| Patents for F04B 37 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups (3,029) |
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| 02/17/2005 | US20050034465 Cryopump control system |
| 02/17/2005 | DE202004015599U1 Vakuumpumpensystem mit mehreren Pumpen Vacuum system with multiple pumps |
| 02/16/2005 | CN2679397Y Full oil-less compressor with crosshead |
| 02/10/2005 | US20050031468 Controller of vacuum pump |
| 02/09/2005 | CN1575846A Gas separation apparatus |
| 02/09/2005 | CN1188592C Method of fast extracting to realiz high vacuum in container and its combination machine set |
| 02/03/2005 | US20050025634 Controlling pressure in a process chamber by variying pump speed and a regulator valve, and by injecting inert gas |
| 02/03/2005 | US20050023134 Producing a thin layer of a metal or metal alloy with plasma, ionic beam deposition or cathodic deposition |
| 02/03/2005 | DE10332642A1 Oscillating vacuum-displacement pump has spring-supported con-rod link to displacement body |
| 01/27/2005 | DE10331201A1 Kryopumpe Cryopump |
| 01/25/2005 | US6846164 Multi-cylinder compressor having plural intake ports in a bearing plate and a cover member forming a sealed space over the bearing plate |
| 01/20/2005 | WO2005005833A2 Integration of automated cryopump safety purge |
| 01/20/2005 | WO2005005832A1 Cryopump |
| 01/20/2005 | US20050011360 Gas separation apparatus |
| 01/20/2005 | US20050011200 Panels for pulse tube cryopump |
| 01/19/2005 | EP1497558A1 Vacuum pump |
| 01/12/2005 | CN1184463C Titanium pump leak detector and leak detection method |
| 12/30/2004 | US20040261426 Integration of automated cryopump safety purge |
| 12/30/2004 | US20040261425 Fail-safe cryopump safety purge delay |
| 12/30/2004 | US20040261424 Integration of automated cryopump safety purge with set point |
| 12/28/2004 | US6835221 Exhaust gas filtration device and auxiliary filtration device |
| 12/28/2004 | US6834510 Refrigerant management system for optimal compressor performance |
| 12/23/2004 | US20040260409 Vacuum pump |
| 12/22/2004 | CN2665441Y A reciprocating compressor crosshead assembly |
| 12/16/2004 | US20040253123 Integrated electrostatic peristaltic pump method and apparatus |
| 12/15/2004 | EP1486673A1 Vacuum pump control device, and vacuum device |
| 12/14/2004 | US6830064 Leak control valve |
| 12/14/2004 | CA2238237C Oilless compressor with a pressurizable crankcase and motor containment vessel |
| 12/02/2004 | WO2004086610A3 Abatement of backflow contaminants in a dry pump |
| 11/25/2004 | DE4213763B4 Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung A method for evacuating a vacuum chamber and a high vacuum chamber and high-vacuum system for its implementation |
| 11/24/2004 | CN2658429Y Air inlet, exhaust valve plate structure of air-conditioning compressor |
| 11/24/2004 | CN1177080C Getter system for purifying work atmosphere in processes of physical vapor deposition |
| 11/24/2004 | CN1177079C In site getter pump system and method |
| 11/18/2004 | US20040228747 Molecular drag, turbomolecular, or hybrid pump with an integrated valve |
| 11/17/2004 | EP1477684A1 Molecular,turbo-molecular or hybrid pump with intergral valve |
| 11/16/2004 | US6817839 Device for delivering moist gases |
| 11/16/2004 | US6817377 Processing apparatus having integrated pumping system |
| 11/16/2004 | CA2363062C Bottom entry pumping system with tertiary containment |
| 11/11/2004 | WO2004097220A1 Piston vacuum pump |
| 11/11/2004 | DE10318735A1 Kolbenvakuumpumpe Piston vacuum pump |
| 11/10/2004 | EP1475535A1 Control system for process chamber pressure based on pump speed, valve opening and neutral gas injection |
| 11/10/2004 | EP1330561B1 Integrated phase separator for ultra high vacuum system |
| 11/04/2004 | DE10317837A1 Vakuumkammer Vacuum chamber |
| 10/28/2004 | WO2004092585A1 Vacuum chamber |
| 10/21/2004 | WO2004090332A1 Dry vacuum pump and method of starting same |
| 10/21/2004 | US20040208756 Compact vacuum pump |
| 10/21/2004 | US20040208752 Method for reducing the partial pressure of undesired gases in a small vacuum vessel |
| 10/20/2004 | EP1177382B1 Piston vacuum pump |
| 10/14/2004 | US20040201349 Vacuum device having a getter |
| 10/14/2004 | US20040200214 Trap apparatus |
| 10/07/2004 | WO2004086610A2 Abatement of backflow contaminants in a dry pump |
| 10/07/2004 | US20040194477 Electronically controlled vacuum pump gauge |
| 09/30/2004 | DE4309929B4 Verfahren zur Evakuierung durch eine Vakuumpumpe A process for the evacuation by a vacuum pump |
| 09/28/2004 | US6796215 Membrane pump |
| 09/23/2004 | WO2004081381A1 Pump |
| 09/23/2004 | DE20307327U1 Vacuum pump, with piston pumps in series, has a common housing for a series containing a double piston giving pistons of different dimensions and running sleeves with a different wall thickness |
| 09/23/2004 | DE19913593B4 Gesteuerter Pumpstand Controlled Pumping Station |
| 09/16/2004 | WO2004079192A1 Vacuum device and vacuum pump |
| 09/16/2004 | US20040179946 Packaged micromachined device such as a vacuum micropump, device having a micromachined sealed electrical interconnect and device having a suspended micromachined bonding pad |
| 09/02/2004 | WO2004073825A2 Method for reducing the partial pressure of undesired gases in a small vacuum vessel |
| 09/02/2004 | DE10359270A1 Steuerung einer Vakuumpumpe Control of a vacuum pump |
| 08/31/2004 | US6784613 Is able to maintain the performance quality thereof over a long period of time even in the atmosphere tending to degrade the performance quality thereof, and a display unit equipped with such a non- evaporating getter |
| 08/31/2004 | US6783696 Porous getter devices with reduced particle loss and method for manufacturing same |
| 08/24/2004 | US6779985 Vacuum generating device |
| 08/17/2004 | US6776588 Dry compressing vacuum pump having a gas ballast device |
| 08/17/2004 | US6776586 Multi-stage vacuum pump |
| 08/05/2004 | WO2004065788A1 Packaged micromachined device such as a vacuum micropump |
| 08/05/2004 | WO2004065290A2 Integrated electrostatic peristaltic pump method and apparatus |
| 08/04/2004 | EP1442222A1 Vacuum pump |
| 08/04/2004 | CN1517547A 往复泵和真空泵 Reciprocating pumps and vacuum pumps |
| 07/22/2004 | US20040143418 Apparatus for predicting life of rotary machine and equipment using the same |
| 07/21/2004 | CN1514133A Controller for vacuum pump |
| 07/20/2004 | US6763700 Trap apparatus |
| 07/15/2004 | US20040136835 Multi-stage reciprocating vacuum pump and method of operating the same |
| 07/14/2004 | EP1030971B1 Cryogenic pump |
| 07/08/2004 | US20040131478 Radiation shielding coating |
| 07/08/2004 | US20040131472 Reciprocating pump and vacuum pump |
| 07/07/2004 | EP1435459A2 Reciprocating pump and vacuum pump |
| 07/07/2004 | EP1181449B1 Pump cylinder and method of collecting pasty materials, liquids, gases and/or mobile objects |
| 07/01/2004 | US20040126255 Fluid pump |
| 07/01/2004 | US20040126244 Vacuum pumping system and method of controlling the same |
| 06/29/2004 | US6755630 Apparatus for compressing fluid |
| 06/29/2004 | US6755028 Electronically controlled cryopump |
| 06/23/2004 | CN2621229Y X-ray head vacuum treatment device |
| 06/17/2004 | DE10255792A1 Vacuum pump control method in which a gas ballast valve is controlled in a manner dependent on the detected formation of condensation within the container being pumped down |
| 06/16/2004 | EP1427939A1 A compact vacuum pump |
| 06/10/2004 | US20040109781 Fluid pump system |
| 06/03/2004 | WO2004013493A3 Process and apparatus for assembling and disassembling a cryogenic pump |
| 06/03/2004 | DE10249062A1 Mehrstufige Kolbenvakuumpumpe und Verfahren zu deren Betrieb Multi-stage piston vacuum pump and method of operation |
| 06/02/2004 | EP0977948A4 Dry vacuum pump |
| 05/12/2004 | CN2615369Y Vacuum-pumping apparatus |
| 05/12/2004 | CN1495363A 真空泵 Vacuum pump |
| 05/12/2004 | CN1495362A 流体泵 Fluid pump |
| 05/12/2004 | CN1495349A 压缩机 Compressor |
| 05/06/2004 | DE4237971B4 Vakuumpumpe mit Wandler Vacuum pump with converter |
| 04/29/2004 | US20040081565 Vacuum pump |
| 04/28/2004 | EP1413753A2 Multistage piston compressor and operation method |
| 04/21/2004 | CN1490526A 真空泵 Vacuum pump |
| 04/15/2004 | DE202004001051U1 Multi-headed pump used as a membrane pump for producing a vacuum comprises shut-off and switching devices integrated in the suction and pressure lines between the pump heads |
| 04/14/2004 | EP1327111B1 Method and system for exchanging earth energy between earthly bodies and an energy exchanger, especially to produce an electric current |