Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2012
11/13/2012US8308915 Systems and methods for magnetron deposition
11/13/2012US8307549 Method of making an electrical circuit
11/08/2012WO2012150877A2 Method for modifying the surface properties of materials and articles
11/08/2012WO2012150805A2 Flexible ti-in-zn-o transparent electrode for dye-sensitized solar cell, and metal-inserted three-layer transparent electrode with high conductivity using same and manufacturing method therefor
11/08/2012WO2012150804A2 Method for preparing nano powder using supporter
11/08/2012WO2012150802A2 Device for preparing nano particle attached to support
11/08/2012WO2012124928A3 Deposition apparatus having light irradiation portion for removing foreign substance
11/08/2012WO2012118623A3 Method and apparatus for forming a cylindrical target assembly
11/08/2012US20120282478 Method and apparatus for the multi-layer and multi-component coating of thin films on substrates, and multi-layer and multi-component coatings
11/08/2012US20120282461 Member having hydrogen-containing, hard, amorphous carbon coating and its production method
11/08/2012US20120281276 Infrared reflector
11/08/2012US20120279857 Sb-Te-Based Alloy Sintered Compact Sputtering Target
11/08/2012US20120279856 Tin Oxide Ceramic Sputtering Target and Method of Producing It
11/08/2012US20120279855 Apparatus for achieving low resistance contact to a metal based thin film solar cell
11/08/2012US20120279851 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
11/08/2012US20120279449 Apparatus and method for focused electric field enhanced plasma-based ion implantation
11/08/2012DE112010002790T5 HERSTELLUNGSVERFAHREN FüR EINE PIEZOELEKTRISCHE SCHICHT SOWIE MITDEM HERSTELLUNGSVERFAHREN HERGESTELLTE PIEZOELEKTRISCHE SCHICHT MANUFACTURING PROCESS FOR A PIEZOELECTRIC LAYER AND MANUFACTURING METHOD MITDEM PRODUCED PIEZOELECTRIC LAYER
11/08/2012DE102011075350A1 Energy filter assembly for ion implantation system used in fabrication of silicon wafer, has filter elements that are arranged in opening of energy filter which is vibrated vertical to propagation direction of ion beam
11/08/2012DE102010043804B4 Substratbehandlungsverfahren The substrate processing method
11/07/2012EP2520689A1 Coating methods and apparatus
11/07/2012EP2519656A2 Vaporization apparatus and method for controlling the same
11/07/2012CN202521913U Solar collector core with anti-micro battery corrosion protection structure
11/07/2012CN202519326U Winding plated film magnetron sputtering cathode structure
11/07/2012CN102770584A Sliding element, in particular a piston ring, and method for coating a sliding element
11/07/2012CN102770579A Conveyance device for film substrate
11/07/2012CN102770578A Film-forming device and film-forming method
11/07/2012CN102770577A In-Ga-Sn oxide sinter, target, oxide semiconductor film, and semiconductor element
11/07/2012CN102770576A Sputtering target composed of aluminum-base alloy
11/07/2012CN102770392A Method for manufacturing sintered LiCoO2, and sputtering target
11/07/2012CN102770391A Manufacturing method for LiCoO2 sintered body, and sputtering target made from same
11/07/2012CN102770385A Device and method for substrate processing
11/07/2012CN102769047A Copper-zinc-tin-sulfide-selenium film and preparation method thereof as well as copper-zinc-tin-sulfide-selenium film solar cell
11/07/2012CN102766875A Surface treatment process for PVD wire drawing product
11/07/2012CN102766849A Indium tin oxide film for resistive touch screen, and preparation method and preparation equipment for indium tin oxide film
11/07/2012CN102766848A Sputtering target material for producing intermediate layer film of perpendicular magnetic recording medium and thin film produced by using the same
11/07/2012CN102766847A Preparation method of Pd/Ge composite nano thin film with fractal clusters
11/07/2012CN102766846A AN/Crl-xAlxN/Cr30 (Al, Y) 70N hard gradient coating and preparation method thereof
11/07/2012CN102766845A Metal surface PVD (Physical Vapor Deposition) decorative coating method
11/07/2012CN102766844A Mask device for evaporation of organic materials of organic light emitting diode (OLED)
11/07/2012CN102766843A Method of forming a partial deposition layer and apparatus of forming a partial deposition layer
11/07/2012CN102766842A Split mask and assembling apparatus for assembling a mask frame assembly including the split mask
11/07/2012CN102766841A Mask frame assembly for thin film deposition and method of manufacturing the same
11/07/2012CN102765292A Decorating element and preparation method of decorating element
11/07/2012CN102764922A Large-area welding method
11/07/2012CN102231363B Manufacturing method for ohmic contact with low specific contact resistance and low roughness
11/07/2012CN102199759B Gradient hydrogen process grown ZnO-TCO thin film with textured structure and use thereof
11/07/2012CN102140618B Mutual non-solid-solution system metal infiltration process based on ion implantation radiation damage and electrode material
11/07/2012CN102094179B RB-SiC base reflector surface modified layer structure and preparation method thereof
11/07/2012CN102051582B Method for preparing highly (100) oriented BiFeO3 films on Si substrate
11/07/2012CN102016107B Heat equalizer and organic film forming apparatus
11/07/2012CN101988187B Vacuum magnetron sputtering color plating equipment
11/07/2012CN101988184B Method for preparing grapheme film
11/07/2012CN101983413B Ion implanter, ion implantation method
11/07/2012CN101931024B Sputter and sputtering method for manufacturing thin film solar cell
11/07/2012CN101878320B Frame-based vacuum chamber for coating systems
11/07/2012CN101837667B Ultraviolet cured coating and application thereof
11/07/2012CN101827955B Workpiece carrier device
11/07/2012CN101698931B Double-flash evaporation device for preparing superlattice thermoelectric film material
11/07/2012CN101694853B ZnO/SiC/Si heterojunction solar battery and preparation method thereof
11/07/2012CN101511586B Surface-treated resin, method for producing the same, and use of the same
11/06/2012US8304961 Method for testing piezoelectric/electrostrictive device, testing apparatus, and method for adjusting piezoelectric/electrostrictive device
11/06/2012US8304359 Sputtering target, transparent conductive film, and transparent electrode for touch panel
11/06/2012US8304100 Coated glass and method for making the same
11/06/2012US8304033 Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles
11/06/2012US8304030 thermal spraying metal hydroxide, carbonate, or nitrate particles and a noble metal, nobel metal hydroxide, carbonate, or nitrate on one side; on other side a physical vapor deposition process of ruthenium, rhodium, palladium, silver, iridium, platinum and/or gold; microchannel catalytic heat exchanger;
11/06/2012US8303786 Sputtering apparatus
11/06/2012US8303785 Plasma processing apparatus and electronic device manufacturing method
11/06/2012US8303780 Method of forming mask for dry etching and manufacturing method of magnetic head using the same method
11/06/2012US8303779 Methods for forming a transparent conductive oxide layer on a substrate
11/06/2012US8303764 Apparatus and methods for transporting and processing substrates
11/06/2012US8303763 Measuring and controlling wafer potential in pulsed RF bias processing
11/06/2012US8303714 Continuous film forming apparatus
11/06/2012US8302834 Friction stir welding using a superabrasive tool
11/01/2012WO2012148270A1 Nanosieve composite membrane
11/01/2012WO2012147985A1 Sputtering target and method for producing same
11/01/2012WO2012147771A1 Microwave plasma generation device, and magnetron sputtering film deposition device using same
11/01/2012WO2012147493A1 Method and device for producing organic el element
11/01/2012WO2012147298A1 Film-forming apparatus
11/01/2012WO2012147228A1 Cathode unit
11/01/2012WO2012146483A1 Turbine component with coated balancing element for use at high temperatures
11/01/2012WO2012146479A1 Tooling carrier for inline coating machine, method of operating thereof and process of coating a substrate
11/01/2012WO2012146312A1 Gas system for reactive deposition process
11/01/2012WO2012146311A1 Method for modifying and alloying surfaces of wc based hard metal structures
11/01/2012WO2012146310A1 Devices and methods for passivating a flexible substrate in a coating process
11/01/2012WO2012146302A1 Method of forming a cylindrical sputter target assembly
11/01/2012WO2012145895A1 Method of manufacturing cigs solar energy photoelectric quaternary sputtering target, method of bonding the same with target backing plate, and method of supplementing material thereof
11/01/2012WO2012121542A3 Method for manufacturing a molybdenum sputtering target for a back surface electrode of a cigs solar cell
11/01/2012WO2012120497A4 Method for surfactant crystal growth of a metal-nonmetal compound
11/01/2012WO2012099975A3 Electrochromic tungsten oxide film deposition
11/01/2012US20120276413 Process for surface treating iron-based alloy and article
11/01/2012US20120276408 Process for surface treating iron-based alloy and article
11/01/2012US20120276407 Process for surface treating iron-based alloy and article
11/01/2012US20120276406 Anti-corrosion treatment process for aluminum or aluminum alloy and aluminum or aluminum alloy article thereof
11/01/2012US20120276405 Coated article and method for making the same
11/01/2012US20120276404 Coated article and method for making the same
11/01/2012US20120276397 Vacuum film formation method and laminate obtained by the method
11/01/2012US20120276396 Vacuum film formation method and laminate obtained by the method
11/01/2012US20120276371 Coated article and method for manufacturing same
11/01/2012US20120276370 Coated article and method for making the same
11/01/2012US20120276352 Tri-barrier ceramic coating