Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
09/2009
09/10/2009US20090226785 Stainless Steel, Titanium, or Titanium Alloy Solid Polymer Fuel Cell Separator and Its Method of Produciton and Method of Evaluation of Warp and Twist of Separator
09/10/2009US20090226078 Method and apparatus for aligning a substrate and for inspecting a pattern on a substrate
09/10/2009US20090225333 System aspects for a probe system that utilizes structured-light
09/10/2009US20090225332 Portable electronic measuring device and method
09/10/2009US20090225331 Method of Providing Alignment Marks, Device Manufacturing Method and Lithographic Apparatus
09/10/2009US20090225330 Optoelectronic distance sensor
09/10/2009US20090225329 Phase-Shift Analysis System and Method
09/10/2009US20090225328 Wavefront aberration measuring apparatus, wavefront aberration measuring method, exposure apparatus, and device manufacturing method
09/10/2009US20090225327 Position measurement apparatus, position measurement method, and exposure apparatus
09/10/2009US20090225304 Electronic component mounting apparatus, height detection method for electronic component, and optical-axis adjustment method for component height detection unit
09/10/2009US20090225294 Reticle for projection exposure apparatus and exposure method using the same
09/10/2009US20090223634 Method and means for assembly of high precision ultra- high speed crystal scanning heads
09/10/2009DE19716809B4 Verfahren und Gerät zur Messung des Streulichts von Sichtscheiben, insbesondere Fahrzeugscheiben, auch im eingebauten Zustand, mit Oberflächenverschleiß auf der Außenseite der Scheibe Method and apparatus for measuring the scattered light of viewing windows, in particular vehicle windows, in the installed condition, surface wear on the outer side of the disk
09/10/2009DE102009009893A1 Scanner Scanner
09/10/2009DE102008020584B3 Object's upper surface area testing method, involves determining phases of wave fronts with wavelengths, and detecting synthetic wave front, which corresponds to different reciprocal value of wavelengths of phases
09/10/2009DE102008013308A1 Tool measuring machine has clamping position for tool, which fixes axle for tool, carrier, two arms, and multiple optical elements, where optical elements carry optical measuring device
09/10/2009DE102008013164A1 Material measure for optical position measuring unit, which operates with light of central wavelength, comprises substrate with two areas, which code position information, which is selected with light of wavelength
09/10/2009DE102008012461A1 Hole's inner surface optical scanning device for fluid-dynamic bearing, has cone mirror comprising reflector, and guiding measuring light radiation to inner surface, where reflector has measuring surfaces for reflecting measuring radiation
09/10/2009DE102008011993A1 Synchronisierte Bildgebung mittels optischer Verfahren und Rasterkraftmikroskopie Synchronized imaging using optical methods and atomic force microscopy
09/10/2009DE102008011534A1 Method for operating coordinate measuring device, involves defining operating area of coordinate measuring device, which depends on position of movable element
09/10/2009DE102008002780A1 Mask structure position determining method for use during semiconductor manufacturing, involves indicating structure on detector, and calculating position of structure from image of structure on detector
09/10/2009DE102008002779A1 Method for determining traversing range in z-coordinate direction for determination of positions of structures on substrate, involves measuring location of z-position of substrate with focus-device at three positions on substrate
09/10/2009DE102008002778A1 Edge position determining method for structure on semiconductor substrate, involves assigning values to position of part depending on relative change of distance of measuring lens to structure, such that one value is determined for position
09/09/2009EP2098490A1 Method for finishing surface of preliminary polished glass substrate
09/09/2009EP2097715A1 Three-dimensional optical radar method and device which use three rgb beams modulated by laser diodes, in particular for metrological and fine arts applications
09/09/2009EP2097714A2 Method for determining the clearance and/or mismatch of an opening for a vehicle without referencing the opening
09/09/2009EP2097713A2 Apparatus and method for measuring characteristics of surface features
09/09/2009EP2097261A2 Rotary printing press and method for adjusting a cylinder thereof
09/09/2009EP1984770B1 Method and arrangement for a rapid and robust chromatic confocal 3d measurement technique
09/09/2009EP1859228B1 Measuring arrangement and method for the optical monitoring of coating processes
09/09/2009EP1306801B1 Part recognition data creation method and apparatus, electronic part mounting apparatus, and recorded medium
09/09/2009EP1269156B1 An imaging apparatus and method
09/09/2009EP1123562B1 Layer processing
09/09/2009CN201307002Y Image scanner device
09/09/2009CN201307001Y Window ash quantity detector
09/09/2009CN201307000Y Film thickness measuring light path system
09/09/2009CN201306999Y Detecting and recording instrument for aluminum plate hole
09/09/2009CN101529200A 确定表面和厚度 Determine the surface and thickness
09/09/2009CN101529199A Line width measuring method, image forming status detecting method, adjusting method, exposure method and device manufacturing method
09/09/2009CN101529198A Trolley wire wear measuring device
09/09/2009CN101526753A Parameter measuring method of worktable coordinate system
09/09/2009CN101526749A Photolithographic system and method for measuring deviation between variable gap of photolithographic system and center of mask stage
09/09/2009CN101526746A Vertical measuring system capable of adjusting zero-plane position
09/09/2009CN101526453A Method for quantitatively measuring inhomogeneous deformation of nano-crystal material
09/09/2009CN101526351A Rod type strata displacement monitor and system
09/09/2009CN101526347A Portable electronic device and method for measuring object length
09/09/2009CN101526346A Portable electronic device and method for measuring length of object by same
09/09/2009CN101526342A Detecting device and method of unevenness of a glass substrate
09/09/2009CN101526341A Differential confocal curvature radius measurement method and device
09/09/2009CN101526340A Stripe color coding method for grating stripe images based on Gray code principle
09/09/2009CN101526339A Temperature self-compensation fiber grating displacement sensor
09/09/2009CN101526338A Field calibration method of structural parameter of line structure light vision sensing system
09/09/2009CN101526337A Scanning system and method for three-dimensional images
09/09/2009CN101526336A Calibration method of linear structured light three-dimensional visual sensor based on measuring blocks
09/09/2009CN100538522C Lithographic apparatus and integrated circuit manufacturing method
09/09/2009CN100538347C Automatic optical detection system of membrane type or belt type printed circuit board and processing method thereof
09/09/2009CN100538262C Soil body image real time capturing method and system used for centrifugal machine model trial
09/09/2009CN100538261C Unknown free-form surface self-adaptive measuring method based on exploration method and measuring head device
09/08/2009US7587295 Image processing device and method therefor and program codes, storing medium
09/08/2009US7587094 Phase measurement system
09/08/2009US7586626 Measurement method, exposure method, exposure apparatus, and device fabrication method
09/08/2009US7586625 Position verifying apparatus and method, position measuring apparatus and method, and computer program for position verification or position measurement
09/08/2009US7586624 Apparatus and method for detecting error of transfer system
09/08/2009US7586623 Optical metrology of single features
09/08/2009US7586622 Measuring thickness of a device layer using reflectance and transmission profiles of baseline devices
09/08/2009US7586621 Displacement-measuring optical scale and optical encoder using same
09/08/2009US7586620 Methods and systems for interferometric analysis of surfaces and related applications
09/08/2009US7586609 Method for analyzing overlay errors
09/08/2009US7586608 Wafer-level testing of optical and optoelectronic chips
09/08/2009US7586606 Near-field polarized-light measurement apparatus
09/08/2009US7586594 Method for inspecting defect and apparatus for inspecting defect
09/08/2009US7586593 Inspection method and inspection apparatus
09/08/2009US7585204 Substrate polishing apparatus
09/03/2009WO2009107981A2 Apparatus and method for measuring a three-dimensional shape
09/03/2009WO2009107839A1 Physical quantity measuring device of optical frequency range reflection measuring type, and temperature and strain simultaneous measuring method using the device
09/03/2009WO2009107838A1 Physical quantity measuring device of optical frequency range reflection measuring type, and temperature and strain measuring method using the device
09/03/2009WO2009107636A1 Blinking signal detection circuit, blinking signal detection method, object detection device, object detection method, and imaging system
09/03/2009WO2009106820A1 Improved interferometric methods and apparatus for seismic exploration
09/03/2009WO2009106602A1 Synchronized imaging by way of an optical method and atomic force microscopy
09/03/2009WO2009106576A1 Method and means for monitoring a bragg grating fibre on a surface
09/03/2009WO2009106375A1 Device for beam control and a method for beam control
09/03/2009WO2009106253A1 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
09/03/2009US20090222238 Method and apparatus for layer thickness measurement
09/03/2009US20090221874 Coded structure light
09/03/2009US20090221103 Fabrication method of semiconductor integrated circuit device
09/03/2009US20090219549 Three dimensional, position observation method and apparatus
09/03/2009US20090219548 Making Method of Sample for Evaluation of Laser Irradiation Position and Making Apparatus Thereof and Evaluation Method of Stability of Laser Irradiation Position and Evaluation Apparatus Thereof
09/03/2009US20090219547 Method and Device for Position Sensing in an Imaging System
09/03/2009US20090219546 Interferometric Gravity Sensor
09/03/2009US20090219533 Exposure method, exposure apparatus, and method of manufacturing device
09/03/2009US20090219532 System and method for quality checking of anisotropic conductive film
09/03/2009US20090219518 Optimizing use and performance of optical systems implemented with telecentric on-axis dark field illumination
09/03/2009US20090219508 System and method for detecting local mechanical stress in integreated devices
09/03/2009US20090219494 Evaluation method, evaluation apparatus, and exposure apparatus
09/03/2009US20090217871 Thin film deposition apparatus and method of maintaining the same
09/03/2009DE202009008906U1 Markierungselement, Probeneinheit mit Markierungselementen und Prüfvorrichtung mit Probeneinheit Marker, sample unit with marking elements and testing device with sample unit
09/03/2009DE202009007199U1 Schneideinrichtung für durch Wärmeeinwirkung zu trennende Körper Cutter for to be separated by heat body
09/03/2009DE10202738B4 Phasenverschiebungsstreifenanalyseverfahren und eine dieses Verfahren verwendende Vorrichtung Phase shifting fringe analysis method and apparatus of this method using
09/03/2009DE102008020326B3 Stereoscopic three-dimensional-safety camera for monitoring spatial area in safety engineering, has evaluation unit designed to combine entire image from three dimensional images of image sensors of stereoscopy systems
09/03/2009DE102007052302B4 Inspektionsvorrichtung mit Rollbeleuchtung Inspection device with Roll Lighting