| Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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| 09/04/2007 | CA2350077C Buckled actuator with enhanced restoring force |
| 08/30/2007 | US20070200082 Manufacture of an integrated fluid delivery system for semiconductor processing apparatus |
| 08/15/2007 | EP1490601B1 Micromechanical components |
| 08/08/2007 | EP1644104B1 Electrically-driven valve comprising a microporous membrane |
| 08/07/2007 | US7252764 Method for fabrication of a molecular filter and apparatus formed by the same |
| 08/01/2007 | EP1588156B1 Miniaturised gas chromatograph and injector for the same |
| 07/31/2007 | US7250128 Method of forming a via in a microfabricated elastomer structure |
| 07/26/2007 | US20070172362 Microvalve device suitable for controlling a variable displacement compressor |
| 07/26/2007 | US20070169686 Systems and methods for mixing reactants |
| 07/25/2007 | CN101004191A Manufacturing process of a hydraulic unit and a hydraulic unit |
| 07/19/2007 | US20070164641 Electroactive polymer devices for moving fluid |
| 07/17/2007 | US7244402 Microfluidic protein crystallography |
| 07/03/2007 | US7238325 By selectively compressing the cavity section from externally, the flow rate of the fluid passing through the cavity section can be reduced to zero |
| 07/03/2007 | US7238268 Microfluidic devices for the controlled manipulation of small volumes |
| 06/19/2007 | US7232109 Electrostatic valves for microfluidic devices |
| 06/14/2007 | US20070133081 Micro-electromechanical system (mems) polyelectrolyte gel network pump |
| 06/07/2007 | WO2007064310A1 Motorised valve |
| 06/07/2007 | WO2005103504A3 High pressure capillary micro-fluidic valve device and a method of fabricating same |
| 05/31/2007 | WO2007060636A2 Microfluidic system |
| 05/31/2007 | WO2007060635A2 System to measure blood coagulation related parameters |
| 05/31/2007 | WO2007060523A1 Microfluidic structures |
| 05/31/2007 | CA2637885A1 Microfluidic structures |
| 05/30/2007 | EP1790861A1 Microfluidic system |
| 05/24/2007 | US20070113663 Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate |
| 05/23/2007 | CN1968754A A valve for a microfluidic device |
| 05/15/2007 | US7217395 Piezoelectrically controllable microfluid actor system |
| 05/15/2007 | US7216671 Microfabricated elastomeric valve and pump systems |
| 05/09/2007 | EP1709335B1 Pyrotechnic microsystem and method for making same |
| 05/03/2007 | WO2007050418A1 Reconfigurable valve using optically active material |
| 05/01/2007 | US7212332 Micro-electromechanical system (MEMS) polyelectrolyte gel network pump |
| 05/01/2007 | US7210502 Microvalve device suitable for controlling a variable displacement compressor |
| 04/26/2007 | US20070090314 Micromachined knife gate valve for high-flow pressure regulation applications |
| 04/25/2007 | EP1476393B1 Microfluidic valve and system therefor |
| 04/19/2007 | WO2006018043A3 Valve slider for a microfluidic coupling device |
| 04/18/2007 | EP1216373B1 A normally closed in-channel micro check valve |
| 04/17/2007 | US7204264 High pressure capillary micro-fluidic valve device and a method of fabricating same |
| 04/17/2007 | US7204263 Flow control method for micro system |
| 04/11/2007 | EP1771665A1 Method of controlling microvalve actuator |
| 04/04/2007 | EP1597576B1 Capillary stop |
| 03/27/2007 | US7195670 High throughput screening of crystallization of materials |
| 03/27/2007 | US7195393 Micro fluidic valves, agitators, and pumps and methods thereof |
| 03/27/2007 | US7195036 Thermal micro-valves for micro-integrated devices |
| 03/22/2007 | US20070062909 cleaning with a detergent, then deionized water, then treating with a nitric acid solution; useful for gas distribution in semiconductor processing equipment; leakproof |
| 03/22/2007 | US20070062021 Method of attaching components to semiconductor processing chambers using diffusion bonding |
| 03/20/2007 | US7192001 Thermopneumatic microvalve |
| 03/15/2007 | US20070059494 Microfabricated elastomeric valve and pump systems |
| 03/08/2007 | US20070051080 In-line filter in a diffusion bonded layered substrate |
| 03/07/2007 | EP1759120A2 Microfluidic devices with separable actuation and fluid-bearing modules |
| 03/01/2007 | WO2006113860A3 Waveform sensing and regulating fluid flow valve |
| 03/01/2007 | US20070044851 Latching micro-regulator |
| 02/22/2007 | US20070042503 Moving microdroplets |
| 02/21/2007 | EP1753534A1 A valve for a microfluidic device |
| 02/15/2007 | US20070034269 Method of controlling fluid |
| 02/08/2007 | DE10235441B4 Durch Mikrobearbeitung hergestelltes Hochtemperaturventil Produced by micro-machining high temperature valve |
| 02/07/2007 | EP1040736B1 Synthetic jet actuators for cooling heated bodies and environments |
| 01/30/2007 | US7169314 Microfabricated elastomeric valve and pump systems |
| 01/24/2007 | EP1745491A1 Optoelectronic tweezers |
| 01/24/2007 | EP1514045B1 Electrostatically actuated valve |
| 01/18/2007 | US20070012371 Flow restrictor and system for delivering a flow of liquid in a microcapillary |
| 01/16/2007 | US7163026 Valve unit and fluid control chip |
| 01/10/2007 | CN1894524A High-flow microvalve |
| 01/09/2007 | US7159841 Piezoelectric axial flow microvalve |
| 01/09/2007 | US7159618 Electrically opened micro fluid valve |
| 01/02/2007 | US7156365 Method of controlling microvalve actuator |
| 12/14/2006 | WO2006132929A1 Microvalve package assembly |
| 12/14/2006 | US20060278288 Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
| 12/06/2006 | EP1116003A4 Apparatus and method for controlling fluid in a micromachined boiler |
| 12/05/2006 | US7144616 Microfabricated elastomeric valve and pump systems |
| 12/05/2006 | US7143787 Microluidic valve having two revolving valve elements |
| 12/05/2006 | US7143785 Microfluidic large scale integration |
| 11/30/2006 | US20060266679 Method and apparatus for sorting particles |
| 11/23/2006 | US20060263033 Switchable surfaces |
| 11/23/2006 | US20060260700 Microluidic valve having two revolving valve elements |
| 11/22/2006 | EP1723356A2 High-flow microvalve |
| 11/22/2006 | CN1867795A Microfluidic large scale integration |
| 11/22/2006 | CN1865714A Device and method for handling liquids |
| 11/15/2006 | EP1266142B1 Thermally actuated microvalve assembly |
| 11/14/2006 | US7134639 Latching micro-regulator |
| 11/14/2006 | US7134453 Microfluidic switch for stopping a liquid flow during a time interval |
| 11/14/2006 | US7134445 Double-effect pyrotechnic microactuator for microsystem and microsystem using same |
| 11/09/2006 | US20060251544 Capillary stop |
| 11/02/2006 | WO2006114406A1 A package for beamlead semiconductor devices |
| 11/02/2006 | US20060243331 Microvalve device suitable for controlling a variable displacement compressor |
| 11/02/2006 | EP1664601A4 Microfluidic large scale integration |
| 11/01/2006 | CN1856365A Microfluidic valve |
| 10/26/2006 | WO2006113860A2 Waveform sensing and regulating fluid flow valve |
| 10/25/2006 | EP1715336A1 Connector for analytical devices |
| 10/25/2006 | EP1194693B1 Microfabricated elastomeric valve and pump systems |
| 10/05/2006 | WO2006104467A1 Configurable microfluidic device and method |
| 10/05/2006 | US20060222571 Fluid handling assembly with valve position control based on fluid amount measurement |
| 09/14/2006 | WO2006067715A3 Method for controlling the flow of liquids containing biological material by inducing electro- or magneto-rheological effect |
| 09/14/2006 | US20060204381 Fluid transferring system and micropump suitable therefor |
| 09/14/2006 | US20060202330 Chip with cleaning cavity |
| 09/13/2006 | EP1633988B1 Electrically-opened micro fluid-valve |
| 09/13/2006 | EP1007873B1 Thermal microvalves |
| 09/12/2006 | US7106493 MEMS-based valve device |
| 09/12/2006 | US7104517 Polymer valves |
| 09/12/2006 | US7104405 Method and apparatus for sorting particles |
| 09/07/2006 | US20060196409 High throughput screening of crystallization materials |
| 09/06/2006 | EP1320741A4 Microfluidic devices for rotational manipulation of the fluidic interface between multiple flow streams |