Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2014
05/07/2014CN103774092A 一种在镁合金表面制备导电且耐腐蚀涂层的方法 A method of preparing the conductive surface of the magnesium alloy and corrosion resistant coating
05/07/2014CN103774091A 一种氧化锌薄膜工艺 A zinc oxide thin film technology
05/07/2014CN103774090A 一种含有氮化钒纳米插入层的高硬度TiSiN涂层及其制备方法 TiSiN high hardness coating and method for preparing nanometer insert containing vanadium nitride layer
05/07/2014CN103774089A 钛铝银氮纳米复合涂层及其制备方法 Titanium, aluminum, nitrogen silver nanocomposite coatings and their preparation
05/07/2014CN103774088A 一种sers探针分子自收集微管及其制备方法和应用 One kind sers probe molecule microtubule self-collected and its preparation method and application
05/07/2014CN103774087A 用于制造用于平板显示器的沉积掩模组件的设备 For manufacturing a deposition mask assembly for a flat panel display device
05/07/2014CN103770397A 一种(Ti,Al,Si)N-Mo(S,N)<sub>2</sub>-Ag/TiAlN纳米多层涂层 One kind of (Ti, Al, Si) N-Mo (S, N) <sub> 2 </ sub> -Ag / TiAlN nano-multilayer coating
05/07/2014CN103770396A Ni-P-金刚石-TiAlN耐磨减磨复合涂层及其制备方法 Ni-P- wear resistance and reduction -TiAlN diamond composite coating and its preparation method
05/07/2014CN103769830A 复杂模具表面微观结构特征的制备方法 Complex mold surface microstructure features of preparation
05/07/2014CN103769577A 宽紫外光吸收FeGa空心球纳米阵列材料及其制备方法 UV absorption FeGa wide array of hollow spherical nano-materials and preparation method
05/07/2014CN102851666B 一种镀有铜层基材上的复合抗菌镀层的表面处理方法 A surface treatment method plated copper layer composite antibacterial coating on the substrate
05/07/2014CN102817007B 一种提高大口径球面光学元件深紫外增透膜透射率均匀性的方法 Method for improving large diameter aspheric optical elements DUV transmittance of AR coating uniformity method
05/07/2014CN102786930B 钛铈共掺杂硅铝氮氧发光薄膜、其制备方法及有机电致发光器件 Total titanium cerium doped luminescent film silicon aluminum oxynitride, its preparation method and organic electroluminescent devices
05/07/2014CN102776476B 触摸屏用复合薄膜及其制造方法 Touch screen with a composite film and its manufacturing method
05/07/2014CN102747335B 一种调节真空磁控辉光均匀性的装置和方法 A method of adjusting vacuum magnetron glow uniformity apparatus and method
05/07/2014CN102732844B 一种真空镀膜机行星转动夹具上球面光学元件镀膜均匀性修正挡板的设计方法 A vacuum coating machine design methods planets rotate the fixture aspheric optical element baffle coating uniformity correction
05/07/2014CN102677014B 一种镁合金表面合金化改性的方法 A method of magnesium alloy surface alloying modified
05/07/2014CN102650033B 一种磷掺杂锡酸锌透明导电膜及其制备方法和应用 Stannate transparent conductive film and its preparation method and application of a phosphorus-doped
05/07/2014CN102586744B 靶材及其形成方法 Target and method of forming
05/07/2014CN102560485B 镁合金表面制备硬质防护膜的方法 The method for preparing the surface of a hard protective film of magnesium alloy
05/07/2014CN102482767B 溅射靶用铜材料及其制造方法 Sputtering target material and a method of manufacturing a copper
05/07/2014CN102471879B 成膜装置 Film forming apparatus
05/07/2014CN102418067B 真空镀膜机多片式比较片装置 Vacuum coating machine multi-chip comparator chip device
05/07/2014CN102412341B 含Cu量分层变化的铜铟镓硒薄膜的磁控溅射制备方法 Preparation magnetron sputtering Cu containing varying amounts layered thin film copper indium gallium selenide
05/07/2014CN102406290B 一种幻彩人造宝石及其制备方法 One kind of artificial gemstones Symphony and its preparation method
05/07/2014CN102165089B 用于在塑料衬底上沉积阻挡层的方法以及其涂覆装置和层系统 A method for depositing a barrier layer on the plastic substrate and its coating apparatus and the layer system
05/06/2014US8715472 Substrate processing methods for reflectors
05/06/2014US8715471 Magnetron sputter cathode
05/06/2014US8715417 Film forming apparatus
05/01/2014WO2014065371A1 Antireflective multilayer film
05/01/2014WO2014065301A1 Semiconductor device
05/01/2014WO2014065201A1 Fe-Pt SINTERED COMPACT SPUTTERING TARGET AND MANUFACTURING METHOD THEREFOR
05/01/2014WO2014065125A1 Anti-adhesive plate for vacuum film deposition apparatus, method of manufacturing anti-adhesive plate for vacuum film deposition apparatus, vacuum film deposition apparatus, and vacuum film deposition method
05/01/2014WO2014064995A1 Fe-Pt-BASED SPUTTERING TARGET HAVING NON-MAGNETIC SUBSTANCE DISPERSED THEREIN
05/01/2014WO2014064860A1 Substrate processing apparatus
05/01/2014WO2014064823A1 Method for producing semiconductor film, solar cell, and chalcopyrite compound
05/01/2014WO2014064768A1 Thin film formation apparatus, sputtering cathode, and method of forming thin film
05/01/2014WO2014064741A1 Magnetron sputtering device and magnetron sputtering method
05/01/2014WO2014063970A2 Laminated materials, methods and apparatus for making same, and uses thereof
05/01/2014WO2014063808A1 Plastic component coated with an embedded pvd layer
05/01/2014WO2014063677A1 Component having a coating and method for the production thereof
05/01/2014WO2014063676A1 Component having a coating and method for the production thereof
05/01/2014US20140120341 Process for manufacturing glazing comprising a porous layer
05/01/2014US20140117629 Anti-Diffusion Metal Coated O-Rings
05/01/2014US20140117509 Metal Deposition with Reduced Stress
05/01/2014US20140116878 Apparatus and method for sputtering a target using a magnet unit
04/2014
04/30/2014EP2725879A1 Automatic lithium target regenerating apparatus and automatic lithium target regenerating method
04/30/2014EP2725634A2 Method of fabricating light extraction substrate for organic light-emitting diode
04/30/2014EP2725266A1 Piston ring
04/30/2014EP2725265A1 Piston ring
04/30/2014EP2724346A1 Method for producing a reflective optical element for euv lithography
04/30/2014EP2723915A1 Sputtering target
04/30/2014EP2723914A1 Method and apparatus for vapor deposition
04/30/2014EP2723913A1 Vapor deposition system and supply head
04/30/2014EP2723912A1 Vapor deposition material source and method for making same
04/30/2014EP2723570A1 Method for producing coated vacuum metallized substrates with high vapour and oxygen barrier properties
04/30/2014DE102013111659A1 Metallabscheidung mit verringerten Spannungen Metal deposition at reduced voltages
04/30/2014DE102012110385A1 Lagerung für eine stoßempfindliche Substratbehandlungsapparatur Storage for a shock-sensitive substrate processing apparatus
04/30/2014DE102012110343A1 Local differentiable evaporation of substrates e.g. high-melting material by a transfer mask, by vaporizing an evaporation material by locally applying an energy into the mask using radiation that is reflected on mask opposite substrates
04/30/2014DE102012110287A1 Substrate treatment apparatus for coating substrate, has pressure reducing unit that is arranged in transport path for reducing pressure difference between atmosphere pressure and pressure in pressure lock chamber
04/30/2014DE102012110264A1 Arrangement, useful for carrying gas in a vacuum coating equipment with a vacuum chamber in which a magnetron is arranged on a race track of a magnetic system, where race track is closed, and a racetrack space includes working gas channel
04/30/2014DE102010028958B4 Substratbehandlungsanlage Substrate treatment plant
04/30/2014CN203569182U Double-chamber vacuum film preparation equipment
04/30/2014CN203569181U Rotary horizontal magnetic field coupling axial magnetic field auxiliary arc ion plating device
04/30/2014CN203569180U Vacuum coating machine
04/30/2014CN203569179U Rotating stand device of vacuum coating machine
04/30/2014CN203569178U Mask plate
04/30/2014CN203569177U Mask plate
04/30/2014CN203569176U Mask plate and mask component for evaporation plating
04/30/2014CN203569175U Mask plate and mask assembly
04/30/2014CN203566823U Target pressing die with hydrophilic layer
04/30/2014CN203564932U Recycling utilization device for sealing oil in vacuum magnetron sputtering technology
04/30/2014CN103765596A Thin-film transistor
04/30/2014CN103765552A Generating, a highly ionized plasma in a plasma chamber
04/30/2014CN103765550A Plasma immersion ion implantation machine for low-pressure process
04/30/2014CN103764873A Nano-layer coating for high performance tools
04/30/2014CN103764869A Cooling ring for physical vapor deposition chamber target
04/30/2014CN103764868A Sputtering thin film forming apparatus
04/30/2014CN103764387A Gas barrier film
04/30/2014CN103762310A Substrate preprocessing device
04/30/2014CN103758733A Large medium/high vacuum gas-bleeding unit and pumping process thereof
04/30/2014CN103758477A Expansion cone with TiN or TiAlN film and machining method thereof
04/30/2014CN103757614A Magnesium and magnesium alloy coating and preparation method thereof
04/30/2014CN103757599A Vacuum evaporation equipment for inorganic material
04/30/2014CN103757598A Linear ion implantation surface modification method of M50NiL material
04/30/2014CN103757597A TiN/CrAlSiN nano composite multilayer coating and preparation method thereof
04/30/2014CN103757596A Preparation method of niobium target
04/30/2014CN103757595A Heat transfer device for magnetron sputtering coating machine
04/30/2014CN103757594A Method for preparing high-performance AZO transparent electro-conductive film on flexible substrate at room temperature
04/30/2014CN103757593A Device for improving uniformity of magnetron sputtering gas field and operation method thereof
04/30/2014CN103757592A Niobium target preparation method
04/30/2014CN103757591A Crucible equipment and application thereof in liquid crystal panel production
04/30/2014CN103757590A Coating machine crucible device
04/30/2014CN103757589A Mask device as well as system and method for manufacturing mask device
04/30/2014CN103757588A Mask and preparation method and application of mask
04/30/2014CN102925862B Preparation method of Ti-doped diamond-like carbon (DLC) coating
04/30/2014CN102828157B Method for conducting surface modification on medical titanium nickel (TiNi) shape memory alloys through niobium (Nb) ion injection deposition
04/30/2014CN102703900B Method for depositing film, panel and display
04/30/2014CN102703856B Auxiliary device for preparing thin film electrode
04/30/2014CN102575333B Method of making coated metal articles
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