| Patents for F04B 37 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups (3,029) |
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| 01/12/1988 | US4718836 Reciprocating completely sealed fluid-tight vacuum pump |
| 01/12/1988 | US4718241 Cryopump with quicker adsorption |
| 01/12/1988 | US4718240 Vacuum system |
| 01/07/1988 | EP0251664A1 Heat-driven pump |
| 01/07/1988 | EP0250613A1 Cryopump and method of operating this cryopump |
| 11/19/1987 | EP0245958A2 Gas compressor |
| 10/20/1987 | CA1228239A1 Economical and thermally efficient cryopump panel and panel array |
| 10/13/1987 | US4699572 Reciprocatory piston and cylinder machine |
| 10/06/1987 | US4697617 Pressure relief filter and valve and cryopump utilizing the same |
| 09/30/1987 | EP0238908A1 Cryosorption pump for thermal vacuum insulation of the rotor of an electric machine provided with a supra-conducting field coil |
| 09/22/1987 | US4694734 Sealing construction for slide type vacuum pump with finger portions of spring element pressing cylindrical portion of seal element against cylinder bore |
| 09/08/1987 | US4691534 Cryogenic pump with refrigerator with the geometry of the shields, suitable for achieving a high efficiency and an extended life |
| 07/14/1987 | US4679994 Piston vacuum pump |
| 07/14/1987 | US4679401 Temperature control of cryogenic systems |
| 06/16/1987 | CA1222941A1 Single stage liquid motor and pump |
| 06/16/1987 | CA1222875A1 Bakeable cryopump |
| 06/09/1987 | CA1222637A1 Multiport cryopump |
| 06/03/1987 | EP0223868A1 Process for the reliquefaction of helium at or in a closed loop-operated bath cryo pump |
| 06/02/1987 | CA1222386A1 Reduced vacuum cryopump |
| 05/27/1987 | EP0223251A2 Use of perfluoropolyethers in mechanical pumps |
| 05/26/1987 | US4668424 Nickel, rare earth metal, zirconium |
| 05/26/1987 | US4667477 Cryopump and method of operating same |
| 05/12/1987 | CA1221668A1 Hydrogen compressor |
| 05/12/1987 | CA1221553A1 Cryopump with improved adsorption capacity |
| 05/07/1987 | WO1987002743A1 Cryopump with quicker adsorption |
| 05/05/1987 | US4662826 Vacuum pump system including serially connected rotary and reciprocating vacuum pumps |
| 04/28/1987 | CA1220948A1 Cryopump with rapid cooldown and increased pressure stability |
| 04/22/1987 | CN86104521A Expelling air and injecting mercury ultra high vacuum instrument with high efficiency and energy saving |
| 04/14/1987 | US4657487 Vacuum generating apparatus including liquid ring pump, pre-separator, two heat exchangers and fine separator |
| 04/07/1987 | US4655800 Adsorption of chlorine containing gases |
| 04/07/1987 | US4655046 Cryopump with exhaust filter |
| 03/26/1987 | WO1987001768A1 Cryopump with vibration isolation |
| 03/18/1987 | EP0214277A1 Cryopump regeneration method and apparatus. |
| 03/10/1987 | US4648804 Aspirator pump device for use in semiconductor processing |
| 01/29/1987 | WO1987000586A1 Cryopump with exhaust filter |
| 01/07/1987 | EP0207230A2 Fast cycle water vapor cryopump |
| 01/06/1987 | US4634353 Valve head for high-pressure pumps |
| 11/20/1986 | EP0201877A2 Directly heated sorption getter body |
| 11/11/1986 | US4621985 High vacuum apparatus |
| 11/05/1986 | EP0112907B1 Means for periodic desorption of a cryopump |
| 10/15/1986 | EP0197238A2 Housing for a turbo-molecular vacuum pump |
| 10/01/1986 | EP0196281A2 A cryogenic pump with refrigerator with the geometry of the shields suitable for achieving a high efficiency and an extended life |
| 09/30/1986 | US4614093 Method of starting and/or regenerating a cryopump and a cryopump therefor |
| 09/23/1986 | US4613485 Pnictide trap for vacuum systems |
| 09/23/1986 | US4612957 Vacuum pump and trap combination |
| 09/16/1986 | US4611467 Method and apparatus for throttling gas flow to a cryopump |
| 09/12/1986 | WO1986005240A1 Cryopump regeneration method and apparatus |
| 08/26/1986 | US4607493 Cryosorption pump |
| 08/26/1986 | US4607491 Cooling trap for vacuum |
| 07/09/1986 | EP0186776A1 Apparatus for the production of a vacuum |
| 07/02/1986 | CA1206822A Radial vane gas throttling valve for vacuum systems |
| 07/01/1986 | US4597267 Fast cycle water vapor cryopump |
| 06/10/1986 | US4593530 Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump |
| 06/10/1986 | CN85106797A Process for production of vacuum |
| 05/13/1986 | US4588504 Oil circuit coupler for an oil-sealed vacuum pump |
| 04/22/1986 | US4583925 Suction pump |
| 04/09/1986 | EP0176828A1 Oil-sealed vacuum pump |
| 04/08/1986 | US4580404 Method for adsorbing and storing hydrogen at cryogenic temperatures |
| 03/25/1986 | US4577465 Oil free vacuum system |
| 03/12/1986 | EP0173787A2 Vacuum pump |
| 03/05/1986 | EP0173601A1 Perfectly dry and closed vacuum pump with rectilinear movement for alternating compression |
| 02/18/1986 | US4571158 Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems |
| 02/11/1986 | CA1200479A1 High pressure helium pump for liquid or supercritical gas |
| 02/05/1986 | EP0170377A1 Portable vacuum pump for desoldering purposes |
| 01/21/1986 | US4565506 Hand operated vacuum pump |
| 01/14/1986 | US4564338 High pressure pump with a flow control valve |
| 12/24/1985 | US4560327 Porting and ducting arrangement |
| 12/24/1985 | US4559787 Vacuum pump apparatus |
| 12/05/1985 | WO1985005410A1 Cryopump with improved second stage array |
| 12/04/1985 | EP0163422A2 Priority vacuum control system |
| 12/03/1985 | US4555907 Cryopump with improved second stage array |
| 11/21/1985 | WO1985005148A1 Vacuum pump purging apparatus |
| 11/21/1985 | EP0161927A2 Load lock pumping mechanism |
| 10/22/1985 | CA1195519A1 Cryogenic pump having maximum aperture throttled port |
| 10/16/1985 | EP0158295A2 Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump |
| 10/16/1985 | EP0158063A1 Pump valve head for a multipiston high-pressure pump |
| 10/15/1985 | US4546613 Cryopump with rapid cooldown and increased pressure |
| 09/17/1985 | US4541249 Cryogenic trap and pump system |
| 09/11/1985 | EP0154165A2 Method for adsorbing and storing hydrogen at cryogenic temperatures |
| 09/10/1985 | CN85200140U Anefficient cryogenical pump for hydrogen extracting refrigerator |
| 09/04/1985 | EP0153525A1 Pnictide trap for vacuum systems |
| 09/03/1985 | CA1192756A1 Cryopump |
| 08/13/1985 | US4534861 Removing liquid contaminants from oil ssump |
| 08/13/1985 | US4534708 Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems |
| 08/13/1985 | US4534314 Load lock pumping mechanism |
| 07/30/1985 | US4531372 Cryogenic pump having maximum aperture throttled part |
| 07/23/1985 | US4530213 Economical and thermally efficient cryopump panel and panel array |
| 07/04/1985 | WO1985002888A1 Method of and apparatus for controlling gas pressure |
| 07/03/1985 | EP0146685A2 Getter sorption pump with heat accumulator for high-vacuum and gas discharge plants |
| 06/25/1985 | US4525128 Reciprocating exhauster |
| 06/19/1985 | EP0144575A2 Cryosorption pump |
| 06/19/1985 | EP0144524A2 Getter pump for high-vacuum and gas discharge plants |
| 06/19/1985 | EP0144523A2 Getter sorption pump with a heat accumulator for high-vacuum and gas discharge plants |
| 06/19/1985 | EP0144522A2 Getter sorption pump having a heat accumulator for high-vacuum and gas discharge plants |
| 06/11/1985 | US4522453 Tribological coatings for the protection of moving machine parts from wear and corrosion |
| 06/05/1985 | EP0143684A1 Multi-stage series compressor |
| 04/30/1985 | US4514204 Bakeable cryopump |
| 04/30/1985 | US4513717 Ignition timing control device of an internal combustion engine |
| 03/27/1985 | EP0134942A1 A cryopanel and a cryopump using such cryopanels |
| 03/19/1985 | US4505647 Vacuum pumping system |