| Patents for G21K 7 - Gamma ray or x-ray microscopes (1,690) |
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| 05/27/2003 | US6570156 Autoadjusting electron microscope |
| 05/20/2003 | US6566664 Charged-particle beam exposure apparatus and device manufacturing method |
| 05/15/2003 | US20030089853 Electron scatter in a thin membrane to eliminate detector saturation |
| 05/13/2003 | US6563115 High-density recording scanning microscope |
| 05/02/2003 | EP1305984A1 Method and apparatus for generating x-ray or euv radiation |
| 04/29/2003 | US6555817 Method and apparatus for correcting magnetic field distortions in electron backscatter diffraction patterns obtained in an electron microscope |
| 04/29/2003 | US6555816 Scanning electron microscope and sample observation method using the same |
| 04/24/2003 | US20030075682 Method for forming composite arrays of single-wall carbon nanotubes and compositions thereof |
| 04/22/2003 | US6552338 Ion photon emission microscope |
| 04/17/2003 | WO2003032405A1 Photoelectric current multiplier using molecular crystal and production method therefor |
| 04/17/2003 | WO2003030955A2 Composites comprising superabsorbent materials having a bimodal particle size distribution and methods of making the same |
| 04/10/2003 | US20030066974 Charged-particle beam exposure apparatus and device manufacturing method |
| 04/10/2003 | US20030066960 Apparatus for growing continuous single-wall carbon nanotube fiber |
| 04/09/2003 | EP1300056A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 04/03/2003 | US20030062476 Remote control electron microscope |
| 04/02/2003 | EP1222842B1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography |
| 04/02/2003 | CN1407334A Manufacture for test apparatus and parts |
| 03/18/2003 | US6534766 Charged particle beam system and pattern slant observing method |
| 03/13/2003 | US20030047682 Detecting apparatus and device manufacturing method |
| 03/12/2003 | EP1291900A2 Apparatus for detecting a fine geometry on a surface of a sample and method of manufacturing a semiconductor device |
| 03/12/2003 | EP1290430A1 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams |
| 03/04/2003 | US6528787 Scanning electron microscope |
| 03/04/2003 | US6528785 Microscope probe needle |
| 02/27/2003 | US20030037605 Conductive transparent probe and probe control apparatus |
| 02/18/2003 | US6522717 Reflective-type soft x-ray microscope |
| 02/13/2003 | US20030030008 Charged particle beam control system and charge partical beam optical apparatus using the system |
| 02/13/2003 | US20030030007 Charged particle beam control apparatus |
| 02/13/2003 | US20030029999 Spherical aberration corrector for electron microscope |
| 02/06/2003 | US20030025076 Electron-optical system with einzel lens and inspection method using the same |
| 01/23/2003 | WO2003007330A1 Sample electrification measurement method and charged particle beam apparatus |
| 01/23/2003 | WO2001063555A3 Image deconvolution techniques for probe scanning apparatus |
| 01/16/2003 | WO2001084209B1 Fully automatic rapid microscope slide scanner |
| 01/16/2003 | US20030010910 Continuous fiber of single-wall carbon nanotubes |
| 01/15/2003 | CN1391697A X射线变焦镜头 X-ray lens |
| 01/08/2003 | CN1390435A Method for obtaining an extraeme ultraviolet radiation source, radiation source and use in lithography |
| 01/07/2003 | US6504151 Wear coating applied to an atomic force probe tip |
| 12/19/2002 | WO2001084209A3 Fully automatic rapid microscope slide scanner |
| 11/13/2002 | CN1379968A Production of dense mist of micrometric droplets in particular for extreme UV lithography |
| 11/12/2002 | US6479816 Near-field optical probe |
| 11/07/2002 | US20020162974 High temperature EUV source nozzle |
| 11/06/2002 | EP1255426A1 High temperature EUV source nozzle |
| 11/05/2002 | US6477237 X-ray shielding mechanism for off-axis X-rays |
| 11/05/2002 | US6476388 Scanning electron microscope having magnification switching control |
| 10/31/2002 | WO2002086477A1 Structure determination of materials using electron microscopy |
| 10/31/2002 | US20020159561 Refractive X-ray arrangement |
| 10/31/2002 | US20020158198 Charged particle beam apparatus |
| 10/29/2002 | US6472663 Electron microscope |
| 10/25/2002 | EP0968409A4 Soft x-ray microfluoroscope |
| 10/24/2002 | US20020153484 Transmission electron microscope equipped with energy filter |
| 10/22/2002 | US6469309 Vacuum sealed specimen holder support with motion damping means |
| 10/15/2002 | US6465783 High-throughput specimen-inspection apparatus and methods utilizing multiple parallel charged particle beams and an array of multiple secondary-electron-detectors |
| 09/25/2002 | EP1243002A1 X-ray zoom lens |
| 09/18/2002 | EP1196939A4 Object inspection and/or modification system and method |
| 09/17/2002 | US6452178 Method and an apparatus of an inspection system using an electron beam |
| 09/05/2002 | US20020123161 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |
| 08/28/2002 | EP1234310A1 Doubly curved optical device with graded atomic planes |
| 08/15/2002 | US20020109087 Method for producing a catalyst support and compositions thereof |
| 08/15/2002 | US20020109086 Method for growing continuous carbon fiber and compositions thereof |
| 08/14/2002 | EP1230828A1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography |
| 08/08/2002 | US20020104871 Pinhole disk laminate and a process for producing the same |
| 08/06/2002 | US6430254 High resolution x-ray imaging of very small objects |
| 08/01/2002 | US20020102201 Method for forming an array of single-wall carbon nanotubes in an electric field and compositions thereof |
| 07/25/2002 | US20020096634 Method for cutting single-wall carbon nanotubes |
| 07/18/2002 | US20020092986 Method and an apparatus of an inspection system using an electron beam |
| 07/18/2002 | US20020092984 Method for purification of as-produced single-wall carbon nanotubes |
| 07/18/2002 | US20020092983 Method for growing single-wall carbon nanotubes utilizing seed molecules |
| 07/17/2002 | EP1222842A1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography |
| 07/17/2002 | EP1222439A1 Method and apparatus for molecular analysis of buried layers |
| 07/16/2002 | US6420703 Method for forming a critical dimension SEM calibration standard of improved definition and standard formed |
| 07/11/2002 | US20020088938 Method for forming an array of single-wall carbon nanotubes and compositions thereof |
| 07/04/2002 | US20020084410 Macroscopically manipulable nanoscale devices made from nanotube assemblies |
| 07/02/2002 | US6414438 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 07/02/2002 | US6414323 Charged particle beam apparatus and method of controlling charged particle beam |
| 06/27/2002 | DE10062049A1 Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop Method for imaging a sample surface using a scanning probe and scanning probe microscope |
| 06/20/2002 | WO2002048644A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 06/19/2002 | EP1214717A1 A refractive x-ray arrangement |
| 06/13/2002 | US20020070340 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams |
| 06/06/2002 | WO2002045125A1 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| 06/06/2002 | CA2436237A1 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| 05/21/2002 | US6392752 Phase-measuring microlens microscopy |
| 05/21/2002 | US6389886 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 05/16/2002 | US20020057757 2-D microscopic tomographic systems utilizing 2-D deflection sensors |
| 05/14/2002 | US6388252 Self-detecting type of SPM probe and SPM device |
| 05/14/2002 | US6388249 Surface analyzing apparatus |
| 05/09/2002 | US20020053634 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 04/25/2002 | US20020047093 Method of capturing scanning electron microscope images and scanning electron microscope apparatus for performing the method |
| 04/24/2002 | EP1198820A1 X-ray anode and method for the production thereof |
| 04/17/2002 | EP1196939A1 Object inspection and/or modification system and method |
| 04/04/2002 | WO2001084593A3 A lens for a scanning electron microscope |
| 04/03/2002 | EP0928496B1 X-ray generator |
| 03/21/2002 | US20020033451 Electron microscope |
| 03/14/2002 | US20020030166 Pattern inspection method and apparatus using electron beam |
| 03/14/2002 | DE10042840A1 Vorrichtung und Verfahren zur Anregung von Fluoreszenzmikroskopmarkern bei der Mehrphotonen-Rastermikroskopie Apparatus and method for excitation of fluorescence microscope markers in the multi-photon scanning microscopy |
| 02/28/2002 | US20020024015 Device and method for the excitation of fluorescent labels and scanning microscope |
| 02/28/2002 | US20020024014 Scanning electron microscope |
| 02/28/2002 | US20020024012 Electron microscope |
| 02/19/2002 | US6348690 Method and an apparatus of an inspection system using an electron beam |
| 02/14/2002 | US20020017619 Processing/observing instrument |
| 02/14/2002 | US20020017615 Scanning unit and scanning microscope having the same |
| 02/07/2002 | WO2002011499A1 Method and apparatus for generating x-ray or euv radiation |