Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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05/29/2001 | US6237619 Micro-machined device for fluids and method of manufacture |
05/23/2001 | EP0914563B1 Piezo-electric operated microvalve |
05/23/2001 | DE19949912A1 Device for transmitting force e.g. for valve or pump, uses driving mechanism for generating force to seal larger opening with smaller opening serving as force-decoupling window |
05/17/2001 | WO2001035484A1 Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology |
05/08/2001 | US6227809 Method for making micropumps |
04/24/2001 | CA2069894C Valve equipped with a position detector and a micropump incorporating said valve |
04/19/2001 | WO2001027026A1 Electromechanical component and method for producing said component |
04/19/2001 | WO2001027025A1 Electro-mechanical component and method for producing the same |
04/19/2001 | WO2001026813A2 Microfluidics without electrically of mechanically operated pumps |
04/10/2001 | US6215221 Electrostatic/pneumatic actuators for active surfaces |
04/03/2001 | US6211598 In-plane MEMS thermal actuator and associated fabrication methods |
03/29/2001 | WO2001021988A1 A normally closed in-channel micro check valve |
03/29/2001 | WO2001021962A1 Addressable valve arrays for proportional pressure or flow control |
03/29/2001 | CA2385855A1 Addressable valve arrays for proportional pressure or flow control |
03/28/2001 | EP0914564B1 Piezo-electrically actuated microvalve |
03/22/2001 | WO2001019516A1 Suspension handling system |
03/21/2001 | EP1085219A2 In-plane MEMS thermal actuator and associated fabrication methods |
03/15/2001 | WO2001017797A1 Microfabrication methods and devices |
03/13/2001 | CA2317246A1 In-plane mems thermal actuator and associated fabrication methods |
03/07/2001 | EP1081391A2 Microelectromechanical valve having single crystalline components and associated fabrication method |
03/01/2001 | CA2317069A1 Microelectromechanical valve having single crystalline components and associated fabrication method |
02/28/2001 | EP1078167A1 Microvalve |
02/27/2001 | US6194066 Microscopic tube devices and method of manufacture |
02/21/2001 | EP1076767A1 Microvalve |
02/14/2001 | EP1075602A1 Microvalve battery |
02/08/2001 | WO2001009521A1 Microvalve for controlling fluid flow |
02/08/2001 | WO2001009520A1 Microvalve for controlling fluid flow |
02/08/2001 | WO2001009519A1 Microvalve for controlling fluid flow |
02/06/2001 | US6182941 Micro-valve with capacitor plate position detector |
02/06/2001 | US6182517 Burette tip |
01/25/2001 | WO2001006134A1 System and method for manipulating and controlling fluid flow over a surface |
01/18/2001 | WO2001004524A1 Apparatus and method for mounting micromechanical fluid control components |
01/11/2001 | WO2001002737A1 Polymer valves |
01/04/2001 | WO2001001025A2 Microfabricated elastomeric valve and pump systems |
01/04/2001 | CA2767084A1 Microfabricated elastomeric valve and pump systems |
01/03/2001 | EP1065378A2 Microfabricated elastomeric valve and pump systems |
01/02/2001 | US6168395 Bistable microactuator with coupled membranes |
12/28/2000 | WO2000078453A1 Valves enabling a liquid to be directed in a diagnostic chart, diagnostic charts and diagnostic device comprising several charts |
12/20/2000 | CN1277731A Thermal arched beam microelectromechanical devices and associated fabrication method |
12/14/2000 | WO2000074532A1 Microvalve controller for pneumatically contoured support |
12/12/2000 | US6160243 Apparatus and method for controlling fluid in a micromachined boiler |
12/12/2000 | US6158712 Multilayer integrated assembly having an integral microminiature valve |
12/07/2000 | DE19921659A1 Microvalve assembly, e.g. for pneumatic system, has housing with molded interconnect device structure for electrically connecting electronic drive components and microvalves |
11/30/2000 | DE19921660A1 Micro valve assembly has micro valve fixed on housing by valve support which defines fluid duct system for valve and uncouples micro valve from mechanical and thermal influences of housing |
11/28/2000 | US6152181 Microdevices based on surface tension and wettability that function as sensors, actuators, and other devices |
11/21/2000 | US6149123 Integrated electrically operable micro-valve |
11/14/2000 | US6146103 Micromachined magnetohydrodynamic actuators and sensors |
11/08/2000 | EP0916028B1 Valve arrangement |
11/07/2000 | US6143248 For controlling fluid flow from microreservoirs into transfer channels using capillary valving mechanisms for use in apparatus useful for performing microanalytic and microsynthetic analyses and procedures |
11/07/2000 | US6142444 Piezoelectrically actuated microvalve |
11/02/2000 | EP1048855A1 Thermohydraulic actuator for micromovements |
11/02/2000 | EP0866919B1 Microvalve |
10/31/2000 | US6141497 Multilayer micro-gas rheostat with electrical-heater control of gas flow |
10/25/2000 | EP1046823A2 Valve apparatus for adjusting parallel flows, method for manufacturing a valve member of said apparatus, method for adjusting said flows as well as method for washing said apparatus |
10/24/2000 | US6135043 Silicon MEMS-based polymer ejector for drag reduction of undersea vehicles |
10/17/2000 | US6131880 Microvalve and method for manufacturing a microvalve |
10/17/2000 | US6131879 Piezoelectrically actuated microvalve |
10/10/2000 | US6130098 Moving microdroplets |
10/10/2000 | US6129331 Low-power thermopneumatic microvalve |
10/10/2000 | US6129002 Valve arrangement, especially for a pneumatic control system |
10/04/2000 | EP1040736A1 Synthetic jet actuators for cooling heated bodies and environments |
10/04/2000 | EP0966609B1 Micromembrane pump |
10/03/2000 | US6126140 Monolithic bi-directional microvalve with enclosed drive electric field |
09/26/2000 | US6123316 Conduit system for a valve array |
09/26/2000 | US6123145 Synthetic jet actuators for cooling heated bodies and environments |
09/26/2000 | US6123107 Apparatus and method for mounting micromechanical fluid control components |
09/21/2000 | DE19909069A1 Microvalue assembly with micromechanically mfd. microvalve chip for 2/2 and 3/2 fluid flow control |
09/12/2000 | US6116257 Micromotors, linear motors, micropumps, methods of using the same, microactuators, methods of controlling flow properties of fluids, and apparatuses for controlling flow properties of fluids |
09/08/2000 | WO2000052376A1 Microfluidic connector |
09/08/2000 | WO2000052341A1 Microvalve system |
09/06/2000 | CN1265451A Semiconductor device, microdrive, microvalve and microrelay using the same and manufacture thereof |
09/05/2000 | US6114794 Thermal arched beam microelectromechanical valve |
09/05/2000 | US6113722 Microscopic tube devices and method of manufacture |
08/30/2000 | EP1031735A2 Microactuator |
08/30/2000 | EP1031734A2 Assembly of etched sheets forming a fluidic module |
08/15/2000 | US6102068 Selector valve assembly |
08/10/2000 | WO2000029770A3 Parylene micro check valve and fabrication method thereof |
08/09/2000 | EP1025367A1 Coupling for microcomponents |
07/12/2000 | EP1017984A1 Moving microdroplets |
07/06/2000 | WO2000039469A1 Connection coupling for plate-shaped microcomponents |
07/06/2000 | WO2000039467A1 Electrostatic/pneumatic actuators for active surfaces |
07/06/2000 | WO2000014415A3 Proportional micromechanical device |
07/04/2000 | US6082185 Disposable fluidic circuit cards |
06/29/2000 | DE19860220A1 Anschlußkupplung für plättchenförmige Mikrokomponenten Connection coupling for platelet-shaped micro components |
06/21/2000 | DE19856583A1 Mikromechanische Aktorstruktur und Mikroventil Micromechanical actuator structure and microvalves |
06/20/2000 | US6076555 Miniaturized valve mechanism |
06/14/2000 | EP1008765A2 Micromechanical actuator structure and microvalve |
06/14/2000 | EP1008161A1 Thermal arched beam microelectromechanical devices and associated fabrication methods |
06/14/2000 | EP1008146A4 Micro gas rheostat |
06/14/2000 | EP1008146A1 Micro gas rheostat |
06/14/2000 | EP1007873A1 Thermal microvalves |
06/08/2000 | WO2000032972A1 Micro-electromechanical block regulating fluid flow |
06/06/2000 | US6070851 Thermally buckling linear micro structure |
06/02/2000 | WO2000031422A1 Interconnection support for plate-like microcomponents |
06/02/2000 | WO2000007735A3 Micromachined acoustic ejectors and applications |
05/30/2000 | US6068751 Microfluidic valve and integrated microfluidic system |
05/30/2000 | US6068010 Microvalve and microthruster for satellites and methods of making and using the same |
05/25/2000 | WO2000029770A2 Parylene micro check valve and fabrication method thereof |
05/25/2000 | DE19946003A1 Piezoelectrically activated microvalve for triggering dimensional change in a machined part by applying an electrical voltage includes a piezoelectrically activated actuator, a transmission gearing and a valve lock. |
05/25/2000 | DE19854096A1 Connection carrier for plate shaped micro-components, comprises at least one carrier rail fixed to a carrier plate, with a slot for a micro-component insert edge. |