Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2012
10/10/2012CN101736295B Method for preparing titanium dioxide thin film
10/10/2012CN101736294B Evaporation boat clamping device
10/10/2012CN101713063B Film plating device
10/10/2012CN101688291B Cooling shield for substrate processing chamber
10/10/2012CN101680079B Method for forming transparent conductive film
10/10/2012CN101660126B Coating method and apparatus, a permanent magnet, and manufacturing method thereof
10/10/2012CN101643889B Part for rotary machine and its method of manufacture
10/10/2012CN101598819B Manufacturing method of coating lens
10/10/2012CN101565812B Shading fixture and lens mount coating method applying shading fixture
10/10/2012CN101420826B Case and surface treating method
10/09/2012US8283058 Fine grained cemented carbide cutting tool insert
10/09/2012US8283041 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s)
10/09/2012US8282997 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
10/09/2012US8282984 Processing condition inspection and optimization method of damage recovery process, damage recovering system and storage medium
10/09/2012US8282794 Filtered cathodic arc deposition method and apparatus
10/09/2012US8282270 Process for manufacturing a ceramic element for a watch case and element obtained by this process
10/09/2012CA2532365C Process for the production of strongly adherent coatings
10/04/2012WO2012133704A1 Gas barrier laminate film, and method for producing same
10/04/2012WO2012133703A1 Gas barrier laminate film, and method for producing same
10/04/2012WO2012133687A1 Vapor-deposited film having barrier performance
10/04/2012WO2012133567A1 Method for manufacturing metal foil provided with electrical resistance layer
10/04/2012WO2012133468A1 Method for manufacturing objective lens
10/04/2012WO2012133203A1 Method for forming vapor deposition film pattern, and method for manufacturing organic electroluminescent display device
10/04/2012WO2012133201A1 Deposition particle emitting device, deposition particle emission method, and deposition device
10/04/2012WO2012133166A1 Sputtering target for magnetic recording film
10/04/2012WO2012132939A1 Fept-c-based sputtering target and process for producing same
10/04/2012WO2012132871A1 Cu ALLOY FILM, AND DISPLAY DEVICE AND ELECTRONIC DEVICE EACH EQUIPPED WITH SAME
10/04/2012WO2012132592A1 Metal foil provided with electrically resistive film, and method for producing same
10/04/2012WO2012132588A1 Plasma cvd apparatus, plasma cvd method, reactive sputtering apparatus, and reactive sputtering method
10/04/2012WO2012132196A1 Film forming apparatus and film forming method
10/04/2012WO2012129757A1 Multi-elements-doped zinc oxide film, manufacturing method and application thereof
10/04/2012WO2012055881A3 Anti-wear coating
10/04/2012US20120252209 Plasma nitriding method, plasma nitriding apparatus and method of manufacturing semiconductor device
10/04/2012US20120251838 Coated article and method for manufacturing same
10/04/2012US20120251824 Stretchable Conductive Nanofibers, Stretchable Fiber Electrode Using The Same And Method For Producing The Same
10/04/2012US20120251819 Methods of changing the visible light transmittance of coated articles and coated articles made thereby
10/04/2012US20120251773 Light scattering coating for greenhouse applications, and/or coated article including the same
10/04/2012US20120251747 Housing and method for manufacturing the same
10/04/2012US20120251746 Device housing and method for making the same
10/04/2012US20120251722 Device and method for thermal evaporation of silicon
10/04/2012US20120251708 Biosensor, thin film electrode forming method, quantification apparatus, and quantification method
10/04/2012US20120251393 Dispensing nozzle for automatic analyzer, and automatic analyzer including same
10/04/2012US20120251023 Method for producing a plain bearing element
10/04/2012US20120250314 Heatable lens for luminaires, and/or methods of making the same
10/04/2012US20120248943 Oscillator Electrode Material Having Excellent Aging Characteristics, Piezoelectric Oscillator Using The Material And Sputtering Target Comprising The Material
10/04/2012US20120247956 Biosensor strip and manufacturing method thereof
10/04/2012US20120247953 Film-coating system
10/04/2012US20120247952 Film forming method by sputtering apparatus and sputtering apparatus
10/04/2012US20120247950 Mold for nanoimprinting, its production process, and processes for producing molded resin having fine concavo-convex structure on its surface and wire-grid polarizer
10/04/2012US20120247949 Film forming method, resputtering method, and film forming apparatus
10/04/2012US20120247948 Sputtering target of multi-component single body and method for preparation thereof, and method for producing multi-component alloy-based nanostructured thin films using same
10/04/2012DE112009003766T5 Sputter-Vorrichtung und Sputter-Verfahren Sputtering apparatus and sputtering method
10/04/2012DE102011018364A1 Näherungssensor Proximity sensor
10/04/2012DE102011015875A1 Device for transporting strip-shaped substrate in vacuum treatment plant for manufacturing thin film solar module, has support structure to contact substrate front surface and support roller to contact substrate rear surface
10/04/2012DE102011006676A1 Method for reducing gas load of substrate carriers with vacuum processes, comprises repeatedly equipping substrate carrier with a substrate, transferring and treating substrate in vacuum treatment plant, removing and recycling substrate
10/04/2012DE102011006462A1 Channeling vacuum process systems, comprises feeding air in a lock chamber of the vacuum process system until pressure is equally large within and outside of the lock chamber, and opening the lock chamber to atmosphere
10/03/2012EP2505687A1 Cleaning gas
10/03/2012EP2505686A1 Cu-Ga-based alloy powder with low oxygen content, Cu-Ga-based alloy target material and method for producing the target material
10/03/2012EP2505685A1 Piston ring
10/03/2012EP2504463A2 Low melting point sputter targets for chalcogenide photovoltaic applications and methods of manufacturing the same
10/03/2012CN202465864U Pressure stabilizing and air charging device for inlet/outlet chamber of coating film production line
10/03/2012CN202465862U Transmission rolling shaft of vacuum coater
10/03/2012CN202465861U Unit type sputtering air extraction module
10/03/2012CN202465860U Vacuum film coating equipment for solving problem about idle line coating
10/03/2012CN202465859U Linear winding vacuum coating device
10/03/2012CN202465858U Vacuum lock for coating device
10/03/2012CN202465857U Continuous vacuum film coating device conveying device
10/03/2012CN202465856U Vacuum coating clamp for window glass of mobile phone
10/03/2012CN202465855U Deposition system for alkaline metal and alkaline-earth metal
10/03/2012CN202465854U Multi-head electronic gun
10/03/2012CN202465853U Low-temperature vacuum film-plating device
10/03/2012CN202465852U Synchronous masking mechanism
10/03/2012CN202460066U Multi-arc ion plating abrasion-resistant smoothening ice skate blade
10/03/2012CN1918672B Thin-film transistor and thin-film transistor substrate, sputtering target, transparent conductive film and transparency electrode, and production methods thereof
10/03/2012CN102714208A 半导体装置 Semiconductor device
10/03/2012CN102712999A Method of coating a substrate
10/03/2012CN102712997A Divided sputtering target and method for producing same
10/03/2012CN102712996A Sputtering target, compound semiconductor thin film, solar cell having compound semiconductor thin film, and method for manufacturing compound semiconductor thin film
10/03/2012CN102712995A Oxide deposition material, vapor deposited thin film, and solar cell
10/03/2012CN102712994A Vaporization apparatus and method for controlling the same
10/03/2012CN102712993A Linear deposition source
10/03/2012CN102712992A PVD method and apparatus
10/03/2012CN102712991A Hydrogen-containing amorphous-carbon-based hard covering member and process for production thereof
10/03/2012CN102712990A Method for producing a plain bearing element
10/03/2012CN102712987A Pure copper plate production method, and pure copper plate
10/03/2012CN102712986A Pure copper plate production method, and pure copper plate
10/03/2012CN102712768A Aromatic polyimide film, laminate, and solar cell
10/03/2012CN102712528A Production method for vehicle window glass
10/03/2012CN102709491A Organic EL device manufacturing apparatus
10/03/2012CN102709189A Thin film transistor, manufacturing method of thin film transistor, and array substrate
10/03/2012CN102706018A Solar energy medium/high temperature selective absorption coating
10/03/2012CN102703900A Method for depositing film, panel and display
10/03/2012CN102703876A Anti-drop coating-under-slice stop piece
10/03/2012CN102703875A Technological equipment for swept-angle magnetron sputtering deposition
10/03/2012CN102703874A Method for preparing tantalum film on surface of magnesium alloy through magnetron sputtering deposition
10/03/2012CN102703873A Preparation method of vanadium dioxide thin film of extremely narrow hysteretic curve width and high temperature coefficient of resistance
10/03/2012CN102703872A Magnetron sputtering target of magnetron sputtering film plating machine
10/03/2012CN102703871A Touch panel film coating process
10/03/2012CN102703870A Nonmagnetic Ru film and production method thereof
10/03/2012CN102703869A Method for preparing target for copper conductor of thin film transistor (TFT)-liquid crystal display (LCD) array substrate, and target