Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
02/2009
02/03/2009US7486405 Optimized reference level generation
02/03/2009US7486404 Size difference measuring method and size difference measuring apparatus
02/03/2009US7486403 Droplet shape measuring method and apparatus
02/03/2009US7486397 Device for aligning substrate with mask and method using the same
02/03/2009US7486394 Optical measuring head
02/03/2009US7486390 Device and process for alignment of machines, machine parts or other technical articles
02/03/2009US7485864 Radiometer, sighting device for a radiometer and method therefor
02/03/2009US7485847 Displacement sensor employing discrete light pulse detection
02/03/2009US7484854 Projector and pattern image display method
02/03/2009CA2481363C Method and apparatus for measuring the outside dimensions of a package
01/2009
01/29/2009WO2009015209A1 Computer controllable led light source for device for inspecting microscopic objects
01/29/2009WO2009014698A1 Methods and apparatus for measuring thickness of etching residues on a substrate
01/29/2009WO2009013926A1 Rotary body measuring device
01/29/2009WO2009013905A1 Position measuring system, exposure device, position measuring method, exposure method, device manufacturing method, tool, and measuring method
01/29/2009WO2009013887A1 End section inspecting apparatus
01/29/2009WO2009013768A1 Method of compensating measurement errors of a measuring machine deriving from the deformations of the machine bed caused by the load exerted by the mobile unit of the machine on the machine bed, and measuring machine operating according to said method
01/29/2009WO2009013231A1 Apparatus and method for checking thickness dimensions of an element while it is being machined
01/29/2009WO2009012748A2 Method for the in-situ determination of the material composition of optically thin layers, arrangements for performance and applications of the method
01/29/2009WO2008146151A3 Apparatus and method for monitoring a track
01/29/2009US20090030647 System and Method for Using Structured Shapes to Increase Laser Scanner Accuracy
01/29/2009US20090030558 Wheel alignment head and system with advanced power management
01/29/2009US20090027785 Position detecting device capable of improving detection accuracy
01/29/2009US20090027695 Methods and apparatus for measuring thickness of etching residues on a substrate
01/29/2009US20090027694 Coordinate detection apparatus and method, and computer program
01/29/2009US20090027693 Optical interrogation system and microplate position correction method
01/29/2009US20090027692 Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
01/29/2009US20090027691 Lithographic Apparatus and Device Manufacturing Method with Reduced Scribe Lane Usage for Substrate Measurement
01/29/2009US20090027690 Measuring probe, sample surface measuring apparatus and sample surface measuring method
01/29/2009US20090027689 Method and apparatus for performing optical imaging using frequency-domain interferometry
01/29/2009US20090027687 Fixed-point detector and displacement-measuring apparatus
01/29/2009US20090027662 Fault tolerant wheel alignment head and system
01/29/2009US20090026657 Alignment System and Method for a Substrate in a Nano-Imprint Process
01/29/2009DE102008030555A1 Vorrichtung zur Verarbeitung von Stereobildern An apparatus for processing stereo images
01/29/2009DE102008026865A1 Systemarchitektur zur Erfassung einer absoluten Position unter Verwendung eines Zielmusters System architecture for detecting an absolute position using a target pattern
01/29/2009DE102007035519A1 Verfahren zur Korrektur der aufgrund der Durchbiegung eines Substrats bedingten Messwerte A method of correction of the conditional because of the deflection of a substrate measured values
01/29/2009DE102007034854A1 Verfahren und Vorrichtung zur automatisierten Messung und Kombination von Bildaufnahme und Kraftmessung Method and apparatus for automated measurement and combination of imaging and force measurements
01/29/2009DE102007034289B3 Verfahren zur in-situ-Bestimmung der stofflichen Zusammensetzung von optisch dünnen Schichten, Anordnungen zur Durchführung und Anwendungen des Verfahrens A method for in-situ determination of the material composition of optically thin layers, and arrangements for carrying out applications of the method
01/29/2009DE102007033619A1 Verfahren der Zuordnung von Korrekturwerten der Durchbiegung eines Substrats relativ zum Koordinatensystem einer Koordinaten-Messmaschine Method of assigning correction values ​​of the deflection of a substrate relative to the coordinate system of a coordinate measuring machine
01/29/2009DE102007021953B4 Interferometrische Messvorrichtung zum Vermessen einer Oberfläche eines Prüflings Interferometric measuring apparatus for measuring a surface of a test specimen
01/29/2009DE10031410B4 Verfahren zur Mengenermittlung von Industrieholzsortimenten A method for determining amount of industrial wood assortments
01/28/2009EP2019292A1 Brillouin spectrum measuring method and brillouin spectrum measuring device
01/28/2009EP2019281A1 3D sensor and method for operating a 3D sensor
01/28/2009EP2018581A1 Apparatus and method for recognizing objects
01/28/2009EP2018514A1 Device for measuring package size
01/28/2009EP2018513A2 Device and method for measuring the relative spatial position of two objects
01/28/2009CN201188079Y Single slit diffraction Yang modulus measuring instrument
01/28/2009CN201187998Y External hanging type mechanism
01/28/2009CN201187994Y Centring device for laser ranging buggy ladle
01/28/2009CN201187993Y Device for large distance light parallel regulation
01/28/2009CN201187992Y Tracking detection apparatus for steel tube navigation route
01/28/2009CN201187991Y Apparatus for detecting main beam side curvature of cranes
01/28/2009CN201187990Y 3D locating measuring instrument
01/28/2009CN201185638Y Ice cream stick head detection mechanism and ice cream stick picking machine equipped with the mechanism
01/28/2009CN101356623A Moving body drive method, moving body drive system, pattern formation method, pattern formation device, exposure method, exposure device, and device fabrication method
01/28/2009CN101356419A Pass-line and tilt insensitive sensor
01/28/2009CN101356418A Shape recognizing device and deformation evaluating device
01/28/2009CN101356417A System and method for detecting a geometry of a workpiece
01/28/2009CN101355045A Substrate detection apparatus and substrate processing apparatus
01/28/2009CN101354310A Methods and systems for in-situ mechanical inspection
01/28/2009CN101354245A Bearing platform and measuring device using the same
01/28/2009CN101354243A Non-contact laser detection method of guide rail rolling angle
01/28/2009CN101354242A Method and device for measuring curved surface
01/28/2009CN101354241A Method and system for evaluating aggregate digital image
01/28/2009CN101354240A Micro nano-scale fiber high precision measuring system based on micro-optical
01/28/2009CN101354239A Measuring apparatus and measuring method using the same
01/28/2009CN101354238A Devices relating to rolled product
01/28/2009CN101354237A Ball type measuring prism
01/28/2009CN101354236A Method for performing nondestructive detection of granule geometric dimension for multi-layer film surface of substrate
01/28/2009CN101353878A A tamping machine
01/28/2009CN101353090A Devices relating to rolled product
01/28/2009CN101352260A High speed on-line system for testing imbossing seal on cigarette
01/28/2009CN100456080C Constant-offset collimated output beam splitter
01/28/2009CN100455989C Pressure resistance inspecting method and pressure resistance inspecting apparatus for heat exchangers
01/28/2009CN100455988C Microsize admeasuring apparatus
01/28/2009CN100455987C Three-dimensional on-line measuring method and system using synthesis wave to interfere whole-field nano surface
01/28/2009CN100455445C Apparatus for measuring the physical properties of a surface and a pattern generating apparatus
01/28/2009CN100455258C Infrared instrument for measuring stature of human body
01/27/2009US7483807 Form measuring device, form measuring method, form analysis device, form analysis program, and recording medium storing the program
01/27/2009US7483562 Method of detecting protrudent adhered matters and method of making spark plug using the same
01/27/2009US7483156 Method for measuring overlay and overlay mark used therefor
01/27/2009US7483155 Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
01/27/2009US7483154 Position detecting device, liquid ejecting apparatus and method of cleaning smear of scale
01/27/2009US7483153 Power-saving control method in laser measuring system and laser measuring system
01/27/2009US7483152 High resolution statistical analysis of localized corrosion by direct measurement
01/27/2009US7483151 Active 3D triangulation-based imaging method and device
01/27/2009US7483150 Measuring device having an optical probe tip
01/27/2009US7483149 Optical measuring device for measuring curved surfaces
01/27/2009US7483148 Ellipsometric investigation of very thin films
01/27/2009US7483147 Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer
01/27/2009US7483133 Multiple angle of incidence spectroscopic scatterometer system
01/27/2009US7483120 Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
01/27/2009US7482564 High definition telescope
01/27/2009US7482102 Monitoring pattern configured to obtain information required for adjusting optical system; asymmetrical diffraction grating generates positive first order diffracted light and negative first order diffracted light; probing phase shifters
01/27/2009US7481945 Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device
01/27/2009US7481944 Etch amount detection method, etching method, and etching system
01/27/2009US7481544 Grazing incidence relays
01/27/2009US7481003 Football down chain set
01/27/2009CA2423325C Sensor and method for range measurements using a tdi device
01/27/2009CA2278332C Optoelectronic system using spatiochromatic triangulation
01/22/2009WO2009011432A1 Shape measuring apparatus and shape measuring method