| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 07/24/2013 | CN103222009A Positron emitter irradiation system |
| 07/24/2013 | CN103219060A Protective device for safely opening beam baffle of electron irradiation accelerator |
| 07/23/2013 | US8495761 Planar positioning device and inspection device provided with the same |
| 07/23/2013 | US8492732 Multi charged particle beam writing apparatus and multi charged particle beam writing method |
| 07/23/2013 | US8492731 Charged particle multi-beamlet lithography system with modulation device |
| 07/18/2013 | US20130181142 Method Of Generating Low-Energy Secondary Electrons For Applications In Biological Sciences, Radiochemistry, And Chemistry Of Polymers And Physics Of Radiotherapy |
| 07/18/2013 | US20130181139 Beam line design to reduce energy contamination |
| 07/18/2013 | DE102010042670B4 Vorrichtung zur UV-Bestrahlung Device for UV irradiation |
| 07/17/2013 | EP2614506A1 Positron emitter irradiation system |
| 07/17/2013 | DE202013103039U1 UV-Leuchte und Leuchtmittel UV lamp and bulb |
| 07/17/2013 | CN103208318A High-power irradiation accelerator X-ray conversion target and high-power irradiation accelerator X-ray conversion device |
| 07/16/2013 | US8487286 Radiation therapy equipment |
| 07/16/2013 | US8487285 Deep-ultraviolet light source capable of stopping leakage of harmful X-rays |
| 07/16/2013 | US8487280 Modulating implantation for improved workpiece splitting |
| 07/16/2013 | US8487279 Gas contamination sensor, lithographic apparatus, method of determining a level of contaminant gas and device manufacturing method |
| 07/16/2013 | US8487269 Combined radiation therapy and magnetic resonance unit |
| 07/16/2013 | US8487268 Method for the production of multiplayer electrostatic lens array |
| 07/16/2013 | US8487253 Scanning electron microscope |
| 07/11/2013 | US20130177855 Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus |
| 07/11/2013 | US20130177136 Apparatus and method of providing dual line source irradiator, dlsir |
| 07/11/2013 | US20130177117 Apparatus for generating a neutron flux from a plurality of neutron sources |
| 07/11/2013 | US20130176714 Mountable Multi-Function Multi-Mode Marker/Signaling Device |
| 07/11/2013 | US20130175459 Multi-sectional linear ionizing bar and ionization cell |
| 07/11/2013 | US20130175454 Excimer light source |
| 07/10/2013 | EP2612692A1 Neutron beam irradiation system |
| 07/09/2013 | US8481985 Method and apparatus for producing a high level of disinfection in air and surfaces |
| 07/09/2013 | US8481984 Extreme ultra violet light source apparatus |
| 07/09/2013 | US8481983 Extreme ultra violet light source apparatus |
| 07/09/2013 | US8481982 Energy emitting treatment device |
| 07/09/2013 | US8481981 Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus |
| 07/09/2013 | US8481980 Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample |
| 07/09/2013 | US8481969 Effective algorithm for warming a twist axis for cold ion implantations |
| 07/09/2013 | US8481968 Electron microscope specimen and method for preparing the same |
| 07/09/2013 | US8481967 Method of processing objects by focused ion beam system and carrier used therewith |
| 07/09/2013 | US8481965 Process for the production of electric energy by the extraction of electrons from atoms and molecules |
| 07/09/2013 | US8481962 Distributed potential charged particle detector |
| 07/09/2013 | US8481961 Shielded capacitive electrode |
| 07/09/2013 | US8481958 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens |
| 07/09/2013 | US8481931 Electron spectroscopy |
| 07/09/2013 | US8481927 High yield atmospheric pressure ion source for ion spectrometers in vacuum |
| 07/04/2013 | US20130172865 Target structure used for generating charged particle beam, method of manufacturing the same and medical appliance using the same |
| 07/04/2013 | US20130171570 Drawing apparatus, and method of manufacturing article |
| 07/04/2013 | US20130168569 Drawing apparatus, and method of manufacturing article |
| 07/04/2013 | DE102013200049A1 Mikrowellenerregtes Ultraviolettlampensystem mit Datenerfassungs- und Abfrageschaltung und Verfahren Microwave Manic ultraviolet lamp system with data acquisition and sampling circuit and method |
| 07/03/2013 | EP2610209A1 Electron beam sterilizer for cap |
| 07/03/2013 | EP2609611A1 Control grid design for an electron beam generating device |
| 06/27/2013 | US20130164692 Drawing apparatus, and method of manufacturing article |
| 06/27/2013 | US20130164684 Charged particle beam lithography apparatus and method, and article manufacturing method |
| 06/27/2013 | US20130161540 Extreme ultraviolet light generation apparatus |
| 06/27/2013 | DE102012005916B3 Vorrichtung zur Bestrahlung eines Substrats Apparatus for irradiating a substrate |
| 06/27/2013 | DE102011122230A1 Optikanordnung und Verfahren zum Untersuchen oder Bearbeiten eines Objekts Optical device and method for examining or editing an object |
| 06/26/2013 | CN203026187U X-ray reflection cavity with novel structure |
| 06/25/2013 | US8473874 Method and apparatus for automatically fixing double patterning loop violations |
| 06/25/2013 | US8472584 Apparatus and method for killing pathogenic and non-pathogenic organisms using low-energy X-rays |
| 06/25/2013 | US8471228 Fast scanning of a target region |
| 06/25/2013 | US8471227 Extreme ultraviolet light source apparatus |
| 06/25/2013 | US8471222 Radiotherapy apparatus control method and radiotherapy apparatus control apparatus |
| 06/20/2013 | WO2013087227A1 Method for producing nanopowders and various element isotopes at nanopowder level |
| 06/20/2013 | US20130157198 Multi charged particle beam writing apparatus and multi charged particle beam writing method |
| 06/20/2013 | US20130156939 Method and apparatus for analyzing and/or repairing of an euv mask defect |
| 06/20/2013 | US20130155644 Lighting device and photographing system including the same |
| 06/20/2013 | US20130153791 Mask Manufacturing Device |
| 06/19/2013 | CN203001486U High-efficiency gamma ray irradiation bin |
| 06/18/2013 | US8466440 Charged particle beam drawing apparatus and control method thereof |
| 06/18/2013 | US8466439 Electron beam lithography apparatus and electron beam lithography method |
| 06/18/2013 | US8466436 System and method for metered dosage illumination in a bioanalysis or other system |
| 06/18/2013 | US8466431 Techniques for improving extracted ion beam quality using high-transparency electrodes |
| 06/17/2013 | DE202012100929U1 Modellier- und Aushärtevorrichtung zum Verarbeiten eines lichtaushärtenden Materials Modeling and curing device for processing a light-curing material |
| 06/13/2013 | WO2013083333A1 Combined ion irradiation and radiography device |
| 06/13/2013 | US20130149647 Holding apparatus, drawing apparatus, and method of manufacturing article |
| 06/13/2013 | US20130149646 Charged particle beam writing apparatus and charged particle beam writing method |
| 06/13/2013 | US20130146790 Apparatus and method for charge neutralization during processing of a workpiece |
| 06/13/2013 | US20130146789 Method of Transmitting Energy Produced with Destructive Interference to a Target |
| 06/13/2013 | US20130146760 System and method for ion implantation with improved productivity and uniformity |
| 06/12/2013 | EP2602003A1 Combined ion irradiation and ion radiography device |
| 06/12/2013 | CN102222534B Beam current shutter for simulation experiment of single-event-effect ground accelerator |
| 06/12/2013 | CN101422372B Cone-beam computerized tomography with a flat-panel imager |
| 06/11/2013 | US8462912 Computed tomography examination and particle therapy treatment |
| 06/11/2013 | US8461556 Using beam blockers to perform a patterned implant of a workpiece |
| 06/11/2013 | US8461555 Charged particle beam writing method and charged particle beam writing apparatus |
| 06/11/2013 | US8461553 Masked ion implant with fast-slow scan |
| 06/11/2013 | US8461552 Active particle trapping for process control |
| 06/11/2013 | US8461550 Electron beam sterilizer |
| 06/06/2013 | US20130143161 Charged particle beam apparatus |
| 06/06/2013 | US20130140473 Automatic Control System for Selection and Optimization of Co-Gas Flow Levels |
| 06/06/2013 | US20130140470 Installation for Treating Articles by Electron Bombardment |
| 06/06/2013 | US20130140450 Inductively-Coupled Plasma Ion Source for Use with a Focused Ion Beam Column with Selectable Ions |
| 06/05/2013 | EP2600356A1 Neutron ray irradiation device, and method for control of neutron ray irradiation device |
| 06/05/2013 | CN103140012A Electronic irradiation accelerator with titanium film protecting function |
| 06/05/2013 | CN101641748B Device and method for immobilizing patients for breast radiation therapy |
| 06/04/2013 | US8457717 Method and system of adaptive control for reducing motion artifacts and patient dose in four dimensional computed tomography |
| 06/04/2013 | US8457279 Patient positioning assembly |
| 06/04/2013 | US8455843 Ultraviolet ionizing chamber for air purifiers |
| 06/04/2013 | US8454839 Method for modifying the properties of a fluid by irradiation, and system for implementing same |
| 05/30/2013 | US20130138183 Methods of Transferring Energies to Water, Alcohols and Minerals |
| 05/30/2013 | US20130137044 Scanning apparatus, drawing apparatus, and method of manufacturing article |
| 05/30/2013 | US20130134330 Holder device, chamber apparatus, and extreme ultraviolet light generation system |
| 05/30/2013 | US20130134329 Charged particle beam writing apparatus and charged particle beam writing method |
| 05/30/2013 | US20130134328 Processing system |
| 05/30/2013 | US20130134326 Extreme ultraviolet light generation apparatus, target collection device, and target collection method |