Patents
Patents for F04B 37 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups (3,029)
10/2005
10/05/2005EP1582606A1 Vacuum treating apparatus with variable pumping arrangement.
10/05/2005CN1221738C Hydraulic apparatus
09/2005
09/29/2005WO2005090795A1 Pump device and pump unit thereof
09/29/2005WO2005090788A1 Valve assembly for a cryopump
09/28/2005EP1580477A1 Damping connection for vacuum pump
09/28/2005CN2729363Y Mobile vacuum set
09/28/2005CN1675505A Cryogenic refrigerator
09/28/2005CN1673550A Damping connection for vacuum pump
09/28/2005CN1673145A Vacuum treatment installation with a variable pump arrangement
09/27/2005US6948921 Vacuum pump comprising an outlet
09/22/2005US20050204754 Vacuum pump damping adapter
09/22/2005US20050204753 Integrated rough/purge/vent (RPV) valve
09/21/2005EP1577559A1 Vacuum pumping system
09/21/2005CN2727446Y Vacuum pump having built-in mute structure and filtration structure
09/21/2005CN2727445Y Vacuum oil pumping and filling device
09/15/2005US20050201882 Vacuum pumping system
09/15/2005US20050199037 Pump for supplying a gas to a sensor and methods therefor
09/15/2005DE10393146T5 Tieftemperaturkühlvorrichtung The cryogenic cooling apparatus
09/14/2005CN2725567Y High vacuum machine set
09/13/2005US6944572 Apparatus for predicting life of rotary machine and equipment using the same
09/13/2005US6942467 UHV compatible lead through, device and procedure for highly effective production of nuclear spin polarized 3He at high polarization
09/08/2005US20050196284 Electronically controlled vacuum pump
09/07/2005CN1218150C Pulse pipe refrigerating machine and cryopump using refrigerating machine
08/2005
08/31/2005CN2721904Y Air pump
08/25/2005WO2005078281A1 Vacuum device
08/24/2005CN1216235C Fluid compression apparatus
08/18/2005WO2005075827A1 A pumping system
08/18/2005WO2005075826A1 Vacuum pump and method for operating the same
08/18/2005WO2004065290A3 Integrated electrostatic peristaltic pump method and apparatus
08/17/2005EP1206641B1 Membrane pump
08/17/2005EP1169572B1 Piston vacuum pump with a gas inlet and a gas outlet
08/17/2005CN1214952C Bottle cork for vacuum preservation
08/10/2005EP1562161A1 Gas suction pump device, gas feed adapter and gas alarm unit
08/04/2005US20050169766 Getter compositions reactivatable at low temperature after exposure to reactive gases at higher temperature
08/03/2005CN1648450A Closed reciprocating compressor
08/03/2005CN1213225C Multi cylinder compressor
08/02/2005US6923018 Electro-desorption actuator
07/2005
07/28/2005WO2005068968A1 A pump for supplying a gas to a sensor and methods therefor
07/28/2005US20050163622 Vacuum pump control device and vacuum device
07/27/2005CN1644924A Vacuum exhaust system and monitoring and controlling method thereof
07/27/2005CN1644923A Vacuuming method for container by gas associating exchanging principle
07/26/2005US6920763 Integration of automated cryopump safety purge
07/21/2005WO2005066493A1 Vacuum ejector device
07/21/2005US20050155358 Method and apparatus for detecting and measuring state of fullness in cryopumps
07/13/2005EP1553303A2 Apparatus for evacuating a plurality of vacuum chambers
07/13/2005CN2709674Y Vacuum pump
07/13/2005CN1637283A Apparatus and method for control, pumping and abatement for vacuum process chambers
07/07/2005US20050147509 Apparatus and method for control, pumping and abatement for vacuum process chambers
06/2005
06/30/2005US20050142010 Fore-line preconditioning for vacuum pumps
06/30/2005DE10108631B4 Vakuumpumpenanlage und Verfahren zur Erzeugung eines Endvakuums Vacuum system and method for generating a final vacuum
06/22/2005EP1427939A4 A compact vacuum pump
06/22/2005CN1207503C Leak control valve
06/16/2005WO2004073825A3 Method for reducing the partial pressure of undesired gases in a small vacuum vessel
06/16/2005US20050129535 Vacuum pump
06/15/2005EP1540049A1 Dual chamber integrated phase separator for ultra high vacuum system
06/15/2005CN1626795A Cylinder type cooling structure in reciprocal movement type compressor
06/15/2005CN1206462C Hydraulic oscillating machine
06/09/2005WO2005052374A1 Vacuum pump
06/09/2005WO2005052369A1 Method and apparatus for regenerating water
06/09/2005DE10352970A1 Sealing arrangement for a cylinder/piston system in vacuum pumps comprises a sealing element in the form of a closed ring which is provided with a protrusion on the inner side
06/07/2005US6902380 Vacuum pump with pump rotor pairs and permanent magnet motor
06/07/2005US6902378 Electronically controlled vacuum pump
06/02/2005WO2005050018A1 Cryopump
06/02/2005WO2005050017A1 Cryopump
05/2005
05/31/2005US6899529 Connecting structure for vacuum pump
05/25/2005EP1533530A1 Vacuum pump provided with vibration damper
05/25/2005DE102004005415B3 Cryogenic vacuum pump for generating high vacuum, especially within a vacuum chamber, comprises an additional cooling device that is spatially assigned and thermally connected to a cooling stage
05/25/2005CN1618702A Fast vacuum sealing device and its manufacturing method and new use and fast sealing method
05/24/2005US6895780 Sorber structure for electro-desorption compressor
05/24/2005US6895766 Fail-safe cryopump safety purge delay
05/19/2005US20050106043 Vacuum pump provided with vibration damper
05/18/2005EP1531267A2 Pumping device using thermal-transpiration micropumps
05/11/2005EP1529560A2 Vacuum control system
05/05/2005US20050095143 Pumping apparatus using thermal transpiration micropumps
04/2005
04/27/2005CN1609447A In situ getter pump system and method
04/26/2005US6884039 Flywheel system with parallel pumping arrangement
04/21/2005WO2005005833A3 Integration of automated cryopump safety purge
04/21/2005US20050081536 Cryopump temperature control of arrays
04/20/2005CN1197641C Compressor unit provided with adsorption dryer and adsorption dryer therefor
04/14/2005US20050079074 Vacuum control system
04/07/2005WO2005031169A1 Detection of contaminants within fluid pumped by a vacuum pump
04/07/2005US20050072356 Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same
04/05/2005US6874989 Vacuum pump
03/2005
03/24/2005DE10115394B4 Maschinenbauteil und/oder verfahrenstechnische Anlage mit einem Hohlraum und Reinigungsverfahren hierfür Machine component and / or process plant having a cavity and cleaning method therefor
03/23/2005CN1194173C Collector
03/23/2005CN1193821C Non-vaporating getter, method for preparing same and display device
03/17/2005US20050058552 Valving for multi-stage vacuum pumps
03/17/2005DE10339838A1 Vacuum pump comprises a plunger having a coating on its casing surface and a cylinder having a coating on its inner surface
03/16/2005EP1515042A2 Valving for multi-stage vacuum pumps
03/16/2005EP1513598A1 Cold trap with rapid regeneration
03/16/2005EP0996877B1 An apparatus and method for regulating a pressure in a chamber
03/16/2005CN1596323A Porous getter devices with reduced particle loss and method for manufacturing same
03/16/2005CN1594881A Inclosed two-stage compression type compressor
03/08/2005US6865513 Method for predicting life of rotary machine and determining repair timing of rotary machine
03/03/2005WO2005019745A1 Vacuum device
03/03/2005WO2005019744A1 Vacuum device
02/2005
02/24/2005US20050042117 Optical interference display panel and manufacturing method thereof
02/24/2005DE10357805A1 Auslass-Rückschlagventil für eine Fahrzeug-Vakuumpumpe Outlet check valve for a vehicle vacuum pump
02/22/2005US6858254 Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same
02/17/2005US20050034767 Processing apparatus having integrated pumping system
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