Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
05/2013
05/02/2013US20130105438 Manufacturing method of grating
05/02/2013US20130105086 High efficiency triple-coil inductively coupled plasma source with phase control
05/02/2013US20130105082 Substrate processing device and impedance matching method
05/02/2013DE112010005668T5 Plasma-Verarbeitungsvorrichtung Plasma processing apparatus
05/01/2013EP2586276A1 Device for generating a plasma jet
05/01/2013EP2586275A1 Production of ultrafine particles in a plasma system having controlled pressure zones
05/01/2013CN202918578U Built-in spark plug type AC plasma generator
05/01/2013CN103081073A Plasma processing device
05/01/2013CN103081021A Compact fusion reactor
05/01/2013CN103079330A Electrode assembly of low-temperature plasma generator
05/01/2013CN103079329A High-pressure plasma ignition device
05/01/2013CN103079328A Dielectric barrier discharge electrode and manufacture method of dielectric barrier discharge electrode
05/01/2013CN102084469B 等离子体处理装置 Plasma processing apparatus
05/01/2013CN101996843B Plasma processing device and focusing ring
05/01/2013CN101943441B Plasma air disinfecting and purifying air conditioner
05/01/2013CN101882567B Plasma processing apparatus and high frequency short-circuit apparatus
05/01/2013CN101836510B Offset liner for chamber evacuation
05/01/2013CN101431854B Plasma processing apparatus
04/2013
04/30/2013US8430995 Dielectric plasma chamber apparatus and method with exterior electrodes
04/30/2013US8430990 Adhesive resin composition and bonding method
04/25/2013WO2013059132A1 Switched electron beam plasma source array for uniform plasma production
04/25/2013WO2013059130A1 Electron beam plasma source with profiled conductive fins for uniform plasma generation
04/25/2013WO2013059129A1 Electron beam plasma source with profiled magnet shield for uniform plasma generation
04/25/2013WO2013059126A1 Electron beam plasma source with segmented beam dump for uniform plasma generation
04/25/2013WO2013059101A1 Electron beam plasma source with profiled chamber wall for uniform plasma generation
04/25/2013WO2013059097A1 Overhead electron beam source for plasma ion generation in a workpiece processing region
04/25/2013WO2013059094A1 Electron beam plasma source with arrayed plasma sources for uniform plasma generation
04/25/2013WO2013059093A1 E-beam plasma source with profiled e-beam extraction grid for uniform plasma generation
04/25/2013US20130098884 Portable Autonomous Material Processing System
04/25/2013US20130098872 Switched electron beam plasma source array for uniform plasma production
04/25/2013US20130098753 Plasma generator and method for producing radical, and cleaning and purifying apparatus and small-sized electrical appliance
04/25/2013US20130098555 Electron beam plasma source with profiled conductive fins for uniform plasma generation
04/25/2013DE112011102192T5 Zuführvorrichtung für reaktive Spezies und Oberflächenbehandlungseinrichtung Feeder reactive species and surface treatment device
04/24/2013CN202907329U Atmospheric plasma system for performing continuous polymeric modification for fabric or polymer film
04/24/2013CN202907328U Plasma generation system by tubular dielectric barrier discharge
04/24/2013CN202907327U Neutral atom injection device used for plasma device
04/24/2013CN202906733U Plasma milling arc source
04/24/2013CN202905659U Matching device and plasma processing equipment
04/24/2013CN103069928A 直流电源装置 DC power supply unit
04/24/2013CN103068138A Water cooling device of multi-power transmission (MPT) microwave energy vacuum tube
04/24/2013CN103068137A Air inlet structure and plasma processing equipment
04/24/2013CN103068136A Discharge plasma electron density measuring device and method based on two-quadrant detector
04/24/2013CN103064133A Device and method for generating double-layer plasma photon crystal
04/24/2013CN103055332A Atmospheric dielectric barrier discharge plasma sterilization device
04/24/2013CN102368887B Cathode assembly of low temperature plasma generator
04/24/2013CN101828433B Cathode assembly and method for pulsed plasma generation
04/24/2013CN101632328B Gas-cooled plasma arc cutting torch
04/23/2013US8425852 High concentration NO2 generating system and method for generating high concentration NO2 using the generating system
04/23/2013US8425735 Fabrication of pillared graphene
04/18/2013WO2013055816A1 Improved drag cap for a plasma arc torch
04/18/2013WO2013055241A1 Electrode cooling system in a multi-electrode microwave plasma excitation source
04/18/2013WO2013055056A1 Plasma apparatus and substrate-processing apparatus
04/18/2013WO2013054960A1 Helicon plasma apparatus
04/18/2013US20130093350 Autonomous method and system for minimizing the magnitude of plasma discharge current oscillations in a hall effect plasma device
04/18/2013US20130092525 Concentric flow-through plasma reactor and methods therefor
04/17/2013EP2580761A1 Compact fusion reactor
04/17/2013CN103052251A Cold plasma glow discharge generator under low vacuum state
04/17/2013CN103052250A Atmospheric pressure dispersion type cold plasma generation device
04/17/2013CN103052249A Jet plasma density distribution adjuster
04/17/2013CN103044063A Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method
04/17/2013CN103040519A Low-temperature plasma generator applied to surgeries and knife system controlled by same
04/17/2013CN102565939B Device and method for generating nested plasma photonic crystals with multiple nesting structures
04/17/2013CN102084024B Power source device
04/17/2013CN102056394B Plasma processing apparatus
04/17/2013CN101990353B Plasma processing apparatus and plasma processing method
04/17/2013CN101911840B Asymmetrical RF drive for electrode of plasma chamber
04/17/2013CN101537197B Method for killing pseudomonas aeruginosa
04/16/2013US8420183 Method of manufacturing composite material
04/16/2013US8420043 Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film
04/16/2013US8419998 Process for making hollow carbon spheres
04/16/2013US8419894 Plasma generator, plasma control method and method of producing substrate
04/11/2013WO2013052713A1 Inductive/capacitive hybrid plasma source and system with such chamber
04/11/2013WO2013051730A1 Plasma generation device
04/11/2013WO2013051255A1 A plasma generating method and system
04/11/2013WO2013051248A1 Plasma processing apparatus
04/11/2013WO2013050492A1 System for converting electric energy into thermal energy
04/11/2013WO2013049902A1 Method and a device for production of plasma
04/11/2013US20130088146 Inductively coupled plasma generation device
04/11/2013US20130087531 Inductive/capacitive hybrid plasma source and system with such chamber
04/11/2013US20130087448 Apparatus for manufacturing template and method for manufacturing template
04/11/2013US20130087286 Symmetric plasma process chamber
04/11/2013US20130087285 Plasma etching apparatus
04/11/2013DE10361908B4 Anordnung zur Erzeugung impulsförmiger Ströme hoher Repetitionsrate und hoher Stromstärke für gasentladungsgepumpte Strahlungsquellen Arrangement for generating pulsed currents of high repetition rate and high amperage for gas-discharge-pumped radiation sources
04/10/2013CN202873172U Plasma reactor
04/10/2013CN202871740U Dc plasma system
04/10/2013CN202865318U Plasma cleaning device in double-sided turnover door structure
04/10/2013CN103037613A Control system of full-automatic cold plasma seed processor
04/10/2013CN103037612A Antenna unit for inductively coupled plasma and inductively coupled plasma processing apparatus
04/10/2013CN103037611A Device for generating air plasma brush at atmospheric pressure
04/10/2013CN103037610A Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition
04/10/2013CN103037609A Plasma jet electron energy regulator
04/10/2013CN103028127A Device for sterilizing medical equipment through low-temperature plasma under atmospheric pressure
04/10/2013CN102325423B High-power and long-service-life plasma generating device and method
04/09/2013US8415885 Plasma processing apparatus and plasma processing method
04/09/2013US8414986 Method of forming surface coatings on cutting elements
04/09/2013US8414985 Plasma deposition of a thin film
04/09/2013US8414983 Particle beam process for the alignment of reactive mesogens
04/09/2013US8413604 Slotted electrostatic shield modification for improved etch and CVD process uniformity
04/04/2013WO2013047575A1 Upper electrode, plasma processing device, and method for controlling electric field intensity distribution
04/04/2013WO2013047000A1 Microwave radiating mechanism, surface wave plasma source, and surface wave plasma processing device
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