Patents for G21K 5 - Irradiation devices (9,144) |
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03/21/2013 | US20130068968 Method of varying a physical property of a material through its depth |
03/21/2013 | US20130068963 Shielded capacitive electrode |
03/21/2013 | US20130068959 Charged particle beam drawing apparatus and method of manufacturing article |
03/20/2013 | CN102985981A Neutron ray irradiation device, and method for control of neutron ray irradiation device |
03/20/2013 | CN101183083B Method and device for cooling, electrically insulating high voltage and heat generation member |
03/19/2013 | US8399862 Ion implanting apparatus and ion implanting method |
03/19/2013 | US8399860 Method for preventing deterioration of edible oil or industrial oil and apparatus therefor |
03/19/2013 | US8399834 Isotope ion microscope methods and systems |
03/14/2013 | WO2013035292A1 Sample-containing cell for x-ray microscope and method for observing x-ray microscopic image |
03/14/2013 | US20130065184 Charged particle beam drawing method and charged particle beam drawing apparatus |
03/14/2013 | US20130063922 Portable Electronic Device Sanitizer |
03/14/2013 | US20130063669 Illumination device, display device, and television reception device |
03/14/2013 | US20130062538 Extreme ultraviolet light generation apparatus |
03/14/2013 | US20130062534 Uv germicidal system, method, and device thereof |
03/14/2013 | US20130062533 Photoactivatable paint curing device and method |
03/14/2013 | DE10219805B4 Verfahren zur Stabilisierung der Strahlungsleistung einer gepuist betriebenen, auf gasentladungserzeugtem Plasma basierenden Strahlungsquelle A method for stabilizing the radiation power of a gepuist operated, based gasentladungserzeugtem plasma radiation source |
03/14/2013 | DE102012201946A1 Removing organic impurities from a graphene surface, comprises prepurifying graphene surface, supplying ozone containing gas to surface, and irradiating oxygen containing gas from surrounding air with UV-radiation for creating ozone |
03/14/2013 | DE102011112994A1 Vorrichtung zur Entkeimung von Gasen und/oder Flüssigkeiten An apparatus for sterilizing gases and / or liquids |
03/13/2013 | CN102971802A Particle beam generating device |
03/12/2013 | US8395133 Apparatus and method of adjusting a laser light source for an EUV source device |
03/12/2013 | US8395132 Ion implanting while growing a III-nitride layer |
03/07/2013 | US20130056655 Ion implant apparatus and method of ion implantation |
03/07/2013 | US20130056654 Positive resist composition and patterning process |
03/07/2013 | US20130056653 Positive resist composition and patterning process |
03/07/2013 | US20130056651 Advanced antimatter weapon technologies |
03/07/2013 | US20130056647 Multi charged particle beam writing apparatus and multi charged particle beam writing method |
03/07/2013 | US20130056646 Multi-leaf collimator, particle beam therapy system, and treatment planning apparatus |
03/07/2013 | US20130056645 Multi charged particle beam writing apparatus and multi charged particle beam writing method |
03/07/2013 | DE202013000809U1 Ultraviolett-Luftdesinfektionsvorrichtung Ultraviolet air disinfection device |
03/07/2013 | DE202013000808U1 Ultraviolett-Abstrahlvorrichtung Ultraviolet radiation device |
03/06/2013 | CN1645548B Charged particle beam device |
03/05/2013 | US8389963 Laser processing device |
03/05/2013 | US8389957 System and method for metered dosage illumination in a bioanalysis or other system |
03/05/2013 | US8389955 Method for thinning a sample and sample carrier for performing said method |
03/05/2013 | US8389936 Method for inspecting a sample |
02/28/2013 | WO2013027263A1 Beam data processing apparatus and particle beam treatment apparatus |
02/28/2013 | US20130050654 Method and apparatus for a solid state light source |
02/28/2013 | US20130048886 Chamber apparatus and extreme ultraviolet (euv) light generation apparatus including the chamber apparatus |
02/28/2013 | US20130048882 Charged particle beam forming aperture and charged particle beam exposure apparatus |
02/28/2013 | US20130048880 Antenna placement in degenerate modal cavities of an electromagnetic energy transfer system |
02/28/2013 | US20130048879 Sensor housing |
02/28/2013 | US20130048877 Method and apparatus for anti-biofouling of a protected surface in liquid environments |
02/28/2013 | US20130048845 Polarization-entangled photon pair source and method for the manufacture thereof |
02/28/2013 | DE102011087885B3 Blitzlampenanordnung Flash lamp assembly |
02/28/2013 | DE102011081570A1 Strahlungsquelle Radiation source |
02/28/2013 | DE102011052979A1 Method for heating surface of plastic component e.g. bumper used in motor vehicle by infrared radiation, involves irradiating surface with infrared radiation having mutually parallel beams to heat component surface |
02/27/2013 | EP2561407A1 Collector mirror assembly and method for producing extreme ultraviolet radiation |
02/27/2013 | CN202751403U Blade linkage driving device for beam limiting device of X-ray machine |
02/26/2013 | US8384050 Ion beam sample preparation thermal management apparatus and methods |
02/21/2013 | US20130043414 System for magnetic shielding |
02/21/2013 | US20130043413 Arrangement of optical fibers, and a method of forming such arrangement |
02/21/2013 | US20130043412 Serial irradiation of a substrate by multiple radiation sources |
02/21/2013 | US20130043408 Shielding Device For An Irradiation Unit And Irradiation Method |
02/21/2013 | US20130043389 Method for correcting electronic proximity effects using off-center scattering functions |
02/21/2013 | DE102011052750A1 Device, useful for the disinfection or sterilization of food, comprises pot, a lid, which closes the pot and one ultraviolet emitter, which is adapted to irradiate the contents contained in the pot closed with the lid, with ultraviolet rays |
02/20/2013 | EP2559994A2 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
02/20/2013 | CN101795527B Radiation source, lithographic apparatus and device manufacturing method |
02/19/2013 | US8378315 Windshield repair device and method for repairing windshield |
02/14/2013 | US20130040240 Charged particle beam drawing apparatus, and method of manufacturing article |
02/14/2013 | US20130037730 Network architecture for lithography machine cluster |
02/14/2013 | US20130037724 Charged particle beam drawing apparatus and charged particle beam drawing method |
02/14/2013 | US20130037713 Method for processing samples held by a nanomanipulator |
02/14/2013 | US20130037706 Devices and methods for cryo lift-out with in situ probe |
02/14/2013 | US20130037693 Optical system and extreme ultraviolet (euv) light generation system including the optical system |
02/13/2013 | CN101740156B Laser-driven particle beam irradiation apparatus and method |
02/13/2013 | CN101404188B Ultraviolet irradiation apparatus |
02/12/2013 | US8374314 Synchronized X-ray / breathing method and apparatus used in conjunction with a charged particle cancer therapy system |
02/12/2013 | US8374306 Isotope production system with separated shielding |
02/07/2013 | WO2013018421A1 Tritium removal device for lithium loop |
02/07/2013 | US20130033695 High-energy laser system intercepting a target and method thereof |
02/07/2013 | US20130032735 Laser apparatus and extreme ultraviolet light generation system including the laser apparatus |
02/07/2013 | US20130032732 Device to load tem sample holders into a vacuum chamber |
02/07/2013 | US20130032707 Charged particle beam drawing apparatus and electrical charging effect correction method thereof |
02/07/2013 | US20130032481 Sample carrier and/or sample carrier processing apparatus |
02/06/2013 | DE202013100342U1 Sicherheitseinrichtung Safety device |
02/06/2013 | DE202013100324U1 Lichthärtgerät A light curing |
02/06/2013 | CN202720907U Irradiation capsule |
02/06/2013 | CN202720906U Irradiation capsule reinforcing rib and capsule connection structure |
02/06/2013 | CN202720905U Irradiation capsule metal wire sealing structure |
02/06/2013 | CN202720904U Irradiation capsule reinforcing rib structure |
02/06/2013 | CN101636031B Ultraviolet irradiation device and lighting control method thereof |
02/05/2013 | US8368041 System and method for compensating for thermal effects in an EUV light source |
02/05/2013 | US8368040 Radiation system and lithographic apparatus |
02/05/2013 | US8368037 Systems and methods providing electron beam writing to a medium |
02/05/2013 | US8368030 Charged particle beam exposure system and beam manipulating arrangement |
01/31/2013 | US20130030264 Method of providing uniform distribution of light in a phototherapy device |
01/31/2013 | US20130027681 Euv collector |
01/31/2013 | US20130025152 Efficient irradiation system using curved reflective surfaces |
01/30/2013 | CN102905761A Particle beam irradiation apparatus and particle beam therapy apparatus provided with same |
01/30/2013 | CN102905457A Scanning magnet device used in electron irradiation accelerator |
01/29/2013 | US8365108 Generating cut mask for double-patterning process |
01/29/2013 | US8362444 Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
01/24/2013 | US20130022929 Method and system for manufacturing a surface using shaped charged particle beam lithography |
01/24/2013 | US20130020511 Mirror, mirror device, laser apparatus, and extreme ultraviolet light generation apparatus |
01/24/2013 | US20130020510 Gated radiation procedure using packages |
01/24/2013 | US20130020502 Charged particle beam drawing apparatus and method of manufacturing article |
01/24/2013 | US20130020499 Window unit, window device, laser apparatus, and extreme ultraviolet light generation system |
01/24/2013 | DE102011079531A1 Bestrahlungsvorrichtung zur UV-Strahlungsbehandlung Irradiation apparatus for ultraviolet radiation treatment |
01/23/2013 | CN102313693B Nuclear-grade equipment irradiation aging identification testing system |
01/23/2013 | CN101678909B Electron beam sterilizer |