Patents
Patents for H01J 3 - Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps (4,773)
05/2006
05/04/2006US20060091302 Apparatus and method of detecting probe tip contact with a surface
05/04/2006US20060091296 Detection device for an optical configuration and a confocal microscope
05/03/2006CN1254382C Imaging apparatus
05/02/2006US7038226 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method
05/02/2006US7038194 Multiple-beam scanning device and image forming apparatus including the multiple-beam scanning device
05/02/2006US7038193 Method and device for separating different emission wavelengths in a scanning microscope
04/2006
04/27/2006WO2006044426A2 Computer-implemented methods and systems for classifying defects on a specimen
04/27/2006WO2006044067A1 Network connection device
04/27/2006US20060086898 Method and apparatus of making highly repetitive micro-pattern using laser writer
04/27/2006CA2583801A1 Network connection device
04/26/2006EP1649479A2 Electron emission device
04/25/2006US7034277 Near-field light-generating element for producing localized near-field light, near-field optical recording device, and near-field optical microscope
04/20/2006WO2006040559A1 A particle beam generating device
04/20/2006US20060082763 Computer-implemented methods and systems for classifying defects on a specimen
04/20/2006US20060081774 Mirror positioning structure for compensation of skew and bow and laser scanning unit employing the same
04/19/2006EP0985222A4 Structure and fabrication of electron-emitting device having specially configured focus coating
04/18/2006US7030550 Electron emission device with multi-layered fate electrode
04/18/2006US7030398 Laser driven ion accelerator
04/18/2006US7030359 Exposing a UV-sensitive glass layer in selected areas between receiver and emitter areas in a reflected-light sensor; tempering UV-sensitive glass layer to produce light-absorbing areas in selected areas; wherein at least two glass layers are stacked on one top of other connected by diffusion bonds
04/13/2006US20060076503 Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner
04/13/2006US20060076481 Light scanning apparatus
04/13/2006US20060076474 Pyramid-shaped near field probe using surface plasmon wave
04/12/2006CN1759465A Apparatus for generating a plurality of beamlets
04/12/2006CN1758412A Electron emission device
04/11/2006US7026607 Scanning probe microscope
04/11/2006US7026606 Auto-focus system with 2-D or 3-D compensation
04/06/2006US20060071584 Electrodeless discharge lamp
04/06/2006US20060071175 Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof
04/04/2006US7022978 Method and apparatus including in-resonator imaging lens for improving resolution of a resonator-enhanced optical system
04/04/2006US7022977 Light beam scanning apparatus
04/04/2006US7022969 LED measuring device
03/2006
03/30/2006US20060065815 Process and arrangement for superimposing ray bundles
03/30/2006US20060065812 Line head and image forming apparatus
03/29/2006CN1753130A Electron source apparatus
03/28/2006US7020063 Optical pickup
03/28/2006US7019279 Solid-state image sensor with the optical center of microlenses shifted from the center of photo-sensors for increasing the convergence ratio
03/28/2006US7018112 Method of assembling an optical system with an optical package in advance
03/23/2006US20060060780 Apparatus and method for e-beam dark field imaging
03/23/2006US20060060760 Optical imaging system
03/23/2006US20060060759 Method and apparatus for measurement of optical detector linearity
03/23/2006US20060060751 Optical discharge apparatus and image forming apparatus containing the same
03/22/2006EP1479090B1 Channel spark source for generating a stably focussed electron beam
03/21/2006US7015481 Charged-particle optical system
03/21/2006US7015454 Relaxed tolerance optical interconnect system capable of providing an array of sub-images
03/16/2006US20060055765 Light scanning device
03/16/2006US20060055300 Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation
03/16/2006US20060054879 Article comprising gated field emission structures with centralized nanowires and method for making the same
03/16/2006US20060054800 Method for investigating transport processes
03/16/2006US20060054799 Optical scanner and image forming apparatus using the same
03/16/2006US20060054791 Apparatus and method for soft baking photoresist on substrate
03/14/2006US7012261 Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens
03/14/2006US7012246 Multiple light beam imaging apparatus
03/14/2006US7012241 Device and method for linear illumination of an object using LEDs and elliptical mirrors
03/09/2006WO2006026462A1 Enclosure with improved knockouts
03/09/2006US20060049734 Image display apparatus
03/09/2006US20060049344 Laser scanning device
03/09/2006US20060049343 Optical zoom system for a light scanning electron microscope
03/08/2006CN1744256A Electron emission device and manufacturing method thereof
03/08/2006CN1744255A 电子发射装置 Electron-emitting devices
03/07/2006US7009342 Plasma electron-emitting source
03/07/2006US7009331 Carbon nano-tube field emission display having strip shaped gate
03/07/2006US7009173 Lens mount integrated with a thermoelectrically cooled photodetector module
03/07/2006US7009172 Method and apparatus for imaging using continuous non-raster patterns
03/07/2006US7009171 Laser scanning microscope system and scanning unit applied to the system
03/07/2006US7009161 Scanning microscope
03/02/2006US20060043311 Thermal compensation in magnetic field influencing of an electron beam
03/02/2006US20060043276 Probe for near-field microscope, the method for manufacturing the probe and scanning probe microscope using the probe
03/02/2006US20060043275 Device and method for measuring surfaces on the internal walls of cylinders, using confocal microscopes
03/01/2006EP1630843A2 Electron emission device and method of manufacturing the same
03/01/2006CN1244121C Electronic source with plane emission area and focusing structure
02/2006
02/28/2006US7005795 Electron bombardment of wide bandgap semiconductors for generating high brightness and narrow energy spread emission electrons
02/28/2006US7005789 Method and apparatus for magnetic focusing of off-axis electron beam
02/28/2006US7005659 Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus
02/28/2006US7005641 Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
02/23/2006US20060038117 Multiple light beam imaging apparatus
02/23/2006US20060038112 Micro-lens configuration for small lens focusing in digital imaging devices
02/22/2006EP1627404A2 Field emitters and devices
02/22/2006CN2760749Y Field emission electron source device deflected by magnetic field
02/16/2006US20060033037 Charged particle beam column
02/16/2006US20060033036 Method and apparatus for material identification using characteristic radiative emissions
02/16/2006US20060033021 Scanning system with feedback for a MEMS oscillating scanner
02/16/2006US20060033010 Micro-lens configuration for small lens focusing in digital imaging devices
02/15/2006EP1210721B1 Field emission flat screen with modulating electrode
02/14/2006US6999158 Apparatus for forming pattern
02/14/2006US6998603 Image forming apparatus, optical writing device, and controlling method thereof
02/14/2006US6998602 Method of and an apparatus for measuring a specimen by means of a scanning probe microscope
02/14/2006US6998598 Modular optical detector system
02/14/2006US6996896 Electron beam lens for micro-column electron beam apparatus and method of fabricating the same
02/09/2006WO2006015273A2 Imaging optical system including a telescope and an uncooled warm-stop structure
02/09/2006WO2005119732A3 Non-axisymmetric charged-particle beam system
02/09/2006DE102004005612B4 Improving beam characteristics of superconducting high frequency photoelectron source, by superimposing high-frequency magnetic field on accelerating high-frequency field
02/07/2006US6995502 Solid state vacuum devices and method for making the same
02/07/2006US6995357 Device for determining position and movement of scanning laser beam
02/02/2006WO2006010387A1 High resolution cathode structure
02/02/2006US20060021968 Time continuous ion-ion plasma
02/01/2006EP1620873A1 Field emission device and a method of forming such a device
01/2006
01/31/2006US6992307 Electron beam source and electron beam exposure apparatus employing the electron beam source
01/31/2006US6992299 Method and apparatus for aerodynamic ion focusing
01/31/2006US6992279 Method for adjusting a multi-beam source unit
01/26/2006US20060019547 Space-optimized sensor connector
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