Patents for G21K 5 - Irradiation devices (9,144)
03/2013
03/21/2013US20130068968 Method of varying a physical property of a material through its depth
03/21/2013US20130068963 Shielded capacitive electrode
03/21/2013US20130068959 Charged particle beam drawing apparatus and method of manufacturing article
03/20/2013CN102985981A Neutron ray irradiation device, and method for control of neutron ray irradiation device
03/20/2013CN101183083B Method and device for cooling, electrically insulating high voltage and heat generation member
03/19/2013US8399862 Ion implanting apparatus and ion implanting method
03/19/2013US8399860 Method for preventing deterioration of edible oil or industrial oil and apparatus therefor
03/19/2013US8399834 Isotope ion microscope methods and systems
03/14/2013WO2013035292A1 Sample-containing cell for x-ray microscope and method for observing x-ray microscopic image
03/14/2013US20130065184 Charged particle beam drawing method and charged particle beam drawing apparatus
03/14/2013US20130063922 Portable Electronic Device Sanitizer
03/14/2013US20130063669 Illumination device, display device, and television reception device
03/14/2013US20130062538 Extreme ultraviolet light generation apparatus
03/14/2013US20130062534 Uv germicidal system, method, and device thereof
03/14/2013US20130062533 Photoactivatable paint curing device and method
03/14/2013DE10219805B4 Verfahren zur Stabilisierung der Strahlungsleistung einer gepuist betriebenen, auf gasentladungserzeugtem Plasma basierenden Strahlungsquelle A method for stabilizing the radiation power of a gepuist operated, based gasentladungserzeugtem plasma radiation source
03/14/2013DE102012201946A1 Removing organic impurities from a graphene surface, comprises prepurifying graphene surface, supplying ozone containing gas to surface, and irradiating oxygen containing gas from surrounding air with UV-radiation for creating ozone
03/14/2013DE102011112994A1 Vorrichtung zur Entkeimung von Gasen und/oder Flüssigkeiten An apparatus for sterilizing gases and / or liquids
03/13/2013CN102971802A Particle beam generating device
03/12/2013US8395133 Apparatus and method of adjusting a laser light source for an EUV source device
03/12/2013US8395132 Ion implanting while growing a III-nitride layer
03/07/2013US20130056655 Ion implant apparatus and method of ion implantation
03/07/2013US20130056654 Positive resist composition and patterning process
03/07/2013US20130056653 Positive resist composition and patterning process
03/07/2013US20130056651 Advanced antimatter weapon technologies
03/07/2013US20130056647 Multi charged particle beam writing apparatus and multi charged particle beam writing method
03/07/2013US20130056646 Multi-leaf collimator, particle beam therapy system, and treatment planning apparatus
03/07/2013US20130056645 Multi charged particle beam writing apparatus and multi charged particle beam writing method
03/07/2013DE202013000809U1 Ultraviolett-Luftdesinfektionsvorrichtung Ultraviolet air disinfection device
03/07/2013DE202013000808U1 Ultraviolett-Abstrahlvorrichtung Ultraviolet radiation device
03/06/2013CN1645548B Charged particle beam device
03/05/2013US8389963 Laser processing device
03/05/2013US8389957 System and method for metered dosage illumination in a bioanalysis or other system
03/05/2013US8389955 Method for thinning a sample and sample carrier for performing said method
03/05/2013US8389936 Method for inspecting a sample
02/2013
02/28/2013WO2013027263A1 Beam data processing apparatus and particle beam treatment apparatus
02/28/2013US20130050654 Method and apparatus for a solid state light source
02/28/2013US20130048886 Chamber apparatus and extreme ultraviolet (euv) light generation apparatus including the chamber apparatus
02/28/2013US20130048882 Charged particle beam forming aperture and charged particle beam exposure apparatus
02/28/2013US20130048880 Antenna placement in degenerate modal cavities of an electromagnetic energy transfer system
02/28/2013US20130048879 Sensor housing
02/28/2013US20130048877 Method and apparatus for anti-biofouling of a protected surface in liquid environments
02/28/2013US20130048845 Polarization-entangled photon pair source and method for the manufacture thereof
02/28/2013DE102011087885B3 Blitzlampenanordnung Flash lamp assembly
02/28/2013DE102011081570A1 Strahlungsquelle Radiation source
02/28/2013DE102011052979A1 Method for heating surface of plastic component e.g. bumper used in motor vehicle by infrared radiation, involves irradiating surface with infrared radiation having mutually parallel beams to heat component surface
02/27/2013EP2561407A1 Collector mirror assembly and method for producing extreme ultraviolet radiation
02/27/2013CN202751403U Blade linkage driving device for beam limiting device of X-ray machine
02/26/2013US8384050 Ion beam sample preparation thermal management apparatus and methods
02/21/2013US20130043414 System for magnetic shielding
02/21/2013US20130043413 Arrangement of optical fibers, and a method of forming such arrangement
02/21/2013US20130043412 Serial irradiation of a substrate by multiple radiation sources
02/21/2013US20130043408 Shielding Device For An Irradiation Unit And Irradiation Method
02/21/2013US20130043389 Method for correcting electronic proximity effects using off-center scattering functions
02/21/2013DE102011052750A1 Device, useful for the disinfection or sterilization of food, comprises pot, a lid, which closes the pot and one ultraviolet emitter, which is adapted to irradiate the contents contained in the pot closed with the lid, with ultraviolet rays
02/20/2013EP2559994A2 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof
02/20/2013CN101795527B Radiation source, lithographic apparatus and device manufacturing method
02/19/2013US8378315 Windshield repair device and method for repairing windshield
02/14/2013US20130040240 Charged particle beam drawing apparatus, and method of manufacturing article
02/14/2013US20130037730 Network architecture for lithography machine cluster
02/14/2013US20130037724 Charged particle beam drawing apparatus and charged particle beam drawing method
02/14/2013US20130037713 Method for processing samples held by a nanomanipulator
02/14/2013US20130037706 Devices and methods for cryo lift-out with in situ probe
02/14/2013US20130037693 Optical system and extreme ultraviolet (euv) light generation system including the optical system
02/13/2013CN101740156B Laser-driven particle beam irradiation apparatus and method
02/13/2013CN101404188B Ultraviolet irradiation apparatus
02/12/2013US8374314 Synchronized X-ray / breathing method and apparatus used in conjunction with a charged particle cancer therapy system
02/12/2013US8374306 Isotope production system with separated shielding
02/07/2013WO2013018421A1 Tritium removal device for lithium loop
02/07/2013US20130033695 High-energy laser system intercepting a target and method thereof
02/07/2013US20130032735 Laser apparatus and extreme ultraviolet light generation system including the laser apparatus
02/07/2013US20130032732 Device to load tem sample holders into a vacuum chamber
02/07/2013US20130032707 Charged particle beam drawing apparatus and electrical charging effect correction method thereof
02/07/2013US20130032481 Sample carrier and/or sample carrier processing apparatus
02/06/2013DE202013100342U1 Sicherheitseinrichtung Safety device
02/06/2013DE202013100324U1 Lichthärtgerät A light curing
02/06/2013CN202720907U Irradiation capsule
02/06/2013CN202720906U Irradiation capsule reinforcing rib and capsule connection structure
02/06/2013CN202720905U Irradiation capsule metal wire sealing structure
02/06/2013CN202720904U Irradiation capsule reinforcing rib structure
02/06/2013CN101636031B Ultraviolet irradiation device and lighting control method thereof
02/05/2013US8368041 System and method for compensating for thermal effects in an EUV light source
02/05/2013US8368040 Radiation system and lithographic apparatus
02/05/2013US8368037 Systems and methods providing electron beam writing to a medium
02/05/2013US8368030 Charged particle beam exposure system and beam manipulating arrangement
01/2013
01/31/2013US20130030264 Method of providing uniform distribution of light in a phototherapy device
01/31/2013US20130027681 Euv collector
01/31/2013US20130025152 Efficient irradiation system using curved reflective surfaces
01/30/2013CN102905761A Particle beam irradiation apparatus and particle beam therapy apparatus provided with same
01/30/2013CN102905457A Scanning magnet device used in electron irradiation accelerator
01/29/2013US8365108 Generating cut mask for double-patterning process
01/29/2013US8362444 Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
01/24/2013US20130022929 Method and system for manufacturing a surface using shaped charged particle beam lithography
01/24/2013US20130020511 Mirror, mirror device, laser apparatus, and extreme ultraviolet light generation apparatus
01/24/2013US20130020510 Gated radiation procedure using packages
01/24/2013US20130020502 Charged particle beam drawing apparatus and method of manufacturing article
01/24/2013US20130020499 Window unit, window device, laser apparatus, and extreme ultraviolet light generation system
01/24/2013DE102011079531A1 Bestrahlungsvorrichtung zur UV-Strahlungsbehandlung Irradiation apparatus for ultraviolet radiation treatment
01/23/2013CN102313693B Nuclear-grade equipment irradiation aging identification testing system
01/23/2013CN101678909B Electron beam sterilizer
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