| Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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| 11/24/1998 | US5839467 Fluid flow regulator |
| 11/19/1998 | WO1998051929A1 Micromembrane pump |
| 11/19/1998 | WO1998051928A1 Method for producing a micromembrane pump body |
| 11/19/1998 | DE19719862A1 Mikromembranpumpe Micro-diaphragm pump |
| 11/19/1998 | DE19719861A1 Verfahren zum Herstellen eines Mikromembranpumpenkörpers A method of manufacturing a micro-diaphragm pump body |
| 11/18/1998 | EP0877864A1 Actuator and holding device |
| 11/17/1998 | US5837394 Electric appliance and fluid depolarized cell with low parasitic usage microactuated valve |
| 11/17/1998 | US5836150 Micro thrust and heat generator |
| 10/20/1998 | US5824910 Miniature hydrostat fabricated using multiple microelectromechanical processes |
| 10/14/1998 | EP0649501B1 Microvalve |
| 10/13/1998 | US5822170 Hydrophobic coating for reducing humidity effect in electrostatic actuators |
| 09/30/1998 | EP0867622A2 Micromotors, linear motors, micropumps, methods of using the same, microactuators, methods of controlling flow properties of fluids, and apparatuses for controlling flow properties of fluids |
| 09/30/1998 | EP0866919A1 Microvalve |
| 09/23/1998 | EP0865606A1 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics |
| 09/22/1998 | US5810325 For feeding a compressible fluid from a pump to a reservoir |
| 09/09/1998 | EP0862708A1 Microfluidic valve and integrated microfluidic system |
| 08/27/1998 | WO1998037397A1 Piezo-ceramic actuator-driven mixing device |
| 08/25/1998 | US5797414 Method and apparatus for controlling turbulence in boundary layer and other wall-bounded fluid flow fields |
| 08/20/1998 | DE19648730A1 Piezoelectrically actuated micro-valve e.g. for control of gas- and liquid-flows in motor vehicle engineering fluid technology |
| 08/18/1998 | US5794641 Valve control |
| 08/11/1998 | US5791375 Valve control |
| 07/30/1998 | WO1998033001A1 Micromachined fluidic coupler |
| 07/30/1998 | WO1998032616A1 Mems valve |
| 07/28/1998 | US5785295 Thermally buckling control microvalve |
| 07/15/1998 | EP0680659B1 Microparticle switching devices |
| 07/14/1998 | US5780748 Flow device having parallel flow surfaces which move toward and away from one another to adjust the flow channel in proportion to applied force |
| 07/09/1998 | WO1998013605A3 Integrated electrically operable micro-valve |
| 07/08/1998 | EP0799393B1 Valve arrangement, in particular for pneumatic control systems |
| 07/07/1998 | US5775371 Valve control |
| 06/11/1998 | WO1998025065A1 Fluid connections |
| 06/11/1998 | WO1997049926A3 Microvalve |
| 06/10/1998 | EP0846875A2 Conduit system for a valve array |
| 06/04/1998 | WO1998023869A1 Piezo-electrically actuated microvalve |
| 06/04/1998 | WO1998023868A1 Piezo-electric operated microvalve |
| 06/03/1998 | EP0845603A1 Microdevice valve structures for fluid control |
| 06/02/1998 | US5758823 Synthetic jet actuator and applications thereof |
| 05/28/1998 | WO1998022719A1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 04/29/1998 | EP0838005A1 Method for the manufacture of a membrane-containing microstructure |
| 04/22/1998 | EP0784754B1 Micromechanical actuator |
| 04/15/1998 | EP0836012A2 Microvalve |
| 04/09/1998 | WO1998014707A1 Micro-machined device for fluids and method of manufacture |
| 04/09/1998 | CA2267086A1 Micro-machined device for fluids and method of manufacture |
| 04/08/1998 | EP0834031A1 Menbrane-type microvalve and method of manufacturing it |
| 04/02/1998 | WO1998013605A2 Integrated electrically operable micro-valve |
| 03/18/1998 | EP0829649A2 Micro valve with preloaded valve flap |
| 03/11/1998 | EP0828101A1 Passively addressable valves |
| 03/04/1998 | EP0826886A1 Single crystal optical module |
| 02/19/1998 | WO1998007019A1 Capillary microvalve |
| 02/19/1998 | CA2263324A1 Capillary microvalve |
| 02/12/1998 | WO1998005871A1 Valve arrangement |
| 02/12/1998 | DE19631693A1 Ventilanordnung Valve assembly |
| 02/04/1998 | EP0821766A1 Electrofluidic standard module and custom circuit board assembly |
| 01/21/1998 | EP0733006B1 Piezoelectric fluid control valve |
| 01/06/1998 | US5705070 Micromachined filters |
| 01/06/1998 | US5705018 Micromachined peristaltic pump |
| 12/31/1997 | WO1997049926A2 Microvalve |
| 12/30/1997 | US5702618 Methods for manufacturing a flow switch |
| 12/29/1997 | EP0813656A1 Valve control |
| 12/16/1997 | US5697153 Method for manufacturing a fluid flow regulator |
| 12/11/1997 | WO1997047013A1 Micro gas rheostat |
| 12/11/1997 | WO1997046820A1 Microvalve and microthruster for satellites and methods of making and using the same |
| 12/11/1997 | CA2257341A1 Micro gas rheostat |
| 11/27/1997 | WO1997044138A1 Electroformed multilayer flow regulator |
| 11/27/1997 | WO1997044132A1 Housing assembly for micromachined fluid handling structure |
| 11/27/1997 | CA2253674A1 Electroformed multilayer flow regulator incorporating force-generating means for selectively constricting the fluid flow path, and a process for the prearation thereof |
| 10/28/1997 | US5681024 Microvalve |
| 10/08/1997 | EP0799393A1 Valve arrangement, in particular for pneumatic control systems |
| 10/01/1997 | EP0797790A1 Microstructured body gradual construction process and thus produced microstructured bodies |
| 09/12/1997 | WO1997033094A1 Micro-machined membrane valve |
| 09/10/1997 | EP0587912B1 Fluid controlling microdevice and method of manufacturing the same |
| 09/03/1997 | EP0616573A4 Groove width trimming. |
| 08/26/1997 | US5660728 Accurate material handling |
| 08/14/1997 | WO1997029538A1 Bistable microactuator with coupled membranes |
| 08/14/1997 | DE19637928A1 Bistable electrostatic actuator, with pneumatic or liquid coupling, for microvalve or micropump |
| 08/13/1997 | EP0789146A1 Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump |
| 08/13/1997 | EP0700485B1 Microvalve |
| 08/13/1997 | CN1157030A Micro-valve and process for manufacturing micro-valve |
| 08/07/1997 | WO1997028376A1 Actuator and holding device |
| 07/31/1997 | WO1997027324A1 Parallel reaction cassette and associated devices |
| 07/30/1997 | EP0478716B1 Semiconductor microactuator |
| 07/23/1997 | EP0784754A1 Micromechanical actuator |
| 07/16/1997 | EP0784254A2 Device for controlling the flow of a liquid |
| 07/15/1997 | US5647574 Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer |
| 07/01/1997 | US5643247 Miniataure electrolyte-containing chambers connected to power source as current controllers |
| 06/26/1997 | WO1997022825A1 Microfluidic valve and integrated microfluidic system |
| 06/24/1997 | US5640995 Electrofluidic standard module and custom circuit board assembly |
| 06/19/1997 | WO1997021930A1 Microvalve |
| 06/18/1997 | EP0779436A2 Micromachined peristaltic pump |
| 06/18/1997 | EP0778924A1 Micro-valve and process for manufacturing a micro-valve |
| 06/12/1997 | WO1997021090A1 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics |
| 06/12/1997 | DE19546181A1 Mikroventil Microvalve |
| 06/12/1997 | CA2239613A1 Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics |
| 05/21/1997 | EP0646221B1 Magnetostrictive transducer |
| 05/21/1997 | EP0592469B1 Miniature actuating device |
| 04/22/1997 | US5622611 Electroformed multilayer flow regulator incorporating force-generating means for selectively constricting the fluid flow path, and a process for the preparation thereof |
| 04/08/1997 | US5617632 Methods for forming a contoured regulator seat |
| 03/20/1997 | DE19534137A1 Semiconductor micro-valve apparatus for regulation of fluid or gas |
| 03/06/1997 | DE19532686A1 Pneumatic valve with integrated pressure booster |
| 02/13/1997 | WO1997005385A1 Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump |
| 01/30/1997 | DE19522806A1 Mikromembranventil und Verfahren zu dessen Herstellung Micro-diaphragm valve and method of producing the |