| Patents for F04B 37 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups (3,029) |
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| 03/11/1998 | EP0828332A1 Vacuum pump status evaluation system |
| 03/05/1998 | WO1998009080A1 Piston vacuum pump with discharge valve |
| 03/05/1998 | DE19634518A1 Piston pump, especially piston vacuum pump |
| 03/05/1998 | DE19634517A1 Kolbenvakuumpumpe mit Auslaßventil Vacuum pump with exhaust |
| 02/25/1998 | CN1174593A Getter pump module and system |
| 02/25/1998 | CN1174291A Gas compressor or expansion machine |
| 02/24/1998 | US5720174 Secondary pump unit |
| 02/19/1998 | WO1998006943A1 Cryopump |
| 02/12/1998 | WO1998005869A1 Vacuum pumping apparatus |
| 02/12/1998 | DE19632123A1 Kryopumpe Cryopump |
| 02/11/1998 | EP0823021A1 High pressure gas compressor |
| 02/11/1998 | CN2274263Y Pneumatic reciprocating piston pump |
| 02/11/1998 | CN2274262Y Wide-range high-vacuum strong oil-vapour-steam pump |
| 01/21/1998 | EP0819856A1 Vacuum pump |
| 01/14/1998 | CN1170441A In site getter pump system and method |
| 01/13/1998 | US5707222 Vacuum pump with resilient drive |
| 12/24/1997 | WO1997049109A1 Pumping device by non-vaporisable getter and method for using this getter |
| 12/04/1997 | DE19722336A1 Auxiliary unit connected to motor vehicle engine via belt and pulley drive |
| 11/26/1997 | EP0809164A1 Control system for controlling a plurality of vacuum pumps |
| 11/26/1997 | CN2268790Y Mechanical vacuum pump with two stage oil seals |
| 11/26/1997 | CN2268789Y Sliding valve vacuum pump |
| 11/18/1997 | US5687575 Miniature thermo-electric cooled cryogenic pump |
| 11/18/1997 | US5687574 Throttle cycle cryopumping system for Group I gases |
| 11/11/1997 | US5685963 In situ getter pump system and method |
| 11/05/1997 | EP0805275A2 Vacuum pumps |
| 10/29/1997 | EP0699277B1 Modified cryogenic diffusion pump |
| 10/23/1997 | WO1997039242A1 Cryopump with gas heated exhaust valve |
| 10/22/1997 | EP0802363A2 Method and apparatus for baking out a gate valve in a semiconductor processing system |
| 10/21/1997 | US5678759 In a vacuum pressure system |
| 10/08/1997 | CN2264262Y Oil-less reciprocating verticle and energy saving vacuum pump |
| 10/08/1997 | CN2264261Y Improved full oil-less lubricating air compressor |
| 10/02/1997 | WO1997035652A1 Combination cryopump/getter pump and method for regenerating same |
| 10/02/1997 | CA2250453A1 Combination cryopump/getter pump and method for regenerating same |
| 10/01/1997 | CN1036021C Closed type electromotive compressor |
| 09/30/1997 | US5671607 Compression refrigeration machine |
| 09/25/1997 | WO1997035111A1 Purge and rough cryopump regeneration process, cryopump and controller |
| 09/18/1997 | WO1997033671A1 Throttle cycle cryopumping system for group i gases |
| 09/17/1997 | EP0795084A2 Getter pump module and system |
| 09/17/1997 | CN2262615Y Speed-regulating mechanical vacuum pump |
| 09/10/1997 | EP0794267A2 A restrictor shield for a wafer processing apparatus |
| 09/03/1997 | EP0793019A2 Improvements in vacuum pumps |
| 08/27/1997 | EP0791752A2 Improvements in diffusion pumps |
| 08/20/1997 | EP0789788A1 In situ getter pump system and method |
| 08/12/1997 | US5655886 Vacuum maintenance device for high vacuum chambers |
| 08/05/1997 | US5653876 High pressure pump for fine liquid metering |
| 07/16/1997 | CN1154443A Super high pressure air compressor |
| 07/03/1997 | WO1997023730A1 Manual vacuum producing system having vacuum pressure indicator |
| 06/26/1997 | WO1997022839A1 Low-temperature refrigerator with cold head and a process for optimising said cold head for a desired temperature range |
| 06/25/1997 | CN2256946Y Straight reciprocating compressor |
| 06/24/1997 | US5641273 Method and apparatus for efficiently compressing a gas |
| 06/19/1997 | DE19547030A1 Tieftemperatur-Refrigerator mit einem Kaltkopf sowie Verfahren zur Optimierung des Kaltkopfes für einen gewünschten Temperaturbereich Cryogenic refrigerator having a cold head and method for optimizing the cold head for a desired temperature range |
| 06/18/1997 | CN2256471Y Man-power air extraction tube |
| 05/27/1997 | US5632605 Multistage vacuum pump |
| 05/21/1997 | EP0603180B1 Cryogenic pump |
| 05/15/1997 | WO1997017542A1 Substrate processing apparatus with neg pump |
| 05/15/1997 | CA2236833A1 Substrate processing apparatus with neg pump |
| 04/29/1997 | US5625742 Promotes hydrogen release rate and/or readsorption rate of hydrogen getter while maintaining vacuum within insulating jacket for prolonged time period |
| 04/16/1997 | EP0708715A4 Heat generation through mechanical molecular agitation |
| 04/09/1997 | EP0767307A1 Secondary pumping group |
| 03/18/1997 | US5611660 Compound vacuum pumps |
| 03/18/1997 | US5611659 Method and a device for reducing the gap between a static part and a movable part |
| 03/18/1997 | US5611208 Modified cryogenic diffusion pump |
| 03/12/1997 | CN2249311Y Vacuum pump for vehicle |
| 02/05/1997 | CN1142014A 压缩机 Compressor |
| 01/30/1997 | DE19625648A1 Pumpsystem Pumping system |
| 01/29/1997 | EP0585439B1 Process for reducing the pollution of operating fluids of vacuum pumps when purifying exhaust gases from vacuum pyrolysis installations and/or extrusion processes |
| 01/22/1997 | EP0608232B1 Cryopump with a substantially pot-shaped housing |
| 01/21/1997 | US5595477 Vacuum pumping stand |
| 01/15/1997 | EP0753663A1 Improved getter pump, particularly for a portable chemical analysis instrument |
| 01/08/1997 | EP0752531A1 Apparatus for rapid evacuation of a vacuum chamber |
| 12/17/1996 | US5584669 Two-stage positive displacement pump |
| 12/12/1996 | WO1996039582A1 Vacuum maintenance device for high vacuum chambers |
| 12/10/1996 | US5582017 Cryopump |
| 12/04/1996 | EP0745525A1 Vacuumpump |
| 11/19/1996 | US5575853 Vacuum exhaust system for processing apparatus |
| 11/13/1996 | EP0742370A1 Heating assembly for getter pumps and gas purifiers |
| 11/13/1996 | CN2240059Y Air pump for compression and sorption |
| 11/07/1996 | WO1996034669A1 Shielded cryogenic trap |
| 11/06/1996 | CN2239511Y Vacuum electric arc Ti pump |
| 11/05/1996 | US5571780 Generation of vacuum by operation of pump with perfluoropolyether |
| 10/31/1996 | WO1996034199A1 High pressure gas compressor |
| 10/30/1996 | CN2238923Y Self-cooled oil ring vacuum pump |
| 10/30/1996 | CN1134513A Vacuum exhaust unit for refrigerating circulation |
| 10/24/1996 | WO1996017171A3 Getter pump module and system |
| 10/23/1996 | EP0678165B1 Cryopump with differential pumping capability |
| 09/18/1996 | EP0672222B1 Process and device for reducing the gap between a static part and a movable part |
| 09/11/1996 | EP0731274A2 Multistage vacuum pump |
| 09/04/1996 | CN2234514Y Air compressor |
| 09/03/1996 | US5551845 Medical air vacuum |
| 08/28/1996 | EP0641238B1 Cryogenic waterpump |
| 08/27/1996 | US5548964 Method and apparatus for cooling a vacuum device |
| 08/14/1996 | EP0726395A1 Regeneration of cryocondensation pump panels in a vacuum chamber |
| 08/07/1996 | EP0724689A1 Process for operating a cryopump and vacuum pump system with cryopump and fore-pump |
| 08/06/1996 | US5542257 Cryogenic pump with an essentially cup-shaped housing |
| 07/31/1996 | EP0650639B1 High capacity getter pump |
| 07/25/1996 | WO1996022465A1 Controlled cryopump regeneration pressures |
| 07/24/1996 | EP0723080A1 Vacuum pumping system |
| 07/23/1996 | US5537833 Shielded cryogenic trap |
| 07/17/1996 | CN2231326Y Vortex buffer multi-path water jet air extractor |
| 07/10/1996 | CN2230830Y Piston for high pressure nitrogen and hydrogen compressor |