| Patents for C30B 35 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure (2,584) |
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| 04/26/2000 | EP0995821A1 Method and apparatus for working semiconductor material |
| 04/20/2000 | DE19847098A1 Verfahren und Vorrichtung zur Bearbeitung von Halbleitermaterial Method and apparatus for processing semiconductor material |
| 03/28/2000 | US6043468 Carbon heater |
| 03/28/2000 | US6042372 Heat treatment apparatus |
| 02/29/2000 | US6030167 Apparatus for loading wafers into a horizontal quartz tube |
| 02/10/2000 | WO2000006811A1 Quartz glass crucible for pulling up silicon single crystal and process for producing the same |
| 02/09/2000 | EP0978518A1 Crystallization of alpha-L-aspartyl-L-phenylalanine methyl ester by vaporization of droplets of slurry through a layer of cold air |
| 02/09/2000 | EP0977637A1 Corrosion resistant composites useful in chemical reactors |
| 02/01/2000 | US6019842 Method and apparatus for loading raw material into a quartz crucible |
| 01/25/2000 | US6017395 Gas pressure regulation in vapor deposition |
| 01/19/2000 | EP0972095A1 Crucible and method of preparation thereof |
| 01/18/2000 | US6015590 Surface with thin films on substrate of multilayer element with vapor deposition |
| 01/13/2000 | DE19830785A1 Stütztiegel zur Stützung von Schmelztiegeln Support crucible in support of crucibles |
| 01/12/2000 | EP0971054A1 Support crucible for supporting melt crucibles |
| 01/04/2000 | US6010569 Device for handling heavy components of a crystal puller according to the Czochralski method which is supported in a supporting frame |
| 12/29/1999 | CN1047810C Improvement in crystal growth |
| 12/28/1999 | US6008143 Metal organic chemical vapor deposition apparatus and deposition method |
| 12/23/1999 | WO1999066108A1 Process and apparatus for preparation of silicon crystals with reduced metal content |
| 12/22/1999 | EP0965663A1 Composite crucible, and preparation method and regeneration method thereof |
| 12/15/1999 | EP0963464A1 Melting pot with silicon protective layers, method for applying said layer and the use thereof |
| 12/07/1999 | US5997640 Device and method for liquefying and crystallizing substances |
| 12/02/1999 | WO1999061685A1 Quartz glass crucible for pulling silicon monocrystal and method of manufacturing the same |
| 11/30/1999 | US5993545 Crucible for growing single crystals, process for making the same and use of the same |
| 11/23/1999 | US5989504 Chemical process employing corrosion resistant composites |
| 11/23/1999 | US5989021 Quartz crucible with large diameter for pulling single crystal and method of producing the same |
| 11/17/1999 | EP0957185A2 Apparatus for fabrication of thin film |
| 11/17/1999 | CN1235211A Injector for passing molten material |
| 11/10/1999 | EP0788561A4 Improved crystallization apparatus and method |
| 11/09/1999 | US5980629 Methods for improving zero dislocation yield of single crystals |
| 11/02/1999 | US5976247 Surface-treated crucibles for improved zero dislocation performance |
| 10/19/1999 | US5968259 High-purity quartz glass and method for the preparation thereof |
| 09/14/1999 | USRE36295 Enables controlled growth of multicomponent metal oxide thin film including high temperature superconducting thin films which are uniform and reproducible using organometallic complexes as metal oxide source |
| 08/12/1999 | WO1999040242A1 Crucible and method of preparation thereof |
| 07/20/1999 | US5925310 Inserts are inserted into openings previously formed in a mold; a slurry of silicon carbide powder, organic binder and water is put in the mold; slip casting molding to obtain a molded green perforated product; semiconductor wafer boats |
| 07/07/1999 | EP0760024B1 Process and device for obtaining unfissured crystals |
| 07/06/1999 | US5919306 Silicon melting crucible |
| 06/22/1999 | US5913975 Quartz; used to form bubble-free silicon |
| 06/17/1999 | WO1999029924A1 Method for coating inner surfaces of equipment |
| 06/15/1999 | US5911824 Method for growing crystal |
| 05/06/1999 | EP0913503A1 Apparatus for removing dust from a gas stream |
| 04/28/1999 | EP0911429A1 Quartz glass crucible for producing silicon single crystal and method for producing the crucible |
| 04/27/1999 | US5897743 Jig for peeling a bonded wafer |
| 04/21/1999 | CN2315358Y Magnetic liquid seal device for driving shaft of single crystal silicon furnace |
| 03/23/1999 | US5885365 Cleaning using pure water, followed by warming with warm pure water heated to at least about 50 degrees c. and then drying in clean air; used to melt material for pulling a semiconductor single crystal by a czochralski method |
| 03/23/1999 | US5885071 Outer and inner layers of quartz glass, aluminum-containing intermediate layer; prevention of migration of impurities |
| 03/09/1999 | US5879449 Crystal growth |
| 03/03/1999 | EP0899777A2 Carbon heater |
| 02/09/1999 | US5870526 Inflatable elastomeric element for rapid thermal processing (RTP) system |
| 02/09/1999 | US5868836 Semiconductor single-crystal lift device |
| 02/09/1999 | US5868835 Apparatus for recharging of silicon granules in a czochralski single crystal growing operation |
| 02/09/1999 | US5868831 Process for controlling the growth of a crystal |
| 02/04/1999 | WO1999005338A2 Surface converted graphite components and methods of making same |
| 02/02/1999 | US5866062 Process for producing shaped bodies of silicon dioxide |
| 01/28/1999 | WO1999004067A1 Inflatable elastomeric element for rapid thermal processing (rtp) system |
| 01/20/1999 | EP0892091A1 Graphite support vessels having a low concentration of calcium impurities and use thereof for production of single-crystal silicon |
| 01/12/1999 | US5859408 Apparatus for uniformly heating a substrate |
| 01/12/1999 | US5858486 Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix |
| 01/12/1999 | US5857848 Transfer apparatus and vertical heat-processing system using the same |
| 01/12/1999 | US5857840 Vacuum pump with a centrifugal dust collector and a metal mesh dust collector mounted in parallel |
| 01/05/1999 | US5856652 Radiant heating apparatus and method |
| 01/05/1999 | US5855680 Apparatus for growing thin films |
| 01/05/1999 | US5855232 Automatic metering/supplying apparatus for granular substances |
| 12/29/1998 | US5854468 Substrate heating apparatus with cantilevered lifting arm |
| 12/23/1998 | EP0885859A2 Member for semiconductor equipment |
| 12/10/1998 | WO1998055238A1 High purity composite useful as a susceptor |
| 12/03/1998 | DE19723070A1 Melting and crystallisation vessel |
| 11/25/1998 | CN2298265Y 快速退火装置 Rapid annealing device |
| 11/12/1998 | WO1998050168A1 Corrosion resistant composites useful in chemical reactors |
| 11/12/1998 | CA2287892A1 Corrosion resistant composites useful in chemical reactors |
| 11/10/1998 | US5833748 Method of and apparatus for obtaining fissure-free crystals |
| 11/10/1998 | US5833425 Semiconductor device manufacturing apparatus employing vacuum system |
| 11/03/1998 | US5829969 Vertical heat treating apparatus |
| 10/29/1998 | WO1998048085A1 Chemical reaction barriers for use with silica containers and/or graphite support vessels in production of single crystal silicon |
| 10/28/1998 | EP0812239A4 High purity composite useful as furnace components |
| 10/21/1998 | CN2294966Y Self-adding mercury source device |
| 10/20/1998 | US5824153 Apparatus with movable arms for holding a single-crystal semiconductor ingot |
| 10/14/1998 | EP0871212A1 Heat treatment apparatus |
| 09/22/1998 | US5810930 Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith |
| 09/09/1998 | EP0863230A1 Apparatus for handling heavy parts of Czochralski crystal pulling apparatus supported in a frame structure |
| 09/01/1998 | US5800924 High purity composite useful as furnace components |
| 08/19/1998 | EP0783599A4 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 08/18/1998 | US5796074 Wafer heater assembly |
| 08/13/1998 | WO1998035075A1 Melting pot with silicon protective layers, method for applying said layer and the use thereof |
| 08/11/1998 | US5791895 Apparatus for thermal treatment of thin film wafer |
| 07/29/1998 | EP0855455A1 Crucible for single crystal growth, method for its manufacture and its application |
| 07/22/1998 | EP0765406B1 Improvements in crystal growth |
| 06/18/1998 | DE19652171A1 Thermal insulation of induction heated, crystal growth crucible or melt |
| 06/17/1998 | CN1184860A Metal organic chemical vapor deposition apparatus and deposition method |
| 06/09/1998 | US5762865 Used to grow single crystal of semiconductors |
| 06/09/1998 | US5762672 Method for producing a quartz glass crucible |
| 06/09/1998 | US5762491 Solid material delivery system for a furnace |
| 06/02/1998 | US5759646 Vessel of pyrolytic boron nitride |
| 06/02/1998 | US5759267 Liquid phase epitaxial |
| 05/07/1998 | WO1998019334A1 Heat treatment apparatus |
| 04/08/1998 | CN1178391A Heat treating apparatus for mercury self sealed mercury-cadmium tellurid for switching transistors |
| 04/07/1998 | US5736206 Molded body of quartz glass and process for the production of a molded body of quartz glass |
| 03/24/1998 | US5730800 Fused silica glass crucible |
| 02/24/1998 | CA2041427C Boron nitride boat and process for producing it |
| 01/28/1998 | EP0821082A1 Process and apparatus for controlling the growth of a crystal |
| 01/28/1998 | CN2273314Y Quartz active gas generating device for vacuum system |