| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 08/02/2012 | US20120193547 Laser produced plasma euv light source |
| 08/02/2012 | DE112010001478T5 Röntgenvorrichtung, Verfahren zum Verwenden der Röntgenvorrichtungund Röntgenbestrahlungsverfahren X-ray apparatus, method of using the X-ray irradiation method Röntgenvorrichtungund |
| 08/01/2012 | EP1701375B1 X-ray apparatus |
| 07/31/2012 | US8232536 Particle beam irradiation system and method for controlling the particle beam irradiation system |
| 07/31/2012 | US8232532 Off-axis ion milling device for manufacture of magnetic recording media and method for using the same |
| 07/31/2012 | US8232518 Device and method for characterizing surfaces |
| 07/26/2012 | WO2012099023A1 Energy degrader, and charged particle irradiation system comprising same |
| 07/26/2012 | US20120190181 Carbon implantation process and carbon ion precursor composition |
| 07/26/2012 | US20120190135 Manufacturing method and manufacturing apparatus for semiconductor device |
| 07/26/2012 | US20120189813 TEM-Lamella, Process for its Manufacture, and Apparatus for Executing the Process |
| 07/26/2012 | US20120187313 Systems, Devices, and/or Methods for Managing Disinfection |
| 07/26/2012 | US20120187309 Method for Fabricating an Electromagnetic Actuator, an Electromagnetic Actuator, and a Charged Particle Device Comprising the Same |
| 07/26/2012 | US20120187291 Method of Depositing Protective Structures |
| 07/26/2012 | US20120187285 Measurement and endpointing of sample thickness |
| 07/26/2012 | DE102011009456A1 Ultraviolet-dryer for drying printing inks and other ultraviolet-photopolymerizable materials, has ultraviolet radiation head with irradiation unit having cylindrical tubular ultraviolet lamp |
| 07/25/2012 | CN202352361U Homological beam integration type target chamber |
| 07/25/2012 | CN102612719A Particle beam radiation system and particle beam radiation method |
| 07/24/2012 | US8229062 Transmission mask with differential attenuation to improve ISO-dense proximity |
| 07/24/2012 | US8227778 Semiconductor exposure device using extreme ultra violet radiation |
| 07/24/2012 | US8227776 Electron beam irradiating apparatus with monitoring device |
| 07/24/2012 | US8227773 Versatile beam glitch detection system |
| 07/24/2012 | US8227769 Curing of photo-curable printing plates with flat tops or round tops |
| 07/24/2012 | US8227768 Low-inertia multi-axis multi-directional mechanically scanned ion implantation system |
| 07/19/2012 | WO2012064801A3 Particle accelerator with a heat pipe supporting components of a high voltage power supply |
| 07/19/2012 | US20120181455 Energy beam drawing apparatus and method of manufacturing device |
| 07/19/2012 | US20120181446 Cleaning apparatus, radiation source module and fluid treatment system |
| 07/19/2012 | US20120181445 Electron beam recording apparatus |
| 07/19/2012 | US20120181428 Device and method for controlling an irradiation system |
| 07/18/2012 | CN102596316A Compact gantry for particle therapy |
| 07/18/2012 | CN102592697A Slotted branching sheet wheel |
| 07/17/2012 | US8222621 Method for maskless particle-beam exposure |
| 07/12/2012 | WO2012093628A1 Electron emission element, electron emission device, electrostatic charging device, image forming device, self-luminescent electron beam hardening device, image display device, blower device, cooling device, method for producing electron emission element and method for repairing electron emission element |
| 07/12/2012 | US20120175533 Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon |
| 07/12/2012 | US20120175532 Compact modular ebeam systems and methods |
| 07/12/2012 | US20120175527 Lithography system and method of processing substrates in such a lithography system |
| 07/11/2012 | EP2474019A2 Particle beam processing device such as an electron beam processing device |
| 07/11/2012 | CN202332322U 一种辐照托箱门锁紧装置 An irradiated prop the door locking device |
| 07/11/2012 | CN102568637A Beam current baffle plate controlling system |
| 07/10/2012 | US8219943 Physical design system and method |
| 07/10/2012 | US8217372 Gas-cluster-jet generator and gas-cluster ion-beam apparatus utilizing an improved gas-cluster-jet generator |
| 07/10/2012 | US8217364 Particle beam irradiation apparatus |
| 07/10/2012 | US8217349 Method for inspecting EUV reticle and apparatus thereof |
| 07/05/2012 | WO2012090614A1 Energy degrader and charged-particle irradiation system provided with same |
| 07/05/2012 | US20120168648 Elliptical light source for ultraviolet (uv) curing lamp assemblies |
| 07/05/2012 | US20120168645 Calibrated Energy Transfer |
| 07/05/2012 | US20120168641 Uv ptfe diffuser technology |
| 07/04/2012 | EP1540668B1 Apparatus and method for radiation therapy where the collimatorhelmet comprises slidable plates for controlling the collimator openings |
| 07/04/2012 | CN202307184U 基于红外热成像技术的标准辐射场主动防护装置 Standards-based radiation field Infrared Thermal Imaging Technology proactive protection device |
| 07/04/2012 | CN202307183U 基于热释电红外检测技术的标准辐射场主动防护装置 Based pyroelectric infrared detection technology standard radiation field active protection device |
| 07/04/2012 | CN102543246A Reactor irradiation hydraulic driving device |
| 07/04/2012 | CN102543245A Charged particle beam irradiation apparatus, charged particle beam irradiating method, and method of attaching and detaching transport line |
| 07/04/2012 | CN102543244A Biological irradiation device of high energy X-rays |
| 07/04/2012 | CN102526778A Electron beam sterilizer |
| 07/04/2012 | CN102097150B Electron beam diffusion device for radiation processing |
| 07/04/2012 | CN101681689B Radioisotope production system and radioisotope production method |
| 07/04/2012 | CN101297376B Electron beam application device for opening-equipped vessel |
| 07/03/2012 | US8212224 Charged particle beam device |
| 07/03/2012 | US8212223 Particle beam irradiation apparatus |
| 06/28/2012 | US20120164022 Methods and devices for processing objects by applying electromagnetic (em) energy |
| 06/28/2012 | US20120161040 Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light |
| 06/28/2012 | US20120161038 Accelerator and method for irradiating a target volume |
| 06/28/2012 | US20120160168 Plasma generation device with electron cyclotron resonance |
| 06/28/2012 | DE10205189B4 Verfahren zur Erzeugung von extrem ultravioletter Strahlung auf Basis eines strahlungsemittierenden Plasmas A method of generating extreme ultraviolet radiation, based on a radiation-emitting plasma |
| 06/27/2012 | CN101471152B Workpiece transportation method and device |
| 06/27/2012 | CN101103417B Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 06/26/2012 | US8209640 System and method for lithography simulation |
| 06/26/2012 | US8207514 Charged particle beam drawing apparatus and proximity effect correction method thereof |
| 06/26/2012 | US8207513 Charged particle beam apparatus |
| 06/21/2012 | US20120156623 Semiconductor device manufacturing method, exposure method for exposure apparatus, exposure apparatus, and light source for exposure apparatus |
| 06/21/2012 | US20120155608 Lithography Masks, Systems, and Manufacturing Methods |
| 06/21/2012 | US20120154775 EUV Radiation Source and Method of Generating EUV Radiation |
| 06/21/2012 | DE102010054569A1 Container for storing radio-active material, has inner container comprising opening that is closed by stopper, platform provided for fastening pattern to be irradiated and arranged on stopper, and channel formed in stopper |
| 06/21/2012 | DE102007031628B4 UV-Strahlungsquelle UV radiation source |
| 06/20/2012 | CN102510656A Scanning magnet device used in electron irradiation accelerator |
| 06/20/2012 | CN102509571A Sample loading device for high-speed neutron irradiation autorotation |
| 06/14/2012 | WO2012077558A1 Electron emission element, electron emission device, charge device, image forming device, electron radiation curing device light-emitting device, image display device, blower device, cooling device, and manufacturing method for electron emission element |
| 06/14/2012 | US20120148025 System and method for non-destructive decontamination of sensitive electronics using soft x-ray radiation |
| 06/14/2012 | US20120147349 Euv radiation system and lithographic apparatus |
| 06/14/2012 | US20120145930 Llp euv light source and method for producing the same |
| 06/14/2012 | US20120145921 Method and apparatus for inspecting sample surface |
| 06/14/2012 | US20120145920 Stage Device |
| 06/13/2012 | EP2462953A1 Electron beam sterilizer |
| 06/12/2012 | US8198615 Gas management system for a laser-produced-plasma EUV light source |
| 06/12/2012 | US8198614 Terahertz wave generator and method of generating high-power terahertz waves using the same |
| 06/12/2012 | US8198613 Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device |
| 06/12/2012 | US8198611 Laser beam formatting module and method for fabricating semiconductor dies using same |
| 06/12/2012 | US8198610 Ion implanter with variable aperture and ion implant method thereof |
| 06/12/2012 | US8198603 Sample preparing device and sample posture shifting method |
| 06/12/2012 | US8198105 Monitor for variation of critical dimensions (CDs) of reticles |
| 06/12/2012 | US8198095 Detection of materials via nitrogen oxide |
| 06/07/2012 | WO2012074453A1 An electron exit window foil |
| 06/07/2012 | WO2012073966A1 Combined-type target, neutron generating method using combined-type target, and neutron generating apparatus using combined-type target |
| 06/07/2012 | US20120141323 Systems and methods for uv sanitization and sterilization |
| 06/07/2012 | US20120140498 Led lighting device of an aircraft, in particular for maneuvers of landing, take-off, taxiing, and searching, and aircraft comprising said device |
| 06/07/2012 | US20120140231 particle detectors |
| 06/07/2012 | US20120138819 Uv radiation control for disinfecting of ophthalmic lenses |
| 06/07/2012 | US20120138818 Ophthalmic lens disinfecting base unit with programmable and communication elements |
| 06/07/2012 | US20120138816 Device Comprising A Source For Emitting Ultraviolet Light |
| 06/07/2012 | US20120138230 Systems and methods for moving web etch, cvd, and ion implant |
| 06/06/2012 | CN202267490U 辐照货箱门体闭合检测系统 Irradiation cargo box door closed Detection System |