Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
Patents for B81B 5 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements (874)
01/2012
01/31/2012US8104874 Inkjet nozzle assembly with moving nozzle opening defined in roof of nozzle chamber
01/25/2012CN102327738A Liquid processing structure, flow control device and plug member assembling and method
01/12/2012WO2012003529A1 Piezo-electric based micro-electro-mechanical lens actuation system
01/05/2012DE102008035990B4 Ein Mikroventil und ein Verfahren zur Herstellung desselben A micro valve and a method of manufacturing the same
12/2011
12/28/2011EP2398733A1 Device for grasping and active release of micro and nano objects
12/15/2011WO2011153800A1 Mems device and manufacturing method thereof
12/08/2011DE102010029632A1 MEMS Bauteil mit Schock-Schutz, Vorrichtung damit und Verfahren zum Schock-Schutz eines MEMS Bauteils MEMS component with shock protection device and method for so shock protection of a MEMS component
12/01/2011DE102008061151B4 Halbleiterbauelement und Verfahren zu seiner Herstellung Semiconductor device and process for its preparation
11/2011
11/24/2011DE102008049647B4 Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements Micromechanical element and method for operating a micromechanical element
11/10/2011WO2011139796A2 Self-folding sub-centimeter structures
10/2011
10/26/2011EP1425528B1 Methods and systems for fluid control in microfluidics devices
09/2011
09/22/2011WO2011115578A1 Method of applying a lubricant to a micromechanical device
09/15/2011DE112006001152B4 Verfahren zur Fertigung einer Halbleitervorrichtung mit Elementabschnitt ichtung A method of manufacturing a semiconductor device having element portion ichtung
09/07/2011CN101000842B Mems switch
09/01/2011WO2011103644A1 Multi degree-of-freedom piezoelectric micro-actuator with an energy efficient isolation structure
09/01/2011CA2791074A1 Multi degree-of-freedom piezoelectric micro-actuator with an energy efficient isolation structure
08/2011
08/31/2011CN101278200B A method for the micromechanical measurement of acceleration and a micromechanical acceleration sensor
08/11/2011DE10231729B4 Bauelement mit einer oberflächenmikromechanischen Struktur Component having a surface-micromechanical structure
08/11/2011DE10223359B4 Mikromechanisches Bauteil und Verfahren zur Herstellung einer Anti-Haftschicht auf einem mikromechanischen Bauteil Micromechanical element and method for producing an anti-adhesive layer on a micromechanical component
08/10/2011CN102149628A Switches for microfluidic systems
07/2011
07/20/2011CN102129125A Stacked dual-shaft micro lens array driver based on MEMS (Micro Electronic Mechanical System) technology and use thereof
07/19/2011US7982937 Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein
07/05/2011CA2726409A1 Counter-balanced mems mirror with hidden hinge
06/2011
06/29/2011CN1721318B Method and system for reducing operational shock sensitivity of MEMS devices
06/22/2011EP2336082A2 Translating and rotation micro mechanism
05/2011
05/25/2011CN102076601A Mems device with independent rotation in two axes of rotation
05/18/2011CN101077766B Electromechanical element and electronic circuit device, and method for manufacturing the same
05/17/2011US7942643 Device and method for pumping fluids employing the movement of gas bubbles in microscale
05/11/2011EP2318304A1 Switches for microfluidic systems
05/05/2011WO2011051620A2 Electromagnetically actuated micro-shutter
05/04/2011CN101717063B Flexible microgripper through topological optimization
04/2011
04/07/2011WO2011040137A1 Movement mechanism
03/2011
03/23/2011EP2298693A1 Process for forming an electromechanical component for a micro- or nano-system having a rod which forms the rotation axis of the component, the rod being covered with graphene
03/17/2011WO2011030623A1 Drive mechanism of magnetically-driven microtool, and microtool
02/2011
02/09/2011EP2280906A1 Mems device with independent rotation in two axes of rotation
02/02/2011CN101560995B Self assembled ultramicro fan
01/2011
01/20/2011WO2011008070A1 Cantilever microvalve structure and method of fabricating same
01/19/2011EP2275793A1 A pressure sensor having a chamber and a method for fabricating the same
01/19/2011CN1994861B All-optical micromachine non-frigorific infrared thermal imaging chip structure and its production method
01/19/2011CN101056072B Staggered vertical comb drive fabrication method
01/11/2011US7867694 Composite polymer microfluidic control device
12/2010
12/28/2010US7859370 Electrostatic actuator
12/16/2010WO2010144051A1 Microelectromechanical system (mems) device, method of operating the same, and method of forming the same
12/09/2010DE102009026738A1 Mikromechanischer Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors A micromechanical acceleration sensor and method for manufacturing an acceleration sensor
12/02/2010WO2010138077A1 A microfluidic device
12/01/2010CN101582366B Nonmagnetic bimetallic strip driver used in transmission electron microscope
11/2010
11/18/2010US20100289855 Inkjet nozzle assembly with moving nozzle opening defined in roof of nozzle chamber
11/10/2010CN101884160A Flat-plate lamination-type conductive polymer actuator and flat-plate lamination-type conductive polymer actuator device as well as operating method thereof
10/2010
10/13/2010CN101858929A Capacitive micro-acceleration sensor with symmetrically combined elastic beam structure and production method thereof
09/2010
09/29/2010CN1572719B MEMS device and method of forming MEMS device
09/21/2010CA2417393C Microdevice with movable microplatform and process for making thereof
09/16/2010US20100233801 Centrifugal force based microfluidic device, biochemical treatment system having the same, and method of fabricating the microfluidic device
09/01/2010CN1618722B Mems having a three-wafer structure
08/2010
08/26/2010WO2010095724A1 Transportation of object of micro-size and retrieval of mechanical work by means of constant electric field
08/26/2010WO2010094102A1 Device for grasping and active release of micro and nano objects
08/26/2010CA2750918A1 Device for grasping and active release of micro and nano objects
08/24/2010US7782161 Magnetically actuated microelectromechanical systems actuator
08/04/2010CN101259950B Method for manufacturing micro-optical-electro-mechanical system wavelength channel selector
08/03/2010US7766459 Multi-coloured printhead nozzle array with rows of nozzle assemblies
07/2010
07/29/2010WO2010084894A1 Rotating structure formed from magnetic photocuring resin and magnetically driven microactuator using the same
07/29/2010US20100192268 Method and Apparatus for Micromachines, Microstructures, Nanomachines and Nanostructures
07/29/2010US20100186841 Microfluidic dispensing assembly
07/28/2010CN101786591A Micro-mechanical device and manufacture method thereof
07/27/2010CA2520250C Micro relay
07/14/2010EP1135665B1 Measurements using tunnelling current between elongate conductors
06/2010
06/24/2010US20100155204 Multi-stable micro electromechanical switches and methods of fabricating same
06/03/2010WO2010062441A1 Fast curable liquid resin procedure for the manufacture of micro/nano featured parts
06/02/2010EP2191574A1 Analog to digital converter using arrangement of stators and ad converting method
06/02/2010CN101717065A Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method
06/02/2010CN101717063A Flexible microgripper through topological optimization
05/2010
05/26/2010CN101715553A Serial siphon valves for fluidic or microfluidic devices
05/18/2010CA2577334C Embedded fluid mixing device using a homopolar motor
05/12/2010DE102009041325A1 Mikroventil zum Schalten von Kanälen in Mikroflusssystemen Micro valve for switching channels in micro-flow systems
05/05/2010CN1771575B Micro relay
04/2010
04/22/2010US20100097681 Micromechanical element and sensor for monitoring a micromechanical element
04/22/2010DE102008042967A1 Kaskadierte mikromechanische Aktuatorstruktur Cascaded micromechanical actuator structure
04/08/2010DE102008049647A1 Mikromechanisches Element und Sensor zur Überwachung eines mikromechanischen Elements Micromechanical element and sensor for monitoring a micromechanical element
04/01/2010DE102008042357A1 Micromechanical component, particularly micromechanical sensor, has substrate with substrate layer and seismic mass in form of compensator
03/2010
03/31/2010CN101683965A Micromechanical sensor with symmetrical surface structure under asymmetric mass distribution
03/30/2010US7688166 Multi-stable micro electromechanical switches and methods of fabricating same
03/18/2010WO2009102902A3 Rotary nanotube bearing structure and methods for manufacturing and using the same
03/18/2010US20100067083 Micro-movable device
02/2010
02/18/2010WO2010017578A1 Switches for microfluidic systems
02/11/2010DE102008035990A1 Micro-valve for hydrogen gas cells, has valve seat with valve opening and valve flap for locking valve opening with cover section of valve flap
02/04/2010DE102008040854A1 Mikromechanische Struktur sowie Verfahren zum Einstellen der Arbeitsspaltbreite einer mikromechanischen Struktur Micromechanical structure and method for adjusting the working gap width a micromechanical structure
01/2010
01/21/2010DE102008040528A1 Herstellungsverfahren für ein mikromechanisches Bauteil und ein mikromechanisches Bauteil Manufacturing method for a micromechanical component and a micromechanical component
01/07/2010WO2009086976A3 Micromechanical component and production method for a micromechanical component
12/2009
12/30/2009CN201372970Y Self-assembled ultra micro fan
12/23/2009EP2135069A1 Serial siphon valves for fluidic or microfluidic devices
12/15/2009US7631549 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
12/02/2009EP2126942A1 Mems actuators and switches
12/02/2009CA2633534A1 Mems based rf components with vertical motion and parallel-plate structure and manufacture thereof using standard cmos technologies
11/2009
11/18/2009CN101582366A Nonmagnetic bimetallic strip driver used in transmission electron microscope
11/12/2009DE102005003888B4 Gelenkkonstruktion für eine Mikrospiegelvorrichtung Joint construction for a micromirror device
11/11/2009EP1337887B1 Fiber optic switch and associated methods
11/05/2009WO2009132440A1 Mems device with independent rotation in two axes of rotation
11/05/2009CA2722783A1 Mems device with independent rotation in two axes of rotation
10/2009
10/28/2009CN100555499C Downward type MEMS switch and method for fabricating the same
10/22/2009DE102008001232A1 Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm und für ein mikromechanisches Bauteil Electrode comb, micromechanical component and manufacturing method for an electrode comb, and for a micromechanical component
10/21/2009CN101560995A Self assembled ultramicro fan
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