Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/2012
08/09/2012US20120199866 Reflective anode electrode for organic el display
08/09/2012US20120199477 Film forming apparatus
08/09/2012US20120199476 Production of Nanoparticles
08/09/2012US20120199471 Film-forming apparatus and film-forming method
08/09/2012US20120199470 Mtj film and method for manufacturing the same
08/09/2012US20120199469 Pvd sputtering target with a protected backing plate
08/09/2012DE112010001873T5 SINTERKÖRPER FÜR EIN SPUTTERTARGET AUF ZnO-Ga2O3-BASIS UND VERFAHREN ZUR HERSTELLUNG DAVON BODY FOR SINTERING a sputtering ZnO-Ga2O3 ON BASE AND METHOD FOR MANUFACTURING THEREOF
08/09/2012DE102011000502A1 Abscheidevorrichtung und Verfahren zur Herstellung eines Tiegels hierfür Separating apparatus and method for producing a crucible of this
08/09/2012DE102009016708B4 Solarabsorber-Schichtsystem und Verfahren zu seiner Herstellung Solar absorber-layer system and method for its preparation
08/09/2012CA2825237A1 Hot metal sheet forming or stamping tools with cr-si-n coatings
08/08/2012EP2485241A1 Magnet array for a physical vapor deposition system
08/08/2012EP2484800A1 Film-forming apparatus and film-forming method
08/08/2012EP2484799A1 Segmented post cathode
08/08/2012EP2484798A1 Physical vapor deposition system
08/08/2012EP2484797A1 Luminescent object
08/08/2012EP2484796A1 Magnetron sputtering process
08/08/2012EP2484453A1 Method for producing smooth, dense optical films
08/08/2012EP2483906A1 Method for ion source component cleaning
08/08/2012EP2483441A1 Vapor deposition reactor for forming thin film on curved surface
08/08/2012EP2483439A2 Method and apparatus for laser ablation
08/08/2012EP2483438A2 Method of making coated metal articles
08/08/2012EP2483437A2 Aluminum titanium nitride coating and method of making same
08/08/2012EP2483214A1 Thin film deposition method
08/08/2012EP2297768B1 Arrangement for coating tape-shaped film substrates
08/08/2012EP2280091B1 METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER
08/08/2012EP2149624B1 Multilayer film-coated member and method for producing it
08/08/2012EP1978400B1 Laminated structure, and electrode for electric circuit using the same
08/08/2012EP1653484B1 Method of producing a superconducting wire
08/08/2012CN202369635U Improved continuous vacuum coating machine trolley
08/08/2012CN202369634U Cylindrical target with magnetron sputtering function
08/08/2012CN202369633U Safe vapor deposition machine
08/08/2012CN202366650U Silver paste shaking machine for vacuum coating
08/08/2012CN102630254A Low melting point sputter targets for chalcogenide photovoltaic applications and methods of manufacturing the same
08/08/2012CN102629661A Composite target sputtering for forming doped phase change materials
08/08/2012CN102628809A Surface enhanced raman detection test paper and application thereof
08/08/2012CN102628163A Cadmium telluride thin-film solar cell back contact layer production method and vertical coater
08/08/2012CN102628162A Method for preparing plasma chromium-plated nitriding iron-based fuel battery bipolar plate material
08/08/2012CN102628161A Method for making semiconducting film and photovoltaic device
08/08/2012CN102628160A Film-forming apparatus and film-forming method
08/08/2012CN102628159A Arc deposition system and filter thereof
08/08/2012CN102628158A Preparing method of film and evaporation material, film, film sheet and lamination sheet used for evaporation
08/08/2012CN102628157A Wear-resistant milling cutter and production method thereof
08/08/2012CN102628156A PVD (Physical Vapor Deposition) super-black coating
08/08/2012CN102628155A Method of manufacturing films, evaporation materials for co-evaporation, film, film sheet and laminate
08/08/2012CN102627004A Multilayer phase-change film for ultrahigh density probe storage and preparation method thereof
08/08/2012CN102626853A Cutting tool covered with diamond
08/08/2012CN102626527A Multi-wall carbon nanotube injected with NH<2+> ions and preparation method and application thereof
08/08/2012CN102626525A Artificial hip joint friction pair surface film layer and preparation method thereof
08/08/2012CN102350847B Lanthanum-aluminum alloy nano cluster-embedded metal ceramic solar energy absorption coating and method thereof
08/08/2012CN102285790B Lithium iron phosphate target materials and preparation method thereof
08/08/2012CN102249661B Lithium phosphate target and preparation method thereof
08/08/2012CN102181840B Lithium cobalt oxide target material and preparation method thereof
08/08/2012CN102127734B Method for directly coating film on surface of lens aluminium
08/08/2012CN102110718B Oxide semiconductor film for thin film transistor and preparation method thereof
08/08/2012CN102016112B Sintered-oxide target for sputtering and process for producing the same
08/08/2012CN101952984B Semiconductor substrate, semiconductor element, light emitting element and electronic element
08/08/2012CN101901749B Method for reducing generation of electric arcs in wafer processing procedure
08/08/2012CN101857950B Tantalum sputtering target
08/08/2012CN101848782B Cutting tool
08/08/2012CN101659138B Anti-counterfeiting element made of composite material, preparation method thereof and application thereof
08/08/2012CN101578386B Method and apparatus for converting precursor layers into photovoltaic absorbers
08/08/2012CN101565813B MgO film electron beam evaporation method and device
08/08/2012CN101556926B Method for forming titanium nitride layer on semiconductor substrate
08/08/2012CN101109068B Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles
08/07/2012US8236432 Wetting resistant materials and articles made therewith
08/07/2012US8236424 Multilayer coating package on flexible substrates for electro-optical devices
08/07/2012US8236380 Gas supply system, substrate processing apparatus and gas supply method
08/07/2012US8236251 Nanoparticle-dispersed high-performance liquid fluid, production method and apparatus for the fluid, and leak detection method for the fluid
08/07/2012US8236152 Different sources for thermal evaporation, thermal sublimation, sputtering, chemical vapor deposition, ion generating source, or etching can be positioned in central region surrounded by plurality of substrates with deposition surfaces facing the center; inner and outer closed-loops
08/07/2012US8236151 Substrate carrier for wet chemical processing
08/07/2012CA2764795A1 Cubic aluminum titanium nitride coating and method of making same
08/07/2012CA2338846C Zinc oxide films containing p-type dopant and process for preparing same
08/02/2012WO2012103551A1 Heating layers containing volatile components at elevated temperatures
08/02/2012WO2012103104A1 Using multiple masks to form independent features on a workpiece
08/02/2012WO2012102374A1 Surface-coated cutting tool
08/02/2012WO2012102092A1 Magnetic field generation device for magnetron sputtering
08/02/2012WO2012101850A1 Sputtering target
08/02/2012WO2012100847A1 Sliding element, in particular piston ring, having a coating and process for producing a sliding element
08/02/2012WO2012100476A1 Method for soldering target and back plate
08/02/2012US20120196148 Coated article and method of making the same
08/02/2012US20120196145 Housing and method for making the same
08/02/2012US20120196137 Protective coating, a coated member having a protective coating as well as method for producing a protective coating
08/02/2012US20120196118 Ag base alloy thin film and sputtering target for forming ag base alloy thin film
08/02/2012US20120196117 Coated glass and method for making the same
08/02/2012US20120196076 Thin Film Comprising Titanium Oxide as Main Component and Sintered Compact Sputtering Target Comprising Titanium Oxide as Main Component
08/02/2012US20120196051 Deposition Apparatus and Methods
08/02/2012US20120196047 Determining relative scan velocity to control ion implantation of work piece
08/02/2012US20120194038 Electrode of a piezo film ultrasonic transducer
08/02/2012US20120193595 Composite target sputtering for forming doped phase change materials
08/02/2012US20120193232 Preparation method of anti-bacterial coating on plastic surface
08/02/2012US20120193227 Magnet array for a physical vapor deposition system
08/02/2012US20120193226 Physical vapor deposition system
08/02/2012US20120193225 Film formation method, film formation device, piezoelectric film, piezoelectric device, liquid discharge device and piezoelectric ultrasonic transducer
08/02/2012US20120193219 Method for determining process-specific data of a vacuum deposition process
08/02/2012US20120193218 Device for supporting a rotatable target and sputtering apparatus
08/02/2012US20120193217 Segmented post cathode
08/02/2012US20120193216 Substrate cooling device, sputtering apparatus and method for manufacturing electronic device
08/02/2012US20120192931 Carbonaceous Nanocomposite Having Novel Structure And Fabrication Method Thereof
08/02/2012US20120192435 Metallized cutlery and tableware and method therefor
08/02/2012DE112010002029T5 Filmbildungsverfahren und Filmbildungsvorrichtung Film formation method and film forming apparatus