| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 11/23/2006 | US20060261270 Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor |
| 11/23/2006 | US20060261269 Method for high-resolution 3d reconstruction |
| 11/23/2006 | US20060261268 Pattern measuring system and semiconductor device manufacturing method |
| 11/21/2006 | US7138641 Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system |
| 11/21/2006 | US7138629 Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| 11/21/2006 | US7138627 Nanotube probe and method for manufacturing same |
| 11/16/2006 | US20060255273 Transmission electron microscope |
| 11/16/2006 | US20060255272 Calibration method for electron-beam system and electron-beam system |
| 11/16/2006 | US20060255270 Semiconductor processing method and system |
| 11/16/2006 | US20060255269 Charged particle beam device |
| 11/16/2006 | US20060255268 Charged particle beam device with detection unit switch and method of operation thereof |
| 11/16/2006 | US20060255267 Device for printing biomolecules on substrate using electrohydrodynamic effect |
| 11/16/2006 | US20060255266 System for repositioning a microfabricated cantilever |
| 11/16/2006 | US20060255265 System and method for non-destructively determining thickness and uniformity of anti-tamper coatings |
| 11/09/2006 | US20060253943 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 11/09/2006 | US20060253942 Smart materials: strain sensing and stress determination by means of nanotube sensing systems, composites, and devices |
| 11/09/2006 | US20060249677 Device for operating gas in vacuum or low-pressure environment and for observation of the operation |
| 11/09/2006 | US20060249676 Apparatus and method for wafer pattern inspection |
| 11/09/2006 | US20060249675 Surface roughness and/or contour shape measuring apparatus |
| 11/07/2006 | US7132652 Automatic classification of defects using pattern recognition applied to X-ray spectra |
| 11/02/2006 | WO2006115114A1 Fresnel zone plate and x-ray microscope using the fresnel zone plate |
| 11/02/2006 | US20060248619 Method of preparing silver nano-structure by means of scanning turnneling microscopy |
| 11/02/2006 | US20060243908 Method of inspecting a circuit pattern and inspecting instrument |
| 11/02/2006 | US20060243907 Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus |
| 10/31/2006 | US7129486 Scanning probe with digitized pulsed-force mode operation and real-time evaluation |
| 10/26/2006 | WO2006113908A2 Crytomography x-ray microscope stage |
| 10/26/2006 | US20060237646 Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample |
| 10/26/2006 | US20060237645 Characterizing Dimensions of Structures Via Scanning Probe Microscopy |
| 10/24/2006 | US7126120 Electron microscope |
| 10/19/2006 | US20060231759 Uniform broad ion beam deposition |
| 10/19/2006 | US20060231758 Inspection system, inspection method, and process management method |
| 10/19/2006 | US20060231757 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 10/19/2006 | US20060231755 Process for precise arrangement of micro-bodies |
| 10/19/2006 | US20060231754 Telegraph signal microscopy device and method |
| 10/19/2006 | US20060231752 Crystallographic metrology and process control |
| 10/18/2006 | CN1280835C X射线显微镜 X-ray microscopy |
| 10/12/2006 | US20060230475 Probe of scanning probe microscope having a field effect transistor channel and fabrication method thereof |
| 10/12/2006 | US20060230474 Method and apparatus for rapid automatic engagement of a prove |
| 10/12/2006 | US20060226363 Ultra-thin sample preparation for transmission electron microscopy |
| 10/12/2006 | US20060226362 Scanning electron microscope |
| 10/12/2006 | US20060226361 Analyzing system and charged particle beam device |
| 10/12/2006 | US20060226360 Charged particle beam device for high spatial resolution and multiple perspective imaging |
| 10/10/2006 | US7119953 Phase contrast microscope for short wavelength radiation and imaging method |
| 10/10/2006 | US7119332 Method of fabricating probe for scanning probe microscope |
| 10/05/2006 | US20060219946 Electron beam apparatus and method for production of its specimen chamber |
| 10/05/2006 | US20060219919 TEM sample holder and method of forming same |
| 10/05/2006 | US20060219918 Sample electrification measurement method and charged particle beam apparatus |
| 10/05/2006 | US20060219917 Scanning electron microscope with measurement function |
| 10/05/2006 | US20060219916 Cantilever holder and scanning probe microscope |
| 10/05/2006 | US20060219915 Imaging apparatus for high probe currents |
| 10/05/2006 | US20060219914 Charged-particle beam instrument |
| 10/05/2006 | US20060219912 Environmental scanning electron microscope |
| 10/05/2006 | US20060219911 Scanning electron microscope |
| 10/05/2006 | US20060219910 Monochromator and scanning electron microscope using the same |
| 10/05/2006 | US20060219909 Detecting apparatus and device manufacturing method |
| 10/05/2006 | US20060219908 Charged particle beam equipment |
| 10/05/2006 | US20060219907 Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity |
| 10/05/2006 | US20060219905 Method and device enabling capacitive probe-based data storage readout |
| 10/05/2006 | US20060219902 System and method for inspecting a semiconductor sample |
| 10/05/2006 | US20060219901 Working method using scanning probe |
| 10/05/2006 | US20060219900 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 10/05/2006 | US20060219899 Scanning probe microscope |
| 10/03/2006 | US7115874 Mission-specific positron emission tomography |
| 10/03/2006 | US7115866 Site stepping for electron beam micro analysis |
| 10/03/2006 | US7115864 Method for purification of as-produced single-wall carbon nanotubes |
| 09/28/2006 | US20060214105 Micromachining process, system and product |
| 09/26/2006 | US7112790 Method to prepare TEM samples |
| 09/20/2006 | CN1275654C Composites comprising superabsorbent materials having a bimodal particle size distribution and methods of making the same |
| 09/19/2006 | US7109482 Object inspection and/or modification system and method |
| 09/12/2006 | US7105815 Method and apparatus for collecting defect images |
| 09/07/2006 | US20060197017 Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
| 08/31/2006 | US20060192120 Charged-particle-beam mapping projection-optical systems and methods for adjusting same |
| 08/31/2006 | US20060192119 Method of measurement accuracy improvement by control of pattern shrinkage |
| 08/31/2006 | US20060192118 Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
| 08/31/2006 | US20060192117 Inspection method and apparatus using an electron beam |
| 08/31/2006 | US20060192116 Charged particle beam device probe operation |
| 08/30/2006 | CN1272989C Method and apparatus for generating X-ray |
| 08/29/2006 | US7098457 Electron beam apparatus and device manufacturing method using same |
| 08/29/2006 | US7098453 Scanning probe microscopy system and method of measurement by the same |
| 08/29/2006 | US7097820 Continuous fiber of single-wall carbon nanotubes |
| 08/24/2006 | US20060186335 Inspection apparatus for thin film transistor substrate |
| 08/15/2006 | US7091498 Rotating specimen holder |
| 08/15/2006 | US7091491 Method and means for reducing electromagnetic noise induced in X-ray detectors |
| 08/15/2006 | US7091486 Method and apparatus for beam current fluctuation correction |
| 08/10/2006 | WO2006083581A2 Microscope system for testing semiconductors |
| 08/08/2006 | US7087899 Sample electrification measurement method and charged particle beam apparatus |
| 08/03/2006 | US20060169918 Information acquistion method and apparatus for information acquistion |
| 08/03/2006 | US20060169901 Direct collection transmission electron microscopy |
| 08/03/2006 | US20060169900 Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| 08/03/2006 | US20060169899 Detector optics for multiple electron beam test system |
| 08/03/2006 | US20060169898 Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus |
| 08/03/2006 | US20060169897 Microscope system for testing semiconductors |
| 08/03/2006 | US20060169896 Pattern specification method and pattern specification apparatus |
| 08/03/2006 | US20060169895 Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam |
| 08/03/2006 | US20060169894 Method of forming images in a scanning electron microscope |
| 08/01/2006 | US7084399 Ion beam apparatus and sample processing method |
| 07/27/2006 | US20060165216 Method for detection of micrometric and sub-micrometric images by means of irradiation of a mask or of a biological specimen with ionizing radiation |
| 07/27/2006 | US20060163480 Inspection method and apparatus using charged particle beam |
| 07/27/2006 | US20060163479 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
| 07/27/2006 | US20060163478 Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system |