| Patents for C30B 35 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure (2,584) |
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| 11/17/1994 | DE4325522C1 Crucible, in particular support crucible |
| 10/18/1994 | US5357115 Processing method for wafers |
| 06/01/1994 | EP0599350A2 Crystal diameter measuring device |
| 05/31/1994 | US5316742 Single crystal pulling apparatus |
| 05/03/1994 | US5308446 Fused quartz member for use in semiconductor manufacture |
| 04/13/1994 | EP0591525A1 Device for pulling up single crystal |
| 03/23/1994 | EP0401387B1 Process for producing single crystal |
| 03/02/1994 | CN2157817Y Zone-melting purification apparatus for high efficient compound |
| 02/01/1994 | US5283089 Non-porous diffusion furnace components |
| 01/19/1994 | CN2153558Y Ultra-high pressure device |
| 01/11/1994 | US5277579 Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system |
| 12/28/1993 | US5273424 Vertical heat treatment apparatus |
| 10/19/1993 | CA2008024C Production process of single crystals |
| 09/28/1993 | US5248886 Processing system |
| 09/28/1993 | US5248637 Aluminum-silica-titanium oxides |
| 08/03/1993 | US5232506 Furnace structure of semiconductor manufacturing apparatus |
| 07/06/1993 | US5224999 Heat treatment apparatus |
| 06/30/1993 | EP0549449A1 Apparatus for solidifying a doped electrically conducting material and for continuously monitoring its dopant concentration |
| 06/08/1993 | US5217501 Vertical wafer heat treatment apparatus having dual load lock chambers |
| 03/10/1993 | EP0530825A1 A single crystal growing apparatus |
| 03/03/1993 | EP0529594A1 A glassy carbon coated graphite component for use in the production of silicon crystal growth |
| 01/07/1993 | WO1993000462A1 Device for pulling up single crystal |
| 01/07/1993 | EP0305461B1 Epitaxial installation |
| 01/05/1993 | US5176490 Monocrystal rod conveying apparatus |
| 12/29/1992 | US5174801 Manufacture of quartz glass crucible for use in the manufacture of single crystal silicon |
| 12/08/1992 | US5169608 Porous Container having pores filled with amorphous carbon and diamond for hermetic sealing |
| 12/01/1992 | US5167759 Noncontamination; high quality, for semiconductors |
| 10/28/1992 | EP0510653A1 Highly heat resistant glass fiber and process for its production |
| 09/09/1992 | EP0502412A1 Processing system |
| 07/21/1992 | US5132145 Method of making composite material crucible for use in a device for making single crystals |
| 07/15/1992 | EP0494783A1 Furnace structure of semiconductor manufacturing apparatus |
| 06/17/1992 | DE4039828A1 Device for holding a semiconductor substrate base - is formed as three or multi point arrangement from a multi jaw chuck with adjustable clamping jaws etc. |
| 05/26/1992 | US5116181 Robotically loaded epitaxial deposition apparatus |
| 05/13/1992 | EP0216932B1 Rhombohedral polycrystalline boron nitride and process for its production |
| 02/18/1992 | US5088922 Heat-treatment apparatus having exhaust system |
| 02/18/1992 | US5088290 Transfer vessel apparatus and method of storing samples |
| 01/22/1992 | EP0290629B1 Device for growing profiled monocrystals |
| 01/22/1992 | EP0290628B1 Method of growing profiled monocrystals |
| 01/22/1992 | EP0214177B1 Apparatus for replenishing a melt |
| 01/14/1992 | US5080039 Processing apparatus |
| 01/02/1992 | EP0463543A1 Manufacture of quartz glass crucible for use in the manufacture of single crystal in silicon |
| 12/31/1991 | US5076902 Removal impurities from vitreous silica or silica glass |
| 12/11/1991 | EP0460477A1 Monocrystal rod conveying apparatus |
| 11/21/1991 | EP0457444A1 Boat of boron nitride and its production |
| 11/12/1991 | US5064497 Crystal growth method and apparatus |
| 11/05/1991 | US5063181 Synthetic silica glass article for dopant-diffusion process in semiconductors |
| 10/08/1991 | US5055036 Method of loading and unloading wafer boat |
| 10/01/1991 | US5053359 Cristobalite reinforcement of high silica glass |
| 09/18/1991 | EP0446525A1 Crystal growth method and apparatus |
| 09/18/1991 | CN2084870U Fixing structure of tool on grinding head for interal microtome |
| 09/05/1991 | WO1991013192A1 Single crystal production apparatus |
| 08/13/1991 | US5038711 Epitaxial facility |
| 07/30/1991 | US5035769 Potassium nitrate and hydroxide |
| 07/16/1991 | US5032366 Boron nitride boat and process for producing it |
| 01/22/1991 | US4987016 Component for producing semiconductor devices and process of producing it |
| 01/01/1991 | US4981436 Vertical type heat-treatment apparatus |
| 12/25/1990 | US4980133 Separated by a conductive sleeve defining a gradient zone for crystallization; single crystals |
| 12/25/1990 | US4979973 Preparation of fused silica glass by hydrolysis of methyl silicate |
| 12/12/1990 | EP0401387A1 Process for producing single crystal |
| 12/11/1990 | US4976613 Heat treatment apparatus |
| 11/22/1990 | EP0398366A2 Semiconductor processing apparatus and method |
| 11/15/1990 | DE3915116C1 Electrically non-conducting crucible - includes pyrolytic carbon layer and aluminium nitride or aluminium oxide-contg. ceramic |
| 10/30/1990 | CA1275741C Flowing gas seal enclosure for processing workpiece surface with controlled gasenvironment and intense laser irradiation |
| 10/17/1990 | CN1010037B Process for growing shaped single crystals |
| 10/17/1990 | CN1010036B Apparatus for growing profieled single crystals |
| 10/16/1990 | US4963178 Apparatus for making quartz glass crucibles |
| 09/27/1990 | DE4007053A1 Coated segmented graphite crucible - with carbon-bonded carbon fibre protective layer |
| 09/19/1990 | EP0387574A1 Apparatus for metering silicon melt |
| 09/18/1990 | US4957781 Thermal treatment of semiconductor wafers |
| 09/18/1990 | US4957713 Apparatus for growing shaped single crystals |
| 09/11/1990 | US4956208 Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
| 09/11/1990 | US4955775 Semiconductor wafer treating apparatus |
| 09/04/1990 | US4954079 Heat-treating apparatus and a method for the same |
| 08/07/1990 | US4945774 Communicating services |
| 06/28/1990 | WO1990007021A1 Process for producing single crystal |
| 06/19/1990 | US4935046 Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
| 05/09/1990 | EP0367127A1 Synthetic silica glass article for dopant-diffusion process in semiconductors |
| 04/10/1990 | US4915773 Process for growing shaped single crystals |
| 03/28/1990 | EP0360659A1 Synthetic fused silica glass and method for the preparation thereof |
| 03/27/1990 | US4911896 Drawing a single crystal silicon rod from molten polysilicon |
| 03/27/1990 | US4911103 Wafers |
| 03/21/1990 | EP0359159A2 Rotating transition for receptacles having a hot wall |
| 02/27/1990 | CA1266222A1 Apparatus for replenishing a melt |
| 02/13/1990 | US4900526 Polycrystalline rhombohedral boron nitride and method of producing the same |
| 12/19/1989 | US4888142 Firing amorphous form in nonoxidizing atmosphere |
| 11/08/1989 | CN1037051A Indium mixed mischcrystal zinc diffusion source |
| 10/25/1989 | EP0338914A1 Process and crucible for the solidification of materials, and application to the crystal growth of semiconductors |
| 09/05/1989 | US4863657 Method of making semi-conductor diffusion furnace components |
| 07/18/1989 | US4849608 Apparatus for heat-treating wafers |
| 07/18/1989 | US4849146 Vapor phase reaction boron halide and ammonia; uniform structure |
| 06/08/1989 | DE3835646A1 Shell for reinforcing a quartz crucible |
| 06/07/1989 | EP0319121A1 Apparatus for producing semiconductors |
| 06/07/1989 | EP0319031A2 Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
| 03/29/1989 | EP0309272A2 Apparatus and method for sample holders and wafer cages fabricated from silicon carbide for processing semiconductor materials |
| 03/29/1989 | EP0308695A2 A component for producing semi-conductor devices and process of producing it |
| 03/23/1989 | EP0290628A4 Method of growing profiled monocrystals. |
| 03/22/1989 | EP0290629A4 Device for growing profiled monocrystals. |
| 03/08/1989 | EP0305461A1 Epitaxial installation. |
| 03/07/1989 | US4810473 Molecular beam epitaxy apparatus |
| 02/07/1989 | US4802842 Apparatus for manufacturing semiconductor device |