| Patents for F04B 37 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups (3,029) |
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| 11/22/2001 | WO2001087463A1 Compressor unit, provided with an adsorption dryer and adsorption dryer therefor |
| 11/22/2001 | DE10021454A1 Vorrichtung zum Fördern feuchter Gase A device for conveying moist gases |
| 11/22/2001 | CA2735313A1 Inflatable device with recessed fluid controller and modified adjustment device |
| 11/20/2001 | US6318640 Dispensing device |
| 11/20/2001 | US6318093 Electronically controlled cryopump |
| 11/20/2001 | US6318091 Cryopump system with modular electronics |
| 11/15/2001 | DE10000675C2 Lineardurchführung, Vorrichtung und Verfahren zur hochproduktiven Erzeugung von hoch kernspinpolarisiertem Helium-3 Gas Linear motion feedthrough, apparatus and method for highly productive generation of high kernspinpolarisiertem helium-3 gas |
| 11/14/2001 | EP1153238A1 Bottom entry pumping system with tertiary containment |
| 11/08/2001 | WO2001083990A1 Device for delivering moist gases |
| 11/08/2001 | DE10112524A1 Zweistufiges Grobverfahren und gesteuerte Aufdampfraten zum Herstellen von Laserablationsmasken Two-stage coarse method and controlled deposition rates for the manufacture of Laserablationsmasken |
| 11/06/2001 | US6311510 Vapor condenser with high efficiency for use in vacuum apparatus |
| 10/31/2001 | EP1150016A1 Cooling system for vacuum pump and method for its realisation |
| 10/31/2001 | EP1150015A2 Vacuum pump |
| 10/30/2001 | US6309184 Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line |
| 10/25/2001 | WO2001079695A1 Oscillating piston pump |
| 10/25/2001 | WO2001079694A1 Electro-desorption compressor |
| 10/25/2001 | DE10019106A1 Oscillating piston vacuum pump is constructed from identical modules, each with piston drive and mounted on common rail, dependent upon customer demand |
| 10/23/2001 | US6305907 Process for evacuating a wet gas a treatment device to carry out this process and a suction pump for a treatment device of this type |
| 10/17/2001 | EP1144930A1 Vacuum control system for foam drying apparatus |
| 10/17/2001 | EP0795084B1 Getter pump module and system |
| 10/11/2001 | US20010028858 Vacuum pump cooling system, and a method of making it |
| 10/09/2001 | US6299746 Getter system for purifying the confinement volume in process chambers |
| 10/04/2001 | US20010025509 Air conditioning system for vehicle |
| 10/04/2001 | EP1137882A1 Low pressure ratio piston compressor |
| 09/26/2001 | EP1135608A1 Compressor arrangement |
| 09/25/2001 | US6293109 Pulse pipe refrigerating machine and cryopump using the refrigerating machine |
| 09/20/2001 | WO2001069645A1 Spatter ion pump |
| 09/20/2001 | WO2001069144A2 Hydrogen compressor |
| 09/20/2001 | CA2402510A1 Hydrogen compressor |
| 09/19/2001 | EP0892662A4 Throttle cycle cryopumping system for group i gases |
| 09/17/2001 | CA2300770A1 Method and apparatus for providing pressurized hydrogen gas |
| 09/12/2001 | EP1131558A1 Method for conveying damp gases by means of a conveyor device and conveyor device for carrying out said method |
| 09/11/2001 | US6286320 Bottom entry pumping system with tertiary containment |
| 09/05/2001 | CN2446302Y Manually operated multipurpose air pump |
| 08/23/2001 | US20010016166 Plasma vacuum pumping cell |
| 08/23/2001 | US20010015019 Vacuum drying apparatus and vacuum drying method |
| 08/22/2001 | EP1126173A1 Pump, in particular single or multistage suction pump |
| 08/21/2001 | US6277173 System and method for discharging gas |
| 08/16/2001 | EP1124061A1 High pressure cryogenic pump |
| 08/14/2001 | US6274854 Method and apparatus for baking out a gate valve in a semiconductor processing system |
| 08/11/2001 | CA2335490A1 Very high pressure cryogenic pump |
| 08/09/2001 | US20010012485 Electronically controlled cryopump |
| 08/07/2001 | US6272400 Vacuum network controller |
| 08/02/2001 | DE10103095A1 Klimaanlage für ein Fahrzeug Air conditioner for a vehicle |
| 07/24/2001 | US6263679 Particulate dam for cryopump flange |
| 07/19/2001 | DE10000675A1 Valve or compressor including sealing rings, for use under high vacuum conditions, especially in efficient production of nuclear spin polarized helium-3 gas for use in magnetic resonance tomography |
| 07/18/2001 | EP1116690A2 Production of nuclear spin polarized Helium-3 gas |
| 07/10/2001 | US6257835 Dry vacuum pump system for gas sorption analyzer |
| 07/10/2001 | US6257001 Cryogenic vacuum pump temperature sensor |
| 07/10/2001 | US6256968 Volumetric vacuum control |
| 07/03/2001 | US6254362 Vacuum pump with dust collecting function |
| 06/28/2001 | WO2001046592A1 Dry compressing vacuum pump having a gas ballast device |
| 06/28/2001 | WO2001046587A1 Multistage compressor, and multistage compression method |
| 06/28/2001 | WO2001046586A1 Multistage compressor |
| 06/28/2001 | DE19962445A1 Dry compressing vacuum pump has gas ballast device with valve that only opens when difference between atmospheric pressure and pressure on pump side of valve exceeds set value |
| 06/26/2001 | US6253029 Vacuum processing apparatus |
| 06/26/2001 | US6251192 Vacuum exhaust system |
| 06/21/2001 | US20010003892 Exhaust gas filtration device, auxiliary filtration device and trap device |
| 06/05/2001 | US6241477 In-situ getter in process cavity of processing chamber |
| 05/31/2001 | WO2001038742A1 Vacuum pump comprising an outlet |
| 05/31/2001 | US20010001950 Sharing vacuum pumps by evacuating the main chamber and auxilary chambers by pumps arranged in series; connected and sharing a drive motor; etching and vapor deposition of semiconductor wafers; efficiency |
| 05/30/2001 | CN2432361Y Combined water pump |
| 05/23/2001 | DE10060164A1 Warm water heating installation has adapter incorporated in water circulation circuit fitted with chemical dispenser and/or sample collector |
| 05/23/2001 | CN1296127A Collector |
| 05/22/2001 | US6233948 Control apparatus for a plurality of cryopumps |
| 05/16/2001 | EP1099778A2 Trap apparatus |
| 05/15/2001 | US6230498 Integrated cryocooler assembly with improved compressor performance |
| 05/02/2001 | EP1095217A1 Plasma vacuum pumping cell |
| 05/02/2001 | EP1094845A1 Vapor sterilization device |
| 04/24/2001 | US6220821 Ion pump having protective mask components overlying the cathode elements |
| 04/19/2001 | DE19947453A1 Gas collection equipment used for e.g. moist gases containing xenon from anesthesia comprises pump and storage unit for gas |
| 04/18/2001 | EP0929744A4 Fluid displacement system |
| 04/05/2001 | DE19947444A1 New gas pump, useful for collection of used anesthesia gases, comprises a compressor unit with controllable temperature |
| 04/05/2001 | DE19947443A1 New pump, useful for conveying and compressing damp gases or gas mixtures, comprises a piston pump used for liquids |
| 04/05/2001 | DE19945241A1 Verfahren zur schonenden Verdichtung von hochreinen Gasen Method for gentle compression of high purity gases |
| 03/28/2001 | EP1087133A1 Process for the compression of purified gases |
| 03/22/2001 | DE19940498A1 Membranpumpe Diaphragm pump |
| 03/21/2001 | EP1085208A2 Piston compressor |
| 03/21/2001 | CN1288107A Compression device |
| 03/20/2001 | US6204776 Communication abnormality detecting/coping device and vacuum pump remote monitor control device |
| 03/13/2001 | US6200107 Vacuum pumping systems |
| 03/13/2001 | CA2217978C High pressure gas compressor |
| 03/07/2001 | EP1081380A1 Device and method for evacuation |
| 03/01/2001 | WO2001014744A1 Membrane pump |
| 02/21/2001 | EP1076776A4 Manual vacuum producing system having vacuum pressure indicator |
| 02/21/2001 | EP1076776A1 Manual vacuum producing system having vacuum pressure indicator |
| 01/25/2001 | WO2001006123A1 Method and compressor module for compressing a gas stream |
| 01/25/2001 | DE19933989A1 Verfahren und Kompressormodul zum Verdichten eines Gasstromes Method and compressor module for compressing a gas stream |
| 01/24/2001 | EP1070848A1 Positive displacement machine for compressible fluids |
| 01/04/2001 | DE19929519A1 Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage Method for operating a multi-chamber vacuum system |
| 01/03/2001 | EP1065385A2 Method of operating a multi-chamber vacuum system |
| 01/03/2001 | CN1278506A Fast vacuum sealer and its manufacture, use and sealing method |
| 12/26/2000 | US6165328 Low pressure pump such as cryopump coupled to the processing chamber with a throttle plate; valve mechanism couples noble gas to chamber so noble gas flows in continuously and is pumped out with cryopump, getter pump removes impurity gases |
| 12/21/2000 | WO2000077398A1 Baffles for cryopump |
| 12/14/2000 | WO2000075512A1 Pump cylinder and method of collecting pasty materials, liquids, gases and/or mobile objects |
| 12/14/2000 | DE19925481A1 Vorrichtung zur Sammlung von pastösen Massen, Flüssigkeiten, Gasen und mobilen Objekten Device for collecting pasty masses, liquids, gases and mobile objects |
| 12/12/2000 | US6158226 Trapping device |
| 12/06/2000 | EP0895484A4 Combination cryopump/getter pump and method for regenerating same |
| 12/05/2000 | US6155059 High capacity cryopump |
| 11/29/2000 | EP1055070A1 Low noise high performance vacuum pump |