| Patents for G01Q 40 - Calibration, e.g. of probes (498) |
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| 03/05/2015 | US20150060654 Charged particle beam device and arithmetic device |
| 02/24/2015 | US8959980 Nanomechanical testing system |
| 02/11/2015 | EP2834652A1 Calibration of a mechanical property of spm cantilevers |
| 01/08/2015 | US20150013038 Probe calibration |
| 01/08/2015 | US20150013037 Thermal Measurements Using Multiple Frequency Atomic Force Microscopy |
| 12/16/2014 | US8914910 Probe calibration |
| 10/23/2014 | US20140317791 Nanometer standard prototype and method for manufacturing nanometer standard prototype |
| 09/17/2014 | EP2778649A1 Nanometer standard prototype and method for manufacturing nanometer standard prototype |
| 09/09/2014 | US8832859 Probe alignment tool for the scanning probe microscope |
| 08/13/2014 | CN102590532B 用于测量装置启动的方法 A method for starting measurement device |
| 07/30/2014 | CN103954600A 一种荧光纳米标尺部件及其制作方法 A fluorescent nano-scale components and production methods |
| 06/05/2014 | WO2014083358A1 Probe calibration or measurement routine |
| 05/27/2014 | US8739310 Characterization structure for an atomic force microscope tip |
| 04/30/2014 | CN103760384A Manufacturing method of templates for calibrating precision microscopy equipment limiting resolution |
| 03/20/2014 | WO2014041677A1 Force probe, measurement device, and measurement method |
| 03/20/2014 | WO2014041331A1 Torsional and lateral stiffness measurement |
| 02/11/2014 | US8650661 Method and apparatus for characterizing a probe tip |
| 01/30/2014 | WO2014016526A1 Device and method for characterizing a sample using localized measurements |
| 01/02/2014 | DE102013106816A1 Scanning sample lithography device for reading and writing of structures in nanometer range, has peak portion that is calibrated to substrate described, adjusted and aligned relative to each other |
| 11/27/2013 | CN103412149A Force measuring sensitivity calibration device applied to laser force measuring system of atomic force microscope and calibration method based on calibration device |
| 10/30/2013 | EP2657711A1 Characterization structure for an atomic force microscope tip |
| 10/30/2013 | EP2657710A1 Characterization structure for an atomic force microscope tip |
| 10/24/2013 | DE102010063033B4 Verfahren zur Inbetriebnahme eines Messgeräts Procedures for placing a measuring instrument |
| 10/10/2013 | WO2013151425A1 Calibration of a mechanical property of spm cantilevers |
| 10/09/2013 | EP2648005A1 Calibration of a mechanical property of SPM cantilevers |
| 10/09/2013 | EP1520292B1 Software synchronization of multiple scanning probes |
| 10/02/2013 | EP2643658A1 Mechanical testing instruments including onboard data |
| 09/26/2013 | WO2013142489A1 Scanning probe microscope with improved feature location capabilities |
| 08/08/2013 | WO2013115638A1 Probe calibration |
| 08/06/2013 | US8499621 Scanning probe microscopy inspection and modification system |
| 07/31/2013 | EP2620779A1 Probe calibration |
| 07/16/2013 | US8487253 Scanning electron microscope |
| 07/11/2013 | WO2013102561A1 Method for measuring the near-field signal |
| 07/10/2013 | EP2613159A1 Method for measuring the near-field signal |
| 06/27/2013 | US20130166240 Pattern Dimension Measurement Method Using Electron Microscope, Pattern Dimension Measurement System, and Method for Monitoring Changes in Electron Microscope Equipment Over Time |
| 05/16/2013 | WO2013069067A1 Nanometer standard prototype and method for manufacturing nanometer standard prototype |
| 05/14/2013 | US8443460 Method and structure for characterising an atomic force microscopy tip |
| 04/23/2013 | US8424364 Active scanner bow compensator |
| 04/11/2013 | WO2013050770A1 Method of investigating a sample surface by scanning probe microscopy which adjusts probe misalignments |
| 04/10/2013 | EP2577326A2 Resonance compensation in scanning probe microscopy |
| 02/12/2013 | US8371184 Flow velocity and pressure measurement using a vibrating cantilever device |
| 02/05/2013 | US8368017 Method for the operation of a measurement system with a scanning probe microscope and a measurement system |
| 12/26/2012 | CN102844665A Alignment and anti-drift mechanism |
| 12/13/2012 | US20120317684 Using optical deflection of cantilevers for alignment |
| 11/21/2012 | CN101395676B Method for operating a measurement system containing a scanning probe microscope, and measurement system |
| 09/26/2012 | CN102692523A Method of measuring vibration characteristics of cantilever |
| 09/26/2012 | CN101473384B Method and apparatus for characterizing a probe tip |
| 09/19/2012 | EP2500684A1 Method of calibrating surface texture measurement device |
| 07/18/2012 | CN102590532A Method for start-up of a measuring device |
| 06/14/2012 | DE102010063033A1 Verfahren zur Inbetriebnahme eines Messgeräts Procedures for placing a measuring instrument |
| 06/06/2012 | CN202267685U 大型自动扫描设备扫描探头离合装置 Large automatic scanning device scans the probe clutch device |
| 06/05/2012 | US8196216 Systems for assessing and enhancing the performance of scanning probe microscopes by quantifying and enforcing symmetries and periodicities in two dimensions |
| 05/18/2012 | WO2012064193A1 Method for determining a spring constant for a deformable scanning probe microscope element, and scanning probe microscope and calibration device arranged for determining a spring constant for a probe element |
| 05/09/2012 | EP2450687A1 Method for determining the spring constant of a cantilever device |
| 03/29/2012 | WO2011149684A3 Resonance compensation in scanning probe microscopy |
| 03/15/2012 | US20120061566 Scanning electron microscope |
| 02/07/2012 | US8109135 Cantilever assembly |
| 02/02/2012 | DE19802848B4 Verfahren und Vorrichtung zum Testen eines Substrats Method and apparatus for testing a substrate |
| 12/20/2011 | US8080790 Scanning electron microscope |
| 12/08/2011 | US20110302676 Method and Device for Examining a Sample with a Probe Microscope |
| 12/01/2011 | WO2011149684A2 Resonance compensation in scanning probe microscopy |
| 11/29/2011 | US8069491 Probe testing structure |
| 10/25/2011 | US8043652 Method and apparatus for aligning patterns on a substrate |
| 10/18/2011 | US8037736 Non-linearity determination of positioning scanner of measurement tool |
| 10/11/2011 | US8034395 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 09/28/2011 | EP2368152A1 Method for determining a repair shape of a defect on or in the vicinity of an edge of a substrate of a photomask |
| 09/07/2011 | EP2363684A1 Calibration cell |
| 07/28/2011 | US20110185458 Force, pressure, or stiffness measurement or calibration using graphene or other sheet membrane |
| 04/28/2011 | WO2011049577A1 Alignment and anti-drift mechanism |
| 04/20/2011 | EP2312325A1 Method and structure for the characterisation of an atomic force microscope tip |
| 04/05/2011 | US7921465 Nanotip repair and characterization using field ion microscopy |
| 02/03/2011 | DE102010025254A1 Normal- und Lateralkraft- sowie Elastizitäts- und Spitzenradien-Standards bei der Rasterkraftmikroskopie Normal and Lateralkraft- and elasticity and tip radii standards in atomic force microscopy |
| 12/22/2010 | CN101319980B Micro/nano scale ultra-micro force measuring device and force value tracing method |
| 12/21/2010 | US7856665 Apparatus and method for scanning capacitance microscopy and spectroscopy |
| 12/14/2010 | US7853422 Dynamic-mode atomic-force-microscope probe (Tip) vibration simulation method, program, recording medium, and vibration simulator |
| 12/09/2010 | US20100313312 Method and Apparatus for Characterizing a Probe Tip |
| 11/10/2010 | CN1991333B Zero-Abbe error measuring system and its method |
| 11/04/2010 | US20100280601 Method for precipitating mono and multiple layers of organophosphoric and organophosphonic acids and the salts thereof in addition to use thereof |
| 09/28/2010 | US7804067 Method of observing and method of working diamond stylus for working of atomic force microscope |
| 09/16/2010 | US20100235955 Vibration compensation in probe microscopy |
| 09/02/2010 | US20100223697 Systems for assessing and enhancing the performance of scanning probe microscopes by quantifying and enforcing symmetries and periodicities in two dimensions |
| 07/29/2010 | US20100192266 System and method for improving the precision of nanoscale force and displacement measurements |
| 07/01/2010 | WO2010072279A1 Method for determining a repair shape of a defect on or in the vicinity of an edge of a substrate of a photomask |
| 06/22/2010 | US7740896 Precipitation occurs on substrate surfaces of oxides, nitrides, or carbides of metals and semiconductors, comprising use of water-soluble salts of compounds for treatment of these surfaces as sensor platforms, implants, medical devices |
| 05/20/2010 | DE112008001611T5 Positionssteuerung für die Rastersondenspektroskopie Position control for scanning probe spectroscopy |
| 03/25/2010 | US20100071477 Flow Velocity and Pressure Measurement Using a Vibrating Cantilever Device |
| 03/23/2010 | US7681432 Calibrating force and displacement sensors of mechanical probes |
| 11/25/2009 | EP1110232B1 Automated set up of an energy filtering transmission electron microscope |
| 11/11/2009 | EP1435003B1 Dielectric constant measuring apparatus and dielectric constant measuring method |
| 10/27/2009 | US7607342 Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument |
| 10/22/2009 | WO2008099136A8 Flow velocity and pressure measurement using a vibrating cantilever device |
| 10/21/2009 | EP2109760A1 Flow velocity and pressure measurement using a vibrating cantilever device |
| 09/10/2009 | US20090224170 Scanning electron microscope |
| 08/25/2009 | US7578176 Systems and methods for utilizing scanning probe shape characterization |
| 08/04/2009 | US7569077 Probe positional error from comparising image sequence of scans to identify differences between positions of a portion of a reference specimen characteristic in the images; probe moved to target location for spectroscopic analysis, as a function of the determined probe positional error; nanotechnolgy |
| 07/21/2009 | US7562564 Scanning probe microscope and sample observing method using this and semiconductor device production method |
| 07/01/2009 | CN101473384A Method and apparatus for characterizing a probe tip |
| 04/23/2009 | US20090106868 Atomic force microscope tip shape determination tool |
| 04/14/2009 | US7517546 Precipitation occurs on substrate surfaces of oxides, nitrides, or carbides of metals and semiconductors, comprising use of water-soluble salts of compounds for treatment of these surfaces as sensor platforms, implants, medical devices |
| 04/08/2009 | CN100477067C Software synchronization of multiple scanning probes |