Patents for C30B 35 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure (2,584)
01/1998
01/27/1998US5711811 Method and equipment for growing thin films
12/1997
12/31/1997CN1169167A Improved crystallization apparatus and method
12/17/1997EP0812239A1 High purity composite useful as furnace components
11/1997
11/25/1997US5690733 Method for recharging of silicon granules in a Czochralski single crystal growing operation
11/19/1997CN2268037Y Structure for synthesizing 0.5-1 mm diamond monocrystal by interval differential temp. method
11/19/1997CN2268036Y Structural member for producing diamond monocrystal
11/19/1997CN2268035Y Method for synthesizing 0.5-1 mm diamond monocrystal
11/06/1997DE19710672A1 Quartz glass crucible for silicon single crystal production
11/05/1997CN1163951A Method for processing semiconductor material and apparatus employed therein
11/04/1997US5683281 High purity composite useful as furnace components
10/1997
10/21/1997US5678989 Heat treatment method using a vertical processing tube
10/07/1997US5674792 Shaped body having a high silicon dioxide content and a process for producing such shaped bodies
10/07/1997US5674317 Exfoliation resistance, durability, wear resistance; container for crystal growing of semiconductor melt
09/1997
09/03/1997EP0792956A2 Radiant heating apparatus and method
09/03/1997EP0591525B1 Device for pulling up single crystal
08/1997
08/21/1997DE19705022A1 Boron nitride crucible with specified absorption coefficient
08/20/1997CN1157344A Permanent-magnetic transmission T type guide slot sample control and seed applying mechanism
08/13/1997EP0788561A1 Improved crystallization apparatus and method
08/06/1997CN2258877Y Far infrared pyrophyllite roasting furnace
08/06/1997CN1156484A Improvement in crystal growth
07/1997
07/29/1997US5651827 Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same
07/16/1997EP0783599A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy
07/02/1997CN1153230A Solid material delivery system for furnace
06/1997
06/25/1997CN1152626A Equipment for making semiconductor device using vacuum system
06/18/1997CN1152037A Method for improving zero dislocation yield of single crystals
06/12/1997WO1997020972A1 Method and apparatus for cooling crystals
06/04/1997EP0777262A1 Wafer heater assembly
05/1997
05/28/1997EP0776026A1 Semiconductor device manufacturing apparatus employing vacuum system
05/14/1997CN1149634A Surface treated crucible for improving undislocation performance
05/07/1997EP0771891A1 Solid material delivery system for a furnace
04/1997
04/23/1997EP0769079A1 Apparatus for uniformly heating a substrate
04/08/1997US5618350 Processing apparatus
04/02/1997EP0765406A1 Improvements in crystal growth
04/01/1997US5616181 MBE apparatus and gas branch piping apparatus
04/01/1997US5616175 3-D carbon-carbon composites for crystal pulling furnace hardware
03/1997
03/11/1997US5609682 Method for the preparation of silicon single crystal
03/05/1997EP0760024A1 Process and device for obtaining unfissured crystals
02/1997
02/26/1997EP0759416A2 Vessel of pyrolytic boron nitride
02/18/1997US5603762 Epitaxial growth
02/18/1997US5603761 Liquid phase epitaxial growth method for carrying out the same
02/04/1997US5600570 Method and apparatus for modeling synthetic crystal structure
01/1997
01/15/1997EP0753605A1 Methods for improving zero dislocation yield of single crystals
01/14/1997US5593496 Slurry crystallization method using bubbles directed at a heat exchanger
12/1996
12/31/1996US5589110 Container for liquid metal organic compound
12/18/1996EP0748885A1 Crucible for improved zero dislocation single crystal growth
11/1996
11/05/1996US5571010 Heat treatment method and apparatus
09/1996
09/06/1996WO1996026791A1 High purity composite useful as furnace components
08/1996
08/29/1996WO1996017969A3 Method and equipment for growing thin films
07/1996
07/31/1996EP0702775A4 Apparatus for thermal treatment of thin film wafer
06/1996
06/13/1996WO1996017969A2 Method and equipment for growing thin films
06/06/1996WO1996017107A1 Method and apparatus for growing thin films
06/06/1996WO1996017106A1 Apparatus for growing thin films
06/04/1996US5523064 Crystallization apparatus
05/1996
05/23/1996DE19541372A1 Mfg. quartz crucible for Czochralski semiconductor crystals
05/22/1996EP0712945A1 Method and apparatus for recharging of silicon granules in Czochralski single crystal growing
05/17/1996WO1996014449A1 Improved crystallization apparatus and method
05/17/1996CA2207918A1 Improved crystallization apparatus and method
05/14/1996US5515810 Heating molten gallium arsenide and boron oxide sealing compound in airtight vessel, pulling up molten gallium arsenide liquid at high pressure
04/1996
04/25/1996WO1996012055A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy
04/25/1996CA2201905A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy
04/17/1996EP0707097A1 MBE apparatus and MBE method
04/02/1996US5503103 Method and apparatus for producing crystalline layers
03/1996
03/27/1996EP0702775A1 Apparatus for thermal treatment of thin film wafer
03/06/1996EP0699783A2 A method of liquid phase epitaxial growth and apparatus therefor
03/05/1996US5497004 Ultraviolet sensor
03/05/1996US5496408 Mass flow controllers, vapor deposition onto semiconductor substrates
02/1996
02/27/1996US5494439 Si/SiC composite material and method for making Si/SiC composite material
01/1996
01/24/1996EP0693461A1 Quartz glass crucible, method for producing the same, and apparatus for producing the same
01/11/1996WO1996000804A1 Apparatus for uniformly heating a substrate
01/10/1996EP0691423A1 Method for the preparation of silicon single crystal and fused silica glass crucible therefor
01/04/1996WO1996000317A1 Improvements in crystal growth
01/03/1996EP0690152A2 Process and apparatus for the production of films of oxide type single crystal
12/1995
12/28/1995WO1995023427A3 Apparatus for thermal treatment of thin film wafer
12/19/1995US5476679 Method for making a graphite component covered with a layer of glassy carbon
12/19/1995US5476359 Robotically loaded epitaxial deposition apparatus
11/1995
11/23/1995WO1995031591A1 Process and device for obtaining unfissured crystals
11/23/1995DE4417105A1 Verfahren und Vorrichtung zur Gewinnung rißfreier Kristalle A method and apparatus for obtaining crack-free crystals
11/22/1995CN1112086A High crystallinity graphite film material and its preparing method
11/07/1995US5464313 Heat treating apparatus
10/1995
10/17/1995US5458086 Apparatus for growing metal oxides using organometallic vapor phase epitaxy
08/1995
08/31/1995WO1995023427A2 Apparatus for thermal treatment of thin film wafer
08/29/1995US5445491 Method for multichamber sheet-after-sheet type treatment
08/22/1995US5443648 Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate
08/15/1995US5441014 Apparatus for pulling up a single crystal
07/1995
07/26/1995EP0664350A1 Process and device for the production of crystalline films
07/26/1995CN1105650A Formed body with high silicon dioxide content and preparation of same
05/1995
05/23/1995US5417803 Method for making Si/SiC composite material
05/18/1995WO1995013248A1 Moulded body made of quartz glass and process for the manufacture thereof
05/18/1995DE4440104A1 Quartz glass moulding with transparent surface region
05/17/1995EP0653613A1 UV sensor
05/17/1995EP0653381A1 Body with high silica content and method for making such a body
04/1995
04/18/1995US5407486 CVD apparatus
04/18/1995US5407350 Heat-treatment apparatus
04/18/1995US5407181 Vertical heat treating device
03/1995
03/07/1995US5394828 Apparatus for the solidification of a doped electricity conducting material and the continuous checking of its dopant content
02/1995
02/22/1995EP0639662A1 Crucible, inparticular two part supporting crucible.
02/14/1995US5389582 Cristobalite reinforcement of quartz glass
01/1995
01/26/1995DE4338807C1 Moulding having a high content of silicon dioxide, and process for the production of such mouldings
01/03/1995US5378900 Crystal diameter measuring device
12/1994
12/20/1994US5374159 Robotically loaded epitaxial deposition apparatus
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