Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2012
11/15/2012WO2012154682A1 Combinatorial and full substrate sputter deposition tool and method
11/15/2012WO2012153781A1 Method and apparatus for producing fluorine-containing organosilicon compound thin film
11/15/2012WO2012153522A1 In2o3-zno sputtering target
11/15/2012WO2012153507A1 In2O3-SnO2-ZnO SPUTTERING TARGET
11/15/2012WO2012153494A1 Thin-film transistor
11/15/2012WO2012153491A1 In-ga-zn oxide sputtering target and method for producing same
11/15/2012WO2012151789A1 Method and apparatus for implanting laser-induced plasma into substrate
11/15/2012WO2012073142A3 Method and device for ion implantation
11/15/2012WO2012070894A4 Method for separating a target of a rotary target
11/15/2012WO2012070882A4 Bonding composition for a rotary target for sputtering and bonding method of a rotary target using same
11/15/2012US20120288707 Base coat coating composition, composite film, and method for producing same
11/15/2012US20120288681 Method for structuring a surface by means of reactive ion-beam etching, structured surface and uses
11/15/2012US20120288676 Method for structuring a surface by means of ion-beam etching, structured surface and uses
11/15/2012US20120288637 Methods of affecting material properties and applications therefor
11/15/2012US20120288615 Apparatus and method for treating substrate
11/15/2012US20120287659 Reflective film laminate
11/15/2012US20120286265 Amorphous oxide thin film, thin film transistor using the same, and method for manufacturing the same
11/15/2012US20120286219 Sputtering target, semiconducting compound film, solar cell comprising semiconducting compound film, and method of producing semiconducting compound film
11/15/2012US20120286152 Ion source with surface coating
11/15/2012US20120285826 Multi-block sputtering target and associated methods and articles
11/15/2012US20120285819 Combinatorial and Full Substrate Sputter Deposition Tool and Method
11/15/2012US20120285818 Plasma doping method with gate shutter
11/15/2012US20120285627 Elastomer Bonded Item and Method for Debonding
11/15/2012US20120285522 Thin-film solar fabrication process, deposition method for tco layer, and solar cell precursor layer stack
11/15/2012US20120285383 Mounting for fixing a reactor in a vacuum chamber
11/15/2012DE10327618B4 Verfahren zur Ausbildung von Aluminiummetallverdrahtungen Process for the formation of aluminum metal wirings
11/15/2012DE102011101088A1 Apparatus, useful for aligning a substrate and a mask, comprises a substrate carrier for receiving a substrate in a substrate-receiving plane, an alignment unit for moving the substrate carrier in all directions, and a mask carrier
11/15/2012DE102011075851A1 Reactive deposition of oxides e.g. aluminum oxide of a pipe magnetron arrangement in vacuum coating plants, by guiding substrate in longitudinal extension of vacuum coating plant at pipe magnetron arrangement
11/15/2012DE102011075543A1 Cooling arrangement used for cooling elongated magnetron used in continuous coating system for coating target material onto substrate, has coolant inlet and outlet that are provided at ends of magnetron
11/14/2012EP2522760A2 Method of making coated cemented carbide
11/14/2012EP2521803A1 Method for depositing multi-layered layers and/or gradient layers
11/14/2012CN202530158U Roll-to-roll continuous vacuum coating production machine
11/14/2012CN202530157U Coiled material plasma treatment device with correcting function
11/14/2012CN202530156U Substrate fixing device used in film coating process
11/14/2012CN202530155U Film coating machine for flat-plate solar heat collector absorbing plate
11/14/2012CN202530154U Sputtering target
11/14/2012CN202530153U Novel structure evaporation material for electron beam evaporation coating
11/14/2012CN202530152U Organic matter evaporation equipment
11/14/2012CN202530151U Differential vacuum indoor substrate lifting mechanism
11/14/2012CN202530150U Evaporation mask plate
11/14/2012CN202530149U Easily welded mask plate for evaporation
11/14/2012CN202530148U Auxiliary alignment plate
11/14/2012CN202530147U Mask plate for vapor deposition
11/14/2012CN202530146U Support table adaptable to objects with different sizes
11/14/2012CN102782860A Photovoltaic cell having a novel TCO layer built therein
11/14/2012CN102782846A Non-volatile memory element and non-volatile memory device equipped with same
11/14/2012CN102782619A Functional laminated sheet, and transparent electrically conductive laminated sheet for touch panel and touch panel produced using same
11/14/2012CN102782186A Chromium -free passivation process of vapor deposited aluminum surfaces
11/14/2012CN102782182A Sputtering device
11/14/2012CN102782181A Indium target and method for producing same
11/14/2012CN102782180A Indium target and method for manufacturing same
11/14/2012CN102782179A Articles including a porous substrate having a conformal layer thereon
11/14/2012CN102782178A Synthesis of metal oxides by reactive cathodic arc evaporation
11/14/2012CN102782177A Cathode sputter deposition of a Cu(In, Ga)X2 thin film
11/14/2012CN102781665A Gas barrier film, production method therefor, and device using same
11/14/2012CN102781659A Layered product and process for producing same
11/14/2012CN102779988A Composite negative electrode material coating modification method of lithium ion battery
11/14/2012CN102779860A Back contact layer structure, preparation method thereof and CdTe thin-film solar cell comprising back contact layer structure
11/14/2012CN102779533A FeRhPt composite film adjustable in phase transition temperature and preparation method of FeRhPt composite film
11/14/2012CN102776540A Magnesium alloy surface treatment process
11/14/2012CN102776536A Mercapto-beta-cyclodextrin modified silver nano-rode array, its preparation method and its use
11/14/2012CN102776512A Method for preparing novel gradient thermal barrier coating
11/14/2012CN102776511A Preparation method for metal composite coating using ceramic as base body
11/14/2012CN102776485A Method for preparing high density diamond-like carbon film by two-step pulse deposition
11/14/2012CN102776484A Design method of baffle for controlling distribution of film thickness of planar optical element in film coating planetary system
11/14/2012CN102776483A Plasma assisted vapor transport deposition device and method
11/14/2012CN102776482A Lamp cup magnetic control sputter coating and continuous production process of surface vacuum hardening protection layer
11/14/2012CN102776481A Method for preparing gradient transition layer between hard film and substrate
11/14/2012CN102776480A Evaporation source device and coating method
11/14/2012CN102776479A Preparation device and method for film
11/14/2012CN102776478A Metal composite coating with ceramic serving as basic body
11/14/2012CN102776477A Waterproof film and preparation method thereof
11/14/2012CN102776476A Composite film for touch screen and production method of composite film
11/14/2012CN102776475A Preparation method of round inductosyn shielding layer structure based on vacuum coatings
11/14/2012CN102776474A Nano composite coating layer for surface treatment of substrate, and preparation method and device of nano composite coating layer
11/14/2012CN102776473A Mask device for evaporating organic materials of organic light-emitting diodes
11/14/2012CN102774074A Novel composite isolating layer based on biaxial texture metal substrate and preparation method thereof
11/14/2012CN102774072A Shell and its making method
11/14/2012CN102774065A Amorphous carbon film with graphene structure and preparation method thereof
11/14/2012CN102773407A Method for improving metal casting mould demoulding effects
11/14/2012CN102332325B In (indium)-Sn (stannum)-Mo (molybdenum)-Nb (niobium)-codoped transparent conductive film and manufacturing method thereof
11/14/2012CN102097267B Method for manufacturing front panel of plasma display screen
11/14/2012CN102080206B Mask plate bearing device
11/14/2012CN102071404B Coating film rotating device and method for side cylindrical surface of optical fiber
11/14/2012CN102051497B Preparation methods of gold and silver embedded target and film thereof
11/14/2012CN102023474B Mask assembly, fabrication method of the same and deposition apparatus using the same for flat panel display device
11/14/2012CN101944482B Process for forming dielectric films
11/14/2012CN101896633B A shutter system
11/14/2012CN101851744B Preparation method of multilayer composite modified layer with strong toughness on titanium alloy surface
11/14/2012CN101838789B Method of reducing stress in coatings produced by physical vapour deposition
11/14/2012CN101787519B Process kit for substrate processing chamber
11/14/2012CN101743339B Sputtering targets with adjusted proportion of pinholes and manufacturing method thereof
11/14/2012CN101724825B Continuous vacuum coating method and special equipment thereof
11/14/2012CN101678467B Surface-coated cutting tool
11/14/2012CN101378003B Alternate gas delivery and evacuation system for plasma processing apparatuses
11/14/2012CN101175867B 硬材料层 Hard material layer
11/13/2012US8309236 Protective alumina film and production method thereof
11/13/2012US8309161 Aluminum oxide coated implants and components
11/13/2012US8308921 Mask for increased uniformity in ion beam deposition
11/13/2012US8308916 Method for simultaneously coating a plurality of workpieces