Patents
Sitemap › G21 - Nuclear physics; Nuclear engineering › G21K - Techniques for handling particles or ionising radiation not otherwise provided for; Irradiation devices; Gamma ray or x-ray microscopes › G21K 7 - Gamma ray or x-ray microscopes
Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690)
04/2011
04/19/2011US7928522 Arrangements for and fabrication of mechanical suspension of a movable structure
04/19/2011US7928397 Gamma camera including a scintillator and an image intensifier
04/19/2011US7928382 Detector and inspecting apparatus
04/14/2011WO2011044218A1 Phase from defocused color images
04/12/2011US7923703 Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus
04/06/2011CN102004276A Photon sieve phase contrast objective lens, manufacturing method and imaging method
03/2011
03/31/2011DE102005007533B4 Objektträgervorrichtung Slide device
03/29/2011US7915581 Methods for sample preparation and observation, charged particle apparatus
03/22/2011US7910885 System and method for determining a cross sectional feature of a structural element using a reference structural element
03/22/2011US7910884 Apparatus and method for inspection and measurement
02/2011
02/24/2011US20110044518 Data Management in a Linear-Array-Based Microscope Slide Scanner
02/17/2011US20110037847 Fully Automatic Rapid Microscope Slide Scanner
02/15/2011US7888638 Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope
02/09/2011EP2282230A2 Fully automatic rapid microscope slide scanner
02/08/2011US7885448 Diagnostic scanning microscope for information-enriched qualitative histopathology
02/08/2011US7884326 Manipulator for rotating and translating a sample holder
02/08/2011US7884325 Electron beam measurement apparatus
02/08/2011US7884322 Scanning electron microscope and a method for pattern composite inspection using the same
02/03/2011DE102009035583A1 Vergrößernde abbildende Optik sowie Metrologiesystem mit einer derartigen abbildenden Optik Magnifying imaging optics and metrology system with such imaging optics
02/03/2011DE102009035582A1 Vergrößernde abbildende Optik sowie Metrologiesystem mit einer derartigen abbildenden Optik Magnifying imaging optics and metrology system with such imaging optics
02/03/2011DE102009034855A1 X-ray radiation source for e.g. medicine, has spherically-formed crystal disk arranged in optical path and atomic lattice with channel-like cavities that run in direction of surface normal of crystal disk
01/2011
01/27/2011WO2009128550A9 Source grating for x-rays, imaging apparatus for x-ray phase contrast image and x-ray computed tomography system
01/26/2011CN101960298A X-ray imaging apparatus, X-ray imaging method and method of controlling X-ray imaging apparatus
01/18/2011US7872232 Electronic microscope apparatus
01/04/2011US7863586 Writing data creation method and charged particle beam writing apparatus
01/04/2011US7863563 Carbon tube for electron beam application
12/2010
12/29/2010CN201689695U Window for X-ray microscopic transmission imaging
12/09/2010US20100313311 Scanning probe in pulsed-force mode, digital and in real time
12/08/2010EP2257792A1 X-ray imaging apparatus, x-ray imaging method and method of controlling x-ray imaging apparatus
11/2010
11/25/2010WO2010134282A1 Sample support member for x-ray microscopes, sample-containing cell, x-ray microscope, and method for observing x-ray microscopic image
11/25/2010US20100294929 Sample Electrification Measurement Method and Charged Particle Beam Apparatus
11/24/2010EP1305984B1 Method and apparatus for generating x-ray radiation
11/16/2010US7834317 Scanning electron microscope and system for inspecting semiconductor device
11/10/2010EP2248135A1 Source grating for x-rays, imaging apparatus for x-ray phase contrast image and x-ray computed tomography system
11/10/2010EP1446813B1 Reflective x-ray microscope for examining objects with wavelengths of = 100nm in reflection
11/02/2010US7826649 Data management in a linear-array-based microscope slide scanner
11/02/2010US7825377 Electron beam apparatus with aberration corrector
10/2010
10/26/2010US7822174 Cryotomography x-ray microscopy state
10/12/2010US7814565 Nanostructure on a probe tip
10/12/2010US7812310 Charged particle beam apparatus and specimen holder
10/07/2010DE102009015075A1 Device for performing microscopy on biological sample, has double-cone-like device provided in inner cone formed at angle of more than ten degrees, where biological sample is dissolved into sample with specific size
10/05/2010US7807980 Charged particle beam apparatus and methods for capturing images using the same
10/05/2010US7807978 Divergent charged particle implantation for improved transistor symmetry
09/2010
09/30/2010WO2010109368A1 Differential phase-contrast imaging with circular gratings
09/29/2010CN101845618A Manufacturing method of silicon nitride film window for imaging of X-ray microlens
09/28/2010US7805023 Image evaluation method and microscope
09/28/2010US7804066 Charged-particle beam apparatus
09/23/2010US20100237242 Device and method for crystal orientation measurement by means of an ion blocking pattern and a focused ion probe
09/21/2010US7800062 Method and system for the examination of specimen
09/21/2010US7800060 Pattern measurement method and pattern measurement system
09/21/2010US7800059 Method of forming a sample image and charged particle beam apparatus
09/14/2010US7796725 Mechanism for switching sources in x-ray microscope
09/14/2010US7795593 Surface contamination analyzer for semiconductor wafers
09/14/2010US7795581 Pattern measuring method and electron microscope
09/07/2010US7792246 High resolution imaging
09/07/2010US7791023 Electron holography system
09/07/2010US7791021 method of evaluating each microstructured pattern of a semiconductor by calculating as a dislocation vector the relationship in position between the surface and bottom of the photoresist on the microstructured pattern; method of evaluating exposure accuracy
08/2010
08/31/2010US7787588 System and method for quantitative reconstruction of Zernike phase-contrast images
08/26/2010US20100213369 Method
08/24/2010US7784107 High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
08/24/2010US7781733 In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques
08/19/2010DE102009008063A1 Teilchenstrahlsystem Particle beam
08/17/2010US7777184 via metrology tool such as transmission electron microscope, scanning electron microscope, atomic force microscope, small angle X-ray scattering and laser diffraction particle analyzer; photoresist positioned between two protective material layers, wrapped with epoxy material
08/10/2010US7772552 Methods and devices for atom probe mass resolution enhancement
08/05/2010WO2010087359A1 Scanning x-ray microscope
08/05/2010US20100193686 Electron Beam Exposure Or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus
07/2010
07/22/2010US20100181478 Charged particle beam adjusting method and charged particle beam apparatus
07/13/2010US7755046 Transmission electron microscope
06/2010
06/29/2010US7745786 Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
06/29/2010US7745782 Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope
06/08/2010US7732792 Pattern measurement apparatus
06/08/2010US7732766 Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same
06/08/2010US7732761 Method for measuring a pattern dimension using a scanning electron microscope
06/02/2010CN1656373B Element-specific x-ray fluorescence microscope and method of operation
06/01/2010US7728292 Method and apparatus for detecting positively charged and negatively charged ionized particles
05/2010
05/26/2010EP2190002A1 Apparatus for detecting a fine geometry and device manufacturing method
05/25/2010US7723683 Aberration correction system
05/18/2010US7718962 Defect imaging device and method
05/11/2010US7714288 Charged particle beam apparatus
05/04/2010US7709791 Scanning probe microscope with automatic probe replacement function
04/2010
04/27/2010US7705301 Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector
04/27/2010US7705300 Charged particle beam adjusting method and charged particle beam apparatus
04/22/2010US20100096265 Macroscopically manipulable nanoscale devices made from nanotube assemblies
04/20/2010US7700931 Ion beam processing apparatus
04/20/2010US7700918 Sample electrification measurement method and charged particle beam apparatus
04/20/2010US7700916 Logical CAD navigation for device characteristics evaluation system
04/20/2010US7700915 Method, computer program and apparatus for the characterization of molecules
04/20/2010US7700380 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
04/15/2010US20100092113 Static pressure slider and transferring device and processing device provided with the same
04/15/2010US20100091362 Complex type microscopic device
04/06/2010US7692144 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
04/01/2010WO2010037097A1 Probe cards including nanotube probes and methods of fabricating
03/2010
03/30/2010US7690046 Drive stage for scanning probe apparatus, and scanning probe apparatus
03/23/2010US7683320 Transmission electron microscope
03/23/2010US7683318 Laser atom probe
02/2010
02/18/2010US20100040197 Large bore pet and hybrid pet/ct scanners and radiation therapy planning using same
02/16/2010US7663104 Specimen inspection equipment and how to make electron beam absorbed current images
02/11/2010US20100032567 Method of Machining a Work Piece with a Focused Particle Beam
02/11/2010US20100032565 Electron microscope and a method for measuring the defocus variation or the limit resolution
02/09/2010US7659509 System for scanning probe microscope input device
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