Patents
Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879)
05/2001
05/29/2001US6237619 Micro-machined device for fluids and method of manufacture
05/23/2001EP0914563B1 Piezo-electric operated microvalve
05/23/2001DE19949912A1 Device for transmitting force e.g. for valve or pump, uses driving mechanism for generating force to seal larger opening with smaller opening serving as force-decoupling window
05/17/2001WO2001035484A1 Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology
05/08/2001US6227809 Method for making micropumps
04/2001
04/24/2001CA2069894C Valve equipped with a position detector and a micropump incorporating said valve
04/19/2001WO2001027026A1 Electromechanical component and method for producing said component
04/19/2001WO2001027025A1 Electro-mechanical component and method for producing the same
04/19/2001WO2001026813A2 Microfluidics without electrically of mechanically operated pumps
04/10/2001US6215221 Electrostatic/pneumatic actuators for active surfaces
04/03/2001US6211598 In-plane MEMS thermal actuator and associated fabrication methods
03/2001
03/29/2001WO2001021988A1 A normally closed in-channel micro check valve
03/29/2001WO2001021962A1 Addressable valve arrays for proportional pressure or flow control
03/29/2001CA2385855A1 Addressable valve arrays for proportional pressure or flow control
03/28/2001EP0914564B1 Piezo-electrically actuated microvalve
03/22/2001WO2001019516A1 Suspension handling system
03/21/2001EP1085219A2 In-plane MEMS thermal actuator and associated fabrication methods
03/15/2001WO2001017797A1 Microfabrication methods and devices
03/13/2001CA2317246A1 In-plane mems thermal actuator and associated fabrication methods
03/07/2001EP1081391A2 Microelectromechanical valve having single crystalline components and associated fabrication method
03/01/2001CA2317069A1 Microelectromechanical valve having single crystalline components and associated fabrication method
02/2001
02/28/2001EP1078167A1 Microvalve
02/27/2001US6194066 Microscopic tube devices and method of manufacture
02/21/2001EP1076767A1 Microvalve
02/14/2001EP1075602A1 Microvalve battery
02/08/2001WO2001009521A1 Microvalve for controlling fluid flow
02/08/2001WO2001009520A1 Microvalve for controlling fluid flow
02/08/2001WO2001009519A1 Microvalve for controlling fluid flow
02/06/2001US6182941 Micro-valve with capacitor plate position detector
02/06/2001US6182517 Burette tip
01/2001
01/25/2001WO2001006134A1 System and method for manipulating and controlling fluid flow over a surface
01/18/2001WO2001004524A1 Apparatus and method for mounting micromechanical fluid control components
01/11/2001WO2001002737A1 Polymer valves
01/04/2001WO2001001025A2 Microfabricated elastomeric valve and pump systems
01/04/2001CA2767084A1 Microfabricated elastomeric valve and pump systems
01/03/2001EP1065378A2 Microfabricated elastomeric valve and pump systems
01/02/2001US6168395 Bistable microactuator with coupled membranes
12/2000
12/28/2000WO2000078453A1 Valves enabling a liquid to be directed in a diagnostic chart, diagnostic charts and diagnostic device comprising several charts
12/20/2000CN1277731A Thermal arched beam microelectromechanical devices and associated fabrication method
12/14/2000WO2000074532A1 Microvalve controller for pneumatically contoured support
12/12/2000US6160243 Apparatus and method for controlling fluid in a micromachined boiler
12/12/2000US6158712 Multilayer integrated assembly having an integral microminiature valve
12/07/2000DE19921659A1 Microvalve assembly, e.g. for pneumatic system, has housing with molded interconnect device structure for electrically connecting electronic drive components and microvalves
11/2000
11/30/2000DE19921660A1 Micro valve assembly has micro valve fixed on housing by valve support which defines fluid duct system for valve and uncouples micro valve from mechanical and thermal influences of housing
11/28/2000US6152181 Microdevices based on surface tension and wettability that function as sensors, actuators, and other devices
11/21/2000US6149123 Integrated electrically operable micro-valve
11/14/2000US6146103 Micromachined magnetohydrodynamic actuators and sensors
11/08/2000EP0916028B1 Valve arrangement
11/07/2000US6143248 For controlling fluid flow from microreservoirs into transfer channels using capillary valving mechanisms for use in apparatus useful for performing microanalytic and microsynthetic analyses and procedures
11/07/2000US6142444 Piezoelectrically actuated microvalve
11/02/2000EP1048855A1 Thermohydraulic actuator for micromovements
11/02/2000EP0866919B1 Microvalve
10/2000
10/31/2000US6141497 Multilayer micro-gas rheostat with electrical-heater control of gas flow
10/25/2000EP1046823A2 Valve apparatus for adjusting parallel flows, method for manufacturing a valve member of said apparatus, method for adjusting said flows as well as method for washing said apparatus
10/24/2000US6135043 Silicon MEMS-based polymer ejector for drag reduction of undersea vehicles
10/17/2000US6131880 Microvalve and method for manufacturing a microvalve
10/17/2000US6131879 Piezoelectrically actuated microvalve
10/10/2000US6130098 Moving microdroplets
10/10/2000US6129331 Low-power thermopneumatic microvalve
10/10/2000US6129002 Valve arrangement, especially for a pneumatic control system
10/04/2000EP1040736A1 Synthetic jet actuators for cooling heated bodies and environments
10/04/2000EP0966609B1 Micromembrane pump
10/03/2000US6126140 Monolithic bi-directional microvalve with enclosed drive electric field
09/2000
09/26/2000US6123316 Conduit system for a valve array
09/26/2000US6123145 Synthetic jet actuators for cooling heated bodies and environments
09/26/2000US6123107 Apparatus and method for mounting micromechanical fluid control components
09/21/2000DE19909069A1 Microvalue assembly with micromechanically mfd. microvalve chip for 2/2 and 3/2 fluid flow control
09/12/2000US6116257 Micromotors, linear motors, micropumps, methods of using the same, microactuators, methods of controlling flow properties of fluids, and apparatuses for controlling flow properties of fluids
09/08/2000WO2000052376A1 Microfluidic connector
09/08/2000WO2000052341A1 Microvalve system
09/06/2000CN1265451A Semiconductor device, microdrive, microvalve and microrelay using the same and manufacture thereof
09/05/2000US6114794 Thermal arched beam microelectromechanical valve
09/05/2000US6113722 Microscopic tube devices and method of manufacture
08/2000
08/30/2000EP1031735A2 Microactuator
08/30/2000EP1031734A2 Assembly of etched sheets forming a fluidic module
08/15/2000US6102068 Selector valve assembly
08/10/2000WO2000029770A3 Parylene micro check valve and fabrication method thereof
08/09/2000EP1025367A1 Coupling for microcomponents
07/2000
07/12/2000EP1017984A1 Moving microdroplets
07/06/2000WO2000039469A1 Connection coupling for plate-shaped microcomponents
07/06/2000WO2000039467A1 Electrostatic/pneumatic actuators for active surfaces
07/06/2000WO2000014415A3 Proportional micromechanical device
07/04/2000US6082185 Disposable fluidic circuit cards
06/2000
06/29/2000DE19860220A1 Anschlußkupplung für plättchenförmige Mikrokomponenten Connection coupling for platelet-shaped micro components
06/21/2000DE19856583A1 Mikromechanische Aktorstruktur und Mikroventil Micromechanical actuator structure and microvalves
06/20/2000US6076555 Miniaturized valve mechanism
06/14/2000EP1008765A2 Micromechanical actuator structure and microvalve
06/14/2000EP1008161A1 Thermal arched beam microelectromechanical devices and associated fabrication methods
06/14/2000EP1008146A4 Micro gas rheostat
06/14/2000EP1008146A1 Micro gas rheostat
06/14/2000EP1007873A1 Thermal microvalves
06/08/2000WO2000032972A1 Micro-electromechanical block regulating fluid flow
06/06/2000US6070851 Thermally buckling linear micro structure
06/02/2000WO2000031422A1 Interconnection support for plate-like microcomponents
06/02/2000WO2000007735A3 Micromachined acoustic ejectors and applications
05/2000
05/30/2000US6068751 Microfluidic valve and integrated microfluidic system
05/30/2000US6068010 Microvalve and microthruster for satellites and methods of making and using the same
05/25/2000WO2000029770A2 Parylene micro check valve and fabrication method thereof
05/25/2000DE19946003A1 Piezoelectrically activated microvalve for triggering dimensional change in a machined part by applying an electrical voltage includes a piezoelectrically activated actuator, a transmission gearing and a valve lock.
05/25/2000DE19854096A1 Connection carrier for plate shaped micro-components, comprises at least one carrier rail fixed to a carrier plate, with a slot for a micro-component insert edge.
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