| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 02/02/2010 | US7655906 Method and apparatus for scanning and measurement by electron beam |
| 01/26/2010 | US7652249 Charged particle beam apparatus |
| 01/26/2010 | US7652248 Inspection apparatus and inspection method |
| 01/21/2010 | US20100012839 Increasing current in charged particle sources and systems |
| 01/19/2010 | US7649173 Method of preparing a sample for transmission electron microscopy |
| 01/12/2010 | US7646495 System and computer readable medium for pre-focus of digital slides |
| 01/12/2010 | US7645989 Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof |
| 01/12/2010 | US7645988 Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus |
| 12/29/2009 | US7638767 Scanning electron microscope |
| 12/22/2009 | US7635844 Microsystem manipulation apparatus |
| 12/10/2009 | US20090303321 System and Computer Readable Medium for Pre-focus of Digital Slides |
| 12/10/2009 | US20090302234 Method and Apparatus for Observing Inside Structures, and Specimen Holder |
| 12/03/2009 | US20090294665 Scanning electron microscope and similar apparatus |
| 11/26/2009 | US20090290680 High resolution imaging system |
| 11/24/2009 | US7623620 Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nm |
| 11/17/2009 | US7619220 Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope |
| 11/10/2009 | US7615764 Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
| 11/10/2009 | US7615738 Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
| 10/22/2009 | WO2009128550A1 Source grating for x-rays, imaging apparatus for x-ray phase contrast image and x-ray computed tomography system |
| 10/20/2009 | US7605368 Vibration-type cantilever holder and scanning probe microscope |
| 10/20/2009 | US7605364 Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope |
| 10/13/2009 | US7601957 Electron microscope and combined illumination lens |
| 10/07/2009 | CN101553823A Method for detecting fluorescent signals in a biological sample |
| 10/06/2009 | US7598491 Observing method and its apparatus using electron microscope |
| 10/06/2009 | US7598490 SEM-type reviewing apparatus and a method for reviewing defects using the same |
| 10/01/2009 | WO2009118130A1 Microscope and microscopy method for examining a reflecting object |
| 10/01/2009 | DE102008015996A1 Mikroskop und Mikroskopierverfahren zur Untersuchung eines reflektierenden Objektes Microscope and microscopy method for examining a reflecting object |
| 09/29/2009 | US7595490 Charged particle beam emitting device and method for operating a charged particle beam emitting device |
| 09/29/2009 | US7595488 Method and apparatus for specifying working position on a sample and method of working the sample |
| 09/29/2009 | US7595482 Standard component for length measurement, method for producing the same, and electron beam metrology system using the same |
| 09/17/2009 | WO2009113713A1 X-ray imaging apparatus, x-ray imaging method and method of controlling x-ray imaging apparatus |
| 09/17/2009 | US20090230303 Defect analyzer |
| 09/17/2009 | DE102007047352B4 Beleuchtungseinrichtung und Inspektionseinrichtung mit Beleuchtungseinrichtung Illumination device and inspection device with illumination |
| 09/08/2009 | US7586093 Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
| 09/01/2009 | US7583787 Device for improving the resolution capability of an x-ray optical apparatus |
| 08/13/2009 | US20090200465 Pattern measuring method and pattern measuring device |
| 08/11/2009 | US7573031 Methods for SEM inspection of fluid containing samples |
| 08/11/2009 | US7573030 Specimen observation method |
| 08/06/2009 | US20090194690 Inspection Method And Inspection System Using Charged Particle Beam |
| 07/28/2009 | US7566873 High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus |
| 07/28/2009 | US7566871 Method and apparatus for pattern inspection |
| 07/23/2009 | US20090184252 X-ray analyzer |
| 07/22/2009 | EP2080014A2 An interface, a methof for observing an object within a non-vacuum environment and a scanning electron microscope |
| 07/21/2009 | US7564557 Apparatus and methods for detecting overlay errors using scatterometry |
| 07/16/2009 | US20090179151 Apparatus and method for inspection and measurement |
| 07/14/2009 | US7560693 Electron-beam size measuring apparatus and size measuring method with electron beams |
| 07/14/2009 | US7560689 High-sensitivity mass spectrometer and method |
| 07/07/2009 | US7557347 Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same |
| 06/30/2009 | US7554099 Ultra-thin liquid control plate and combination of box-like member and the control plate |
| 06/30/2009 | US7554094 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 06/30/2009 | US7554082 Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program |
| 06/23/2009 | US7551722 X-ray target and apparatuses using the same |
| 06/23/2009 | US7550723 Atom probe apparatus and method for working sample preliminary for the same |
| 06/18/2009 | US20090152463 Method and apparatus of pattern inspection and semiconductor inspection system using the same |
| 06/16/2009 | US7547884 Pattern defect inspection method and apparatus thereof |
| 06/16/2009 | US7547883 Seek-scan probe (SSP) memory including mechanism for track correction |
| 06/11/2009 | US20090146057 Electron beam measurement apparatus |
| 06/11/2009 | US20090146055 Apparatus for thermal control in the analysis of electronic devices |
| 06/09/2009 | US7544936 Method and device for observing a specimen in a field of view of an electron microscope |
| 06/04/2009 | US20090141126 Fully Automatic Rapid Microscope Slide Scanner |
| 05/27/2009 | EP2063434A1 X-ray condensing method and its device using phase restoration method |
| 05/19/2009 | US7535001 Method and system for focusing a charged particle beam |
| 05/07/2009 | WO2008050321A3 An interface, a methof for observing an object within a non-vacuum environment and a scanning electron microscope |
| 05/06/2009 | EP1481279A4 Multi-detector microscopic inspection system |
| 04/23/2009 | WO2007027757A3 Direct write nanolithography using heated tip |
| 04/23/2009 | WO2006113908A3 Crytomography x-ray microscope stage |
| 04/23/2009 | US20090101818 Corrector |
| 04/21/2009 | US7521695 Scanning electron microscope |
| 04/21/2009 | US7521679 Inspection method and inspection system using charged particle beam |
| 04/16/2009 | WO2005101997A3 In-situ bwr and pwr crud flake analysis method and tool |
| 04/16/2009 | DE102007047352A1 Beleuchtungseinrichtung, Verwendung der Beleuchtungseinrichtung bei flächigen Substraten und Inspektionseinrichtung mit Beleuchtungseinrichtung Lighting device using the illumination device for flat substrates and inspection device with illumination |
| 04/15/2009 | EP2047408A2 Method for detecting fluorescent signals in a biological sample |
| 04/07/2009 | US7514682 Electron anti-fogging baffle used as a detector |
| 04/07/2009 | US7514681 Electrical process monitoring using mirror-mode electron microscopy |
| 04/07/2009 | US7514680 Apparatus for modifying and measuring diamond and other workpiece surfaces with nanoscale precision |
| 03/31/2009 | US7511272 Method for controlling charged particle beam, and charged particle beam apparatus |
| 03/31/2009 | US7511270 Nanotube probe and a method for manufacturing the same |
| 03/24/2009 | US7507961 Method and apparatus of pattern inspection and semiconductor inspection system using the same |
| 03/24/2009 | US7507960 Apparatus and method for controlled particle beam manufacturing |
| 03/24/2009 | US7507956 Charged particle beam energy width reduction system for charged particle beam system |
| 03/19/2009 | WO2009035731A1 Resonant difference-frequency atomic force ultrasonic microscope |
| 03/17/2009 | US7504625 Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus |
| 03/17/2009 | US7504624 Charged particle beam device |
| 03/17/2009 | US7504623 provides the ability to utilize both gross and fine modification of specimen surface through use of high and low energy ion sources; Precise control of location of specimen within he impingement beams created by ion sources provides ability to tilt and rotate the specimen with respect thereto |
| 03/12/2009 | WO2009030390A1 Device and method for xuv microscopy |
| 03/12/2009 | US20090065694 Scanning electron microscope |
| 03/10/2009 | US7501625 Electron microscope application apparatus and sample inspection method |
| 03/05/2009 | US20090057556 Method and apparatus of an inspection system using an electron beam |
| 03/03/2009 | US7499521 System and method for fuel cell material x-ray analysis |
| 03/03/2009 | US7498589 Scanning probe microscope |
| 02/26/2009 | US20090052619 Fresnel zone plate and x-ray microscope using the fresnel zone plate |
| 02/26/2009 | US20090050803 Charged particle beam device |
| 02/24/2009 | US7495217 Film thickness and composition measurement via auger electron spectroscopy and electron probe microanalysis |
| 02/19/2009 | US20090045338 Inspection method and apparatus using an electron beam |
| 02/17/2009 | US7491933 Electron beam apparatus |
| 02/12/2009 | US20090041333 Scanning electron microscope |
| 02/12/2009 | US20090039274 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |
| 02/12/2009 | US20090039257 Electron beam device |
| 02/11/2009 | CN101366097A Multi-reflecting time-of-flight mass spectrometer with orthogonal acceleration |
| 02/10/2009 | US7488936 TFT array inspecting apparatus |