Patents for G21K 5 - Irradiation devices (9,144)
01/2014
01/03/2014WO2014002336A1 Ion beam processing method and ion beam processing device
01/02/2014US20140001373 Method for setting a position of a carrier element in a particle beam device
01/01/2014CN103492027A Charged particle beam-irradiating apparatus
01/01/2014CN103492025A 带电粒子束照射装置 A charged particle beam irradiation apparatus
12/2013
12/31/2013US8618521 Pluridirectional very high electron energy radiation therapy systems and processes
12/31/2013US8618520 Method and apparatus for processing a micro sample
12/31/2013US8618518 Apparatus and method for forming a solid immersion lens using a binary bitmap milling pattern
12/31/2013US8618513 Apparatus and methods for forming an electrical conduction path through an insulating layer
12/31/2013US8618508 Detection system and method
12/31/2013US8618503 Electron beam sterilizer
12/31/2013US8618502 Mounting arrangement
12/31/2013US8618497 Drawing apparatus, method of manufacturing article, and information processing apparatus
12/26/2013US20130343516 Method and apparatus for filtering radio-frequency electromagnetic beams and irradiation apparatus or device for irradiating an object
12/26/2013US20130341535 Infrared scene projector
12/26/2013US20130341527 Electron beam apparatus
12/25/2013CN203366773U Nuclear physics in-beam experiment target membrane flattening device
12/25/2013CN203366772U Sodium-cooled fast reactor structure material irradiation tank
12/25/2013CN203365689U Standard source for scale of segmental gamma scanning device of radioactive waste barrel
12/25/2013CN1868028B Ion implanter electrodes
12/19/2013WO2013185829A1 Limiting migration of target material
12/18/2013EP2442317B1 Particle beam irradiation apparatus
12/18/2013CN103458964A Charged particle beam radiating device
12/18/2013CN102905761B Particle beam irradiation apparatus and particle beam therapy apparatus provided with same
12/17/2013US8611497 Portable orthovoltage radiotherapy
12/17/2013US8610096 Charged particle beam writing apparatus and method
12/17/2013US8610095 Extreme ultraviolet light source device
12/17/2013US8610091 Charged particle beam writing apparatus and charged particle beam writing method
12/17/2013US8610090 Ion beam sample preparation thermal management apparatus and methods
12/17/2013US8610083 Systems and methods providing electron beam writing to a medium
12/17/2013US8610082 Drawing apparatus and method of manufacturing article
12/17/2013DE202013105150U1 Stabförmiges UV-Leuchtmittel Rod-shaped UV lamps
12/17/2013DE202013009112U1 Infrarotstrahler zur berührungslosen Erwärmung von Kunststoffoberflächen zum Zweck des Schweißens oder Umformens Infrared heaters for non-contact heating of plastic surfaces for the purpose of welding or reshaping
12/12/2013US20130327963 EUV excitation light source with a laser beam source and a beam guide device for manipulating the laser beam
12/12/2013US20130327952 Focused Charged Particle Column for Operation at Different Beam Energies at a Target
12/10/2013US8605859 Multiple image collection and synthesis for personnel screening
12/10/2013US8604452 Drive laser delivery systems for EUV light source
12/10/2013US8604448 UVLED apparatus for curing glass-fiber coatings
12/10/2013US8604411 Charged particle beam modulator
12/05/2013US20130322587 Tritium removal device for lithium loop
12/05/2013US20130320243 Efficient scan for e-beam lithography
12/05/2013US20130320235 Uv curing system for semiconductors
12/05/2013US20130320232 Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation method
12/05/2013US20130320208 Inert Atmospheric Pressure Pre-Chill and Post-Heat
12/04/2013EP2669668A2 X-ray source assembly having enhanced output stability
12/04/2013CN103424762A Standard source for radioactive waste barrel segmenting gamma scanning device scales
12/03/2013US8598545 Multiple beam charged particle optical system
12/03/2013US8598544 Method of generating a two-level pattern for lithographic processing and pattern generator using the same
12/03/2013US8598538 Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
12/03/2013US8598511 Carbon nanotube anchor for mass spectrometer
12/03/2013US8598051 Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
11/2013
11/28/2013WO2013175997A1 Electronic beam irradiation device
11/28/2013WO2012049700A8 Device for shaping an electron beam of a machine for intraoperative radiation therapy
11/28/2013DE102005031160B4 Trockenvorrichtung für eine Druckmaschine Drying apparatus for a printing press
11/27/2013CN103413589A Device and methods for flattening target film used in nuclear physical beam experiment
11/26/2013US8595657 Methods of forming a photo mask
11/26/2013US8592787 Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
11/26/2013US8592783 Titanium diboride coating for plasma processing apparatus
11/26/2013US8592763 Ion beam sample preparation apparatus and methods
11/21/2013DE102006021716B4 UV-Bestrahlungseinrichtung UV irradiation device
11/19/2013US8589830 Method and apparatus for enhanced optical proximity correction
11/19/2013US8589828 Reduce mask overlay error by removing film deposited on blank of mask
11/19/2013US8588369 Radiation system with rotating patient support
11/19/2013US8586949 Charged particle lithography system with intermediate chamber
11/19/2013US8586948 Particle beam irradiation apparatus and particle beam therapy system
11/19/2013US8586944 Electron beam emitter for sterilizing containers
11/19/2013CA2754622C Flash x-ray irradiator
11/14/2013WO2013168362A1 Irradiation planning apparatus and charged particle irradiation system
11/12/2013US8584057 Non-directional dithering methods
11/12/2013US8582712 Methods of detection and identification of carbon- and nitrogen-containing materials
11/12/2013US8581217 Method for monitoring ion implantation
11/12/2013US8581206 Focused ion beam system and sample processing method using the same
11/12/2013US8581205 Transmission electron microscope micro-grid
11/07/2013US20130292584 Optical element for transmitting ultraviolet light and light source device including same
11/07/2013DE102013104466A1 Retrofit extractor for extracting aerosols for exhaust air treatment and/or odor removal in commercial kitchens in restaurant, has shielding element associated to side of tube to reduce emission radiation portion in direction of element
11/07/2013DE102012008733A1 UV-Wasserbehandlungsanlage mit offenem Kanal UV water treatment plant with an open channel
11/06/2013EP2660825A1 Energy degrader and charged-particle irradiation system provided with same
11/05/2013US8575566 Specimen box for electron microscope
11/05/2013US8575565 Ion source apparatus and methods of using the same
10/2013
10/31/2013WO2013159201A1 Processes, systems, and apparatus for cyclotron production of technetium-99m
10/31/2013US20130284949 Extreme ultraviolet light source device and method for generating extreme ultraviolet light
10/30/2013CN103375736A Light-emitting diode (LED) lamp, beam-defining clipper comprising same and X-ray device
10/30/2013CN102280158B Laser and CCD (Charge-coupled Device) alignment positioning device
10/29/2013US8569723 Extreme ultraviolet light source apparatus
10/29/2013US8569720 Patient alignment system with external measurement and object coordination for radiation therapy system
10/24/2013WO2013157116A1 Gantry-type particle beam illumination device, and particle beam therapy device comprising same
10/22/2013US8566753 Fragmentation point and simulation site adjustment for resolution enhancement techniques
10/22/2013US8565375 Protection device for X-ray instrumentation
10/22/2013US8563951 Exposure systems for integrated circuit fabrication
10/22/2013US8563945 Sampling of confined spaces
10/17/2013WO2013154177A1 Combined-type target, neutron-generating method using combined-type target, and neutron-generating device using combined-type target
10/17/2013US20130270461 Smart memory alloys for an extreme ultra-violet (euv) reticle inspection tool
10/16/2013CN1992141B X-ray generating mechanism and method
10/15/2013US8560978 Pattern-dependent proximity matching/tuning including light manipulation by projection optics
10/15/2013US8558200 Multiple row scalable LED-UV module
10/15/2013US8558196 Charged particle lithography system with aperture array cooling
10/15/2013US8558174 Processing system
10/10/2013US20130264498 System and method of ion neutralization with multiple-zoned plasma flood gun
10/10/2013DE102012006972A1 Reinigungseinrichtung und Verfahren zum Reinigen von Fahrzeuginnenräumen Cleaning device and method for cleaning of vehicle interiors
10/09/2013EP2648490A1 Combined-type target, neutron generating method using combined-type target, and neutron generating apparatus using combined-type target
10/09/2013EP2647027A1 An electron exit window foil
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