| Patents for G01Q 40 - Calibration, e.g. of probes (498) |
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| 03/02/2000 | WO2000011702A1 Automated set up of an energy filtering transmission electron microscope |
| 02/15/2000 | US6025600 Method for astigmatism correction in charged particle beam systems |
| 01/25/2000 | US6016684 Certification of an atomic-level step-height standard and instrument calibration with such standards |
| 11/17/1999 | EP0957333A1 Correlation sample for scanning probe microscope and method of processing the correlation sample |
| 10/19/1999 | US5969273 Method and apparatus for critical dimension and tool resolution determination using edge width |
| 09/16/1999 | WO1999046558A1 Atomic-level step-height standard certification method |
| 08/31/1999 | US5945833 Method for testing semiconductor devices which measures internal potential distribution, internal electric field, and internal doping profile |
| 07/28/1999 | EP0932182A2 Method and an apparatus for testing a substrate |
| 07/06/1999 | US5920067 Monocrystalline test and reference structures, and use for calibrating instruments |
| 05/14/1999 | WO1999023483A1 Electrostatic force detector with cantilever for an electrostatic force microscope |
| 11/05/1998 | WO1998034092A3 Object inspection and/or modification system and method |
| 10/22/1998 | WO1998026297A3 Method for testing semiconductor devices |
| 10/20/1998 | US5825670 High precison calibration and feature measurement system for a scanning probe microscope |
| 09/08/1998 | US5804460 Forming raised topographical feature, removing portion of feature, exposing cross-section, measuring critical dimension of cross-section, measuring with second type of instrument, correlating measurements |
| 08/06/1998 | WO1998034092A2 Object inspection and/or modification system and method |
| 06/18/1998 | WO1998026297A2 Method for testing semiconductor devices |
| 05/06/1998 | EP0839311A1 Inter-atomic measurement technique |
| 04/28/1998 | US5744799 Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces |
| 03/11/1998 | EP0808477A4 Fabrication and use of a sub-micron dimensional standard |
| 02/10/1998 | US5717205 Method and apparatus for measuring mass distribution of a shaft |
| 02/05/1998 | DE19731854A1 Skala zur Erfassung der Position eines sich bewegenden Objekts sowie eine diese Skala verwendende Vorrichtung Scale for detecting the position of a moving object and a device using this scale |
| 02/04/1998 | CN1172246A Scale for sensing moving object, and apparatus for sensing moving object using same |
| 02/03/1998 | US5714682 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 12/16/1997 | US5699282 Methods and test structures for measuring overlay in multilayer devices |
| 11/27/1997 | WO1997044631A1 Inter-atomic measurement technique |
| 11/26/1997 | EP0808477A1 Fabrication and use of a sub-micron dimensional standard |
| 11/04/1997 | US5684301 For measuring geometrical characteristics of features on a substrate |
| 10/14/1997 | US5677765 For measuring atomic scale vertical topographic dimensions |
| 07/29/1997 | US5652428 Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere |
| 07/01/1997 | US5644512 High precision calibration and feature measurement system for a scanning probe microscope |
| 06/24/1997 | US5641897 Scanning apparatus linearization and calibration system |
| 05/20/1997 | USRE35514 Scanning force microscope having aligning and adjusting means |
| 04/29/1997 | US5624845 Detection of code sequences of biomolecules, super resolution |
| 04/01/1997 | US5617340 Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing |
| 02/11/1997 | US5602323 For calibration of region of recesses and projections |
| 02/04/1997 | US5599464 Formation of atomic scale vertical features for topographic instrument calibration |
| 01/07/1997 | US5591903 Reconstructing the shape of an atomic force microscope probe |
| 12/17/1996 | US5585211 Fabrication and use of sub-micron dimensional standard |
| 11/26/1996 | US5578745 Calibration standards for profilometers and methods of producing them |
| 10/09/1996 | EP0736746A1 Method of using scanning probe microscope permitting cleaning of probe microscope or of probe tip in ambient atmosphere |
| 10/01/1996 | US5560244 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 09/17/1996 | US5557156 Scan control for scanning probe microscopes |
| 08/15/1996 | WO1996024885A1 Fabrication and use of a sub-micron dimensional standard |
| 07/03/1996 | EP0720216A2 Linewidth metrology of integrated circuit structures |
| 06/18/1996 | US5528047 Electron beam exposure apparatus with improved drawing precision |
| 05/28/1996 | US5521377 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 05/28/1996 | US5520769 Quantitative analysis of dopes in semiconductors, etching an oxide, measurement of topography |
| 04/18/1996 | DE4437010A1 Reducing or eliminating stick slip effects and lateral force between probe movable relative to surface esp. in raster force microscopy |
| 03/26/1996 | US5502305 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 01/23/1996 | US5486769 Method and apparatus for measuring quantitative voltage contrast |
| 11/28/1995 | US5469734 Scanning apparatus linearization and calibration system |
| 11/07/1995 | US5463897 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 10/11/1995 | EP0676614A1 Calibration standards for profilometers and methods of producing them |
| 08/15/1995 | US5442174 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 06/27/1995 | US5428548 Method of and apparatus for scanning the surface of a workpiece |
| 05/23/1995 | US5418363 In an atomic force microscope |
| 12/14/1994 | EP0628809A1 Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
| 11/09/1994 | EP0623805A1 Method of manufacturing reference samples for calibrating amount of measured displacement and reference sample, and measuring instrument and calibration method |
| 08/09/1994 | US5336895 Impurity free reference grid for use charged partiole beam spectroscopes |
| 06/08/1994 | EP0600452A1 Scanning probe instrument using stored topographical data |
| 06/01/1994 | EP0599582A2 Scanning apparatus linearization and calibration system |
| 05/31/1994 | US5317141 Apparatus and method for high-accuracy alignment |
| 05/03/1994 | US5308974 Scanning probe microscope using stored data for vertical probe positioning |
| 03/23/1994 | EP0588512A1 Method of and apparatus for scanning the surface of a workpiece |
| 01/18/1994 | US5280341 Feedback controlled differential fiber interferometer |
| 09/01/1993 | EP0557743A1 Feedback controlled differential fiber interferometer |
| 07/22/1993 | WO1993014377A1 Method of manufacturing reference samples for calibrating amount of measured displacement and reference sample, and measuring instrument and calibration method |
| 12/23/1992 | EP0519693A1 Reference grid for use in charged particle beam spectroscopes |
| 12/22/1992 | CA1311863C Low-voltage source for narrow electron/ion beams |
| 10/20/1992 | US5157251 Scanning force microscope having aligning and adjusting means |
| 10/13/1992 | US5155359 For imaging a surface |
| 08/04/1992 | CA1305872C Micromechanical atomic force sensor head |
| 05/26/1992 | US5117110 Composite scanning tunnelling microscope with a positioning function |
| 12/24/1991 | US5075548 Tunnel current probe moving mechanism having parallel cantilevers |
| 08/06/1991 | US5038034 Scanning tunneling microscope |
| 11/06/1990 | CA1275801C Optical proximity imaging method and apparatus |
| 09/04/1990 | US4954711 Low-voltage source for narrow electron/ion beams |
| 05/09/1990 | EP0366851A1 Low-voltage source for narrow electron/ion beams |
| 11/14/1989 | US4880975 Fine adjustment mechanism for a scanning tunneling microscope |
| 10/31/1989 | US4877957 Scanning type tunnel microscope |
| 02/21/1989 | US4806755 Micromechanical atomic force sensor head |
| 05/24/1988 | US4746571 Spheres, particles, calibration |
| 04/06/1988 | EP0262253A1 Micromechanical atomic force sensor head |
| 09/09/1987 | EP0235696A2 Optical proximity imaging method and apparatus |
| 07/21/1987 | US4681451 Optical proximity imaging method and apparatus |
| 05/10/1983 | US4383172 Method and apparatus for measuring coating thicknesses on continuously moving material |
| 06/15/1982 | US4335189 Resolution standard for scanning electron microscope comprising palladium spines on a metal substrate |
| 02/03/1982 | EP0044926A1 Resolution standard for scanning electron microscope and method of producing such a standard |
| 02/10/1981 | CA1095637A1 Multiple crystal holder assembly for wavelength dispersive x-ray spectrometers |
| 01/13/1981 | CA1093709A1 Non-contacting gage apparatus and method |
| 06/17/1980 | US4208581 Radioactive ray gauge |
| 05/27/1980 | US4205226 Auger electron spectroscopy |
| 04/24/1979 | US4151418 Multiple crystal holder assembly for wavelength dispersive X-ray spectrometers |
| 10/10/1978 | US4119846 Non-contacting gage apparatus and method |
| 03/14/1978 | US4079237 Card controlled beta backscatter thickness measuring instrument |
| 02/21/1978 | US4075550 Ionization cell for sensing and measuring gaseous impurities |
| 12/20/1977 | US4064438 Nondestructive detection and measurement of hydrogen embrittlement |
| 06/07/1977 | US4028267 Method and apparatus for measuring the concentration of a component, for instance iron, in a material |