| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 01/27/2015 | US8941247 Stacked die package for MEMS resonator system |
| 01/27/2015 | US8941229 Semiconductor device and method of manufacturing the same |
| 01/27/2015 | US8941223 MEMS device package with conductive shell |
| 01/27/2015 | US8941193 Method for manufacturing a hybrid integrated component |
| 01/27/2015 | US8941152 Semiconductor device |
| 01/22/2015 | US20150023529 MEMS Devices, Interface Circuits, and Methods of Making Thereof |
| 01/22/2015 | US20150023523 Surface Mountable Microphone Package, a Microphone Arrangement, a Mobile Phone and a Method for Recording Microphone Signals |
| 01/22/2015 | US20150021723 Mechanisms for forming micro-electro mechanical system device |
| 01/22/2015 | US20150021721 Integrated circuit package and method |
| 01/22/2015 | US20150021720 Device comprising a fluid channel fitted with at least one microelectronic or nanoelectronic system, and method for manufacturing such a device |
| 01/22/2015 | US20150021718 Apparatus and method for reduced strain on mems devices |
| 01/22/2015 | US20150021410 System and method for miniaturization of synthetic jets |
| 01/22/2015 | US20150021409 System and method for miniaturization of synthetic jets |
| 01/22/2015 | DE102014214154A1 Ein MEMS-Bauelement A MEMS device |
| 01/22/2015 | DE102014109913A1 Halbleitervorrichtung, mikro-elektromechanischen Resonator und Verfahren zur Herstellung einer Halbleitervorrichtung A semiconductor device, micro-electro-mechanical resonator and method for making a semiconductor device |
| 01/22/2015 | DE102014109908A1 MEMS-Vorrichtungen, Schnittstellenschaltungen und Verfahren zu deren Herstellen MEMS devices, interface circuits and processes for preparing |
| 01/22/2015 | DE102013212118A1 Sensorsystem mit zwei Inertialsensoren Sensor system with two inertial sensors |
| 01/22/2015 | DE102013211970A1 Mikro-elektromechanischer Resonator und Verfahren zum Herstellen eines mikro-elektromechanischen Resonators Micro-electro-mechanical resonator and method for producing a micro-electromechanical resonator, |
| 01/22/2015 | DE102011103516B4 Verfahren zum Befüllen eines Hohlraums mit einer Atmosphäre Method for filling a cavity with an atmosphere |
| 01/22/2015 | DE102011056484B4 Verfahren zur Herstellung eines Sensors A method for producing a sensor |
| 01/21/2015 | CN104303091A Mems扫描镜视场提供方法和装置 Mems field scanning mirror to provide a method and apparatus |
| 01/21/2015 | CN104301839A Mems器件、接口电路及其制作方法 Mems devices, interface circuit and its production method |
| 01/21/2015 | CN104297520A 一种单片嵌入结构集成硅加速度和压力复合传感器 Embed a monolithic structure integrated silicon accelerometer and pressure sensor complex |
| 01/21/2015 | CN104291264A 一种基于纳米压电纤维的柔性能量捕获器件及其制备方法 A capture device and fabrication method based on flexible energy piezoelectric nano fibers |
| 01/21/2015 | CN104291263A 一种金刚石桥膜结构微型红外光源芯片及制备方法 A line of diamond film structure miniature infrared light bridge chip and preparation method |
| 01/21/2015 | CN104291262A 具有嵌入式声道的电容性感测结构 Capacitive sensing structure with embedded channels |
| 01/21/2015 | CN102786023B 一种无盖板的碳纳米管器件结构及其制作方法 Cover a non-carbon nanotube device structure and fabrication method thereof |
| 01/20/2015 | US8937757 Optical deflector apparatus including optical deflector chip sandwhiched by two substrates |
| 01/20/2015 | US8937513 Micro-scale system to provide thermal isolation and electrical communication between substrates |
| 01/20/2015 | US8937380 Die edge protection for pressure sensor packages |
| 01/20/2015 | CA2738537C Microsystem process networks |
| 01/19/2015 | CA2856917A1 Ultrasonic sensor microarray and method of manufacturing same |
| 01/15/2015 | WO2015006327A1 Wafer level package solder barrier used as vacuum getter |
| 01/15/2015 | WO2015004166A1 Method for hermetically sealing with reduced stress |
| 01/15/2015 | WO2015003264A1 Mems device and method of manufacturing |
| 01/15/2015 | US20150014794 Integrated Circuit Provided with a Device for Detecting its Spatial Orientation and/or a Modification of this Orientation |
| 01/15/2015 | US20150014165 Solid state amperometric chloramine sensor |
| 01/15/2015 | DE102014213386A1 Vorrichtung mit MEMS-Struktur und Lüftungsweg in Stützstruktur Device with MEMS structure and air vent in support structure |
| 01/15/2015 | DE102014212340A1 MEMS-Mikrofon mit Niederdruckbereich zwischen Membran und Gegenelektrode MEMS microphone with low-pressure region between the membrane and the counter electrode |
| 01/15/2015 | DE102013213717A1 MEMS-Bauelement mit einer Mikrofonstruktur und Verfahren zu dessen Herstellung MEMS device having a microphone structure and process for its preparation |
| 01/15/2015 | DE102013212202A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 01/15/2015 | DE102013107271A1 Sensor zur Erfassung druckabhängiger Messwerte in Dünnschichtbauweise Sensor for detecting pressure-dependent measurements of thin layer construction |
| 01/14/2015 | EP2823351A1 A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| 01/14/2015 | EP2823276A2 Micromechanical measuring element, and method for producing a micromechanical measuring element |
| 01/14/2015 | CN204097077U 一种mems器件结构 One kind mems device structure |
| 01/14/2015 | CN204097076U 一种测试结构 A test structure |
| 01/14/2015 | CN102476786B 加速度和压力传感器单硅片集成芯片及制作方法 Acceleration and pressure sensors integrated single silicon chip and production methods |
| 01/14/2015 | CN102336386B 一种三维实体针尖柔性微电极阵列及其制作方法 A three-dimensional solid tip flexible microelectrode array and its manufacturing method |
| 01/14/2015 | CN102265184B 基于mems的电容传感器 Mems based capacitive sensors |
| 01/14/2015 | CN101801837B 具有mems惯性感测及内置数字电子元件的集成式移动处理单元(mpu) Has mems inertial sensing and built-in digital electronics integrated mobile processing unit (mpu) |
| 01/08/2015 | US20150012241 Adaptive automatic gain control apparatus and method for inertial sensor |
| 01/08/2015 | US20150009067 External gnss receiver module with motion sensor suite for contextual inference of user activity |
| 01/08/2015 | US20150008788 Low temperature ceramic microelectromechanical structures |
| 01/08/2015 | US20150008544 Physical quantity sensor |
| 01/08/2015 | US20150008540 Mems-cmos integrated devices, and methods of integration at wafer level |
| 01/08/2015 | DE102013213065A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 01/08/2015 | DE102013212112A1 Drehratensensor mit drei sensitiven Achsen und Verfahren zur Herstellung eines Drehratensensors Rate of rotation sensor having three sensitive axes, and process for producing a rotational speed sensor |
| 01/08/2015 | DE102013212102A1 Mikromechanisches Bauteil, Mikrospiegelvorrichtung und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, micro-mirror device and manufacturing method for a micromechanical component |
| 01/08/2015 | DE102013212095A1 Mikro-elektromechanischer Reflektor und Verfahren zum Herstellen eines mikro-elektromechanischen Reflektors Micro-electro-mechanical reflector and method of manufacturing a micro-electro-mechanical reflector |
| 01/08/2015 | DE102013212059A1 Mikromechanischer Inertialsensor und Verfahren zum Betrieb eines Inertialsensors Micromechanical inertial sensor and method for operating an inertial sensor |
| 01/08/2015 | DE102013212056A1 Drehratensensor und Verfahren zum Betrieb eines Drehratensensors Rotation rate sensor and method of operation of a rotation rate sensor |
| 01/08/2015 | DE102013211872A1 Mikro-elektromechanischer Reflektor und Verfahren zum Herstellen eines mikro-elektromechanischen Reflektors Micro-electro-mechanical reflector and method of manufacturing a micro-electro-mechanical reflector |
| 01/08/2015 | DE102012222426B4 Herstellungsverfahren für ein mikromechanisches Bauelement Manufacturing method for a micromechanical component |
| 01/08/2015 | DE102010029072B4 Mikroelektromechanisches Translationsschwingersystem Micro-electromechanical transducer translation system |
| 01/07/2015 | CN204085748U 压阻式压力传感器 Piezoresistive pressure sensor |
| 01/07/2015 | CN204079474U 键合晶圆、器件晶圆及键合结构 Wafer bonding, the device wafer and bonding structure |
| 01/07/2015 | CN104267214A 物联网用无源无线的加速度传感芯片及其加工方法 Things acceleration sensor chip and the processing method of passive wireless |
| 01/07/2015 | CN104266781A 压阻式压力传感器及其制造方法 Piezoresistive pressure sensor and its manufacturing method |
| 01/07/2015 | CN104261673A 电子敏感玻璃基板和光学电路,以及其中形成的微型结构 Electron-sensitive glass substrate and the optical circuit, and a micro-structure formed therein |
| 01/07/2015 | CN103234673B 一种在高温环境下具有高稳定性的压力传感器微纳结构 A pressure sensor with high stability micro-nano structure at high temperatures |
| 01/07/2015 | CN102826501B 石英纤维表面微结构及其制备方法 Quartz fiber surface microstructure and its preparation method |
| 01/06/2015 | US8928098 Semiconductor package and fabrication method thereof |
| 01/01/2015 | US20150002916 Mems device and methods for manufacturing and using same |
| 01/01/2015 | US20150001649 MEMS Apparatus On a Lid With Flexible Substrate |
| 01/01/2015 | US20150001645 Mems device incorporating a fluidic path, and manufacturing process thereof |
| 01/01/2015 | US20150001632 Mems device and fabrication method |
| 12/31/2014 | CN104251920A 具有两个惯性传感器的传感器系统 Inertial sensor having two sensor systems |
| 12/31/2014 | CN104249991A Mems器件及其制作方法 Mems device and manufacturing method thereof |
| 12/31/2014 | CN104249990A 包含流体路径的mems器件及其制造工艺 Mems device and a manufacturing process comprising the fluid path |
| 12/31/2014 | CN102275860B 惯性微机电传感器的制造方法 Manufacturing method of inertial MEMS sensors |
| 12/31/2014 | CN101643193B 具有带有不同大气内压力的空腔的微机械装置 Micromechanical device having a cavity with an internal pressure of the different atmospheric |
| 12/30/2014 | US8921957 Method of improving MEMS microphone mechanical stability |
| 12/30/2014 | US8921145 Hybrid MEMS bump design to prevent in-process and in-use stiction |
| 12/30/2014 | CA2600081C Mems actuators and switches |
| 12/25/2014 | US20140374859 Sensor device |
| 12/25/2014 | US20140374855 Pressure sensor and method of packaging same |
| 12/25/2014 | US20140374854 Vertical mount package and wafer level packaging therefor |
| 12/25/2014 | US20140374852 Electrical Shielding in a MEMS Leadframe Package |
| 12/25/2014 | US20140374850 Apparatus and Method for Shielding and Biasing in MEMS Devices Encapsulated by Active Circuitry |
| 12/24/2014 | CN204034020U 一种异平面微针阵列 A different plane microneedle array |
| 12/24/2014 | CN104244152A 微机电系统麦克风封装及封装方法 MEMS microphone packaging and packaging methods |
| 12/24/2014 | CN104241735A 一种基于微机械电子技术的微波移相器 Based on micro-mechanical electronic technology microwave phase shifter |
| 12/24/2014 | CN104241281A 一种集成电路及其制造方法 An integrated circuit and its manufacturing method |
| 12/24/2014 | CN104241034A 微机电系统(mems)结构及设计结构 Microelectromechanical systems (mems) structure and design of the structure |
| 12/24/2014 | CN104236593A 伸展模态传感器及其制造方法 Stretch modal sensor and its manufacturing method |
| 12/24/2014 | CN104229730A Mems装置的封装方法 Mems device packaging method |
| 12/24/2014 | CN104229725A 一种半导体器件及其形成方法 A semiconductor device and method of forming |
| 12/24/2014 | CN104229723A 晶片级封装形式的部件及其制造方法 Wafer-level package in the form of components and manufacturing method thereof |
| 12/24/2014 | CN104229722A 具有光学波导和二维偏转的mems梁的集成 Integrated with optical waveguides and two-dimensional beam deflection mems |
| 12/24/2014 | CN104229721A 用于mems设备的悬浮无源元件 Passive Components for mems suspension equipment |