Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862) |
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02/03/2009 | US7486405 Optimized reference level generation |
02/03/2009 | US7486404 Size difference measuring method and size difference measuring apparatus |
02/03/2009 | US7486403 Droplet shape measuring method and apparatus |
02/03/2009 | US7486397 Device for aligning substrate with mask and method using the same |
02/03/2009 | US7486394 Optical measuring head |
02/03/2009 | US7486390 Device and process for alignment of machines, machine parts or other technical articles |
02/03/2009 | US7485864 Radiometer, sighting device for a radiometer and method therefor |
02/03/2009 | US7485847 Displacement sensor employing discrete light pulse detection |
02/03/2009 | US7484854 Projector and pattern image display method |
02/03/2009 | CA2481363C Method and apparatus for measuring the outside dimensions of a package |
01/29/2009 | WO2009015209A1 Computer controllable led light source for device for inspecting microscopic objects |
01/29/2009 | WO2009014698A1 Methods and apparatus for measuring thickness of etching residues on a substrate |
01/29/2009 | WO2009013926A1 Rotary body measuring device |
01/29/2009 | WO2009013905A1 Position measuring system, exposure device, position measuring method, exposure method, device manufacturing method, tool, and measuring method |
01/29/2009 | WO2009013887A1 End section inspecting apparatus |
01/29/2009 | WO2009013768A1 Method of compensating measurement errors of a measuring machine deriving from the deformations of the machine bed caused by the load exerted by the mobile unit of the machine on the machine bed, and measuring machine operating according to said method |
01/29/2009 | WO2009013231A1 Apparatus and method for checking thickness dimensions of an element while it is being machined |
01/29/2009 | WO2009012748A2 Method for the in-situ determination of the material composition of optically thin layers, arrangements for performance and applications of the method |
01/29/2009 | WO2008146151A3 Apparatus and method for monitoring a track |
01/29/2009 | US20090030647 System and Method for Using Structured Shapes to Increase Laser Scanner Accuracy |
01/29/2009 | US20090030558 Wheel alignment head and system with advanced power management |
01/29/2009 | US20090027785 Position detecting device capable of improving detection accuracy |
01/29/2009 | US20090027695 Methods and apparatus for measuring thickness of etching residues on a substrate |
01/29/2009 | US20090027694 Coordinate detection apparatus and method, and computer program |
01/29/2009 | US20090027693 Optical interrogation system and microplate position correction method |
01/29/2009 | US20090027692 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels |
01/29/2009 | US20090027691 Lithographic Apparatus and Device Manufacturing Method with Reduced Scribe Lane Usage for Substrate Measurement |
01/29/2009 | US20090027690 Measuring probe, sample surface measuring apparatus and sample surface measuring method |
01/29/2009 | US20090027689 Method and apparatus for performing optical imaging using frequency-domain interferometry |
01/29/2009 | US20090027687 Fixed-point detector and displacement-measuring apparatus |
01/29/2009 | US20090027662 Fault tolerant wheel alignment head and system |
01/29/2009 | US20090026657 Alignment System and Method for a Substrate in a Nano-Imprint Process |
01/29/2009 | DE102008030555A1 Vorrichtung zur Verarbeitung von Stereobildern An apparatus for processing stereo images |
01/29/2009 | DE102008026865A1 Systemarchitektur zur Erfassung einer absoluten Position unter Verwendung eines Zielmusters System architecture for detecting an absolute position using a target pattern |
01/29/2009 | DE102007035519A1 Verfahren zur Korrektur der aufgrund der Durchbiegung eines Substrats bedingten Messwerte A method of correction of the conditional because of the deflection of a substrate measured values |
01/29/2009 | DE102007034854A1 Verfahren und Vorrichtung zur automatisierten Messung und Kombination von Bildaufnahme und Kraftmessung Method and apparatus for automated measurement and combination of imaging and force measurements |
01/29/2009 | DE102007034289B3 Verfahren zur in-situ-Bestimmung der stofflichen Zusammensetzung von optisch dünnen Schichten, Anordnungen zur Durchführung und Anwendungen des Verfahrens A method for in-situ determination of the material composition of optically thin layers, and arrangements for carrying out applications of the method |
01/29/2009 | DE102007033619A1 Verfahren der Zuordnung von Korrekturwerten der Durchbiegung eines Substrats relativ zum Koordinatensystem einer Koordinaten-Messmaschine Method of assigning correction values of the deflection of a substrate relative to the coordinate system of a coordinate measuring machine |
01/29/2009 | DE102007021953B4 Interferometrische Messvorrichtung zum Vermessen einer Oberfläche eines Prüflings Interferometric measuring apparatus for measuring a surface of a test specimen |
01/29/2009 | DE10031410B4 Verfahren zur Mengenermittlung von Industrieholzsortimenten A method for determining amount of industrial wood assortments |
01/28/2009 | EP2019292A1 Brillouin spectrum measuring method and brillouin spectrum measuring device |
01/28/2009 | EP2019281A1 3D sensor and method for operating a 3D sensor |
01/28/2009 | EP2018581A1 Apparatus and method for recognizing objects |
01/28/2009 | EP2018514A1 Device for measuring package size |
01/28/2009 | EP2018513A2 Device and method for measuring the relative spatial position of two objects |
01/28/2009 | CN201188079Y Single slit diffraction Yang modulus measuring instrument |
01/28/2009 | CN201187998Y External hanging type mechanism |
01/28/2009 | CN201187994Y Centring device for laser ranging buggy ladle |
01/28/2009 | CN201187993Y Device for large distance light parallel regulation |
01/28/2009 | CN201187992Y Tracking detection apparatus for steel tube navigation route |
01/28/2009 | CN201187991Y Apparatus for detecting main beam side curvature of cranes |
01/28/2009 | CN201187990Y 3D locating measuring instrument |
01/28/2009 | CN201185638Y Ice cream stick head detection mechanism and ice cream stick picking machine equipped with the mechanism |
01/28/2009 | CN101356623A Moving body drive method, moving body drive system, pattern formation method, pattern formation device, exposure method, exposure device, and device fabrication method |
01/28/2009 | CN101356419A Pass-line and tilt insensitive sensor |
01/28/2009 | CN101356418A Shape recognizing device and deformation evaluating device |
01/28/2009 | CN101356417A System and method for detecting a geometry of a workpiece |
01/28/2009 | CN101355045A Substrate detection apparatus and substrate processing apparatus |
01/28/2009 | CN101354310A Methods and systems for in-situ mechanical inspection |
01/28/2009 | CN101354245A Bearing platform and measuring device using the same |
01/28/2009 | CN101354243A Non-contact laser detection method of guide rail rolling angle |
01/28/2009 | CN101354242A Method and device for measuring curved surface |
01/28/2009 | CN101354241A Method and system for evaluating aggregate digital image |
01/28/2009 | CN101354240A Micro nano-scale fiber high precision measuring system based on micro-optical |
01/28/2009 | CN101354239A Measuring apparatus and measuring method using the same |
01/28/2009 | CN101354238A Devices relating to rolled product |
01/28/2009 | CN101354237A Ball type measuring prism |
01/28/2009 | CN101354236A Method for performing nondestructive detection of granule geometric dimension for multi-layer film surface of substrate |
01/28/2009 | CN101353878A A tamping machine |
01/28/2009 | CN101353090A Devices relating to rolled product |
01/28/2009 | CN101352260A High speed on-line system for testing imbossing seal on cigarette |
01/28/2009 | CN100456080C Constant-offset collimated output beam splitter |
01/28/2009 | CN100455989C Pressure resistance inspecting method and pressure resistance inspecting apparatus for heat exchangers |
01/28/2009 | CN100455988C Microsize admeasuring apparatus |
01/28/2009 | CN100455987C Three-dimensional on-line measuring method and system using synthesis wave to interfere whole-field nano surface |
01/28/2009 | CN100455445C Apparatus for measuring the physical properties of a surface and a pattern generating apparatus |
01/28/2009 | CN100455258C Infrared instrument for measuring stature of human body |
01/27/2009 | US7483807 Form measuring device, form measuring method, form analysis device, form analysis program, and recording medium storing the program |
01/27/2009 | US7483562 Method of detecting protrudent adhered matters and method of making spark plug using the same |
01/27/2009 | US7483156 Method for measuring overlay and overlay mark used therefor |
01/27/2009 | US7483155 Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus |
01/27/2009 | US7483154 Position detecting device, liquid ejecting apparatus and method of cleaning smear of scale |
01/27/2009 | US7483153 Power-saving control method in laser measuring system and laser measuring system |
01/27/2009 | US7483152 High resolution statistical analysis of localized corrosion by direct measurement |
01/27/2009 | US7483151 Active 3D triangulation-based imaging method and device |
01/27/2009 | US7483150 Measuring device having an optical probe tip |
01/27/2009 | US7483149 Optical measuring device for measuring curved surfaces |
01/27/2009 | US7483148 Ellipsometric investigation of very thin films |
01/27/2009 | US7483147 Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer |
01/27/2009 | US7483133 Multiple angle of incidence spectroscopic scatterometer system |
01/27/2009 | US7483120 Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
01/27/2009 | US7482564 High definition telescope |
01/27/2009 | US7482102 Monitoring pattern configured to obtain information required for adjusting optical system; asymmetrical diffraction grating generates positive first order diffracted light and negative first order diffracted light; probing phase shifters |
01/27/2009 | US7481945 Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device |
01/27/2009 | US7481944 Etch amount detection method, etching method, and etching system |
01/27/2009 | US7481544 Grazing incidence relays |
01/27/2009 | US7481003 Football down chain set |
01/27/2009 | CA2423325C Sensor and method for range measurements using a tdi device |
01/27/2009 | CA2278332C Optoelectronic system using spatiochromatic triangulation |
01/22/2009 | WO2009011432A1 Shape measuring apparatus and shape measuring method |