| Patents for G01Q 40 - Calibration, e.g. of probes (498) |
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| 10/18/2005 | US6955078 Caliper method, system, and apparatus |
| 10/11/2005 | US6953927 Method and system for scanning apertureless fluorescence microscope |
| 10/06/2005 | WO2005092559A1 Method and precise laser nanomachining with uv ultrafast laser pulses |
| 10/06/2005 | US20050221577 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope |
| 10/06/2005 | US20050220362 Method of precision calibration of a microscope and the like |
| 10/06/2005 | DE102004012268A1 A micro/nano region thin film tensile test planarity measurement procedure observes three dimensional movement of marker atoms using scanning tunnelling microscopy |
| 10/05/2005 | CN1221780C Detector |
| 10/04/2005 | US6951130 Software synchronization of multiple scanning probes |
| 09/15/2005 | WO2004104516A3 Spring constant calibration device |
| 09/15/2005 | US20050200841 Detection of defects in patterned substrates |
| 09/08/2005 | US20050194534 Method of operating a probe microscope |
| 09/08/2005 | US20050194365 Method of precise laser nanomachining with UV ultrafast laser pulses |
| 09/07/2005 | CN1666312A Software synchronization of multiple scanning probes |
| 08/31/2005 | EP1568060A2 One dimensional beam blanker array |
| 08/23/2005 | US6933499 Electron microscope, method for operating the same, and computer-readable medium |
| 08/11/2005 | US20050172703 Scanning probe microscopy inspection and modification system |
| 08/03/2005 | CN1648635A Method for measuring atomic force microscope needle type radius using single wall carbon nano tube |
| 08/02/2005 | US6924488 Charged-particle beam apparatus equipped with aberration corrector |
| 07/20/2005 | EP1555676A2 Method of operating a probe microscope |
| 07/05/2005 | US6914441 Detection of defects in patterned substrates |
| 06/28/2005 | US6911832 Focused ion beam endpoint detection using charge pulse detection electronics |
| 06/23/2005 | WO2005057587A1 Height calibration of scanning probe microscope actuators |
| 06/21/2005 | US6909983 Calibration of an analogue probe |
| 06/09/2005 | US20050120781 Scanning probe microscope |
| 06/01/2005 | EP1535300A2 Improved method and system for scanning apertureless fluorescence microscope |
| 05/26/2005 | US20050109925 Height calibration of scanning probe microscope actuators |
| 05/12/2005 | WO2004099712A3 Nanomanipulation on a sample surface using atomic force microscopy |
| 05/12/2005 | US20050097944 Software synchronization of multiple scanning probes |
| 05/04/2005 | EP1527012A2 Method for producing at least one small opening in a layer on a substrate and components produced according to said method |
| 04/26/2005 | US6885012 Convergent charged particle beam apparatus and inspection method using same |
| 04/19/2005 | US6880389 Software synchronization of multiple scanning probes |
| 04/12/2005 | US6878935 Method of measuring sizes in scan microscopes |
| 04/06/2005 | EP1520292A2 Software synchronization of multiple scanning probes |
| 03/31/2005 | WO2004012201A3 Method of and apparatus for calibrating cantilevers |
| 03/22/2005 | US6869480 Method for the production of nanometer scale step height reference specimens |
| 03/10/2005 | WO2004015455A3 Improved method and system for scanning apertureless fluorescence microscope |
| 03/08/2005 | US6864488 Charged particle beam exposure method and apparatus |
| 03/08/2005 | US6862924 Augmenting reality system for real-time nanomanipulation using atomic force microscopy |
| 03/01/2005 | US6861648 Scanning probe microscopy inspection and modification system |
| 02/10/2005 | WO2004014785A3 Method for producing at least one small opening in a layer on a substrate and components produced according to said method |
| 02/10/2005 | US20050030054 Electrical scanning probe microscope apparatus |
| 01/27/2005 | US20050017162 Nanoscale standard sample and its manufacturing method |
| 01/20/2005 | US20050012512 Focused ion beam endpoint detection using charge pulse detection electronics |
| 01/06/2005 | US20050000275 Scanning tip orientation adjustment method for atomic force microscopy |
| 01/05/2005 | CN1560593A Model parameter calibrating and nontinear correcting method of piezoelectric actuator in scanning probe microscope |
| 12/30/2004 | US20040263185 Dielectric constant measuring apparatus, dielectric constant measuring method, and information recording/reproducing apparatus |
| 12/02/2004 | WO2004104516A2 Spring constant calibration device |
| 11/30/2004 | US6823723 Method and apparatus for performing atomic force microscopy measurements |
| 11/30/2004 | US6823713 Scanning tip orientation adjustment method for atomic force microscopy |
| 11/18/2004 | WO2004099712A2 Nanomanipulation on a sample surface using atomic force microscopy |
| 11/10/2004 | CN1544913A Nonlinear correction method for piezoelectric ceramic tube scanner |
| 11/04/2004 | US20040216517 Augmenting reality system for real-time nanomanipulation using atomic force microscopy |
| 10/28/2004 | US20040211919 Convergent charged particle beam apparatus and inspection method using same |
| 10/19/2004 | US6807314 Method of precision calibration of a microscope and the like |
| 10/14/2004 | WO2004051696A3 One dimensional beam blanker array |
| 10/14/2004 | US20040200261 Scanning tip orientation adjustment method for atomic force microscopy |
| 10/12/2004 | US6803582 One dimensional beam blanker array |
| 09/30/2004 | US20040191809 Methods for registration at the nanometer scale |
| 09/02/2004 | WO2004074816A1 Scanning probe microscope and sample observing method using this and semiconductor device production method |
| 08/12/2004 | WO2003083876A3 Method and apparatus for aligning patterns on a substrate |
| 08/03/2004 | US6770868 Critical dimension scanning electron microscope |
| 07/27/2004 | US6768113 Height of samples varies due to warping |
| 07/07/2004 | EP1435003A2 Dielectric constant measuring apparatus and dielectric constant measuring method |
| 06/17/2004 | WO2004051696A2 One dimensional beam blanker array |
| 06/17/2004 | CA2507734A1 One dimensional beam blanker array |
| 06/15/2004 | US6750447 Calibration standard for high resolution electron microscopy |
| 06/10/2004 | US20040108459 Electron microscope, method for operating the same, and computer-readable medium |
| 06/03/2004 | US20040104353 One dimensional beam blanker array |
| 06/01/2004 | US6744057 Convergent charged particle beam apparatus and inspection method using same |
| 05/27/2004 | WO2004015455A9 Improved method and system for scanning apertureless fluorescence microscope |
| 05/13/2004 | WO2004006302A3 Software synchronization of multiple scanning probes |
| 05/13/2004 | US20040093179 Calibration of an analogue probe |
| 05/13/2004 | US20040089816 Method and system for scanning apertureless fluorescence microscope |
| 05/12/2004 | CN1495407A Detector |
| 05/04/2004 | US6730906 Method and apparatus for testing a substrate |
| 04/15/2004 | WO2003023423A3 Dielectric constant measuring apparatus and dielectric constant measuring method |
| 04/13/2004 | US6720553 Tip calibration standard and method for tip calibration |
| 03/23/2004 | US6710339 Scanning probe microscope |
| 03/17/2004 | CN1142411C Scale for sensing moving object, and apparatus for sensing moving object using same |
| 02/26/2004 | US20040036030 Charged-particle beam apparatus equipped with aberration corrector |
| 02/26/2004 | DE10236150A1 Method for forming opening in semiconductor substrate layer for manufacture of calibration standard for scanning microscopy, micromechanical sensor or other components |
| 02/19/2004 | WO2004015455A2 Improved method and system for scanning apertureless fluorescence microscope |
| 02/19/2004 | WO2004014785A2 Method for producing at least one small opening in a layer on a substrate and components produced according to said method |
| 02/18/2004 | CN1138980C Electrostatic force detector with cantilever for electrostatic force microscope and its detecting method |
| 02/12/2004 | US20040025578 Software synchronization of multiple scanning probes |
| 02/05/2004 | WO2004012201A2 Method of and apparatus for calibrating cantilevers |
| 02/05/2004 | US20040021075 Method of measuring sizes in scan microscopes |
| 01/29/2004 | WO2004010075A1 Method for the production of nanometer scale step height reference specimens |
| 01/15/2004 | WO2004006302A2 Software synchronization of multiple scanning probes |
| 12/16/2003 | US6664546 In-situ probe for optimizing electron beam inspection and metrology based on surface potential |
| 12/16/2003 | US6664532 Method of precision calibration of magnification of scanning microscopes with the use of test diffraction grating |
| 12/10/2003 | EP1368615A1 Calibration of an analogue probe |
| 11/18/2003 | US6650129 Method of testing semiconductor device |
| 11/13/2003 | US20030210062 Method of testing semiconductor device |
| 11/11/2003 | US6646737 Calibration standard comprises the traceably measured thickness of layer |
| 10/28/2003 | US6639400 Method and apparatus for measuring magnetic head |
| 10/23/2003 | US20030197130 Convergent charged particle beam apparatus and inspection method using same |
| 10/16/2003 | US20030193022 Calibration standard for high resolution electron microscopy |
| 10/14/2003 | US6633660 Near-field tomography |
| 10/09/2003 | WO2003083876A2 Method and apparatus for aligning patterns on a substrate |