| Patents for G01L 21 - Vacuum gauges (1,613) |
|---|
| 07/12/2006 | CN1800799A Wide range electron tunneling type zinc oxide nano probe vacuum gauge and preparation method thereof |
| 07/11/2006 | US7076421 Method and system for supporting increased channel density |
| 07/11/2006 | US7073346 Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus and vacuum sensor |
| 07/06/2006 | WO2006069546A1 A speech processing approach and device of a wireless terminal |
| 07/06/2006 | WO2005006076A3 Systems for magnification and distortion correction for imprint lithography processes |
| 07/06/2006 | US20060144818 System for detecting film quality variation and method using the same |
| 07/06/2006 | US20060144817 Low-pressure removal of photoresist and etch residue |
| 06/29/2006 | US20060138082 Method and apparatus for determining consumable lifetime |
| 06/22/2006 | WO2006065535A1 Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure |
| 06/13/2006 | US7059192 Pressure sensor |
| 06/08/2006 | US20060118517 Etching method |
| 06/07/2006 | CN1784778A Envelope follower end point detection in time division multiplexed processes |
| 06/01/2006 | WO2006057148A1 Pirani gauge |
| 05/24/2006 | CN2783323Y Foaming vacuity quick tester for insulation impregnated resin |
| 05/23/2006 | US7049823 Ionization vacuum gauge |
| 05/23/2006 | US7047810 Micro-electro-mechanical pressure sensor |
| 05/04/2006 | US20060091108 Method and apparatus for controlling etch processes during fabrication of semiconductor devices |
| 05/04/2006 | US20060090850 Chemical processing system and method |
| 04/27/2006 | US20060086461 Etching apparatus and etching method |
| 04/27/2006 | US20060086189 Vacuum gauge |
| 04/26/2006 | CN2775636Y Vacuum degree alarm |
| 04/25/2006 | US7033518 Method and system for processing multi-layer films |
| 04/18/2006 | US7031905 Audio signal processing apparatus |
| 04/18/2006 | US7030620 Ionization vacuum gauge |
| 04/18/2006 | US7030619 Ionization gauge |
| 04/13/2006 | WO2006039421A1 Pressure transducer with improved process adapter |
| 04/13/2006 | US20060076315 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 04/06/2006 | WO2006036821A2 Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage |
| 04/06/2006 | US20060070703 Method & apparatus to improve plasma etch uniformity |
| 04/05/2006 | EP1642170A2 Systems for magnification and distortion correction for imprint lithography processes |
| 04/05/2006 | CN2770080Y Vacuum gauge protector |
| 03/30/2006 | WO2006032534A1 Determining gas pressure |
| 03/30/2006 | US20060065626 Detection and feed forward of exposed area to improve plasma etching |
| 03/30/2006 | US20060065625 Periodic patterns and technique to control misalignment between two layers |
| 03/30/2006 | US20060065624 Irradiating the photoresist layer through a mask to generate a photoacid in the resist, heating to evaporate water from the resist; heating to deprotects the resist; immersion lithography for lowering the water variation in a resist |
| 03/30/2006 | US20060065623 Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage |
| 03/30/2006 | DE102004046020A1 Gasdruck-Bestimmung Gas pressure determination |
| 03/21/2006 | US7014787 Etching method of organic insulating film |
| 03/16/2006 | WO2006028779A2 Electrically floating diagnostic plasma probe with ion property sensors |
| 03/16/2006 | DE102004035728A1 Absperrventil und Druckmesskopf Shut-off valve and pressure gauge head |
| 03/15/2006 | EP1634280A2 Multi-channel speech processor with increased channel density |
| 03/15/2006 | CN2765170Y Vacuum gaugehead |
| 03/09/2006 | US20060048891 Method and apparatus for determining an etch property using an endpoint signal |
| 03/08/2006 | CN1244907C High frequency intensifier coding method for broadband speech coder and decoder and apparatus |
| 03/02/2006 | US20060043064 Plasma processing system and method |
| 03/02/2006 | US20060043063 Electrically floating diagnostic plasma probe with ion property sensors |
| 02/28/2006 | US7004035 Physical value detecting apparatus and housing for physical value detecting means |
| 02/23/2006 | US20060037938 Method and apparatus for detecting endpoint |
| 02/23/2006 | DE10245866B4 Vorrichtung zur Vakuumüberwachung einer Anlagekomponente mit evakuiertem Hohlraum, insbesondere für die Glasproduktion Apparatus for vacuum monitoring a system component with an evacuated cavity, especially for glass production |
| 02/21/2006 | US7001530 Method for detecting the end point by using matrix |
| 02/16/2006 | US20060032835 Method and apparatus for simulating standard test wafers |
| 02/16/2006 | US20060032257 Compressor head, internal discriminator, external discriminator, manifold design for refrigeration recovery apparatus |
| 02/15/2006 | CN1734247A III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer |
| 02/14/2006 | CA2347668C Perceptual weighting device and method for efficient coding of wideband signals |
| 02/14/2006 | CA2347667C Periodicity enhancement in decoding wideband signals |
| 02/09/2006 | WO2006073622A2 Low-pressure removal of photoresist and etch residue |
| 02/09/2006 | US20060027324 Plasma processing apparatus and plasma processing method |
| 02/08/2006 | EP1623457A2 Envelope follower end point detection in time division multiplexed processes |
| 02/02/2006 | WO2006012297A1 Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes |
| 02/02/2006 | WO2006011954A2 Diagnostic plasma measurement device having patterned sensors and features |
| 02/02/2006 | WO2006010884A1 Pirani pressure gauge |
| 02/02/2006 | US20060021970 Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters |
| 02/02/2006 | US20060021444 Method of operating a resistive heat-loss pressure sensor |
| 02/01/2006 | CN1728327A Vacuum gauge bead |
| 02/01/2006 | CN1727860A Gain-constrained noise suppression |
| 01/26/2006 | WO2006008412A1 Tightness test for mems or for small encapsulated components |
| 01/25/2006 | CN2754077Y Foundation soil vacuum degree sensor |
| 01/19/2006 | US20060012373 Cold-cathode ionisation manometer having a longer service life due to two separate cathodes |
| 01/19/2006 | US20060011583 Materials and gas chemistries for processing systems |
| 01/12/2006 | US20060006139 Selection of wavelengths for end point in a time division multiplexed process |
| 01/05/2006 | US20060000800 Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units |
| 01/04/2006 | EP1611593A2 Louvered beam stop for lowering x-ray limit of a total pressure gauge |
| 12/29/2005 | US20050287815 Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes |
| 12/29/2005 | US20050284570 Diagnostic plasma measurement device having patterned sensors and features |
| 12/28/2005 | EP1540294B1 Cold-cathode ionisation manometer having a longer service life due to two separate cathodes |
| 12/21/2005 | CN1711465A Apparatus and methods for heat loss pressure measurement |
| 12/13/2005 | US6973834 Method and apparatus for measuring pressure of a fluid medium and applications thereof |
| 12/01/2005 | US20050263484 Adjustable shielding plate for adjusting an etching area of a semiconductor wafer and related apparatus and methods |
| 11/24/2005 | WO2005111568A1 Encoding device, decoding device, and method thereof |
| 11/17/2005 | WO2005109399A1 Speech synthesis device and method |
| 11/10/2005 | WO2005091330A3 Louvered beam stop for lowering x-ray limit of a total pressure gauge |
| 11/10/2005 | US20050247669 Method for repairing a phase shift mask |
| 11/09/2005 | CN1226601C Pocket tester for high voltage vacuum tube |
| 11/02/2005 | EP1493007B1 Determination of the gas pressure in an evacuated thermal insulating board (vacuum panel) by using a heat sink and test layer that are integrated therein |
| 11/02/2005 | CN1691245A Cold cathode electron gun and vacuum gauge tube using the same |
| 11/01/2005 | US6961407 Device to detect pressure in an x-ray tube |
| 10/27/2005 | US20050237066 Cold cathode device and vacuum gauge using same |
| 10/20/2005 | WO2005098386A1 Microfabricated hot wire vacuum sensor |
| 10/19/2005 | CN1685466A Apparatus and method for use of optical system with a plasma processing system |
| 10/13/2005 | WO2005065417A3 Cold cathode ion gauge |
| 10/06/2005 | US20050220133 Method and system for supporting increased channel density |
| 10/06/2005 | US20050218115 Anti-clogging nozzle for semiconductor processing |
| 10/06/2005 | US20050218114 Method and system for performing a chemical oxide removal process |
| 09/29/2005 | WO2005091331A2 An ionization gauge |
| 09/29/2005 | WO2005091330A2 Louvered beam stop for lowering x-ray limit of a total pressure gauge |
| 09/29/2005 | US20050212066 Microfabricated hot wire vacuum sensor |
| 09/29/2005 | US20050211669 Method and system of discriminating substrate type |
| 09/20/2005 | US6945119 Apparatus and methods for heat loss pressure measurement |
| 09/15/2005 | US20050199067 Determination of the gas pressure in an evacuated thermal insulating board (vacuum panel) by using a heat sink and test layer that are intergrated therein |
| 09/06/2005 | US6939409 Cleaning method and etching method |