| Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874) |
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| 03/26/2003 | CN1405081A Electric-static driven large-displacement micro structure |
| 02/25/2003 | US6526197 MEMS optical balanced path switch |
| 02/25/2003 | US6525759 Induction charge mirror |
| 02/13/2003 | WO2003012325A1 Methods and systems for fluid control in microfluidics devices |
| 02/05/2003 | CN1395128A Optical modulator and manufacturing method thereof |
| 01/30/2003 | US20030019522 Methods and systems for fluid control in microfluidic devices |
| 01/09/2003 | WO2002021190A3 Fiber optic switch and associated methods |
| 01/08/2003 | EP1273094A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 01/08/2003 | EP1272888A2 Magnetically actuated microelectromechanical systems actuator |
| 12/27/2002 | WO2002103871A1 Processing device for cables or wires |
| 12/26/2002 | US20020195886 Micromachines |
| 12/25/2002 | CN1387251A Processing method binded by selenide chip for atomic resolution store shuffling device |
| 12/19/2002 | US20020191267 Electrostatic zipper actuator optical beam switching system and method of operation |
| 12/18/2002 | CN1385358A Application of fixator for preventing outer-plane movement of minimal resolution memory actuator |
| 12/05/2002 | US20020181836 Optical switch with moving lenses |
| 11/28/2002 | WO2002095479A1 Mems balanced path optical switch |
| 11/27/2002 | EP1261023A2 Atomic resolution storage system |
| 11/21/2002 | US20020171326 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 11/21/2002 | DE10122470A1 Detecting and storing device for consumption parameter derives proportional electrical energy from consumption parameter to drive microsystem gearbox forming metering mechanism |
| 11/20/2002 | EP1258979A2 Actuators with micro-movers |
| 11/13/2002 | EP1082740B1 Micro-mechanical elements |
| 10/30/2002 | CN1376631A Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
| 10/10/2002 | WO2002017482A3 Micromechanical resonator and filter using the same |
| 10/10/2002 | US20020146199 Mems optical balanced path switch |
| 10/01/2002 | US6458616 Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby |
| 09/19/2002 | US20020132113 Method and system for making a micromachine device with a gas permeable enclosure |
| 09/18/2002 | EP1241714A1 Positioning unit and positioning device having at least two positioning units |
| 09/06/2002 | WO2002042826A3 Microelectromechanical display devices |
| 09/03/2002 | US6444135 Method to make gas permeable shell for MEMS devices with controlled porosity |
| 08/29/2002 | DE10107402A1 Piezoelektrischer paralleler Mikrogreifer Piezoelectric parallel micro-gripper |
| 08/27/2002 | US6441405 Micro-mechanical elements |
| 08/27/2002 | US6440820 Process flow for ARS mover using selenidation wafer bonding after processing a media side of a rotor wafer |
| 08/08/2002 | US20020105393 Micromechanical resonator device and micromechanical device utilizing same |
| 07/25/2002 | US20020096018 Surface-micromachined rotatable member having a low-contact-area hub |
| 07/09/2002 | US6418247 Fiber optic switch and associated methods |
| 06/19/2002 | EP1135665A4 Measurements using tunnelling current between elongate conductors |
| 06/11/2002 | US6404942 Fluid-encapsulated MEMS optical switch |
| 06/11/2002 | US6402969 Surface—micromachined rotatable member having a low-contact-area hub |
| 06/04/2002 | US6400117 Slider mechanism and method of driving the same |
| 05/30/2002 | WO2002042826A2 Microelectromechanical display devices |
| 05/30/2002 | CA2429831A1 Microelectromechanical display devices |
| 05/21/2002 | US6392221 Micro-electro-mechanical optical device |
| 05/02/2002 | US20020051053 Induction charge mirror |
| 04/25/2002 | US20020048135 Micro-switches for downhole use |
| 04/04/2002 | WO2001078096A3 Magnetically actuated microelectromechanical systems actuator |
| 04/04/2002 | US20020039466 Optical switching element having movable optically transmissive microstructure |
| 03/29/2002 | CA2355450A1 Hybrid attach mirrors for a mems optical switch |
| 03/28/2002 | WO2002025352A2 Optical switching element having movable optically transmissive microstructure |
| 03/27/2002 | EP1191382A2 Stacked micromirror structures |
| 03/21/2002 | US20020034024 Stacked micromirror structures |
| 03/14/2002 | WO2002021190A2 Fiber optic switch and associated methods |
| 03/14/2002 | WO2001073934A3 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 03/12/2002 | US6356377 Mems variable optical delay lines |
| 02/28/2002 | WO2002017482A2 Micromechanical resonator and filter using the same |
| 02/28/2002 | CA2420498A1 Micromechanical resonator and filter using the same |
| 02/27/2002 | EP1181765A1 Rotary electrostatic microactuator |
| 02/21/2002 | WO2002015379A1 Walking actuator |
| 02/20/2002 | CN1336548A Comb-shaped stereo silicon processing micro mechanical structure with fixed tooth offset |
| 02/14/2002 | US20020017834 Acoustically actuated mems devices |
| 01/30/2002 | EP1176620A1 Micromachine switch and method of manufacture thereof |
| 01/30/2002 | CN1333943A Rotary electrostatic microactuator |
| 01/17/2002 | US20020005976 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 01/16/2002 | EP1141755A4 Fluid-encapsulated mems optical switch |
| 01/06/2002 | CA2352653A1 Acoustically actuated mems devices |
| 01/02/2002 | EP1168399A1 Micromachine switch |
| 01/02/2002 | CN1077300C Micro-miniature structures and method of fabrication thereof |
| 12/11/2001 | US6328903 Surface-micromachined chain for use in microelectromechanical structures |
| 11/29/2001 | US20010045811 Slider mechanism and method of driving the same |
| 11/28/2001 | CN1324453A Fluid-encapsulated MEMS optical switch |
| 11/20/2001 | US6318177 Micromechanical component and method for producing the micromechanical component |
| 11/01/2001 | US20010034938 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 10/18/2001 | WO2001078096A2 Magnetically actuated microelectromechanical systems actuator |
| 10/11/2001 | WO2001074707A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 10/10/2001 | EP1141755A1 Fluid-encapsulated mems optical switch |
| 10/10/2001 | CN1317083A Method for measuring tunnelling current between elongate conductors |
| 10/09/2001 | US6300619 Micro-electro-mechanical optical device |
| 10/09/2001 | US6300156 Process for fabricating micromechanical devices |
| 10/04/2001 | WO2001073934A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 09/26/2001 | EP1135665A1 Measurements using tunnelling current between elongate conductors |
| 08/30/2001 | US20010017058 Micromechanical component and method for producing the micromechanical component |
| 08/14/2001 | US6272926 Micromechanical component |
| 08/07/2001 | US6271145 Method for making a micromachine |
| 07/26/2001 | US20010009776 Growing epitaxial layer on substrate to form semiconductor wafer, removing selective portion of epitaxial layer to define rotor element and stator element capacitively coupled to rotor, removing portion of substrate below rotor |
| 07/24/2001 | US6265239 Micro-electro-mechanical optical device |
| 07/17/2001 | US6261494 Substrates and plastic deformation |
| 07/05/2001 | US20010006248 Micromachined device having electrically isolated components and a method for making the same |
| 06/21/2001 | DE19960949A1 Micromotor for stepped movement of microcomponent uses electrostatic forces for contactless transfer of linear movement to oscillating microcomponent supported between 2 reference surfaces |
| 06/14/2001 | WO2001042131A1 Gear and method of making the same |
| 06/07/2001 | WO2001040111A1 Micromachines |
| 06/07/2001 | CA2393139A1 Micromachines |
| 06/06/2001 | EP1104746A1 Micro-electro-mechanical optical device |
| 06/05/2001 | US6242843 Resonator structures |
| 05/31/2001 | US20010002001 Part fabricating method and part fabricating apparatus |
| 05/23/2001 | EP1102104A2 Optical switch |
| 05/17/2001 | CA2325247A1 Optical switch |
| 05/16/2001 | EP1099972A2 Variable optical delay lines with a micro electro-mechanical system |
| 04/25/2001 | EP1094593A2 A rotary microactuator |
| 04/24/2001 | US6221228 Maching and molding, electrodeposition of metal and removal |
| 04/18/2001 | EP1093005A2 Micro-electro-mechanical optical device |
| 04/18/2001 | EP1093003A2 Micro-electro-mechanical optical device |