| Patents for C30B 35 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure (2,584) |
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| 07/30/2002 | US6426133 Graphite material coated with silicon carbide |
| 07/10/2002 | CN1087362C Method for improving zero dislocation yield of single crystals |
| 07/09/2002 | US6416577 Method for coating inner surfaces of equipment |
| 07/04/2002 | US20020086119 Protective layer for quartz crucibles used for silicon crystallization |
| 07/04/2002 | US20020083891 Method for growing single crystal silicon carbide |
| 07/04/2002 | US20020083890 Tantalum crucible fabrication and treatment |
| 07/04/2002 | US20020083886 Cruicible and growth method for polycrystal silicon using same |
| 06/20/2002 | US20020076501 Method of applying a release coating to crucibles used to contain molten material while it solidifies, such as molten silicon into ingots |
| 06/20/2002 | US20020076316 Wafer boat and boat holder |
| 06/05/2002 | EP1210472A1 Heater arrangement for crystal growth furnace |
| 06/04/2002 | US6399203 Carbon composite fibers |
| 05/23/2002 | WO2002040732A1 A protective layer for quartz crucibles used for silicon crystallization |
| 05/23/2002 | WO2002040183A1 Improved crucible coating system |
| 05/23/2002 | WO2002040182A1 Release coating system for crucibles |
| 05/23/2002 | US20020059902 Niobium crucible fabrication and treatment |
| 05/23/2002 | US20020059901 Low defect axially grown single crystal silicon carbide |
| 05/22/2002 | EP1206591A2 Crucible-holder for single crystal growth |
| 05/16/2002 | DE10141554A1 Melt crucible, used for melting non-ferrous metals, especially silicon, comprises outer blocking crucible and inner quartz crucible |
| 05/07/2002 | US6381987 Process for making opaque quartz glass and opaque component made according to the process |
| 04/18/2002 | WO2001068954A3 Axial gradient transport apparatus and process |
| 04/17/2002 | EP1197993A1 Apparatus for manufacturing semiconductor device |
| 04/11/2002 | US20020041931 Method for growing thin films |
| 04/04/2002 | WO2001092609A3 Multilayered quartz glass crucible and method of its production |
| 04/03/2002 | EP1090167B1 Process and apparatus for preparation of silicon crystals with reduced metal content |
| 04/03/2002 | EP0972095B1 Crucible and method of preparation thereof |
| 03/27/2002 | EP1191130A1 Saucer for escaped melt in apparatus for pulling up single crystal |
| 03/20/2002 | EP1187950A2 Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
| 03/20/2002 | CN1341080A Quartz glass crucible and method for production thereof |
| 03/19/2002 | US6358288 Touchless stabilizer for processing spherical devices |
| 03/14/2002 | US20020029737 Quartz glass crucible for pulling up silicon single crystal and production method therefor |
| 03/07/2002 | WO2001053572A3 Crucible-holder for single crystal growth |
| 02/06/2002 | EP1012358B1 Inflatable elastomeric element for rapid thermal processing (rtp) system |
| 01/29/2002 | US6342688 Method for preparing iridium crucibles for crystal growth |
| 01/16/2002 | EP1171211A1 Efg crystal growth apparatus |
| 01/15/2002 | US6338759 Metal organic chemical vapor deposition apparatus and deposition method |
| 01/01/2002 | US6334898 Crucible holder for pulling monocrystals |
| 12/20/2001 | WO2001038625A3 Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
| 12/06/2001 | WO2001092609A2 Multilayered quartz glass crucible and method of its production |
| 12/05/2001 | EP1159227A1 Quartz glass crucible and method for the production thereof |
| 11/29/2001 | DE19962452A1 Verfahren für die Herstellung von opakem Quarzglas und nach dem Verfahren hergestelltes opakes Bauteil A process for the production of opaque quartz glass and an opaque component produced by the process |
| 11/20/2001 | US6319314 Method and device for manufacturing spherical semiconductor crystals |
| 11/14/2001 | EP1153000A1 Method for making a bowl in thermostructural composite material in particular for a monocrystalline silicon producing installation |
| 11/06/2001 | US6313013 Method and device for processing semiconductor material |
| 10/18/2001 | DE10064073A1 Process for determining the crystallographic orientation of semiconductor single crystals comprises measuring an X-ray auxiliary reflex on a planar region of the surface of the crystals |
| 10/16/2001 | US6302957 Quartz crucible reproducing method |
| 09/20/2001 | WO2001068954A2 Axial gradient transport apparatus and process |
| 09/13/2001 | WO2001066833A1 Apparatus and method for fabrication of photonic crystals |
| 08/28/2001 | US6280522 Quartz glass crucible for pulling silicon single crystal and production process for such crucible |
| 08/16/2001 | WO2001059189A1 Quartz member for semiconductor manufacturing equipment and method for metal analysis in quartz member |
| 08/02/2001 | US20010010112 Manufacturing method of semiconductor wafer, semiconductor manufacturing apparatus, and semiconductor device |
| 08/01/2001 | EP1120484A1 Carbon fiber reinforced carbon composite and useful as components for pulling single crystal apparatus |
| 07/26/2001 | WO2001053572A2 Crucible-holder for single crystal growth |
| 07/25/2001 | CN1305540A Process and apparatus for preparation of silicon crystals with preduced metal content |
| 07/18/2001 | EP0963464B1 Melting pot with silicon protective layers, method for applying said layer and the use thereof |
| 07/12/2001 | DE19962449A1 Quarzglastiegel und Verfahren für seine Herstellung Quartz glass crucible and process for its preparation |
| 07/09/2001 | WO2001064976A1 Saucer for escaped melt in apparatus for pulling up single crystal |
| 07/03/2001 | US6254674 Method of controllably delivering dopant by limiting the release rate of dopant from a submerged vessel |
| 06/28/2001 | WO2001046077A1 Quartz glass crucible and method for the production thereof |
| 06/27/2001 | EP1110917A2 Method of producing opaque silica glass and opaque elements produced by the process |
| 06/12/2001 | US6246031 Mini batch furnace |
| 06/07/2001 | WO2001040552A1 Mini batch furnace |
| 06/06/2001 | CN1066696C Forming body with high silicon dioxide content and its producing process |
| 05/31/2001 | WO2001038625A2 Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
| 05/31/2001 | WO2001038255A1 Method for making a bowl in thermostructural composite material in particular for a monocrystalline silicon producing installation |
| 05/23/2001 | DE10048397A1 Process for restoring a quartz crucible comprises internally repairing the crucible using chemical etching, mechanically grinding or heat treatment at high temperature on the inner surface |
| 05/15/2001 | US6231673 Manufacturing method of semiconductor wafer, semiconductor manufacturing apparatus, and semiconductor device |
| 04/25/2001 | EP1094039A1 Method for manufacturing quartz glass crucible |
| 04/24/2001 | US6221478 Surface converted graphite components and methods of making same |
| 04/11/2001 | EP1090167A1 Process and apparatus for preparation of silicon crystals with reduced metal content |
| 02/06/2001 | US6183553 Process and apparatus for preparation of silicon crystals with reduced metal content |
| 01/30/2001 | US6179914 Dopant delivery system and method |
| 01/24/2001 | EP1070161A1 A method and a device for epitaxial growth of objects by chemical vapour deposition |
| 01/23/2001 | US6176901 Dust precipitator |
| 01/18/2001 | DE10022333A1 Silicon carbide coated graphite component e.g. gas rectification tube, for silicon single crystal drawing apparatus, has graphite base adhered with primary and secondary layers of silicon carbide film |
| 01/04/2001 | WO2001000908A1 Heater arrangement for crystal growth furnace |
| 01/02/2001 | US6168638 Touchless stabilizer for processing spherical shaped devices |
| 01/02/2001 | US6168427 Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| 12/26/2000 | US6165425 A quartz, graphite or a ceramic melting pot having a silicon nitride protective layer for avoiding adhesion between the melting pot and silicon melts |
| 12/07/2000 | WO2000074124A1 Apparatus for manufacturing semiconductor device |
| 11/30/2000 | DE19924635A1 Composite quartz glass crucible, useful for Czochralski single crystal growth, comprises an opaque outer layer with a bubble-free transparent inner layer of separately formed inserts |
| 11/22/2000 | CN1058761C Heat treating appts. for mercury-cadmium tellurid |
| 11/16/2000 | WO2000068625A1 End-effector with integrated cooling mechanism |
| 10/24/2000 | US6136092 Depositing silicon dioxide powder on the inner surface of the substrate, heating to melt and form the transparent inner layer |
| 10/19/2000 | DE19917288A1 Quarzglas-Tiegel und Herstellungsverfahren dafür Quartz glass crucible and the production method thereof |
| 10/18/2000 | EP1045046A2 Quartz glass crucible and process for its manufacture |
| 10/17/2000 | US6132508 Device and method for liquefying and crystallizing substances |
| 10/12/2000 | WO2000059837A1 Method for manufacturing quartz glass crucible |
| 10/03/2000 | US6127569 Crystallization of α-L-aspartyl-L-phenylalanine methyl ester |
| 09/20/2000 | CN1056656C Permanent-magnet transmission T type guide slot sample control and seed crystal applying mechanism |
| 08/22/2000 | US6106610 Pulling; scattering crystallization promoter on interior wall of crucible; reducing defects |
| 08/09/2000 | EP1026289A1 Quartz glass crucible for pulling up silicon single crystal and process for producing the same |
| 08/09/2000 | EP1007225A4 High purity composite useful as a susceptor |
| 07/25/2000 | US6093245 Method for growing crystal |
| 07/19/2000 | EP1020546A1 Quartz glass crucible for pulling silicon monocrystal and method of manufacturing the same |
| 07/05/2000 | EP1017085A2 Semiconductor device manufacturing apparatus employing vacuum system |
| 06/28/2000 | EP1012358A1 Inflatable elastomeric element for rapid thermal processing (rtp) system |
| 06/14/2000 | EP1007225A1 High purity composite useful as a susceptor |
| 06/14/2000 | CN1256724A Crucible and method of preparation thereof |
| 06/06/2000 | US6071350 Semiconductor device manufacturing apparatus employing vacuum system |
| 05/30/2000 | US6068925 Corrosion resistant composites useful in chemical reactors |