| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 07/18/1984 | EP0113518A2 Bubbler cylinder and dip tube device |
| 06/27/1984 | EP0111510A1 Low temperature process for depositing epitaxial layers. |
| 06/19/1984 | US4454835 Apparatus for growing epitaxial layers by proteolysis |
| 05/29/1984 | US4451499 From oxygen and beryllium ionized vapors |
| 05/29/1984 | US4451391 Germanium |
| 05/15/1984 | US4449037 Method and apparatus for heating semiconductor wafers |
| 05/15/1984 | US4448797 Masking techniques in chemical vapor deposition |
| 05/08/1984 | US4447904 Semiconductor devices with nonplanar characteristics produced in chemical vapor deposition |
| 05/08/1984 | US4447497 Heat treatment, deoxygenation of substrate surface, lowering temperature, and vapor deposition of semiconductor |
| 05/08/1984 | US4446817 Apparatus for vapor deposition of a film on a substrate |
| 05/08/1984 | CA1166937A1 Method and apparatus for performing growth of compound thin films |
| 05/02/1984 | EP0107344A1 Susceptor for radiant absorption heater system |
| 05/02/1984 | EP0036859B1 Boat for wafer processing |
| 05/01/1984 | US4445965 Method for making thin film cadmium telluride and related semiconductors for solar cells |
| 04/24/1984 | US4445129 Semiconductor device with a gray tin layer and a method of making the same |
| 04/24/1984 | US4444812 Combination gas curtains for continuous chemical vapor deposition production of silicon bodies |
| 04/17/1984 | US4443488 Semiconductors, multistage, thin films, extraction, coalescing |
| 04/17/1984 | US4443410 Integrated circuits, thin films, cassettes |
| 04/04/1984 | EP0104405A1 Silicon carbide materials |
| 03/27/1984 | US4439267 Vapor-phase method for growing mercury cadmium telluride |
| 03/21/1984 | EP0103470A1 Titanium disulfide thin film and process for fabricating the same |
| 03/13/1984 | US4436769 Metal organic vapor deposition procedure for preparing group III--V compounds on a heated substrate |
| 03/13/1984 | US4436674 Vapor mass flow control system |
| 03/13/1984 | CA1163538A1 Holder for liquid phase epitaxial growth |
| 03/06/1984 | US4434742 Installation for depositing thin layers in the reactive vapor phase |
| 02/14/1984 | US4431475 Process for making doped semiconductors |
| 02/14/1984 | US4430959 Semiconductor vapor phase growing apparatus |
| 02/07/1984 | US4430149 Chemical vapor deposition of epitaxial silicon |
| 02/02/1984 | WO1984000353A1 Ultra-pure epitaxial silicon |
| 01/19/1984 | WO1984000178A1 Low temperature process for depositing epitaxial layers |
| 01/03/1984 | US4424193 Constituent members of a semiconductor element-manufacturing apparatus and a reaction furnace for making said constituent members |
| 01/03/1984 | CA1159629A1 Method for producing pre-shaped alpha-silicon nitride whisker compacts and loose whiskers for composite material reinforcement |
| 12/27/1983 | US4422888 Method for successfully depositing doped II-VI epitaxial layers by organometallic chemical vapor deposition |
| 12/20/1983 | US4421786 Chemical vapor deposition reactor for silicon epitaxial processes |
| 12/20/1983 | US4421592 Without contamination by alkali halide substrate |
| 12/06/1983 | US4419332 Semiconductors, heating pipe |
| 12/06/1983 | US4419179 Method of vapor phase growth |
| 12/06/1983 | US4419178 Endless belts, monocrystals |
| 12/06/1983 | CA1158109A1 Coating of semiconductor wafers and apparatus therefor |
| 11/01/1983 | US4413022 Vapor reactions |
| 10/26/1983 | EP0092435A1 A method of, and a susceptor for use in, vapour deposition of films |
| 10/25/1983 | US4411729 Positioning of crystalline substrate and dummy substrate in gas flow to control doping and growth |
| 10/12/1983 | EP0090817A1 Thin films of compounds and alloy compounds of group iii and group v elements. |
| 09/06/1983 | US4402771 Substrate for silicon solar cells |
| 08/30/1983 | US4401687 Plasma deposition of silicon |
| 08/30/1983 | US4401507 Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions |
| 08/30/1983 | US4401506 Process for producing semiconductor device |
| 08/10/1983 | EP0085397A2 Semiconductor vapor phase growing apparatus |
| 08/09/1983 | US4397897 Bell of translucent fused silica for the precipitation of polysilicon |
| 07/19/1983 | US4394401 Method of plasma enhanced chemical vapor deposition of phosphosilicate glass film |
| 07/12/1983 | US4393013 Vapor mass flow control system |
| 07/12/1983 | US4392453 Molecular beam converters for vacuum coating systems |
| 06/28/1983 | US4389973 Apparatus for performing growth of compound thin films |
| 06/23/1983 | WO1983002108A1 Continuous silicon carbide whisker production |
| 06/21/1983 | US4389273 Vapor deposition, heat treatment |
| 06/14/1983 | US4388342 Method for chemical vapor deposition |
| 06/14/1983 | US4388255 Method for producing pre-shaped α-silicon nitride whisker compacts and loose whiskers for composite material reinforcement |
| 05/31/1983 | US4386255 Susceptor for rotary disc reactor |
| 05/10/1983 | US4382837 Single crystals by heating in the presence of flowing nitrogen and hydrogen gases; solid solutions; process control; semiconductors |
| 05/10/1983 | US4382776 Quartz tube for thermal processing of semiconductor substrates |
| 04/28/1983 | WO1983001466A1 Thin films of compounds and alloy compounds of group iii and group v elements |
| 04/27/1983 | EP0077408A1 A method and apparatus for the heat treatment of semiconductor articles |
| 04/19/1983 | CA1145065A1 Semiconductor device made by epitaxial growth |
| 04/06/1983 | EP0075889A2 Process for making thin silicon films |
| 03/22/1983 | US4377564 Plasma in a gas flow where silicon compound reacts |
| 03/22/1983 | CA1143259A1 Method of cleaning a reactor |
| 03/15/1983 | CA1143074A1 Boat for wafer processing |
| 02/16/1983 | EP0072226A1 Vapor phase deposition of semiconductor material |
| 01/25/1983 | US4370288 On a layer of graphite applied to substrate from a colloidal suspension |
| 01/12/1983 | EP0069206A1 Single crystals of xSiC.(1-x)AlN |
| 01/11/1983 | US4368098 Epitaxial composite and method of making |
| 01/11/1983 | US4368072 Iodide cell vapor pressure control |
| 01/11/1983 | US4367768 Refractory protective tube for the heat treatment of semiconductor components |
| 01/11/1983 | CA1139453A1 Improving graphoepitaxy |
| 01/05/1983 | EP0068839A1 Method and apparatus for vapor phase growth of a semiconductor |
| 12/28/1982 | US4365588 Fixture for VPE reactor |
| 11/30/1982 | CA1136413A1 Carbonaceous material and process for producing a high btu gas from this material |
| 11/16/1982 | CA1135601A1 Method for forming a crystalline film for a paramagnetic sodium thallium type intermetallic compound |
| 10/19/1982 | US4354455 Apparatus for oscillating a gas manifold in a rotary disc reactor |
| 10/19/1982 | CA1134059A1 Method of providing an epitaxial layer |
| 10/06/1982 | EP0061611A1 Method for producing pre-shaped alpha-silicon nitride whisker compacts and loose whiskers for composite material reinforcement |
| 10/05/1982 | US4352713 Vapor growth method |
| 09/14/1982 | US4348981 Vertical type vapor-phase growth apparatus |
| 08/24/1982 | CA1130474A1 Epitaxial tunnels |
| 08/11/1982 | EP0057587A2 Semiconductor deposition method |
| 08/10/1982 | US4343963 Substrate for silicon solar cells |
| 08/05/1982 | EP0049286A4 Methods of producing sheets of crystalline material and devices amde therefrom. |
| 07/27/1982 | US4341107 Calibratable system for measuring fluid flow |
| 07/21/1982 | EP0056326A2 Coating of semiconductor wafers and apparatus therefor |
| 07/20/1982 | US4340568 Blow pipe assembly |
| 07/13/1982 | US4339300 Process for smoothing surfaces of crystalline materials |
| 06/22/1982 | US4336099 Method for producing gallium arsenide single crystal ribbons |
| 06/15/1982 | US4335160 Chemical process |
| 06/08/1982 | US4333989 Sapphire single crystal substrate consisting essentially of Ga2 O.sub.3 |
| 06/08/1982 | US4333792 Enhancing epitaxy and preferred orientation |
| 06/02/1982 | EP0052979A1 Improvements in the manufacture of group IIIB-VB compounds |
| 05/19/1982 | EP0051677A1 Process and apparatus for chemical vapor deposition of films on silicon wafers |
| 05/18/1982 | US4330360 Molecular beam deposition technique using gaseous sources of group V elements |
| 05/18/1982 | US4330182 Method of forming semiconducting materials and barriers |
| 05/04/1982 | CA1122859A1 Electronic grade aluminum nitride materials |