Patents for C30B 35 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure (2,584)
12/2003
12/18/2003US20030232001 Low nitrogen concentration carbonaceous material and manufacturing method thereof
12/17/2003EP1370498A1 Quartz glass component and method for the production thereof
12/11/2003US20030226500 Atomic layer deposition apparatus and methods
12/10/2003CN1461045A Method and device for semiconductor crystallization by laser beam
11/2003
11/25/2003US6652649 Supplemental heating unit for crystal growth furnace
11/20/2003WO2003095384A1 Fused quartz article having controlled devitrification
11/20/2003US20030216012 Method and apparatus for crystallizing semiconductor with laser beams
11/13/2003WO2003030222A3 Tool for handling wafers and epitaxial growth station
11/13/2003US20030211335 Fused quartz article having controlled devitrification
11/13/2003US20030210731 Process and device for producing a quartz glass crucible by ring-like arc, and its quartz glass crucible
11/04/2003US6641663 Silica crucible with inner layer crystallizer and method
10/2003
10/23/2003US20030199177 Semiconductor crystal-structure-processed mechanical devices, and methods and systems for making
10/23/2003US20030196593 Thin-film crystal-structure-processed mechanical devices, and methods and systems for making
10/23/2003US20030196592 Monolithic stacked/layered crystal-structure-processed mechanical, and combined mechanical and electrical, devices and methods and systems for making
10/23/2003US20030196591 Formation of crystal-structure-processed mechanical, and combined mechanical and electrical, devices on low-temperature substrates
10/22/2003EP1153000B1 Method for making a bowl in thermostructural composite material in particular for a monocrystalline silicon producing installation
10/16/2003WO2002095807A3 Silicon fixtures useful for high temperature wafer processing
10/09/2003WO2003083188A1 Device for pulling monocrystals
10/02/2003WO2003080900A1 A crystallisation system and method
10/02/2003US20030186560 Gaseous phase growing device
10/01/2003EP1348783A2 a method for regenerating a composite crucible
10/01/2003CN1445184A Process and device for producing silica glass crucible by cyclic arc and silica glass crucible
09/2003
09/17/2003EP1344751A2 Quartz glass crucible and process and apparatus for producing it by arc fusion
09/10/2003CN1441091A Laser seed crystal centering method for top seed crystal process of growing crystal
08/2003
08/28/2003US20030159648 Method for the production of a silica glass crucible with crystalline regions from a porous silica glass green body
08/14/2003US20030152194 Integrated crystal mounting and alignment system for high-throughput biological crystallography
08/12/2003US6605152 Catch pan for melt leakage in apparatus for pulling single crystal
08/07/2003US20030148104 Highly pure, replaceable wear insert and process for manufacturing the same
08/06/2003EP1333013A2 High purity wear resistant inlay material and its production method
08/06/2003EP1332117A2 Glass member resistant to plasma corrosion
08/05/2003US6602345 Heater arrangement for crystal growth furnace
07/2003
07/30/2003CN2563166Y Mold for synthesizing high grade artificial crystal
07/24/2003US20030136335 Heater arrangement for crystal growth furnace
07/22/2003US6596076 Apparatus and method for altering the apparent effects of gravity
07/03/2003US20030124044 Modification process of synthetic silica powder and its quartz glass product
06/2003
06/19/2003WO2003050598A2 Integrated crystal mounting and alignment system for high-throughput biological crystallography
06/19/2003US20030113488 Device for holding a molten semiconductor material
06/19/2003US20030113449 For pulling up monocrystalline silicone; superior in dimensional stability; inner quartz glass layer and an outer carbonaceouslayer, such as carbon fiber laminate; layers are integrally formed
06/18/2003EP1319736A1 Silica crucible with inner layer crystallizer and method for its manufacturing
06/18/2003DE10204468C1 Highly pure replaceable wear insert production from expanded graphite, used as insert for semiconductor manufacturing crucible comprises placing expanded graphite into pressing mold and subjecting to pressure
06/18/2003CN2556210Y Device of controlling inoculating crystal direction for use in crystal growing process
06/12/2003US20030106491 Silica crucible with inner layer crystallizer and method
06/11/2003CN1422819A SiO2 formed body local or all glassivation, its producing method and use
06/05/2003US20030104920 SiO2 shaped body which is vitrified in partial regions or completely, process for its production and use
06/05/2003US20030101748 Silica glass member for semiconductor and production method thereof
06/03/2003US6572705 Method and apparatus for growing thin films
05/2003
05/28/2003EP1314701A1 Modification process of synthetic quartz powder and its quartz glass product
05/28/2003CN1420213A Method for producing silica glass crucible with crystallizing zone from porous silica glass parison
05/22/2003WO2003024876A3 Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
05/22/2003US20030094131 Coating a metal salt and a partial hydrolyzate of alkoxysilane oligomer on the surface of the crucible, and heating for a transparent layer
05/14/2003CN1417387A Surface modifying method for quartz glass crucible and surface modified crucible
05/13/2003US6562131 Method for growing single crystal silicon carbide
05/13/2003US6562130 Low defect axially grown single crystal silicon carbide
05/13/2003US6562125 Heater arrangement for crystal growth furnace
04/2003
04/29/2003US6553787 Method for manufacturing quartz glass crucible
04/23/2003EP1304399A1 Surface modification process of quartz glass crucible
04/15/2003US6548131 Quartz glass crucible and process for the manufacture of the crucible
04/15/2003US6547877 Tantalum crucible fabrication and treatment
04/10/2003WO2003030222A2 Tool for handling wafers and epitaxial growth station
04/09/2003EP1210472A4 Heater arrangement for crystal growth furnace
03/2003
03/27/2003WO2003024876A2 Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
03/27/2003CA2460996A1 Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
03/25/2003US6537372 Heater arrangement for crystal growth furnace
03/25/2003US6537371 Niobium crucible fabrication and treatment
03/12/2003EP1290250A2 Multilayered quartz glass crucible and method of its production
03/06/2003US20030041623 Quartz glass crucible and process for the production thereof
03/05/2003CN1400336A Pyrolyzing borium nitride crucible and method
02/2003
02/27/2003US20030037724 Axial gradient transport appatatus and process for producing large size, single crystals of silicon carbide
02/25/2003US6524668 Composite crucible, and preparation method and regeneration method thereof
01/2003
01/29/2003CN1100164C Improved crystallization apparatus and method
01/16/2003US20030012899 Doped silica glass crucible for making a silicon ingot
01/16/2003US20030012898 Silica glass crucible
01/16/2003US20030010770 Heater arrangement for crystal growth furnace
01/02/2003US20030000458 Quartz member for semiconductor manufacturing equipment and method for metal analysis in quartz member
01/02/2003EP1268882A2 Axial gradient transport apparatus and process for producing large size, single crystals of silicon carbide
12/2002
12/31/2002US6499777 End-effector with integrated cooling mechanism
12/19/2002WO2002100797A1 Method for densification and anticorrosive treatment of a thermostructural composite material
12/19/2002US20020192409 Multilayer structured quartz glass crucible and method for producing the same
12/19/2002DE10219387A1 Aus Kohlenfaser-verstärktem Kohlenstoffkompositmaterial hergestellter Schmelztiegel für ein Einkristallziehgerät Made of carbon fiber-reinforced carbon composite crucible for a Einkristallziehgerät
12/18/2002CN1096506C Surface treated crucible for improving undisclocation performance
12/12/2002US20020185061 Crucible made of carbon fiber-reinforced carbon composite material for single crystal pulling apparatus
12/10/2002US6491971 Release coating system for crucibles
12/05/2002US20020182394 Pyrolytic boron nitride crucible and method
12/04/2002EP1261761A1 Quartz member for semiconductor manufacturing equipment and method for metal analysis in quartz member
12/03/2002US6489027 High purity carbon fiber reinforced carbon composites and manufacturing apparatus for use thereof
11/2002
11/28/2002WO2002095807A2 Silicon fixtures useful for high temperature wafer processing
11/28/2002DE10124899A1 Lifting device used in a crystal pulling arrangement comprises a winding roller for winding and unwinding a support element to support a load and having a torque sensor for continuously determining the driving torque of the winding roller
11/27/2002EP1260357A2 Pyrolytic boron nitride crucible and method
11/21/2002WO2002092525A1 Quartz glass component and method for the production thereof
11/21/2002US20020170487 Pre-coated silicon fixtures used in a high temperature process
11/21/2002US20020170486 Silicon fixture with roughened surface supporting wafers in chemical vapor deposition
11/14/2002WO2002091448A1 Gaseous phase growing device
11/14/2002US20020166341 Technique for quartz crucible fabrication having reduced bubble content in the wall
11/12/2002US6479108 Protective layer for quartz crucibles used for silicon crystallization
10/2002
10/31/2002US20020157602 Catch pan for melt leakage in apparatus for pulling single crystal
10/10/2002US20020146510 Release coating system for crucibles
09/2002
09/26/2002DE10114698A1 Component made from quartz glass e.g. crucible having high thermal stability comprises a mold, part of which is provided with a stabilizing layer having a higher softening temperature than quartz glass
09/04/2002EP1235953A1 Mini batch furnace
08/2002
08/13/2002US6432538 Carbon fiber reinforced carbon composite and useful as components for pulling single crystal apparatus
08/01/2002WO2002059061A1 Method for making a carbon/carbon crucible holder and resulting crucible stand
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