| Patents for G01Q 40 - Calibration, e.g. of probes (498) |
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| 04/02/2009 | US20090084952 Apparatus and method for scanning capacitance microscopy and spectroscopy |
| 03/25/2009 | CN101395676A Method for operating a measurement system containing a scanning probe microscope, and measurement system |
| 03/05/2009 | US20090061506 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 02/24/2009 | US7493794 Method of calibrating a caliper AFM |
| 02/12/2009 | WO2008157373A3 Position control for scanning probe spectroscopy |
| 02/03/2009 | US7485856 Scanning probe microscopy inspection and modification system |
| 01/06/2009 | US7472576 Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use |
| 12/24/2008 | WO2008157373A2 Position control for scanning probe spectroscopy |
| 12/18/2008 | US20080308726 Method for the Operation of a Measurement System With a Scanning Probe Microscope and a Measurement System |
| 12/18/2008 | US20080308718 Position control for scanning probe spectroscopy |
| 12/10/2008 | CN101319980A Micro/nano scale ultra-micro force measuring device and force value tracing method |
| 11/27/2008 | WO2008079349A3 Systems and methods for utilizing scanning probe shape characterization |
| 11/20/2008 | US20080288186 Dynamic-Mode Atomic-Force-Microscope Probe (Tip) Vibration Simulation Method, Program, Recording Medium, And Vibration Simulator |
| 11/19/2008 | EP1991991A2 Method and apparatus for characterizing a probe tip |
| 11/04/2008 | US7444857 Software synchronization of multiple scanning probes |
| 10/23/2008 | WO2008073213A3 Calibrating force and displacement sensors of mechanical probes |
| 10/16/2008 | WO2008079349A9 Systems and methods for utilizing scanning probe shape characterization |
| 10/15/2008 | EP1979913A1 Method for operating a measurement system containing a scanning probe microscope, and measurement system |
| 10/14/2008 | US7434445 Apparatus for determining cantilever parameters |
| 09/09/2008 | US7421899 Resonance method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators |
| 08/21/2008 | WO2008099136A1 Flow velocity and pressure measurement using a vibrating cantilever device |
| 08/21/2008 | CA2715504A1 Flow velocity and pressure measurement using a vibrating cantilever device |
| 08/14/2008 | WO2008060624A3 Apparatus and method for scanning capacitance microscopy and spectroscopy |
| 07/08/2008 | US7395697 Force method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators |
| 07/03/2008 | WO2008079349A2 Systems and methods for utilizing scanning probe shape characterization |
| 06/26/2008 | US20080154521 Systems and methods for utilizing scanning probe shape characterization |
| 06/25/2008 | EP1535300A4 Improved method and system for scanning apertureless fluorescence microscope |
| 06/19/2008 | WO2008073213A2 Calibrating force and displacement sensors of mechanical probes |
| 06/19/2008 | US20080147346 Method and apparatus for aligning patterns on a substrate |
| 06/19/2008 | US20080141764 Method of observing and method of working diamond stylus for working of atomic force microscope |
| 06/12/2008 | US20080134748 Calibrating force and displacement sensors of mechanical probes |
| 05/29/2008 | US20080121028 Scanning Probe Microscopy Inspection and Modification System |
| 05/22/2008 | WO2008060624A2 Apparatus and method for scanning capacitance microscopy and spectroscopy |
| 05/21/2008 | EP1520292A4 Software synchronization of multiple scanning probes |
| 04/03/2008 | US20080078229 Caliper method, system, and apparatus |
| 02/28/2008 | US20080047334 Scanning Microscope With Shape Correction Means |
| 02/13/2008 | EP1315968B1 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 01/17/2008 | US20080011083 Resonance Method for Determining the Spring Constant of Scanning Probe Microscope Cantilevers using MEMS Actuators |
| 01/17/2008 | US20080011046 Displacement Method for Determining the Spring Constant of Scanning Probe Microscope Cantileers using MEMS Actuators |
| 01/17/2008 | US20080011044 Force method for Determining the Spring Constant of Scanning Probe Microscope Cantilevers using MEMS Actuators |
| 12/21/2007 | WO2007145012A1 Probe design support system, probe design support method and probe design support program |
| 12/13/2007 | WO2007098237A3 Method and apparatus for characterizing a probe tip |
| 11/27/2007 | US7301336 Magnetic field generator device for calibration of magnetic force microscope |
| 11/08/2007 | WO2007127817A1 Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument |
| 11/01/2007 | US20070251305 Method and Apparatus for Reducing Lateral Interactive Forces During Operation of a Probe-Based Instrument |
| 10/09/2007 | US7279046 Method and apparatus for aligning patterns on a substrate |
| 10/09/2007 | US7278296 Scanning probe microscope |
| 09/05/2007 | EP1830171A1 Dynamic- mode atomic force- microscope probe(tip) vibration simulation method, program, recording medium, and vibration simulator |
| 08/30/2007 | WO2007098237A2 Method and apparatus for characterizing a probe tip |
| 08/09/2007 | US20070182971 Reference specimen for microscope and manufacturing method thereof |
| 08/07/2007 | US7253645 Detection of defects in patterned substrates |
| 07/24/2007 | US7246513 Lateral calibration device and method |
| 07/12/2007 | WO2007076828A1 Method for operating a measurement system containing a scanning probe microscope, and measurement system |
| 07/04/2007 | CN1991333A Zero-Abbe error measuring system and its method |
| 06/26/2007 | US7234343 Method and apparatus for evanescent filed measuring of particle-solid separation |
| 06/21/2007 | WO2007068612A1 Tool for determining the shape of the probe of an atomic force microscope |
| 06/14/2007 | US20070131249 Probe washing method of scanning probe microscope |
| 05/15/2007 | US7218600 Dielectric constant measuring apparatus, dielectric constant measuring method, and information recording/reproducing apparatus |
| 05/01/2007 | US7210330 Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby |
| 04/24/2007 | US7209596 Method of precision calibration of a microscope and the like |
| 04/12/2007 | DE102006038148A1 Standard-Spezimen zur Evaluierung einer Sondenform und Verfahren zu Evaluierung einer Sondenform Standard specimen for evaluation of a probe form and methods for evaluation of a special form |
| 04/03/2007 | US7198961 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope |
| 03/22/2007 | US20070062252 Noncontact Sensitivity and Compliance Calibration Method for Cantilever-Based Instruments |
| 03/07/2007 | CN1303416C Method for measuring atomic force microscope needle type radius using single wall carbon nano tube |
| 02/22/2007 | US20070040117 Standard specimen for probe shape evaluation and method for evaluating probe shape |
| 02/14/2007 | CN1300562C Model parameter calibrating and nontinear correcting method of piezoelectric actuator in scanning probe microscope |
| 02/01/2007 | US20070022804 Scanning probe microscopy inspection and modification system |
| 12/27/2006 | CN1884964A Nano pitch templet and preparation method thereof |
| 12/19/2006 | US7151244 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining |
| 12/14/2006 | US20060277972 Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby |
| 11/30/2006 | US20060267596 Spring constant calibration device |
| 10/04/2006 | EP1012584A4 Object inspection and/or modification system and method |
| 08/29/2006 | US7096711 Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby |
| 08/24/2006 | US20060185424 Integrated measuring instrument |
| 08/10/2006 | WO2006083191A1 Accurately displacing device |
| 08/09/2006 | EP0839311B1 Inter-atomic measurement technique |
| 07/27/2006 | US20060165957 Method for producing at least one small opening in a layer on a substrate and components produced according ot said method |
| 06/29/2006 | US20060139026 Magnetic field generator device for magnetic force microscope |
| 06/27/2006 | US7066005 Noncontact sensitivity and compliance calibration method for cantilever-based insturments |
| 06/06/2006 | US7057135 Method of precise laser nanomachining with UV ultrafast laser pulses |
| 06/01/2006 | US20060113469 Scanning probe microscope and sample observing method using this and semiconductor device production method |
| 05/18/2006 | US20060101895 Lateral calibration device and method |
| 05/16/2006 | US7045780 Scanning probe microscopy inspection and modification system |
| 05/11/2006 | WO2006049120A1 Dynamic mode atomic force microscope probe vibration simulation method, program, recording medium, and vibration simulator |
| 05/09/2006 | US7041963 Height calibration of scanning probe microscope actuators |
| 03/02/2006 | US20060043257 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining |
| 02/23/2006 | US20060037379 Caliper method, system, and apparatus |
| 02/16/2006 | US20060032296 Software synchronization of multiple scanning probes |
| 02/15/2006 | EP1625349A2 Spring constant calibration device |
| 01/17/2006 | US6986280 Integrated measuring instrument |
| 01/12/2006 | US20060005615 Method and apparatus for evanescent field measuring of particle-solid separation |
| 01/12/2006 | DE19731854B4 Abtastvorrichtung zur Erfassung der Position eines sich bewegenden Objekts Scanning device for detecting the position of a moving object |
| 12/27/2005 | US6978654 Scanning tip orientation adjustment method for atomic force microscopy |
| 12/22/2005 | WO2004104516A8 Spring constant calibration device |
| 12/20/2005 | US6978215 Method of determining of true nonlinearity of scan along a selected direction X or Y in scan microscope |
| 12/13/2005 | US6975129 Electrical scanning probe microscope apparatus |
| 12/06/2005 | US6972405 Nanoscale standard sample and its manufacturing method |
| 11/17/2005 | US20050252282 Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby |
| 10/20/2005 | WO2005098869A1 Scanning probe microscope with integrated calibration |
| 10/20/2005 | WO2005097669A1 Method for modifying existing micro- and nano-structures using a near-field scanning optical microscope |