Patents
Sitemap › F15 - Fluid-pressure actuators; Hydraulics or pneumatics in general › F15C - Fluid-circuit elements predominantly used for computing or control purposes › F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements
Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879)
05/2000
05/25/2000CA2350595A1 Parylene micro check valve and fabrication method thereof
05/18/2000WO2000028651A1 Driving method for electrostatic actuators
05/18/2000WO2000028650A1 Buckled actuator with enhanced restoring force
05/11/2000DE19849700A1 Micro-valve has housing with two facing layers between which is valve chamber containing valve member, actuator, detector and condenser
05/02/2000US6057149 Merging microdroplets by using housing of silicon with etched transport channels and delivering each liquid drop by separate channel to reaction region in third transport channel by differential heating
05/02/2000US6056269 Microminiature valve having silicon diaphragm
05/02/2000US6056204 Synthetic jet actuators for mixing applications
05/02/2000US6055899 Micro-mechanical actuator
05/02/2000CA2004965C Micromachined valve with polyimide film diaphragm
04/2000
04/26/2000EP0939861B1 Method for producing a micromembrane pump body
04/11/2000US6048734 Thermal microvalves in a fluid flow method
04/06/2000WO2000019161A1 Apparatus and method for controlling fluid in a micromachined boiler
04/06/2000DE19844518A1 Hydraulic flow amplifier for microsystems with drive diaphragm bending under energy supply
03/2000
03/22/2000EP0987740A1 Epitaxial layer for dissolved wafer micromachining process
03/16/2000WO2000014415A2 Proportional micromechanical device
03/01/2000EP0981710A1 Low-power thermopneumatic microvalve
02/2000
02/17/2000WO2000007735A2 Micromachined acoustic ejectors and applications
02/09/2000CN1244239A Fluid connections
02/08/2000US6023121 Thermal arched beam microelectromechanical structure
02/01/2000US6019437 Vehicle hydraulic braking systems incorporating micro-machined technology
12/1999
12/30/1999DE19929734A1 Micro-fluid apparatus
12/29/1999EP0966609A1 Micromembrane pump
12/28/1999US6007309 Micromachined peristaltic pumps
12/21/1999US6003833 Integrated micro pressure-resistant flow control module
12/14/1999US6000676 Microvalve
12/08/1999CN1238029A Integrated electrically operable micro-valve
11/1999
11/30/1999US5994816 Thermal arched beam microelectromechanical devices and associated fabrication methods
11/25/1999DE19821638A1 Micro-valve with valve chamber
11/23/1999US5988522 Synthetic jet actuators for modifiying the direction of fluid flows
11/18/1999WO1999058860A1 Microvalve
11/18/1999WO1999058859A1 Microvalve battery
11/18/1999WO1999058841A1 Microvalve
11/17/1999CN1235658A Micro-machined device for fluids and manufacture thereof
11/10/1999EP0955473A1 Valve array
11/10/1999EP0954450A1 Mems valve
11/09/1999US5980119 Single-crystal component to be applied to optical module and its fabrication method
11/02/1999US5975485 Integrated micro thermistor type flow control module
10/1999
10/26/1999US5971355 Microdevice valve structures to fluid control
10/26/1999US5970998 Microfabricated cantilever ratchet valve, and method for using same
10/21/1999WO1999053205A1 Liquid flow amplification device
10/19/1999US5967163 Actuator and method
10/14/1999DE19816283A1 Mengenverstärkereinrichtung für Fluidströme Quantity amplifier means for fluid flows
10/12/1999US5964242 Method of and apparatus for substance processing with small opening gates actuated and controlled by large displacement members having fine surface finishing
10/12/1999US5964239 Housing assembly for micromachined fluid handling structure
10/05/1999US5962081 A microstructure comprising an elastic membrane. a method which simplifies the fabrication of and permits further miniaturization of microfluidic structures as well as other structures comprising a flexible polymer membrane.
09/1999
09/29/1999EP0944794A1 Fluid connections
09/29/1999EP0898497A4 Electroformed multilayer flow regulator
09/28/1999US5957413 Modifications of fluid flow about bodies and surfaces with synthetic jet actuators
09/21/1999US5955817 Thermal arched beam microelectromechanical switching array
09/21/1999US5954079 Asymmetrical thermal actuation in a microactuator
09/08/1999EP0939862A1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine
09/08/1999EP0939861A1 Method for producing a micromembrane pump body
09/07/1999US5949119 Device equipped with floating rigid microstructure elements
08/1999
08/24/1999US5941501 Passively addressable cantilever valves
08/18/1999EP0834031B1 Method of manufacturing a membrane-type microvalve
08/05/1999WO1999039118A1 Thin film fluid control systems and method of fabricating the same
07/1999
07/27/1999US5930594 Method of manufacturing rigid floating microstructure elements and a device equipped with such elements
07/27/1999US5927325 Microelectromechanical machined array valve
07/27/1999US5926955 Microvalve with joined layers of metal parts and process for manufacture of a microvalve
07/21/1999EP0929746A1 Micro-machined device for fluids and method of manufacture
07/20/1999US5924674 Microvalve and method for manufacturing a microvalve
07/15/1999WO1999035347A1 Microdevices based on surface tension and wettability that function as sensors, actuators, and other devices
07/14/1999EP0928371A2 Integrated electrically operable micro-valve
06/1999
06/15/1999CA2102572C Micro-valve and method of manufacturing
06/09/1999CN1219141A Electroformed multilayer flow regulator
05/1999
05/27/1999WO1999026457A1 Synthetic jet actuators for cooling heated bodies and environments
05/20/1999WO1999024744A1 Micromachined parylene membrane valve and pump
05/19/1999EP0916028A1 Valve arrangement
05/14/1999WO1999023437A1 Element with extremely strong water-repellent dry zones on the surface thereof
05/12/1999EP0914564A1 Piezo-electrically actuated microvalve
05/12/1999EP0914563A1 Piezo-electric operated microvalve
05/11/1999US5901939 Buckled actuator with enhanced restoring force
05/06/1999DE19748295A1 Element mit extrem stark wasserabweisenden Trockenzonen an der Oberfläche Element with extremely highly water-repellent dry zones at the surface
05/04/1999US5899218 Method for controlling fluid flow
04/1999
04/29/1999WO1999020906A1 Coupling for microcomponents
04/29/1999DE19746585A1 Coupling for micro components with parallel plates
04/27/1999US5897097 Passively addressable fluid valves having S-shaped blocking films
04/27/1999CA2214432C Valve control
04/20/1999US5894990 Synthetic jet actuator and applications thereof
04/15/1999WO1999017749A1 A micromachined valve for fluid applications
04/08/1999WO1999017093A1 Moving microdroplets
04/06/1999US5890802 Piezo-ceramic actuator-driven mixing device
04/06/1999US5890745 Micromachined fluidic coupler
04/01/1999WO1999016096A1 Thermal arched beam microelectromechanical devices and associated fabrication methods
03/1999
03/24/1999EP0903179A1 Microvalve
03/03/1999EP0898497A1 Electroformed multilayer flow regulator
03/02/1999US5876187 Micropumps with fixed valves
02/1999
02/18/1999DE19718963C1 Fluid mechanical controller operated by external electromagnet
02/17/1999CN1208464A Device and methods for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics
02/04/1999DE19727552A1 Micro flow control valve
02/02/1999US5865417 Integrated electrically operable normally closed valve
01/1999
01/26/1999US5863502 Economical, automated, high temperature microreactor with valves suitable for use in conducting multiple, parallel pcr assays, pathogen assays, combinatorial chemistry; medical diagnosis; noncontamination; seals to prevent vapor loss
01/26/1999US5863024 Micro-Electromagnet including an integrated magnetic circuit and coil
01/14/1999WO1999001688A1 Thermal microvalves
12/1998
12/30/1998EP0722541B1 Micromachined flow switches
12/29/1998US5854122 Epitaxial layer for dissolved wafer micromachining process
12/23/1998EP0722540B1 Micromachined fluid flow regulators
12/16/1998EP0884511A2 Miniaturized valve device
12/02/1998EP0880817A1 Bistable microactuator with coupled membranes
11/1998
11/26/1998WO1998053236A1 Low-power thermopneumatic microvalve
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