| Patents for G01L 21 - Vacuum gauges (1,613) |
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| 09/06/2005 | US6938493 Apparatus and methods for heat loss pressure measurement |
| 09/01/2005 | WO2005080932A1 Method and device for measuring ultrahigh vacuum |
| 08/30/2005 | US6935181 Anticorrosive vacuum sensor |
| 08/25/2005 | US20050184735 Ionization gauge |
| 08/11/2005 | US20050173375 Apparatus and method for use of optical system with a plasma processing system |
| 08/04/2005 | US20050167397 Critical dimension control in a semiconductor fabrication process |
| 08/04/2005 | US20050167396 A measurement to determine plasma leakage |
| 07/28/2005 | DE10392973T5 Druckgesteuertes Entgasungssystem für Ionisationsdruckmessgeräte mit heisser Kathode Pressure-controlled degassing system for Ionisationsdruckmessgeräte with hot cathode |
| 07/27/2005 | CN1646890A Determination of the gas pressure in an evacuated thermal insulating board (vacuum panel) by using a heat sink and test layer that are integrated therein |
| 07/26/2005 | US6922733 Method for coordinating visual and speech web browsers |
| 07/21/2005 | WO2005065417A2 Cold cathode ion gauge |
| 07/21/2005 | US20050155952 Emission spectroscopic processing apparatus and plasma processing method using it |
| 07/14/2005 | DE10164004B4 Vakuumisolationspaneel und Verfahren zur Messung des Innendrucks desselben The vacuum insulation panel and method for measuring the internal pressure thereof |
| 07/13/2005 | EP1552265A1 Apparatus and methods for heat loss pressure measurement |
| 07/05/2005 | US6913653 Prior to cleaning with XeF2, contacting XeF2 gas with an article to be cleaned, such as a semiconductor, in a reduced-pressure or vacuum atmosphere containing a required amount of water to form HFto be |
| 06/30/2005 | US20050140375 Cold cathode ion gauge |
| 06/23/2005 | WO2004102642A3 Envelope follower end point detection in time division multiplexed processes |
| 06/16/2005 | US20050126295 Pressure sensor |
| 06/15/2005 | EP1540294A1 Cold-cathode ionisation manometer having a longer service life due to two separate cathodes |
| 05/31/2005 | US6901367 Front end translation mechanism for received communication |
| 05/26/2005 | US20050109733 Cleaning and etching methods and their apparatuses |
| 05/19/2005 | US20050108007 Perceptual weighting device and method for efficient coding of wideband signals |
| 05/19/2005 | US20050108005 Method and device for adaptive bandwidth pitch search in coding wideband signals |
| 05/18/2005 | CN1202409C Vacuum measuring instrument for vacuum switch with undetached arc extinguishing chamber |
| 05/11/2005 | EP1530036A1 Pressure sensor |
| 05/10/2005 | US6890771 Plasma processing method using spectroscopic processing unit |
| 05/05/2005 | US20050092010 Compressor head, internal discriminator, external discriminator, manifold design for refrigeration recovery apparatus |
| 04/14/2005 | US20050076718 Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus and vacuum sensor |
| 03/30/2005 | EP1519402A1 Ionisation vacuum gauge |
| 03/30/2005 | EP1519401A1 Ionisation vacuum gauge |
| 03/29/2005 | US6873956 Multi-channel speech processor with increased channel density |
| 03/23/2005 | CN2687646Y Vacuum degree adjustable acousto-optic alarming device |
| 03/16/2005 | CN1595087A Apparatus for detecting degree of vacuum for micro machinery vacuum packaging |
| 03/15/2005 | US6865952 Apparatus and methods for heat loss pressure measurement |
| 03/09/2005 | EP1511983A2 Vacuum gauge |
| 03/01/2005 | US6860153 Gas pressure sensor based on short-distance heat conduction and method for fabricating same |
| 02/10/2005 | WO2005003712A3 Multi-channel speech processor with increased channel density |
| 02/10/2005 | US20050030044 Ionisation vacuum gauge |
| 02/10/2005 | US20050028602 Ionisation vacuum gauge |
| 02/03/2005 | US20050026310 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing |
| 02/03/2005 | DE10243634B4 Kaltkatoden-Ionisationsmanometer Cold cathode ionization gauge |
| 01/27/2005 | US20050016953 Method of detecting particles and a processing apparatus using the same |
| 01/20/2005 | WO2005006076A2 Systems for magnification and distortion correction for imprint lithography processes |
| 01/13/2005 | WO2005003712A2 Multi-channel speech processor with increased channel density |
| 01/13/2005 | US20050006343 Systems for magnification and distortion correction for imprint lithography processes |
| 01/13/2005 | US20050006342 Solder mask removal method |
| 01/12/2005 | EP1495562A2 Fast estimation of weak bio-signals using novel algorithms for generating multiple additional data frames |
| 01/05/2005 | EP1493007A1 Determination of the gas pressure in an evacuated thermal insulating board (vacuum panel) by using a heat sink and test layer that are integrated therein |
| 12/30/2004 | US20040262260 Method and system for processing multi-layer films |
| 12/23/2004 | US20040260541 Multi-channel speech processor with increased channel density |
| 12/21/2004 | US6832491 Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus |
| 12/16/2004 | US20040250625 Micro-electro-mechanical pressure sensor |
| 12/15/2004 | CN1555077A Vacuum insulated switching apparatus |
| 12/02/2004 | US20040240617 Device to detect pressure in an x-ray tube |
| 12/02/2004 | US20040238489 Envelope follower end point detection in time division multiplexed processes |
| 12/01/2004 | CN1551979A Electrified vacuum panel |
| 11/25/2004 | WO2004102642A2 Envelope follower end point detection in time division multiplexed processes |
| 11/17/2004 | EP1476737A2 Electrified vacuum panel |
| 11/17/2004 | CN1176355C Vacuum detecting method and device for electrostatic charge arc extinguishing chamber with shielding cover |
| 11/09/2004 | US6815345 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing |
| 11/04/2004 | US20040216528 Apparatus and methods for heat loss pressure measurement |
| 11/04/2004 | US20040216527 Apparatus and methods for heat loss pressure measurement |
| 11/03/2004 | CN2653474Y Micro machinery gyroscope package vacuum degree detector |
| 10/28/2004 | DE10314538A1 X-ray tube pressure monitoring method in which the pressure inside the tube is measured, based on measurements of heating and tube currents and their comparison with calibration values, to predict remaining tube service life |
| 10/21/2004 | US20040209172 Defect correction method for a photomask |
| 10/21/2004 | US20040206185 Anticorrosive vacuum sensor |
| 10/20/2004 | CN1172292C Method and device for adaptive bandwidth pitch search in coding wideband signals |
| 10/19/2004 | US6807524 Perceptual weighting device and method for efficient coding of wideband signals |
| 10/07/2004 | US20040195207 Substrate cleaning device and a method for manufacturing electronic devices |
| 10/05/2004 | US6799468 Apparatus and methods for heat loss pressure measurement |
| 09/21/2004 | US6795805 Periodicity enhancement in decoding wideband signals |
| 09/08/2004 | CN1165892C Method and apparatus for periodicity enhancement in decoding wideband signals |
| 09/08/2004 | CN1165891C High frequency content recovering method and device for over-sampled synthesized wideband signal |
| 08/24/2004 | US6779350 Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus and vacuum sensor |
| 08/19/2004 | US20040160163 Electrified vacuum panel |
| 07/29/2004 | WO2004032177A3 Apparatus and method for use of optical system with plasma proc essing system |
| 07/28/2004 | CN1159741C Vacuum insulated switching apparatus |
| 07/08/2004 | DE19903010B4 Pirani-Druckmeßanordnung und Kombinationssensor mit einer solchen Pirani-Druckmeßanordnung Pirani pressure measuring and sensor combination with such a Pirani pressure measuring |
| 06/29/2004 | US6756785 Pressure controlled degas system for hot cathode ionization pressure gauges |
| 06/16/2004 | CN1153953C Multifunctional vacuum microelectronic sensor and its preparing process |
| 06/10/2004 | US20040108296 XeF2 gas produced by sublimation in a vacuum atmosphere decomposes and gasifies grease components and removes silicon pieces by etching; with or without water |
| 06/03/2004 | WO2003106954A3 Vacuum gauge |
| 04/29/2004 | WO2004036169A1 Apparatus and methods for heat loss pressure measurement |
| 04/27/2004 | US6727709 Vacuum gauge using peltier tip |
| 04/15/2004 | WO2004032177A2 Apparatus and method for use of optical system with plasma proc essing system |
| 04/15/2004 | US20040069747 Apparatus and method for detecting an endpoint in a vapor phase etch |
| 04/15/2004 | US20040069318 Prior to cleaning with XeF2, contacting XeF2 gas with an article to be cleaned, such as a semiconductor, in a reduced-pressure or vacuum atmosphere containing a required amount of water to form HFto be |
| 04/08/2004 | WO2004029572A1 Cold-cathode ionisation manometer having a longer service life due to two separate cathodes |
| 04/08/2004 | DE10245866A1 Device for vacuum monitoring installation components used in glass production has a bellows open on one side and having an inner chamber connected to a hollow chamber |
| 04/08/2004 | DE10243634A1 Kaltkatoden-Ionisationsmanometer Cold cathode ionization gauge |
| 04/08/2004 | CA2499729A1 Cold-cathode ionisation manometer with two separate cathodes for a long service life |
| 04/06/2004 | US6716300 Emission spectroscopic processing apparatus |
| 03/31/2004 | CN2609176Y Catcher secondary heat cathode ionic vacuum gougehead |
| 03/31/2004 | CN1485601A Vacuum suction pen checking apparatus |
| 03/25/2004 | WO2004025237A1 Wireless wire vacuum sensor and vacuum panel |
| 03/11/2004 | US20040045933 Plasma processing method using spectroscopic processing unit |
| 03/09/2004 | US6701789 Cold cathode vacuum gauging system |
| 03/04/2004 | DE10238961A1 Verfahren zum Betrieb eines Totaldrucktransmitters Method for operating a total pressure transmitter |
| 03/03/2004 | EP1394523A1 Method for operating a total pressure transmitter |
| 02/26/2004 | WO2003085369A8 Determination of the gas pressure in an evacuated thermal insulating board (vacuum panel) by using a heat sink and test layer that are integrated therein |