10/04/2012WO2012129711A1 Gas pressure measurement cell arrangement
10/03/2012CN101617361B Method and apparatus for rate reduction of coded voice traffic
09/2012
09/25/2012US8273259 Ashing method
09/20/2012DE112010001207T5 Sauerstoffdetektionsverfahren, Luftleckbestimmungsverfahren,Gaskomponentendetektionsgerät und Vakuumverarbeitungsvorrichtung Oxygen detection method, air leak detection methods, gas component detection device and vacuum processing apparatus
09/19/2012EP2499476A2 Vacuum quality measurement system
09/19/2012CN202442840U Vacuum gauge
09/19/2012CN102680049A Vacuum oil injection monitoring device of transformer
09/18/2012US8268181 Plasma ashing apparatus and endpoint detection process
09/13/2012US20120227465 Vacuum Quality Measurement System
09/12/2012CN202433145U Vacuum gauge with protection mechanism
09/12/2012CN202433144U Vacuum gauge protective device
09/12/2012CN202433143U On-line vacuum degree detecting device for closed container
09/12/2012CN102661830A On-line inspection method and apparatus for vacuum degrees of sealed containers
09/11/2012US8264030 Flash memory device and manufacturing method of the same
08/2012
08/30/2012DE102005008959B4 Drucksensoren und Kombinations-Drucksensoren und deren Verwendung Pressure sensors and pressure sensors combination and their use
08/29/2012CN202403868U Vacuum degree measuring device for vacuum heat insulation plate
08/29/2012CN202403867U Digital-type vacuometer
08/23/2012WO2012111368A1 Heat conduction-type sensor having influence of temperature and kind of fluid corrected therein, and heat-type flow sensor and heat-type barometric sensor using the heat conduction-type sensor
08/15/2012CN102636311A Alarm device of rotary evaporator vacuum system
08/14/2012US8242783 Ionization vacuum gauge
08/09/2012WO2012103942A1 Sensor arrangement
08/08/2012EP2057454B1 Pirani type vacuum gauge for measuring vaporized organic or inorganic material pressure
08/08/2012EP1864101B1 Systems, methods, and apparatus for highband excitation generation
08/08/2012CN102630298A Device for measuring mean free path, vacuum gauge, and method for measuring mean free path
08/07/2012CA2650612C An adaptive user interface
08/01/2012CN102620883A Vacuum degree on-line detection device and vacuum degree on-line detection method of vacuum thermal insulation board
07/2012
07/25/2012CN202350979U BD (Bowie-Dick) test pack
07/25/2012CN102612641A Vacuum quality measurement system
07/25/2012CN102607765A Vacuum glass detection system
07/18/2012CN202339247U 一种用于微器件真空度测量的标定盒 A method for measuring the degree of vacuum of the micro device calibration cartridge
07/18/2012CN102589796A Online monitoring system of vacuum degree of vacuum switch
07/11/2012CN202332716U 内置冷阴极规管的真空灭弧室真空度测量装置 Built-in cold cathode regulatory vacuum interrupter vacuum measurement device
07/11/2012CN202329967U 真空玻璃指示器 Vacuum glass indicator
07/11/2012CN202329927U 一种热偶真空计 Even a thermal vacuum gauge
07/11/2012CN202329670U 真空测头保护装置 Vacuum probe protection device
07/04/2012CN202305299U 自密封真空透明浸渍装置 Self-sealing transparent vacuum impregnation equipment
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