| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 04/06/2006 | US20060071164 Characterizing dimensions of structures via scanning probe microscopy |
| 03/30/2006 | US20060065831 Spectrum analyzer and method of spectrum analysis |
| 03/29/2006 | EP1640996A2 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 03/23/2006 | US20060060783 Scanning particle beam instrument |
| 03/23/2006 | US20060060781 Charged-particle beam apparatus and method for automatically correcting astigmatism and for height detection |
| 03/23/2006 | US20060060780 Apparatus and method for e-beam dark field imaging |
| 03/23/2006 | US20060060779 Semiconductor probe with resistive tip and method of fabricating the same |
| 03/23/2006 | US20060060778 Probe microscope system suitable for observing sample of long body |
| 03/23/2006 | US20060060777 Apparatus and method for evaluating cross section of specimen |
| 03/23/2006 | US20060060776 Method of sensing a gas by detecting change in magnetic properties |
| 03/21/2006 | US7015482 Electron beam writing equipment using plural beams and method |
| 03/21/2006 | US7015469 Electron holography method |
| 03/21/2006 | US7015467 Generating electrons with an activated photocathode |
| 03/16/2006 | US20060054820 Method of forming TEM specimen and related protection layer |
| 03/16/2006 | US20060054819 Electron beam apparatus and device manufacturing method using same |
| 03/16/2006 | US20060054818 Scanning apparatus and scanning methods for inspecting a surface of a semiconductor wafer |
| 03/16/2006 | US20060054815 Method for charging substrate to a potential |
| 03/16/2006 | US20060054814 Scanning electron microscope having multiple detectors and a method for multiple detector based imaging |
| 03/16/2006 | US20060054813 Method and system for inspecting specimen |
| 03/16/2006 | US20060054811 Methods and systems for process monitoring using x-ray emission |
| 03/14/2006 | US7012262 Corrector for correcting first-order chromatic aberrations of the first degree |
| 03/14/2006 | US7012254 Method and device for observing a specimen in a field of view of an electron microscope |
| 03/14/2006 | US7012253 Transmission electron microscope and three-dimensional observing method |
| 03/14/2006 | US7012252 Method and an apparatus of an inspection system using an electron beam |
| 03/09/2006 | WO2006025968A2 Multiple gas injection system for charged particle beam instruments |
| 03/09/2006 | US20060049349 Methods and systems for process monitoring using x-ray emission |
| 03/07/2006 | US7009192 Charged particle beam application apparatus |
| 03/07/2006 | US7009178 Scanning electron microscope |
| 03/02/2006 | US20060043294 Scanning electron microscope |
| 03/02/2006 | US20060043293 Charged particle beam adjustment method and apparatus |
| 03/02/2006 | US20060043292 Method and apparatus for inspecting semiconductor device |
| 03/02/2006 | US20060043290 Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder |
| 03/02/2006 | US20060043289 Environmental cell for a scanning probe microscope |
| 03/02/2006 | US20060043288 Scanning probe for data storage and microscopy |
| 02/28/2006 | US7005641 Electron beam apparatus and a device manufacturing method by using said electron beam apparatus |
| 02/28/2006 | US7005640 Method and apparatus for the characterization of a depth structure in a substrate |
| 02/28/2006 | US7005638 Apparatus and method for reducing the electron-beam-induced deposition of contamination products |
| 02/23/2006 | WO2006020324A2 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
| 02/23/2006 | US20060038137 Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same |
| 02/23/2006 | US20060038133 Rotating specimen holder |
| 02/23/2006 | US20060038127 Method of three-dimensional image reconstruction and transmission electron microscope |
| 02/23/2006 | US20060038126 System and method for sample charge control |
| 02/23/2006 | US20060038125 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system |
| 02/22/2006 | CN1243269C High subharmonic soft X-ray lining microscope |
| 02/21/2006 | US7002151 Scanning electron microscope |
| 02/21/2006 | US7002150 Thin specimen producing method and apparatus |
| 02/16/2006 | US20060034423 Surgical microscope |
| 02/16/2006 | US20060033048 Method of generation of charged particle beam exposure data and charged particle beam exposure method using a block mask |
| 02/16/2006 | US20060033038 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope |
| 02/14/2006 | US6998600 Multifrequency ultra-high resolution miniature scanning microscope using microchannel and solid-state sensor technologies and method for scanning samples |
| 02/09/2006 | US20060027748 Secondary electron detector unit for a scanning electron microscope |
| 02/07/2006 | US6996207 X-ray microscope |
| 02/07/2006 | US6995576 Thin film transistor array inspection apparatus |
| 02/07/2006 | US6995370 Scanning electron microscope |
| 02/07/2006 | US6995368 MEMS differential actuated nano probe and method for fabrication |
| 02/02/2006 | US20060022138 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/02/2006 | US20060022137 Electron microscope |
| 02/02/2006 | US20060022136 Multiple gas injection system for charged particle beam instruments |
| 02/02/2006 | US20060022135 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
| 02/02/2006 | US20060022134 Method of removing particle of photomask using atomic force microscope |
| 01/31/2006 | US6992300 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| 01/31/2006 | US6992287 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 01/26/2006 | US20060016992 Electron beam apparatus |
| 01/26/2006 | US20060016991 Electron beam apparatus with aberration corrector |
| 01/26/2006 | US20060016986 MEMS differential actuated nano probe and method for fabrication |
| 01/26/2006 | CA2570704A1 A system for automatically locating and manipulating positions on an object |
| 01/24/2006 | US6989542 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope |
| 01/24/2006 | US6989535 Atomic force microscopy, method of measuring surface configuration using the same, and method of producing magnetic recording medium |
| 01/19/2006 | US20060011838 Sample observation method and transmission electron microscope |
| 01/19/2006 | US20060011837 Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same |
| 01/19/2006 | US20060011836 Element mapping unit, scanning transmission electron microscope, and element mapping method |
| 01/19/2006 | US20060011835 Electron microscope and electron beam inspection system |
| 01/19/2006 | US20060011834 Low vacuum scanning electron microscope |
| 01/19/2006 | US20060011833 Projection imaging type electron microscope |
| 01/19/2006 | US20060011832 Optical zoom system for a light scanning electron microscope |
| 01/17/2006 | US6987266 Structure determination of materials using electron microscopy |
| 01/17/2006 | US6987265 Method and an apparatus of an inspection system using an electron beam |
| 01/10/2006 | US6984822 Apparatus and method for secondary electron emission microscope |
| 01/03/2006 | US6982429 Transmission electron microscope sample preparation |
| 01/03/2006 | US6982427 Electron beam apparatus with aberration corrector |
| 01/03/2006 | US6982420 Sample observation method and transmission electron microscope |
| 12/29/2005 | US20050285033 luminophor materials comprising terbium, gadolinium-doped rare-earth aluminum scandium borate, used as light sources for fluorescent lamps or plasma display panels |
| 12/22/2005 | US20050279938 Low-pressure chamber for scanning electron microscopy in a wet environment |
| 12/08/2005 | US20050270638 Fully automatic rapid microscope slide scanner |
| 12/08/2005 | US20050269510 Electrical scanning probe microscope apparatus |
| 12/08/2005 | US20050269509 Method for manufacturing single wall carbon nanotube tips |
| 12/08/2005 | DE102004024810A1 Verfahren und Vorrichtung zur optischen Abtastung einer Probe Method and device for optically scanning a sample |
| 12/01/2005 | WO2005114093A1 Method and device for optically scanning a sample |
| 12/01/2005 | US20050263703 Pattern inspection method and apparatus using electron beam |
| 12/01/2005 | US20050263701 Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus |
| 11/29/2005 | US6969852 Method of evaluating of a scanning electron microscope for precise measurements |
| 11/24/2005 | WO2005112043A1 Multi-column charged particle optics assembly |
| 11/24/2005 | US20050258366 Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope |
| 11/24/2005 | US20050258365 Method and apparatus for measuring a surface profile of a sample |
| 11/22/2005 | US6967328 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor |
| 11/15/2005 | US6965112 Specimen holder, observation system, and method of rotating specimen |
| 11/10/2005 | US20050247875 Conductive transparent probe and probe control apparatus |
| 11/10/2005 | US20050247860 Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system |
| 11/03/2005 | US20050244326 Dispersing derivatived (e.g., solubilized) nanotubes and fractionating by length, diameter, and/or helicities; e.g., electrophoresis, DNA fractionation procedures, or polymer fractionation |
| 11/03/2005 | US20050242286 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |