| Patents for G01Q 40 - Calibration, e.g. of probes (498) |
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| 10/02/2003 | US20030186914 Precipitation occurs on substrate surfaces of oxides, nitrides, or carbides of metals and semiconductors, comprising use of water-soluble salts of compounds for treatment of these surfaces as sensor platforms, implants, medical devices |
| 10/02/2003 | US20030185967 Method and apparatus for aligning patterns on a substrate |
| 09/30/2003 | US6627903 Methods and devices for calibrating a charged-particle-beam microlithography apparatus, and microelectronic-device fabrication methods comprising same |
| 09/11/2003 | US20030168594 Integrated measuring instrument |
| 09/09/2003 | US6617569 Probe opening forming apparatus and near-field optical microscope using the same |
| 08/21/2003 | US20030155508 Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method |
| 08/07/2003 | US20030146382 Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method |
| 07/23/2003 | EP1329686A2 Integrated measuring instrument |
| 07/17/2003 | US20030132376 Tip calibration standard and method for tip calibration |
| 07/15/2003 | US6593583 Ion beam processing position correction method |
| 07/15/2003 | US6591658 Calibration of nano-devices |
| 07/01/2003 | US6586753 Electron beam apparatus and electron beam adjusting method |
| 06/24/2003 | US6583411 Multiple local probe measuring device and method |
| 06/19/2003 | US20030111616 Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method |
| 06/12/2003 | US20030107006 Charged particle beam exposure method and apparatus |
| 06/04/2003 | EP1315968A2 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 06/03/2003 | US6573498 Electric measurement of reference sample in a CD-SEM and method for calibration |
| 06/03/2003 | US6573497 Calibration of CD-SEM by e-beam induced current measurement |
| 05/06/2003 | US6559924 Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 05/06/2003 | US6559459 Convergent charged particle beam apparatus and inspection method using same |
| 05/06/2003 | US6559456 Charged particle beam exposure method and apparatus |
| 04/22/2003 | US6552331 Device and method for combining scanning and imaging methods in checking photomasks |
| 04/17/2003 | US20030071230 Electron beam apparatus and electron beam adjusting method |
| 04/08/2003 | US6545495 Method and apparatus for self-calibration of capacitive sensors |
| 04/08/2003 | US6545273 Use of multiple tips on AFM to deconvolve tip effects |
| 03/27/2003 | US20030058437 Submicron dimensional calibration standards and methods of manufacture and use |
| 03/20/2003 | WO2003023423A2 Dielectric constant measuring apparatus and dielectric constant measuring method |
| 03/20/2003 | US20030055588 Method of determination of true nonlinearity of scan along a selected direction X or Y in scan microscope |
| 03/06/2003 | US20030042896 Method and apparatus for measuring magnetic head |
| 02/20/2003 | US20030034437 Method of precision calibration of magnification of scanning microscopes with the use of test diffraction gratiing |
| 01/21/2003 | US6509750 Apparatus for detecting defects in patterned substrates |
| 01/21/2003 | US6509564 Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method |
| 01/14/2003 | US6507197 Electrostatic force detector with cantilever for an electrostatic force microscope |
| 01/09/2003 | WO2002020873A3 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 01/02/2003 | DE20121476U1 Material measure and calibrating norm for recording lateral dimensions on nano-scale objects for microscopy and linear measurement uses a measuring structure on a carrier surface. |
| 12/19/2002 | US20020189330 Caliper method, system, and apparatus |
| 12/10/2002 | US6493065 Alignment system and alignment method in exposure apparatus |
| 12/03/2002 | US6489611 Atomic force microscope for profiling high aspect ratio samples |
| 11/26/2002 | US6486654 Calibration of magnetic force or scanning hall probe microscopes by measuring sample images and calculating instrument response functions |
| 11/14/2002 | US20020166964 Detection of defects in patterned substrates |
| 11/07/2002 | US20020162388 Noncontact sensitivity and compliance calibration method for cantilever-based instruments |
| 10/31/2002 | WO2001059807A9 In-situ probe for optimizing electron beam inspection and metrology based on surface potential |
| 10/31/2002 | US20020158637 Method and apparatus for self-calibration of capacitive sensors |
| 10/31/2002 | US20020157457 Method and apparatus for performing atomic force microscopy measurements |
| 09/24/2002 | US6455847 Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts |
| 09/19/2002 | WO2002073128A1 Calibration of an analogue probe |
| 09/10/2002 | US6448553 Signal detector to be used with scanning probe and atomic force microscope |
| 09/04/2002 | EP1237161A2 Method and apparatus for performing atomic force microscopy measurements |
| 08/29/2002 | US20020117611 Object inspection and/or modification system and method |
| 08/06/2002 | US6429425 Method for forming a calibation standard to adjust a micro-bar of an electron microscope |
| 07/11/2002 | DE10107796A1 Material measure and calibrating norm for recording lateral dimensions on nano-scale objects for microscopy and linear measurement uses a measuring structure on a carrier surface. |
| 05/09/2002 | US20020053643 Convergent charged particle beam apparatus and inspection method using same |
| 05/07/2002 | US6384408 Calibration of a scanning electron microscope |
| 04/09/2002 | US6369397 SPM base focal plane positioning |
| 03/20/2002 | EP1189240A1 Multi-probe measuring device and method of use |
| 03/19/2002 | US6358860 Line width calibration standard manufacturing and certifying method |
| 03/14/2002 | WO2002020873A2 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 03/12/2002 | US6354133 Use of carbon nanotubes to calibrate conventional tips used in AFM |
| 03/05/2002 | US6353219 Object inspection and/or modification system and method |
| 02/28/2002 | US20020024644 Alignment system and alignment method in exposure apparatus |
| 02/28/2002 | US20020024023 Method and apparatus for testing a substrate |
| 02/28/2002 | DE10039337A1 Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken Combination of scanning and imaging methods in the review of photomasks |
| 02/26/2002 | USRE37560 Scan control for scanning probe microscopes |
| 02/14/2002 | US20020018207 Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 02/14/2002 | US20020017621 Device and method for combining scanning and imaging methods in checking photomasks |
| 02/13/2002 | EP1179748A2 Combination of imaging and scanning methods for checking reticles |
| 01/08/2002 | US6337479 Object inspection and/or modification system and method |
| 01/01/2002 | US6335532 Convergent charged particle beam apparatus and inspection method using same |
| 12/06/2001 | US20010048068 Probe opening forming apparatus and near-field optical microscope using the same |
| 12/05/2001 | EP1160611A2 Probe opening forming apparatus and near-field optical microscope using the same |
| 11/29/2001 | DE10044162A1 Standard für ein Nanotopographie-Gerät und Verfahren zur Herstellung des Standards Standard for a nanotopography device and process for the preparation of the standard |
| 11/20/2001 | US6319643 Conductive photoresist pattern for long term calibration of scanning electron microscope |
| 11/15/2001 | US20010041258 Standard for a nanotopography unit, and a method for producing the standard |
| 11/14/2001 | EP1153883A2 Standard for a nanotopography apparatus and method for the production thereof |
| 10/25/2001 | US20010032936 Ion beam processing position correction method |
| 10/18/2001 | US20010030286 Scanning probe microscope |
| 10/11/2001 | DE10113966A1 Sondenelektronenmikroskop Electron probe |
| 08/16/2001 | WO2001059807A1 In-situ probe for optimizing electron beam inspection and metrology based on surface potential |
| 08/14/2001 | US6274876 Inspection apparatus and method using particle beam and the particle-beam-applied apparatus |
| 07/17/2001 | US6262802 Scale for sensing moving object, and apparatus for sensing moving object using same |
| 07/10/2001 | US6259960 Part-inspecting system |
| 06/27/2001 | EP1110232A1 Automated set up of an energy filtering transmission electron microscope |
| 06/26/2001 | US6252412 Method of detecting defects in patterned substrates |
| 05/15/2001 | US6232787 Microstructure defect detection |
| 05/09/2001 | EP1032828A4 Electrostatic force detector with cantilever for an electrostatic force microscope |
| 05/08/2001 | US6228498 Crystal structure; electroconductivity |
| 04/10/2001 | US6215127 Method of using critical dimension mapping to qualify a new integrated circuit fabrication tool set |
| 02/28/2001 | CN1285915A Electrostatic force detector with cantilever for an electrostatic force microscpoe |
| 02/15/2001 | WO2001011656A1 Calibration of a scanning electron microscope |
| 02/06/2001 | US6184524 Automated set up of an energy filtering transmission electron microscope |
| 11/08/2000 | EP1050741A1 Calibration of magnetic force or scanning hall probe microscopes |
| 11/02/2000 | WO2000020823B1 Atomic force microscope for profiling high aspect ratio samples |
| 10/31/2000 | US6140644 Inspection apparatus and method using a particle beam |
| 09/21/2000 | WO2000020823A3 Atomic force microscope for profiling high aspect ratio samples |
| 09/06/2000 | EP1032828A1 Electrostatic force detector with cantilever for an electrostatic force microscope |
| 08/31/2000 | DE10000362A1 Detecting structured substrates defects involves scanning charged particle beam over substrate with optical column stationary w.r.t. surface, comparing detected images with reference |
| 07/13/2000 | DE10000361A1 Means for detection of microstructure defects in semiconductor wafers around through contact holes using a charged particle beam scanning system which involves negatively charging the zone around the contact hole prior to scanning |
| 06/28/2000 | EP1012584A2 Object inspection and/or modification system and method |
| 05/17/2000 | EP0808477B1 Fabrication and use of a sub-micron dimensional standard |
| 04/13/2000 | WO2000020823A2 Atomic force microscope for profiling high aspect ratio samples |