H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
12/2013
12/04/2013	CN103426706A Microwave ion source
12/04/2013	CN103418086A Wound treatment device utilizing high voltage to generate plasma
12/04/2013	CN102378462B Plasma processing apparatus
12/03/2013	US8598551 EUV radiation source comprising a droplet accelerator and lithographic apparatus
12/03/2013	US8598486 Method for treating return ores using plasma
11/2013
11/28/2013	WO2013177387A1 Method for magnetic control of plasma arc
11/28/2013	WO2013174211A1 Chemical-electromagnetic hybrid propeller with variable specific impulse
11/28/2013	WO2013174208A1 Fuel-free spacecraft propelling system based on spatial atomic oxygen and propelling method
11/28/2013	WO2013045636A9 Plasma generator
11/28/2013	DE102012208818A1 Direkte Aushärtung von Reaktionsharzen durch Plasmainduktion Direct curing reaction resins by plasma induction
11/27/2013	EP2667689A1 Electrode for plasma cutting torch and use of same
11/27/2013	EP2667013A1 Plasma generation device and internal combustion engine
11/27/2013	EP2666544A1 Process for deposition and characterization of a coating
11/27/2013	EP2666340A2 Coplanar dielectric barrier discharge source for a surface treatment under atmospheric pressure
11/27/2013	CN203313512U Low-temperature plasma jet flow generating device
11/27/2013	CN203313511U Protection device for ceramic roller
11/27/2013	CN203313071U Plasma ignition system and power supply system thereof
11/27/2013	CN103415644A Coating, and method and device for coating
11/27/2013	CN103415135A Device and method for discharging plasma in enhanced way under high speed flow environment
11/27/2013	CN103415134A Double-source ECR plasma source device
11/27/2013	CN103415133A Catalysis-assisting rotational sliding arc discharge plasma generating device
11/27/2013	CN102089867B Plasma processing apparatus
11/27/2013	CN101884253B Method and apparatus for alignment of components of plasma arc torch
11/26/2013	US8592712 Mounting table structure and plasma film forming apparatus
11/26/2013	US8592328 Method for depositing a chlorine-free conformal sin film
11/26/2013	US8592005 Atomic layer deposition for controlling vertical film growth
11/26/2013	US8591660 Method for the plasma cleaning of the surface of a material coated with an organic substance
11/24/2013	CA2815260A1 Electrode for plasma cutting torches and use of same
11/21/2013	WO2013173201A2 Method and apparatus for improved cutting life of a plasma arc torch
11/21/2013	WO2013172665A1 Plasma equipment
11/21/2013	WO2013172456A1 Plasma processing apparatus and plasma processing method
11/21/2013	WO2013139484A4 Plasma electrode for a plasma arc torch with a replaceable electrode tip
11/21/2013	US20130307413 Circular Hollow Anode Ion Electron Plasma Source
11/21/2013	US20130306607 Method and apparatus for improved cutting life of a plasma arc torch
11/21/2013	US20130305988 Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source
11/21/2013	DE102012104224A1 Device for e.g. cleaning high-speed wire, has dielectric small tube portion surrounding channel and arranged in plasma nozzle such that channel is partially electrically insulated against discharge space that is formed within plasma nozzle
11/20/2013	EP2665347A1 Reactor structure and plasma processing device
11/20/2013	EP2663406A1 Device for thermally coating a surface
11/20/2013	CN203301843U Novel automatic plasma detector
11/20/2013	CN103404238A Method of manufacturing a high current electrode for a plasma arc torch
11/20/2013	CN103404237A Plasma cutting tip with advanced cooling passageways
11/20/2013	CN103404236A Plasma generator and cleaning/purification apparatus using same
11/20/2013	CN103402299A Lower liner with integrated flow equalizer and improved conductance
11/20/2013	CN103401468A Plasma arc starting circuit
11/20/2013	CN102203919B Process kit having reduced erosion sensitivity
11/20/2013	CN101940068B Methods and apparatus for changing area ratio in a plasma processing system
11/20/2013	CN101843178B Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
11/14/2013	WO2013169710A1 Cathode interface for a plasma gun and method of making and using the same
11/14/2013	WO2013167862A1 Device for providing a flow of plasma
11/14/2013	WO2013167693A1 Device for the plasma treatment of human, animal or plant surfaces, in particular of skin or mucous membrane areas
11/14/2013	WO2013167244A2 Cooling pipe for a plasma arc torch and spacer
11/14/2013	US20130302992 Apparatus for plasma treatment and method for plasma treatment
11/14/2013	US20130302918 Plasma processing apparatus and plasma processing method
11/14/2013	US20130300289 Electrode assemblies, plasma generating apparatuses, and methods for generating plasma
11/14/2013	US20130300288 Method and device for forming a plasma beam
11/14/2013	US20130299455 Focus ring heating method, plasma etching apparatus, and plasma etching method
11/14/2013	DE102010001395B4 Miniaturisierbare Plasmaquelle Miniaturizable plasma source
11/13/2013	EP2663168A2 Plasma torch of non-transferred and hollow type
11/13/2013	EP2663167A1 Cooling pipe for a plasma arc torch and spacer
11/13/2013	CN203289730U Dielectric barrier discharge electrode
11/13/2013	CN103392383A Plasma generator and cleaning/purification apparatus using same
11/13/2013	CN103392026A Arc evaporation source
11/13/2013	CN103391678A Plasma torch of non-transferred and hollow type
11/13/2013	CN103386541A Plasma arc method for perforating key hole by current
11/13/2013	CN102104357B Motor control device and method, impedance matcher and plasma processing equipment
11/13/2013	CN102077695B Peripherally engaging electrode carriers and assemblies incorporating the same
11/13/2013	CN101978474B Tunable ground planes in plasma chambers
11/13/2013	CN101971712B Methods and apparatus for a wide conductance kit
11/12/2013	US8581220 Target supply apparatus, control system, control apparatus and control circuit thereof
11/12/2013	US8580354 Plasma treatment of substrates prior to deposition
11/12/2013	US8580353 Method for treating surface of glass substrate and apparatus for performing same
11/07/2013	US20130295297 Semiconductor film formation apparatus and process
11/07/2013	US20130294474 Gasification melting furnace and method for treating combustible material using the same
11/07/2013	US20130292055 Insulated dielectric window assembly of an inductively coupled plasma processing apparatus
11/07/2013	US20130291794 Plasma generator, and cleaning and purifying apparatus and small-sized electrical appliance using plasma generator
11/07/2013	DE112007003616B4 Veraschungsvorrichtung Ashing device
11/07/2013	DE102012103938A1 Plasmamodul für eine Plasmaerzeugungsvorrichtung und Plasmaerzeugungsvorrichtung Plasma module for a plasma generating apparatus and plasma-generating device
11/06/2013	EP2659961A1 Method and device for preparing high temperature water vapour rich in active particles using plasma
11/06/2013	EP2659946A2 Apparatus for processing exhaust fluid
11/06/2013	EP2659748A1 Heating element, steam cutting device, and burner of a power-generating device
11/06/2013	CN203279322U Plasma generating device for air cleaning
11/06/2013	CN103383915A Apparatus for the removal of a metal oxide from a substrate and methods therefor
11/06/2013	CN102770944B Etching method and etching apparatus
11/06/2013	CN101828432B Pulsed plasma device and method for generating pulsed plasma
11/05/2013	US8574686 Microwave brazing process for forming coatings
11/05/2013	US8573153 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode
11/05/2013	CA2506051C Power source for plasma device
10/2013
10/31/2013	WO2013162973A1 Distributed electro-static chuck cooling
10/31/2013	WO2013162962A1 Three-coil inductively coupled plasma source with individually controlled coil currents from a single rf power generator
10/31/2013	WO2013162932A1 Apparatus for treating an exhaust gas in a foreline
10/31/2013	WO2013162826A1 Three-coil inductively coupled plasma source with individually controlled coil currents from a single rf power generator
10/31/2013	WO2013162825A1 Plasma processing using rf return path variable impedance controller with two-dimensional tuning space
10/31/2013	WO2013162644A1 Capacitively coupled plasma source with rf coupled grounded electrode
10/31/2013	WO2013162642A1 Two-phase operation of plasma chamber by phase locked loop
10/31/2013	WO2013161819A1 Plasma processing method and plasma processing apparatus
10/31/2013	WO2013161387A1 Linear actuator and vacuum control device
10/31/2013	WO2013160644A1 Plasma treatment device
10/31/2013	WO2013160344A1 Method and apparatus for sterilizing equipment
10/31/2013	US20130289223 Polymeric coupling agents and pharmaceutically-active polymers made therefrom
10/31/2013	US20130287968 Lithographic apparatus and device manufacturing method

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