| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 03/04/1980 | CA1073117A1 Process and apparatus for the preparation of semiconductor-grade silicon |
| 02/26/1980 | US4190640 Reaction of nitrogen oxide with bromocarbon |
| 02/26/1980 | US4190470 Production of epitaxial layers by vapor deposition utilizing dynamically adjusted flow rates and gas phase concentrations |
| 02/05/1980 | US4186684 Apparatus for vapor deposition of materials |
| 02/05/1980 | CA1071068A1 Method of manufacturing single crystals by growth from the vapour phase |
| 01/09/1980 | EP0006118A1 Process for vapor-phase growing of gallium arsenide containing a large concentration of germanium |
| 12/25/1979 | US4180618 Thin silicon film electronic device |
| 12/25/1979 | CA1068582A Continuous chemical vapor deposition reactor |
| 12/18/1979 | US4179530 Process for the deposition of pure semiconductor material |
| 12/18/1979 | US4179326 Flowing reaction gas over heated wafer |
| 12/12/1979 | EP0005744A1 Process for producing epitaxial layers on selectively doped silicon substrates with high impurity concentration |
| 12/11/1979 | US4178197 Formation of epitaxial tunnels utilizing oriented growth techniques |
| 12/04/1979 | US4177321 Reduction of difference in lattice constant |
| 12/04/1979 | US4177094 Semiconductors |
| 12/04/1979 | US4177084 Method for producing a low defect layer of silicon-on-sapphire wafer |
| 11/28/1979 | EP0005442A1 Process and apparatus for producing aluminium nitride useful for electronic applications |
| 11/13/1979 | US4174422 Layer of nickel crystals intermediate between monocrystalline sodium chloride and silver |
| 11/13/1979 | US4173944 Silverplated vapor deposition chamber |
| 11/13/1979 | CA1066174A1 Method for producing compound thin films |
| 10/30/1979 | US4172756 Vapor deposition of monocrystalline gallium for semiconductors |
| 10/30/1979 | US4172754 Reaction of aluminum monoselenide, formed from aluminum and selenium, with nitrogen |
| 10/23/1979 | US4171996 Fabrication of a heterogeneous semiconductor structure with composition gradient utilizing a gas phase transfer process |
| 09/25/1979 | US4168998 Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder |
| 09/11/1979 | CA1062130A1 Process for producing large-size self-supporting plates of silicon |
| 09/04/1979 | CA1061795A1 Process for the preparation of chlorosilanes |
| 08/08/1979 | EP0003425A1 A method for forming a crystalline film of a paramagnetic sodium thallium type intermetallic compound and apparatus for performing said method |
| 08/07/1979 | CA1059880A2 Deposition of solid semiconductor compositions and novel semiconductor materials |
| 06/26/1979 | US4159354 Method for making thin film III-V compound semiconductors for solar cells involving the use of a molten intermediate layer |
| 06/13/1979 | EP0002383A1 Method and apparatus for depositing semiconductor and other films |
| 06/05/1979 | CA1055817A1 Reaction vessel for depositing semi-conductor material |
| 05/16/1979 | EP0001942A2 Process for manufacturing silicon for photovoltaic conversion |
| 05/08/1979 | US4153486 Silicon tetrachloride epitaxial process for producing very sharp autodoping profiles and very low defect densities on substrates with high concentration buried impurity layers utilizing a preheating in hydrogen |
| 05/01/1979 | US4152182 Process for producing electronic grade aluminum nitride films utilizing the reduction of aluminum oxide |
| 04/04/1979 | EP0001373A1 Method of forming smooth and pinhole-free silicon carbide films on a silicon substrate |
| 04/03/1979 | US4147571 Method for vapor epitaxial deposition of III/V materials utilizing organometallic compounds and a halogen or halide in a hot wall system |
| 03/27/1979 | US4146774 Planar reactive evaporation apparatus for the deposition of compound semiconducting films |
| 03/13/1979 | US4144116 Vapor deposition of single crystal gallium nitride |
| 02/27/1979 | US4141778 Vapor deposition, decomposition |
| 02/20/1979 | US4140735 Process and apparatus for bubbling gas through a high purity liquid |
| 02/06/1979 | US4138509 Disproportionation of binary silicon fluoride |
| 02/06/1979 | US4138306 Apparatus for the treatment of semiconductors |
| 01/30/1979 | US4137108 Process for producing a semiconductor device by vapor growth of single crystal Al2 O3 |
| 01/02/1979 | US4132818 Layers of uniform thickness by varying flow rate and concentration of gases |
| 01/02/1979 | US4132571 Silicides |
| 12/26/1978 | US4131659 Process for producing large-size, self-supporting plates of silicon |
| 11/21/1978 | US4126731 Sapphire single crystal substrate for semiconductor devices |
| 10/31/1978 | US4123571 Placing silicon substrate in susceptor having tantalum carbide surfaces, heating, cooling, addition of methane |
| 10/10/1978 | US4119994 Heterojunction and process for fabricating same |
| 10/03/1978 | US4118539 Super hard-highly pure silicon nitrides having a preferred crystal face orientation |
| 09/26/1978 | US4117504 Heterogeneous semiconductor structure with composition gradient and method for producing same |
| 09/26/1978 | US4116751 Methods and apparatus for producing unsupported monocrystalline films of silicon and of other materials |
| 09/19/1978 | US4115625 Sodium thallium type crystal on crystalline layer |
| 09/12/1978 | US4113547 Formation of epitaxial layers on substrate wafers utilizing an inert heat radiation ring to promote uniform heating |
| 09/12/1978 | US4113513 Method of manufacturing a semiconductor device by non-selectively implanting a zone of pre-determined low resistivity |
| 08/15/1978 | CA1036470A1 Deposition of solid semiconductor compositions and novel semiconductor materials |
| 07/25/1978 | US4102766 Alkali metal or an alkaline-earth metal reductant, silicon halide, doping agent reacted to produce metal salts and liquid silicon |
| 07/25/1978 | US4102298 Device for deposition of semi-conductor material |
| 07/18/1978 | US4100879 Device for epitaxial growing of semiconductor periodic structures from gas phase |
| 05/16/1978 | US4089735 Method for epitactic precipitation of crystalline material from a gaseous phase, particularly for semiconductors |
| 05/09/1978 | US4088515 Method of making semiconductor superlattices free of misfit dislocations |
| 04/25/1978 | US4086109 Method for the epitaxial growth of III-V compounds at homogeneous low temperature utilizing a single flat temperature zone |
| 04/04/1978 | US4082865 Method for chemical vapor deposition |
| 03/28/1978 | US4081313 Process for preparing semiconductor wafers with substantially no crystallographic slip |
| 01/03/1978 | US4066481 Metalorganic chemical vapor deposition of IVA-IVA compounds and composite |
| 12/27/1977 | US4065533 Process for the continuous production of silicon rods or tubes by gaseous deposition into a flexible wound band |
| 12/20/1977 | US4063974 Planar reactive evaporation method for the deposition of compound semiconducting films |
| 12/20/1977 | US4063529 Device for epitaxial growing of semiconductor periodic structures from gas phase |
| 12/13/1977 | US4062706 Process for III-V compound epitaxial crystals utilizing inert carrier gas |
| 12/13/1977 | US4062318 Apparatus for chemical vapor deposition |
| 11/15/1977 | US4058430 Method for producing compound thin films |
| 11/15/1977 | US4058418 Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth |
| 10/11/1977 | US4053326 Photovoltaic cell |
| 10/11/1977 | US4052782 Tubular solar cell and method of making same |
| 09/13/1977 | US4047496 Epitaxial radiation heated reactor |
| 08/16/1977 | US4042447 Crystallizing a layer of silicon on a sodium thallium type crystalline alloy substrate |
| 07/12/1977 | US4035460 Shaped bodies and production of semiconductor material |
| 07/12/1977 | US4034705 Shaped bodies and production of semiconductor material |
| 06/07/1977 | US4028149 Process for forming monocrystalline silicon carbide on silicon substrates |
| 05/17/1977 | US4023520 Reaction container for deposition of elemental silicon |
| 04/19/1977 | US4018183 Apparatus for treating a plurality of semiconductor slices to a reacting gas current |
| 03/29/1977 | US4014980 Method for manufacturing graphite whiskers using condensed polycyclic hydrocarbons |
| 03/22/1977 | US4013503 Filamentary silicon carbide crystals by VLS growth in molten iron |
| 01/11/1977 | US4002725 Process for growing acicula of rare earth pentaphosphates |
| 01/04/1977 | US4000716 Epitaxial growth device |
| 11/23/1976 | US3993533 Method for making semiconductors for solar cells |
| 09/14/1976 | US3980942 Apparatus for the control of electrical heating of a semiconductor rod |
| 09/14/1976 | US3980686 Process for the preparation of chlorosilane |
| 09/07/1976 | US3979271 Deposition of solid semiconductor compositions and novel semiconductor materials |
| 09/07/1976 | US3979235 Depositing doped material on a substrate |
| 08/17/1976 | US3974561 Method of producing directly heatable hollow semiconductor bodies |
| 06/29/1976 | US3966513 Method of growing by epitaxy from the vapor phase a material on substrate of a material which is not stable in air |
| 06/22/1976 | US3964430 Semi-conductor manufacturing reactor instrument with improved reactor tube cooling |
| 06/01/1976 | US3960619 Reduction or thermal decomposition of a silane compound and a hydrocarbon |
| 05/11/1976 | US3956037 Method of forming semiconductor layers by vapor growth |
| 05/11/1976 | US3956032 Silicon carbide |
| 04/27/1976 | US3953876 Silicon solar cell array |
| 03/30/1976 | US3947562 Production of a form of alumina whiskers |
| 03/23/1976 | US3945935 Radiation detectors |
| 03/23/1976 | US3945864 Method of growing thick expitaxial layers of silicon |
| 03/02/1976 | US3941900 Method for producing highly pure silicon |