Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2014
05/21/2014CN103805945A 有机层沉积设备、有机发光显示装置及其制造方法 The organic layer deposition apparatus, an organic light emitting display device and its manufacturing method
05/21/2014CN103805944A 沉积装置及使用该装置的薄膜沉积方法 Depositing a thin film deposition apparatus and a method using the apparatus
05/21/2014CN103805943A 利用混合多层真空沉积法进行沉积及固化的披覆薄膜 Deposition and curing using the hybrid multilayer coated film vacuum deposition method
05/21/2014CN103805942A 用于形成太阳能电池中的薄膜的装置和方法 The thin film solar cell device and a method for forming a
05/21/2014CN103805941A 薄膜沉积设备以及用其沉积薄膜的方法 Thin film deposition apparatus and method for depositing a thin film with its
05/21/2014CN103805920A 用于塑性变形加工的金属玻璃薄膜及其微器件的制备方法 Preparation of metallic glass film for plastic deformation and micro devices
05/21/2014CN103805822A 高性能四组分导电陶瓷蒸发舟及其生产工艺 High-performance four-component conductive ceramic evaporation boat and its production process
05/21/2014CN103802346A 一种家用榨油机的榨膛及其制备材料 One kind of virgin bore press home their preparation materials
05/21/2014CN103801918A 立方晶氮化硼超高压烧结材料制刀片 EHV cubic boron nitride sintered material blade
05/21/2014CN102952545B 铕掺杂钒酸锶发光薄膜、其制备方法及有机电致发光器件 Vanadium europium-doped strontium luminescent film, its preparation method and organic electroluminescent devices
05/21/2014CN102864427B 一种利用磁控溅射法制备Nb薄膜的方法 A use of Nb films prepared by magnetron sputtering method
05/21/2014CN102719789B 一种复合薄膜及其镀膜方法 A composite film and coating method
05/21/2014CN102612501B 溅射靶及使用它的薄膜晶体管 A sputtering target and a thin film transistor using it
05/21/2014CN102405303B 溅射靶材料、其制备方法、及使用其制备的薄膜 A sputtering target material, preparation method, and use of the film for its preparation
05/21/2014CN102373423B 溅镀装置 Sputtering apparatus
05/21/2014CN102367566B 一种铸铁真空镀铬方法 A method of vacuum chrome cast iron
05/21/2014CN102315276B 硅器件结构及其形成时所使用的溅射靶材料 A silicon sputter target material and the device structure formed by the use of
05/21/2014CN102177271B 蒸发材料及蒸发材料的制造方法 The method of manufacturing an evaporation material and an evaporation material
05/21/2014CN101899645B 一种离子注入方法 An ion implantation method
05/20/2014US8729702 Copper seed layer for an interconnect structure having a doping concentration level gradient
05/20/2014US8728621 Hard multilayer film formed body and method for manufacturing same
05/20/2014US8728589 Laser decal transfer of electronic materials
05/20/2014US8728587 Closed loop process control of plasma processed materials
05/20/2014US8728358 Sintered compact, amorphous film and crystalline film of composite oxide, and process for producing the films
05/20/2014US8728287 Oxynitride sputtering target
05/20/2014US8728286 Method of manufacturing sample for atom probe analysis by FIB and focused ion beam apparatus implementing the same
05/20/2014US8728285 Transparent conductive oxides
05/20/2014US8728284 Barium copper sulfur fluoride transparent conductive thin films and bulk material
05/20/2014US8728283 Process for forming a film, piezoelectric film, piezoelectric device, and liquid discharge apparatus
05/20/2014US8728255 Pot-shaped copper sputtering target and manufacturing method thereof
05/20/2014US8728252 Treatment of metal components
05/16/2014CA2825168A1 Interlayer composite substrates
05/15/2014WO2014074574A1 Friction and wear reduction in cryogenic mechanisms and other systems
05/15/2014WO2014073585A1 Metal oxide film and method for forming metal oxide film
05/15/2014WO2014073388A1 Ceramic material and sputtering-target member
05/15/2014WO2014073387A1 Ceramic material and sputtering-target member
05/15/2014WO2014073329A1 Transparent-conductive-film laminate, manufacturing method therefor, thin-film solar cell, and manufacturing method therefor
05/15/2014WO2014073328A1 Transparent-conductive-film laminate, manufacturing method therefor, thin-film solar cell, and manufacturing method therefor
05/15/2014WO2014073310A1 Transparent conductive film
05/15/2014WO2014073213A1 Sputtering target
05/15/2014WO2014073210A1 Sputtering target, oxide semiconductor thin film, and methods for producing these products
05/15/2014WO2014072221A1 Method for thermochemically treating a part while masking a portion and corresponding mask
05/15/2014WO2014071518A1 Method for depositing a conductive coating on a surface
05/15/2014WO2013072731A8 Solar-thermal conversion member, solar-thermal conversion device, and solar thermal power generation device
05/15/2014US20140134429 Techniques for Marking a Substrate Using a Physical Vapor Deposition Material
05/15/2014US20140131194 Sputtering device for forming thin film and method for making thin film
05/15/2014US20140131193 Apparatus and method for forming thin films in solar cells
05/15/2014US20140130794 Solar selective absorber based on double nitride composite material and process for its preparation
05/15/2014US20140130741 Ion implant apparatus and a method of implanting ions
05/15/2014DE112007001605B4 Zinkoxiddünnfilm vom p-Typ und Verfahren zur Ausbildung desselben und lichtemittierendes Element Zinc oxide thin film of the same p-type and method of forming and emitting element
05/15/2014DE102013100443A1 Schutzfenstervorrichtung für eine Beschichtungsanlage Windows device for a coating system
05/15/2014DE102012110927A1 Vacuum processing of substrates for treating substrate, comprises igniting magnetron discharge by supplying e.g. inert working gas, displacing first plasma zone, igniting additional magnetron discharge and concentrating second plasma zone
05/15/2014DE102012107440A1 Verfahren zur Erzeugung einer nicht-vollkeramischen Oberfläche . Method for producing a non-all-ceramic surface.
05/15/2014DE102012107163A1 Coating a substrate using high energy pulse magnetron sputtering, comprises applying bipolar pulses on at least one aluminum containing magnetron target for producing an aluminum oxide coating, and coating without external heat supply
05/15/2014DE102012022343A1 Method for monitoring film growth during surface coating of substrate used in dispersive mirror production, involves computing degree and quality of film growth from spectral phase acquired from partial beams interference measurements
05/15/2014DE102012022268A1 Method for preparing piston ring for internal combustion engine e.g. petrol engine, involves partially extending interruptions introduced into hard material layer as channel between flank surfaces in circumferential direction
05/15/2014DE102012022237A1 Sputtertarget mit optimierten Gebrauchseigenschaften Sputtering target with optimized performance characteristics
05/15/2014DE102012016027A1 Rocker joint for bush chain or roller chain, has bush which is designed as straight circular cylinder in which through-channel is arranged in bush eccentrically to longitudinal axis of bush
05/15/2014DE102010009795B4 Verfahren und Vorrichtung zur Herstellung von metallischen Rückkontakten für waferbasierte Solarzellen Method and device for producing metallic back contact for wafer based solar cells
05/14/2014EP2730668A1 High-purity yttrium, process for producing high-purity yttrium, high-purity yttrium sputtering target, metal gate film deposited with high-purity yttrium sputtering target, and semiconductor element and device equipped with said metal gate film
05/14/2014EP2729955A1 Apparatus and method for the pretreatment and/or for the coating of an article in a vacuum chamber with a hipims power source
05/14/2014CN203593783U 用于真空镀膜的磁导向装置 Vacuum coating apparatus for magnetic guide
05/14/2014CN203593782U 一种射频磁控溅射装置 An RF magnetron sputtering device
05/14/2014CN203593781U 档板切换系统 Tailgate switching system
05/14/2014CN203593780U 一种蒸镀喷头及蒸镀设备 Nozzle and an evaporation deposition equipment
05/14/2014CN103797154A 用于真空处理设备的旋转台滑架 Sets the carriage for rotating the vacuum processing apparatus
05/14/2014CN103797153A Mo-W靶材及其制造方法 Mo-W target and its manufacturing method
05/14/2014CN103797152A 高纯度铜锰合金溅射靶 High-purity copper-manganese alloy sputtering target
05/14/2014CN103797151A 复合塑料部件及其制造方法 Composite plastic parts and the manufacturing method
05/14/2014CN103797150A 具有通过磁控管溅射的银层的镜子 By magnetron sputtering with a silver layer of the mirror
05/14/2014CN103797149A 蒸镀掩膜、蒸镀掩膜的制造方法及薄膜图案形成方法 Deposition mask manufacturing method and a vapor deposition mask film pattern forming method
05/14/2014CN103797148A 用于汽车的装饰件 Decorative pieces for automobiles
05/14/2014CN103796970A Zn-Si-O系氧化物烧结体及其制造方法和透明导电膜 Zn-Si-O-based oxide sintered body and a manufacturing method and a transparent conductive film
05/14/2014CN103796832A 制备具有高水蒸气和氧气阻隔性能的涂层真空金属化基板的方法 The method of preparing a high water vapor and oxygen barrier properties of the coating vacuum metallized substrate
05/14/2014CN103796346A 一种双层膜结构的高温纳米电热膜及其制备方法 High-temperature nano-electric film and method for preparing the bilayer membrane structure
05/14/2014CN103789807A 贵金属纳米结构单元构筑的纳米管阵列及制备方法及其在有机分子检测中的应用 Nanotube array and preparation methods precious metal nanostructures unit to build its application in the detection of organic molecules
05/14/2014CN103789766A 一种abs塑料表面金属层及其制备方法 One kind of abs plastic surface of the metal layer and its preparation method
05/14/2014CN103789765A 斜角法在硅基片上形成Ag/ZnO核壳结构的方法 The method of forming a diagonal method Ag / ZnO core-shell structure on a silicon substrate
05/14/2014CN103789743A 一种斜角入射微纳米薄膜沉积系统 One kind of oblique incidence of micro and nano thin film deposition system
05/14/2014CN103789742A 反应室观测窗及使用其的反应室 The reaction chamber and the observation window using the same reaction chamber
05/14/2014CN103789741A 一种基于褶皱的金属表面纳米结构制备方法 Prepare the metal surface nanostructure method based on the fold
05/14/2014CN103789740A 平面模具表面微观结构特征的制备方法 Flat mold surface preparation microstructural features
05/14/2014CN103789739A 磁控溅射镀膜装置 Magnetron sputtering device
05/14/2014CN103789738A WO<sub>3</sub>团簇束流沉积系统及利用其制备WO<sub>3</sub>薄膜的方法 WO <sub> 3 </ sub> cluster beam deposition system and the use of methods for their preparation WO <sub> 3 </ sub> Films
05/14/2014CN103789737A 溅射镀膜装置和真空镀膜设备 Sputtering and vacuum coating equipment
05/14/2014CN103789736A 利用磁铁单元的溅射装置及其方法 The use of the magnet unit and the method of sputtering apparatus
05/14/2014CN103789735A 一种旋转靶及溅射装置 A rotating target and sputtering apparatus
05/14/2014CN103789734A 一种中性团簇束流喷嘴集群实现宽幅纳米颗粒束流的方法 A neutral cluster beam method to achieve wide nozzle cluster beam of nanoparticles
05/14/2014CN103789733A 可任意角度安装使用的真空蒸发源 Can be installed at any angle using a vacuum evaporation source
05/14/2014CN103789732A 蒸镀机以及蒸镀方法 Vapor deposition machine and method
05/14/2014CN103789731A 有机物沉积装置 Organic matter deposition apparatus
05/14/2014CN103789730A 一种二次电子发射薄膜的制备方法 A secondary electron emitting film preparation method
05/14/2014CN103789729A 四方晶结构的铟靶材 Indium target tetragonal structure
05/14/2014CN103789728A 双轴承传导辊装置 Two-bearing conductive roller device
05/14/2014CN103789727A 应用于螺旋桨的抗磨耐腐蚀复合涂层及其制备方法 Wear resistant composite coating applied to its preparation method propeller
05/14/2014CN103789726A 与工具表面结合牢固的AlTiCrN/MoN纳米多层涂层及其制备方法 Combined with the surface of the tool firmly AlTiCrN / MoN nanometer multilayer coating and preparation method
05/14/2014CN103789725A 一种活塞环表面的多层多元复合硬质pvd镀层、活塞环及制备工艺 One kind of piston ring surface multiple composite multilayer rigid pvd coating, piston rings and preparation
05/14/2014CN103789724A 一种AlTiCrN/YN纳米多层硬质涂层及其制备方法 One kind AlTiCrN / YN nanometer multilayer hard coating and preparation method
05/14/2014CN103789723A 一种Cr/CrN/(Ti,Al,Si,Cr)N复合硬质涂层及其制备方法 A hard coating layer of a composite Cr / CrN / (Ti, Al, Si, Cr) N and preparation method
05/14/2014CN103788986A 一种抑制结焦的烃类裂解炉管及其制备方法 A hydrocarbon cracking furnace tubes and preparation method of inhibiting coking
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