Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
03/2009
03/05/2009WO2009028811A1 Apparatus for measuring three-dimensional profile using lcd
03/05/2009WO2009028494A1 Position detecting apparatus, position detecting method, exposure apparatus and device manufacturing method
03/05/2009WO2009028489A1 Object detecting method, object detecting device, and robot system
03/05/2009WO2009028377A1 Measurement apparatus and method for measuring surface shape and roughness
03/05/2009WO2009028164A1 Method for detecting crack occurrence position
03/05/2009US20090063093 Method and apparatus for surveying actual measurement data of a component
03/05/2009US20090061361 Integrated Circuit Manufacturing Methods with Patterning Device Position Determination
03/05/2009US20090059244 Web Measurement Device
03/05/2009US20090059243 Method for determining the absolute thickness of non-transparent and transparent samples by means of confocal measurement technology
03/05/2009US20090059242 Three-dimensional measurement method and three-dimensional measurement apparatus
03/05/2009US20090059241 System and Method for Three-Dimensional Measurement of The Shape of Material Objects
03/05/2009US20090059240 Incorporating film optical property measurements into scatterometry metrology
03/05/2009US20090059239 Method of Determining the Depth Profile of a Surface Structure and System for Determining the Depth Profile of a Surface Structure
03/05/2009US20090059229 Apparatus for detecting position of substrate, ellipsometer, and film thickness measuring apparatus
03/05/2009US20090059213 Apparatus and method for wheel alignment
03/05/2009US20090059212 Inclined detector
03/05/2009US20090059208 Apparatus and method for a combined interferometric and image based geometric determination, particularly in the microsystem technology
03/05/2009US20090059206 Optical Linear and Rotation Displacement Sensor
03/05/2009US20090057837 Wafer with edge notches encoding wafer identification descriptor
03/05/2009US20090056156 Web Measurement Device
03/05/2009US20090056152 Vehicle wheel alignment system and methodology
03/05/2009DE202007014435U1 Optischer Sensor für eine Messvorrichtung Optical sensor for a measuring device
03/05/2009DE102008039322A1 Verfahren zum Ermitteln des Tiefenprofils einer Oberflächenstruktur und System zum Ermitteln des Tiefenprofils einer Oberflächenstruktur A method for determining the depth profile of a surface structure and system for determining the depth profile of a surface structure
03/05/2009DE102007041375A1 Arrangement controlling device for free ends of pins i.e. plug pins in e.g. female connector, has mask with break-throughs in which pins are held by acquisition device, where light of lighting device is reflected at break-throughs
03/05/2009DE102007041272A1 Measuring system for performing contact and contactless measurement at e.g. indexable insert, has electronics circuit receiving measuring signals from barrier and caliper arrangements and routing signals in transmission line to controller
03/05/2009DE102007039077A1 Signalmarken und Verfahren zur photogrammetrischen Vermessung von geometrisch unregelmäßigen Objekten Signal trademarks and method for photogrammetric measurement of geometrically irregular objects
03/05/2009DE102007032609A1 Kostengünstige Erfassung der inneren Raumform von Fußbekleidung und Körpern Cost-effective detection of the inner space form of footwear and bodies
03/04/2009EP2031348A1 Device for a reflective metal strip with an inspection unit for detecting surface defects and/or charting the surface topography
03/04/2009EP2031347A1 Method and apparatus for measuring coating thickness with a laser
03/04/2009EP2030005A2 Glazing inspection method
03/04/2009EP2029965A2 Laser-based alignment tool
03/04/2009EP2029964A2 Systems and methods for illuminating materials
03/04/2009EP2029963A1 Gap measuring method, imprint method, and imprint apparatus
03/04/2009EP1926435B1 Apparatus for supporting a patient during radiation therapy
03/04/2009EP1545866B1 An automatic control and monitoring system for splice overlapping tolerance in textile ply
03/04/2009CN201203581Y Safety detection system for chassis of automobile
03/04/2009CN201203484Y Multi-point high precision temperature real time automatic measuring device
03/04/2009CN201203420Y Digital close view photogrammetric system
03/04/2009CN201203408Y Assembling quality detection device of vacuum pump vane
03/04/2009CN201203407Y Formwork clip fixture
03/04/2009CN101379597A Semiconductor device manufacturing method and method for reducing microroughness of semiconductor surface
03/04/2009CN101379380A Method for determining loads on/damage to a mechanical structure
03/04/2009CN101379366A Optical translation of triangulation position measurement
03/04/2009CN101377423A Device and method for correcting sensor temperature influence
03/04/2009CN101377416A Method for lighting ultra-long shafting on marine vehicle to center
03/04/2009CN101377415A Method for precisely measuring deflection angle
03/04/2009CN101377414A Apparatus and method for measuring two-dimensional small angle based on light beam angle drift dynamic compensation
03/04/2009CN101377413A Method for measuring photoresist mask slot-shaped structure parameter
03/04/2009CN101377412A Cage conductor shape laser detector based on double-steel wire rope orientation and detecting method thereof
03/04/2009CN101377411A Cage conductor shape laser detector based on photoelectric receiving array and detecting method thereof
03/04/2009CN101377410A Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning
03/04/2009CN101377409A Method for detecting surface appearance of glasses lens
03/04/2009CN101377408A Apparatus for indirectly measuring steel rail deformation parameter
03/04/2009CN101377407A Drill edge detection device
03/04/2009CN101377406A Apparatus and method for obtaining information related to terahertz waves
03/04/2009CN101377405A Vision measuring method of space round gesture parameter and geometric parameter
03/04/2009CN101377404A Method for disambiguating space round gesture recognition ambiguity based on angle restriction
03/04/2009CN101377403A Apparatus and method for measuring position accuracy of part straight-line edge
03/04/2009CN101377402A Three-dimensional measuring instrument
03/04/2009CN101376433A Helicopter rotor operation method and system
03/04/2009CN100465716C A substrate assembling device and a method thereof
03/04/2009CN100465579C A laser plane coordinate calibrating device
03/03/2009US7499829 Laser rangefinder and method thereof
03/03/2009US7499812 Method for locating flaws, and a marking system
03/03/2009US7499600 Method for characterizing a digital imaging system
03/03/2009US7499581 Vision system to calculate a fluid volume in a container
03/03/2009US7499186 Laser survey device
03/03/2009US7499185 Measuring device for workpiece held on chuck table
03/03/2009US7499184 Three-dimensional measuring apparatus and three-dimensional measuring method
03/03/2009US7499183 Method of measuring sub-micron trench structures
03/03/2009US7499180 Alignment stage, exposure apparatus, and semiconductor device manufacturing method
03/03/2009US7499179 Measurement method and apparatus, exposure apparatus, exposure method, and adjusting method
03/03/2009US7498621 Image sensing device and method of
03/03/2009US7498106 Method and apparatus for controlling etch processes during fabrication of semiconductor devices
03/03/2009US7497018 Laser-based alignment tool
02/2009
02/26/2009WO2009025771A2 Parameterized optical system and method
02/26/2009WO2009025323A1 Three-dimensional image data creating system and creating method
02/26/2009WO2009024904A2 Method and apparatus for the optical characterization of surfaces
02/26/2009WO2009024758A1 Non-contact probe
02/26/2009WO2009024757A1 Phase analysis measurement apparatus and method
02/26/2009WO2009024756A1 Non-contact measurement apparatus and method
02/26/2009WO2009024467A1 Organically based optical position sensor
02/26/2009WO2009024344A1 Optical microprobe
02/26/2009WO2009024129A1 Signal marks and method for the photogrammetric measurement of geometrically irregular objects
02/26/2009WO2008157619A3 Total internal reflection displacement scale
02/26/2009WO2008125605A3 Method and assembly for optical reproduction with depth discrimination
02/26/2009WO2008122808A3 Rotation detection kit with intensity sensors receiving optical beams with discretely varying polarisation orientation
02/26/2009US20090052843 Optical Multi-Fiber Plug Connection
02/26/2009US20090051939 Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
02/26/2009US20090051938 Multi-beam optical probe and system for dimensional measurement
02/26/2009US20090051937 Device and method for measuring profiles of electron beam and laser beam
02/26/2009US20090051936 Method for measuring positions of structures on a substrate with a coordinate measuring machine
02/26/2009US20090051935 Automatic Geometric Calibration Using Laser Scanning Reflectometry
02/26/2009US20090051934 Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
02/26/2009US20090051933 Tool Detection
02/26/2009US20090051932 Method for determining the position of a measurement objective in the z-coordinate direction of an optical measuring machine having maximum reproducibility of measured structure widths
02/26/2009US20090051931 Systems and methods for measuring sample surface flatness of continuously moving samples
02/26/2009US20090051930 Method for detecting surface defects on a substrate and device using said method
02/26/2009US20090051929 Three-dimensional image measuring apparatus
02/26/2009US20090051926 Multiple frequency optical mixer and demultiplexer and apparatus for remote sensing