| Patents for F15C 5 - Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements (1,879) |
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| 01/23/1997 | WO1997002433A1 Micro-valve and process for manufacturing a micro-valve |
| 01/23/1997 | DE19526897A1 Micro-valve operating with high precision |
| 01/15/1997 | EP0753671A1 Method of manufacturing elements of floating, rigid microstructures and apparatus equipped with such elements |
| 01/09/1997 | WO1997001055A1 Method for the manufacture of a membrane-containing microstructure |
| 01/09/1997 | WO1997001054A1 Menbrane-type microvalve and method of manufacturing it |
| 01/02/1997 | DE19523915A1 Mikroventil und Verfahren zur Herstellung eines Mikroventils Micro valve and method for manufacturing a microvalve |
| 12/31/1996 | US5588466 Layer of terbium dysprosium ferride is applied to a flexible element |
| 12/17/1996 | US5585011 Methods for manufacturing a filter |
| 10/22/1996 | US5566703 Fluid control valve |
| 10/09/1996 | CN1133080A Micromachined valve apparatus |
| 10/02/1996 | DE19533184A1 Semiconductor micro-valve |
| 09/25/1996 | EP0733169A1 Micromachined filters and flow regulators |
| 09/25/1996 | EP0733006A1 Piezoelectric fluid control valve |
| 09/19/1996 | WO1996028664A1 Electrofluidic standard module and custom circuit board assembly |
| 09/19/1996 | WO1996019689A3 Valve arrangement, in particular for pneumatic control systems |
| 09/12/1996 | WO1996027742A1 Valve control |
| 08/14/1996 | EP0726398A1 Method of and apparatus for controlling turbulence in boundary layer and other wall-bounded fluid flow fields |
| 08/14/1996 | DE19504689A1 Micro-mechanical seat valve with outlet plate |
| 08/14/1996 | CA2169230A1 Method of and apparatus for controlling turbulence in boundary layer and other wall-bounded fluid flow fields |
| 08/06/1996 | US5542821 Plate-type diaphragm pump and method of use |
| 07/30/1996 | US5541016 Electrical appliance with automatic valve especially for fluid depolarized electrochemical battery |
| 07/25/1996 | WO1996008749A3 Method of producing a three-dimensional component or group of components |
| 07/24/1996 | EP0722541A1 Micromachined flow switches |
| 07/24/1996 | EP0722540A1 Micromachined fluid flow regulators |
| 07/23/1996 | US5538221 Micromechanical valve for micromechanical dosing devices |
| 07/03/1996 | EP0719951A1 Micro electromagnet with integrated magnetic circuit and coil |
| 06/27/1996 | WO1996019689A2 Valve arrangement, in particular for pneumatic control systems |
| 06/27/1996 | DE4445686A1 Ventilanordnung, insbesondere für pneumatische Steuerungen Valve arrangement, especially for pneumatic controls |
| 06/26/1996 | EP0569480B1 Flow regulator |
| 06/25/1996 | US5529279 Thermal isolation structures for microactuators |
| 06/20/1996 | DE19511022C1 Micro=mechanical valve for micro dosing |
| 05/15/1996 | EP0521117B1 Microvalve |
| 05/02/1996 | DE19530843A1 Mikrobearbeitete Ventilöffnung und Ventilsitz mit verbesserter thermischer Isolierung The micromachined valve opening and valve seat with improved thermal insulation |
| 04/18/1996 | WO1996011342A1 Micromechanical actuator |
| 04/10/1996 | EP0706003A2 Diaphragm valve |
| 04/08/1996 | CA2157647A1 Valve |
| 03/21/1996 | WO1996008749A2 Method of producing a three-dimensional component or group of components |
| 03/13/1996 | EP0700485A1 Microvalve |
| 03/05/1996 | US5496009 Valve |
| 02/14/1996 | EP0696683A1 Molded-in pneumatic circuit |
| 01/17/1996 | EP0438570B1 Method of making a microvalve |
| 01/11/1996 | DE4432725C1 Forming three-dimensional components on surface of semiconductor chips etc. |
| 01/04/1996 | DE4422973A1 Method of assembling multilayer miniature fuel injection valve |
| 01/04/1996 | DE4422972A1 Electro-magnetic drive for a miniature valve |
| 01/04/1996 | DE4422971A1 Micro-valve with valve housing built up from several layers |
| 01/04/1996 | DE4422970A1 Atomizer for miniature multi-layer valve |
| 01/04/1996 | DE4422946A1 Electrostatic operation of miniature valve |
| 01/04/1996 | DE4422944A1 Axially movable micro-valve e.g. for fuel injection valve |
| 01/04/1996 | DE4422943A1 Micro-mechanical, multi-stage valve for fuel injection |
| 01/04/1996 | DE4422942A1 Micro-valve drive for plug movable between two pressure chambers |
| 01/04/1996 | DE4422941A1 Miniature fuel injection valve |
| 12/07/1995 | DE4419446A1 Miniature solenoid valve |
| 11/23/1995 | DE4417251A1 Pressure balancing micro=valve |
| 11/08/1995 | EP0680659A1 Microparticle switching devices |
| 10/25/1995 | EP0613535B1 Micromechanical valve for micromechanical dosing devices |
| 10/05/1995 | DE4436008C1 Micro=mechanical actuator for handling miniaturised components |
| 09/26/1995 | US5452878 Miniature actuating device |
| 09/20/1995 | EP0672834A1 Micro fluid manipulator |
| 09/12/1995 | US5449569 Fluid depolarized battery with improved automatic valve |
| 08/29/1995 | US5445185 Piezoelectric fluid control valve |
| 08/15/1995 | US5441597 Microstructure gas valve control forming method |
| 07/26/1995 | EP0498863B1 A valve equipped with a position detector and a micropump incorporating said valve |
| 07/13/1995 | WO1995018991A1 Microstructured body gradual construction process and thus produced microstructured bodies |
| 07/04/1995 | US5429713 Method of manufacturing a micro-valve |
| 06/15/1995 | WO1995015873A1 Piezoelectric fluid control valve |
| 06/14/1995 | EP0656997A1 Micro-miniaturizable valve |
| 06/14/1995 | DE4342849A1 Apparatus for controlling release rate of liquid microdosages |
| 05/23/1995 | US5417235 Integrated microvalve structures with monolithic microflow controller |
| 05/11/1995 | WO1995008716A3 Micromachined valve apparatus |
| 04/26/1995 | EP0649501A1 Microvalve |
| 04/13/1995 | WO1995009989A1 Micromachined flow switches |
| 04/13/1995 | WO1995009988A1 Micromachined filters and flow regulators |
| 04/13/1995 | WO1995009987A1 Micromachined fluid flow regulators |
| 04/05/1995 | EP0646221A1 Magnetostrictive transducer. |
| 03/30/1995 | WO1995008716A2 Micromachined valve apparatus |
| 03/30/1995 | CA2169826A1 Micromachined valve apparatus |
| 03/28/1995 | US5400824 Microvalve |
| 03/22/1995 | EP0447451B1 Micromachined valve with polyimide film diaphragm |
| 03/01/1995 | EP0491026B1 Valve, method for producing said valve and micropump incorporating said valve |
| 01/12/1995 | DE4400315C1 Process for the stepwise construction of microstructure elements, and microstructure elements produced by this process |
| 01/11/1995 | EP0425612B1 Micromechanical actuator |
| 01/10/1995 | US5380396 Valve and semiconductor fabricating equipment using the same |
| 12/08/1994 | WO1994028318A1 Microvalve |
| 12/01/1994 | DE4418450A1 Microvalve |
| 11/29/1994 | US5367878 For providing motion at a high repetition rate |
| 10/13/1994 | WO1994017538A3 Microparticle switching devices |
| 10/12/1994 | EP0619210A2 Piezoelectric pressure control valve |
| 09/28/1994 | EP0616573A1 Groove width trimming |
| 09/07/1994 | EP0613535A1 Micromechanical valve for micromechanical dosing devices. |
| 09/06/1994 | US5344117 Micro-actuator |
| 08/31/1994 | EP0513018B1 Microvalve |
| 08/10/1994 | EP0478565B1 Microvalve |
| 08/04/1994 | WO1994017538A2 Microparticle switching devices |
| 08/04/1994 | CA2153990A1 Microparticle switching devices |
| 08/02/1994 | US5333831 High performance micromachined valve orifice and seat |
| 07/26/1994 | CA2098173C Flow regulator |
| 07/12/1994 | US5328559 Forming grooves and oxidation of surfaces |
| 06/28/1994 | US5323999 Microstructure gas valve control |
| 06/21/1994 | US5322258 Micromechanical actuator |
| 05/10/1994 | US5309943 Micro-valve and method of manufacturing |